Thinning machine grinding wheel installation protection device

Abstract

The utility model provides a thinning machine grinding wheel installation protection device, which relates to the technical field of semiconductor manufacturing, and comprises a main body, and a first side surface of the main body is provided with an accommodating groove for accommodating grinding wheel teeth; a through hole is formed in the center of the main body, a convex lug is arranged on the side wall of the through hole, the convex lug extends towards the center of the main body along the side wall of the through hole, and a connecting position used for being connected with the grinding wheel is arranged on the convex lug. The grinding wheel tooth protection device has the advantages that grinding wheel teeth can be effectively protected, the problem that due to the fact that the space of a machining cavity of a thinning machine is narrow, in the working process of grinding wheel replacement, the tooth surfaces of the grinding wheels are broken is solved, and the product quality and the production efficiency are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a thinning machine grinding wheel installation protection device. BACKGROUND

[0002] The thinning machine is a kind of equipment widely used in the field of precision manufacturing, which carries out accurate processing on raw materials by mechanical cutting, chemical corrosion or the combination of both to achieve the expected thickness specification.

[0003] The DXSG320 thinning machine currently in use is used in the process of mechanical cutting, and the workpiece (i.e. the sheet material to be thinned) is fixed on the clamp and cut by the rotating or moving cutting tool (grinding wheel).

[0004] Since the processing cavity space of the DXSG320 thinning machine is only 12.5 cm thick, it is very narrow, and the thickness of the grinding wheel is about 2.5 cm. During the grinding wheel replacement process, it is very easy to cause tooth surface collapse due to misoperation, and the grinding wheel tooth surface collapse will affect the flatness of the processed wafer surface, and further affect the particles and scratches of the shipment.

[0005] Therefore, it is urgent to need a thinning machine grinding wheel installation protection device to solve the above technical problems. CONTENT OF THE UTILITY MODEL

[0006] The utility model aims at providing a thinning machine grinding wheel installation protection device to solve the technical problem that the processing cavity space of the existing thinning machine is very narrow, and it is very easy to cause tooth surface collapse due to misoperation during the grinding wheel replacement process, and the grinding wheel tooth surface collapse will affect the flatness of the processed wafer surface, and further affect the particles and scratches of the shipment. The preferred technical solutions in many technical solutions provided by the utility model can produce many technical effects, which are described in detail below.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions:

[0008] The utility model provides a thinning machine grinding wheel installation protection device, which comprises a main body, wherein:

[0009] The first side surface of the main body is provided with a containing groove for containing the grinding wheel teeth;

[0010] A through hole is arranged at the center of the main body, the side wall of the through hole is provided with a lug, the lug extends to the center of the main body along the side wall of the through hole, and a connecting position for connecting with the grinding wheel is arranged on the lug.

[0011] Preferably, the main body comprises an integrally formed center part and a protective peripheral edge arranged at the outer periphery of the center part, wherein:

[0012] The center part adopts a conical structure protruding towards the first side face, and the through hole is arranged at the center of the center part;

[0013] The protective peripheral edge protrudes from the edge of the center part, and an annular groove is arranged along the first side face of the main body towards the second side face, the annular groove is located at the protective peripheral edge, and the accommodating groove is formed.

[0014] Preferably, a tapered groove is arranged along the second side face of the main body, and the tapered groove is located at the center part.

[0015] Preferably, a plurality of lugs are arranged, and the plurality of lugs are uniformly distributed along the circumference of the side wall of the through hole.

[0016] Preferably, the lug adopts a sector structure, and the cross-sectional area of the lug gradually decreases from one end face to the other end face connected to the side wall of the through hole.

[0017] Preferably, the end face of the lug is arranged in an arc structure.

[0018] Preferably, the connecting part is further provided with a connecting part for connecting the connecting part with the grinding wheel.

[0019] Preferably, the connecting part comprises a bolt, and the connecting part comprises a through hole structure.

[0020] Preferably, the cross section of the main body is circular, and the through hole structure comprises a circular hole.

[0021] The thinning machine grinding wheel installation protection device provided by the utility model connects the main body with the grinding wheel through the connecting part arranged on the lug, the grinding wheel tooth can be installed into the accommodating groove arranged on the main body, and the grinding wheel tooth can be effectively protected through the accommodating groove. The lug is arranged on the side wall of the through hole at the center of the main body, so that the installation of the grinding wheel to the thinning machine is avoided. In this way, the grinding wheel tooth is effectively protected, the problem of tooth surface collapse of the grinding wheel during the grinding wheel replacement process is avoided due to the narrow space of the machining cavity of the thinning machine, and the quality and production efficiency of the product are improved. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating creative labor.

