Main shaft fixing pressing arm device

Abstract

The utility model discloses a main shaft fixing pressing arm device, and relates to the technical field of wafer chamfering. The pressing arm comprises a base and a pressing arm body, two main shaft bodies are arranged on the pressing arm body, grinding wheels are arranged on the main shaft bodies, a rotating shaft is rotationally arranged on the base, the pressing arm body is arranged on the rotating shaft, a hollow screw cylinder is arranged on the base in a threaded mode, and a fixing plate is arranged in the screw cylinder. An elastic positioning piece is arranged on the fixing plate in a sliding mode, three positioning holes are formed in the pressing arm body, and the elastic positioning piece is matched with the positioning holes in an inserted mode. The mode that in the prior art, the pressing arm body is fixedly arranged on the base is abandoned, in the using process, the pressing arm body can rotate with the rotating shaft as the center, the position of the pressing arm body is locked through the cooperation effect of the elastic positioning piece and the positioning hole, and therefore the using limitation is reduced, the using flexibility is improved, and the practicability is higher.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of wafer chamfering, in particular to a spindle fixed pressure arm device. BACKGROUND

[0002] The wafer refers to a silicon wafer used for manufacturing silicon semiconductor integrated circuits, and is called wafer due to the circular shape. The wafer chamfering is an important process in semiconductor manufacturing, and is mainly used for improving the quality and reliability of the wafer. The purpose of chamfering is to remove the sharp part of the wafer edge to prevent edge chipping and thermal stress concentration, thereby reducing the generation of dislocation and layer defect. In the prior art, the chamfering device usually comprises a base, a pressure arm body fixed on the base, and two spindle bodies arranged on the pressure arm body. A grinding wheel is arranged on the spindle body. The wafer is chamfered by rotating the grinding wheel. Since the position of the pressure arm body is fixed, the limitation is high, and the use flexibility is poor. Therefore, the spindle fixed pressure arm device is provided. SUMMARY

[0003] The application aims to solve the technical problems of high limitation and poor use flexibility due to the fixed position of the pressure arm body. The application provides a spindle fixed pressure arm device.

[0004] In order to achieve the above-mentioned purpose, the application specifically adopts the following technical scheme:

[0005] A spindle fixed pressure arm device comprises a base and a pressure arm body. Two spindle bodies are arranged on the pressure arm body. A grinding wheel is arranged on the spindle body. A rotating shaft is rotatably arranged on the base. The pressure arm body is arranged on the rotating shaft. A hollow screw cylinder is threadedly arranged on the base. A fixed plate is arranged in the screw cylinder. An elastic positioning piece is slidably arranged on the fixed plate. Three positioning holes are arranged on the pressure arm body. The elastic positioning piece is inserted and matched with the positioning hole.

[0006] Further, the outer surface of the screw cylinder is provided with a limiting ring abutting and lapping with the base.

[0007] Further, the elastic positioning piece comprises a positioning rod slidably arranged on the fixed plate and inserted and matched with the positioning hole. A positioning plate is arranged at the free end of the positioning rod. A return spring is arranged on the positioning rod between the positioning plate and the fixed plate.

[0008] Further, the diameter of the positioning plate is the same as the outer diameter of the screw cylinder.

[0009] Further, the spindle body is provided with a spraying group corresponding to the grinding wheel.

[0010] Further, the pressure arm body is provided with two pressing rings. An expansion sleeve abutting and lapping with the spindle body is arranged on the pressing ring.

[0011] Furthermore, the main body of the pressure arm is provided with a clamping screw, a proximity switch assembly, and a stop pin, with the free end of the clamping screw pressing against the stop pin.

[0012] Furthermore, the base is provided with a clamping limit block assembly that abuts against and overlaps with the clamping screw.

[0013] Furthermore, the base is provided with a fall-prevention buffer block.

[0014] The beneficial effects of this application are as follows:

[0015] This application abandons the existing method of fixing the main body of the pressure arm to the base. In use, the main body of the pressure arm can rotate around the pivot. Through the cooperation of the elastic positioning element and the positioning hole, the position of the main body of the pressure arm is locked, thereby reducing the limitations of use and improving the flexibility of use, thus making it more practical. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural view of this application;

[0017] Figure 2 This is a three-dimensional sectional view of this application;

[0018] Figure 3 This application Figure 2 Enlarged view of point A in the middle;

[0019] Figure 4 This is a three-dimensional sectional view from another perspective of this application;

[0020] Figure 5 This application Figure 4 Enlarged view of point B in the middle;

[0021] Figure 6 This is another perspective sectional view of this application;

[0022] Figure 7 This application Figure 6 Enlarged view of point C in the middle;

[0023] Figure 8 This is another perspective sectional view of this application;

[0024] Figure 9 This application Figure 8 Enlarged view of point D in the middle.