[0023] Figure 1It is the structural schematic diagram of one embodiment of the thinning machine grinding wheel installation protection device of the utility model,

[0024] Figure 2 It is Figure 1 the main view structural schematic diagram,

[0025] Figure 3 It is Figure 2 the A-A section view structural schematic diagram in,

[0026] Figure 4 It is Figure 1 the structural schematic diagram of use,

[0027] Figure 5 It is Figure 4 the main view structural schematic diagram,

[0028] Figure 6 It is Figure 5 the B-B section view structural schematic diagram in,

[0029] Figure 7 It is Figure 1 the structural schematic diagram of another angle.

[0030] In the drawing: 1, main body;11, center part;110, through hole;111, lug;1110, connecting position;112, tapered groove;12, protective periphery;120, accommodating groove;101, first side face;102, second side face;2, grinding wheel;21, grinding wheel tooth. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantage of the utility model more clear, the technical scheme of the utility model will be described in detail below. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiment. Based on the embodiment in the utility model, all other implementation manners obtained by the ordinary skill in the art without making the creative labor belong to the range of the utility model.

[0032] Figure 1 It is the structural schematic diagram of the embodiment, Figure 2 It is Figure 1 the main view structural schematic diagram, Figure 3 It is Figure 2 the A-A section view structural schematic diagram in, as Figures 1-3 The utility model provides a kind of thinning machine grinding wheel installation protection device, including main body 1.

[0033] Wherein, Figure 4 It is Figure 1 the structural schematic diagram of use, Figure 5 It is Figure 4 the main view structural schematic diagram, Figure 6is Figure 5 A schematic view of the cross section structure of the body B-B is shown in Fig. 1B. Figures 1-6 As shown in the drawings, the first side 101 of the body 1 is provided with a receiving groove 120 for accommodating the grinding teeth 21; the center of the body 1 is provided with a through hole 110, the side wall of the through hole 110 is provided with a lug 111, the lug 111 extends along the side wall of the through hole 110 to the center of the body 1, and the lug 111 is provided with a connecting site 1110 for connecting with the grinding wheel 2.

[0034] In use, the body 1 is connected with the grinding wheel 2 through the connecting site 1110 provided on the lug 111, and the grinding teeth 21 can be installed into the receiving groove 120 provided on the body 1, and the grinding teeth can be effectively protected by the receiving groove 120. The lug 111 is arranged on the side wall of the through hole 110 at the center of the body 1, which avoids affecting the installation of the grinding wheel 2 to the thinning machine. In this way, the grinding teeth are effectively protected, and the problem of tooth surface collapse during the grinding wheel replacement process due to the narrow space of the machining cavity of the thinning machine is avoided, and the product quality and production efficiency are improved.

[0035] Figure 7 is Figure 1 A schematic view of the structure from another angle is shown in Fig. 2B. Figure 1 and Figure 7 As shown in the drawings, the body 1 includes a center part 11 integrally formed and a protective peripheral edge 12 arranged on the outer periphery of the center part 11.

[0036] The center part 11 adopts a conical structure protruding towards the first side 101, and the through hole 110 is arranged at the center of the center part 11, which does not affect the normal operation of the grinding wheel installation. The protective peripheral edge 12 protrudes from the edge of the center part 11 and extends along the first side 101 of the body 1 towards the second side 102 to form an annular groove, and the annular groove is located in the protective peripheral edge 12 to form the receiving groove 120. The receiving groove 120 can effectively protect the grinding teeth 21 during the grinding wheel 2 replacement process of the thinning machine, so as to avoid the problem of tooth surface collapse during the installation or replacement of the grinding wheel 2 due to the narrow space of the machining cavity of the thinning machine.

[0037] As an optional embodiment, a tapered groove 112 is arranged along the second side 102 of the body 1, and the tapered groove 112 is located in the center part 11.

[0038] The tapered groove 112 is arranged at the center part 11 of the second side 102 of the body 1, which can reduce the weight of the thinning machine grinding wheel installation protection device on the premise of meeting the use requirements, so as to facilitate the installation operation. On the other hand, the tapered protruding structure is arranged, the lug 111 protrudes more from the protective peripheral edge 12 during installation, and the tapered groove 112 is provided between the lug 111 and the protective peripheral edge 12, which can provide more installation space to facilitate the connection of the lug 111 and the grinding wheel 2.

[0039] As an optional embodiment, the lugs 111 are provided in plurality, and the plurality of lugs 111 are uniformly distributed along the circumference of the side wall of the through hole 110.

[0040] By uniformly distributing the plurality of lugs 111 along the circumference of the side wall of the through hole 110, the stability of the connection between the thinning machine grinding wheel installation protection device and the grinding wheel 2 can be ensured.

[0041] Preferably, in the embodiment, the lugs 111 are provided in three. By using the stability principle of triangle, the three lugs 111 are arranged at 120° on the circumference. In this way, compared with arranging fewer lugs 111, the stability of the connection can be ensured; compared with arranging more lugs 111, the installation time can be saved.

[0042] As an optional embodiment, the lugs 111 adopt a fan-shaped structure, and the cross-sectional area of the lugs 111 gradually decreases from one end face to the other end face connected to the side wall of the through hole 110. In the embodiment, the end face of the lug is provided in an arc-shaped structure.

[0043] As an optional embodiment, a connecting piece is further included, and the connecting piece is used to connect the connecting site 1110 and the grinding wheel 2. In the embodiment, the connecting piece includes a bolt, and the connecting site 1110 includes a through hole structure. Specifically, in the embodiment, the cross section of the main body 1 is circular, and the through hole structure includes a circular hole.

[0044] The use mode of the thinning machine grinding wheel installation protection device is as follows: first, the grinding wheel teeth 21 in the grinding wheel 2 are laid flat on a flat workbench with the grinding wheel teeth 21 upward; then, the first side 101 of the main body 1 is directed toward the grinding wheel 2, the protection device and the grinding wheel 2 are ensured to be opposite to each other, the grinding wheel teeth 21 are ensured to enter the accommodating groove 120, and then the bolt is used to connect the grinding wheel 2 and the lug 111, so that no loosening and knocking phenomenon occurs, and then the grinding wheel 2 and the protection device are installed into the thinning machine according to the normal grinding wheel installation process. After the installation is completed, the bolt is loosened, and the thinning machine grinding wheel installation protection device is removed.

[0045] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A protective device for the installation of a thinning machine grinding wheel, characterized in that, Including the main body, of which: The first side of the main body is provided with a receiving groove for accommodating grinding wheel teeth; A through hole is provided at the center of the main body, and a lug is provided on the side wall of the through hole. The lug extends along the side wall of the through hole toward the center of the main body, and a connection position for connecting with the grinding wheel is provided on the lug.

2. The thinning machine grinding wheel installation protection device according to claim 1, characterized in that: The main body includes an integrally formed central portion and a protective periphery disposed on the outer periphery of the central portion, wherein: The central portion adopts a conical structure that convexes towards the first side, and the through hole is opened at the center of the central portion; The protective periphery protrudes from the edge of the central portion and extends along the first side of the main body toward the second side to form an annular groove. The annular groove is located on the protective periphery and forms the receiving groove.

3. The thinning machine grinding wheel installation protection device according to claim 2, characterized in that: A tapered groove is formed along the second side of the main body, and the tapered groove is located at the center.

4. The thinning machine grinding wheel installation protection device according to any one of claims 1-3, characterized in that: The lugs are provided in multiple ways, and the lugs are evenly distributed circumferentially along the sidewall of the through hole.

5. The thinning machine grinding wheel installation protection device according to claim 4, characterized in that: The lug has a fan-shaped structure, and the cross-sectional area of ​​the lug gradually decreases from one end face connected to the sidewall of the through hole to the other end face.

6. The thinning machine grinding wheel installation protection device according to claim 4, characterized in that: The end face of the lug is configured as an arc-shaped structure.

7. The thinning machine grinding wheel installation protection device according to any one of claims 1-3, characterized in that: It also includes a connector for connecting the connection point to the grinding wheel.

8. The thinning machine grinding wheel installation protection device according to claim 7, characterized in that: The connector includes a bolt, and the connection position includes a through-hole structure.

9. The thinning machine grinding wheel installation protection device according to claim 8, characterized in that: The main body has a circular cross-section, and the through-hole structure includes a circular hole.

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