[0025] Reference numerals in the attached diagram: 1. Base; 2. Pressure arm body; 3. Main shaft body; 4. Grinding wheel; 5. Rotating shaft; 6. Screw; 7. Fixing plate; 8. Positioning hole; 9. Limiting ring; 10. Positioning rod; 11. Positioning plate; 12. Return spring; 13. Spray assembly; 14. Pressure ring; 15. Expansion sleeve; 16. Pressure screw; 17. Proximity switch assembly; 18. Stop pin; 19. Pressure limiting block assembly; 20. Anti-fall buffer block. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0027] like Figures 1-9 As shown, an embodiment of this application proposes a spindle fixing pressure arm device, including a base 1 and a pressure arm body 2. Two spindle bodies 3 are provided on the pressure arm body 2, and a grinding wheel 4 is provided on the spindle body 3. The grinding wheel 4 rotates to chamfer the wafer. A rotating shaft 5 is rotatably provided on the base 1. The rotating shaft 5 is in a horizontal direction. The pressure arm body 2 is provided on the rotating shaft 5 and fixed on the rotating shaft 5. A hollow screw cylinder 6 is threaded on the base 1. The screw cylinder 6 is in a horizontal direction. A fixing plate 7 is provided inside the screw cylinder 6. The fixing plate 7 is in a vertical direction and fixed inside the screw cylinder 6. An elastic positioning member is slidably provided on the fixing plate 7. The elastic positioning member slides in a horizontal direction. Three positioning holes 8 are opened on the pressure arm body 2. The positioning holes 8 are in a horizontal direction. In this embodiment, for ease of understanding, the three positioning holes 8 are named A, B, and C respectively. The elastic positioning member is inserted and engaged with the positioning holes 8.

[0028] In the initial state, the screw cylinder 6 is threaded onto the base 1, the pressure arm body 2 is horizontal and perpendicular to the base 1, the elastic positioning element is in the initial position and in its natural state, and the elastic positioning element is engaged with A to lock the position of the pressure arm body 2, that is, the pressure arm body 2 cannot rotate around the pivot 5. In use, manually pull the elastic positioning element, the elastic positioning element slides to the limit position and is in a squeezed state until the elastic positioning element exits A. At this time, the pressure arm body 2 can rotate around the pivot 5. Then release the elastic positioning element. When the pressure arm body 2 is raised 60 degrees, the elastic positioning element automatically returns to its natural state and slides to the initial position. The elastic positioning element is engaged with B to lock the position of the pressure arm body 2. The above operation can also be repeated. When the pressure arm body 2 is raised 90 degrees, the elastic positioning element is engaged with C to lock the position of the pressure arm body 2.

[0029] In summary, this application abandons the method of fixing the pressure arm body 2 on the base 1 in the prior art. When in use, the pressure arm body 2 can rotate around the pivot 5. Through the cooperation of the elastic positioning member and the positioning hole 8, the position of the pressure arm body 2 is locked, thereby reducing the limitations of use and improving the flexibility of use, and thus it is more practical.

[0030] like Figure 7 As shown, in some embodiments, a limiting ring 9 that abuts against and overlaps with the base 1 is provided on the outer surface of the screw cylinder 6. The limiting ring 9 is vertical and fixed on the outer surface of the screw cylinder 6.

[0031] Referring to the above, when the screw cylinder 6 is threaded onto the base 1, the screw cylinder 6 can be quickly positioned by the contact and overlapping of the limiting ring 9 and the base 1, making it more convenient to use.

[0032] like Figure 7 As shown, in some embodiments, the elastic positioning member includes a positioning rod 10 that is slidably disposed on the fixed plate 7 and inserted into the positioning hole 8. The positioning rod 10 slides in the horizontal direction. A positioning plate 11 is provided at the free end of the positioning rod 10. The positioning plate 11 is vertical and fixed to the free end of the positioning rod 10. A return spring 12 is provided between the positioning plate 11 and the fixed plate 7 and sleeved on the positioning rod 10. The return spring 12 is horizontal and its two ends are fixedly connected to the positioning plate 11 and the fixed plate 7 respectively.

[0033] Referring to the above, in the initial state, both the positioning rod 10 and the positioning plate 11 are in their initial positions, the return spring 12 is in its natural state, and the free end of the positioning rod 10 is engaged with A. In use, the positioning plate 11 is manually pulled so that the positioning plate 11 and the positioning rod 10 slide together to their limit positions, the return spring 12 is compressed until the free end of the positioning rod 10 exits A, and then the positioning plate 11 is released, the return spring 12 returns to its natural state, the positioning plate 11 and the positioning rod 10 slide together to their initial positions, and the free end of the positioning rod 10 is engaged with B.

[0034] like Figure 7 As shown, in some embodiments, the diameter of the positioning plate 11 is the same as the outer diameter of the screw barrel 6;

[0035] Referring to the above, in the initial state, the positioning plate 11 is located in the initial position and abuts against the screw cylinder 6. When the positioning plate 11 slides to the limit position, it will move away from the screw cylinder 6. Conversely, when the positioning plate 11 slides to the initial position, it will abut against the screw cylinder 6 again to achieve the limit of the positioning plate 11, so as to facilitate the manual pulling of the positioning plate 11.

[0036] like Figure 2 As shown, in some embodiments, a spray group 13 corresponding to the grinding wheel 4 is provided on the spindle body 3, and the spray group 13 is fixed on the spindle body 3.

[0037] Referring to the above, during use, the spray assembly 13 can rotate arbitrarily around the center of the main shaft body 3, and the spray angle can be adjusted appropriately, which facilitates the adjustment of the accuracy of the spray assembly 13 spraying the grinding wheel 4.

[0038] like Figure 3 As shown, in some embodiments, the pressure arm body 2 is provided with two pressure rings 14, and the pressure rings 14 are provided with expansion sleeves 15 that abut against and overlap with the main shaft body 3. In this embodiment, the expansion sleeves 15 are Z1 type and can hold the main shaft body 3 tightly.

[0039] Referring to the above, during use, the expansion sleeve 15 can hold the spindle body 3 tightly to prevent it from falling. At the same time, it can reduce the installation distance between the two spindle bodies 3, which greatly reduces the displacement of the wafer during chamfering and grinding between the two spindle bodies 3, thereby saving internal space in the water tank. Furthermore, the expansion sleeve 15 is easy to disassemble and install, saving the disassembly and installation time of the spindle body 3, thereby improving the overall performance of the equipment.

[0040] like Figure 5 As shown, in some embodiments, the pressure arm body 2 is provided with a clamping screw 16, a proximity switch group 17 and a stop pin 18. The free end of the clamping screw 16 presses against the stop pin 18, and the proximity switch group 17 is fixed to the bottom of the pressure arm body 2.

[0041] Referring to the above, during use, when the main body 2 of the pressure arm is lifted upwards, the signal source of the proximity switch group 17 is disconnected and sends a signal to the PLC, so as to achieve the purpose of stopping the main body 3 of the spindle body 3 the moment the main body 2 of the pressure arm is lifted upwards, thus ensuring the safety of the operator and the equipment.

[0042] like Figures 1-5 As shown, in some embodiments, a clamping limit block assembly 19 is provided on the base 1 to abut against and overlap with the clamping screw 16, and the clamping limit block assembly 19 is fixed on the base 1.

[0043] Referring to the above, when the spindle body 3 is working, the vibration generated by the pressure arm body 2 can be reduced and limited by the clamping limit block assembly 19.

[0044] like Figure 1 As shown, in some embodiments, a fall-prevention buffer block 20 is provided on the base 1;

[0045] Referring to the above, during use, the anti-fall buffer block 20 can prevent the pressure arm body 2 from tilting backward and falling due to the position not being locked, thus protecting the pressure arm body 2 and the main shaft body 3 from overtravel.

[0046] The foregoing description of the disclosed embodiments enables a person skilled in the art to make or use the application. Modifications of these embodiments will occur to persons of skill in the art, and that the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Therefore, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A spindle fixing pressure arm device, comprising a base (1) and a pressure arm body (2), wherein two spindle bodies (3) are disposed on the pressure arm body (2), and a grinding wheel (4) is disposed on the spindle body (3), characterized in that, The base (1) is rotatably provided with a rotating shaft (5), and the pressure arm body (2) is provided on the rotating shaft (5). The base (1) is threaded with a hollow internal screw cylinder (6), and a fixing plate (7) is provided inside the screw cylinder (6). An elastic positioning element is slidably provided on the fixing plate (7). The pressure arm body (2) is provided with three positioning holes (8), and the elastic positioning element is inserted into the positioning holes (8).

2. The spindle fixing arm device according to claim 1, characterized in that, The outer surface of the screw (6) is provided with a limiting ring (9) that abuts against and overlaps with the base (1).

3. The spindle fixing arm device according to claim 1, characterized in that, The elastic positioning component includes a positioning rod (10) that is slidably disposed on the fixed plate (7) and inserted into the positioning hole (8). The free end of the positioning rod (10) is provided with a positioning plate (11). A return spring (12) sleeved on the positioning rod (10) is provided between the positioning plate (11) and the fixed plate (7).

4. The spindle fixing arm device according to claim 3, characterized in that, The diameter of the positioning plate (11) is the same as the outer diameter of the screw barrel (6).

5. The spindle fixing arm device according to claim 1, characterized in that, The spindle body (3) is equipped with a spray group (13) corresponding to the grinding wheel (4).

6. The spindle fixing arm device according to claim 1, characterized in that, The main body (2) of the pressure arm is provided with two pressure rings (14), and the pressure rings (14) are provided with expansion sleeves (15) that abut against and overlap with the main shaft body (3).

7. The spindle fixing arm device according to claim 1, characterized in that, The main body (2) of the pressure arm is provided with a clamping screw (16), a proximity switch group (17) and a stop pin (18), and the free end of the clamping screw (16) presses against the stop pin (18).

8. The spindle fixing arm device according to claim 1, characterized in that, The base (1) is provided with a clamping limit block assembly (19) that abuts against the clamping screw (16).

9. The spindle fixing arm device according to claim 1, characterized in that, The base (1) is provided with a fall-prevention buffer block (20).

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