Buffer device for carrying mechanism

Abstract

A buffering device for a carrying mechanism comprises the carrying mechanism, a driven assembly and a buffering assembly. The carrying mechanism comprises a rail assembly and a carrying frame. The driven assembly is arranged at the top, away from the rail assembly, of the carrying frame and comprises a sliding rail, a sliding block, a clamping device and a baffle. The buffering assembly comprises a fixing plate, a mounting plate, a hydraulic buffer and a metal plate box. Compared with the prior art, due to the fact that the driven assembly is arranged, the top of the carrying frame is also supported when the carrying frame moves. And the buffering assembly is arranged, and the hydraulic buffer is used for abutting against and buffering the connecting plate, so that the obvious damping effect on the top of the carrying frame is achieved. Meanwhile, the buffering structure combining the driven assembly and the buffering assembly is convenient and reliable to install, saves space, is convenient to install and disassemble, greatly reduces the possibility of generating small-particle dust during movement, and provides powerful technical support for safe production of products.

Description

TECHNICAL FIELD

[0001] The utility model relates to a carrying device technical field, especially relates to a buffer device for carrying mechanism. BACKGROUND

[0002] Stocker is the intelligent storage equipment of semiconductor factory, has the multi -layer storage space, mainly used for semiconductor factory FOUP (a kind of material box) automation transfer, storage, realizes wafer between process circulation.Crane (Stocker's automatic handling component) as one of the core structures in Stocker, bears the heavy responsibility of the normal operation of equipment.

[0003] The carrying mechanism of a kind of Stocker currently, by moving the carrying frame with lifting function to realize the double-axis carrying of product, however due to the carrying frame with higher height, the height of usual equipment can reach 4 meters and above, leading to the top of carrying mechanism to be shaken because of the impact of inertia when fast start-stop.It is common on market to set up guide wheel on the top of carrying frame, play the role of guiding and stabilizing mechanism, but do not have shock-absorbing function, can not protect product well, when product is wafer, mask and other fragile products, the vibration generated can damage product, in addition, guide wheel is easy to produce small particle dust when moving, affect environmental cleanliness, have security risk to product production. SUMMARY

[0004] Therefore, the utility model provides a buffer device for carrying mechanism to solve the above technical problems.

[0005] A buffer device for a carrying mechanism, comprising a carrying mechanism, a driven assembly arranged on one side of the carrying mechanism, and a buffer assembly arranged between the driven assembly and the carrying mechanism. The carrying mechanism comprises a track assembly, and a carrying frame arranged on the track assembly. The driven assembly is arranged on the top of the carrying frame away from the track assembly, and comprises a slide rail, two sliders arranged on the slide rail, a connecting plate arranged on the two sliders, a clamp arranged on the connecting plate, and a baffle arranged on the connecting plate. The connecting plate is arranged across and fixed on the two sliders, and is located on the side of the sliders close to the carrying frame. The buffer assembly comprises a fixing plate arranged on the carrying frame, two mounting plates arranged on the fixing plate, two groups of hydraulic buffers arranged on the mounting plates respectively, and a sheet metal box arranged on the fixing plate. The two mounting plates are fixed perpendicularly on the fixing plate. The two mounting plates are arranged on the two sides of the connecting plate respectively, and are arranged in parallel and spaced apart with the connecting plate. The main part of the hydraulic buffer is fixed on the mounting plate, and the abutting part connected by the piston rod is arranged perpendicularly against the baffle. The two groups of hydraulic buffers are arranged oppositely.

[0006] Further, the carrying mechanism further comprises a plurality of driving devices arranged on the track assembly.

[0007] Further, the extension direction of the slide rail is consistent with the movement direction of the track assembly, and the slide rail is arranged in the same plane with the track assembly in the transportation direction of the carrying frame.

[0008] Further, the slider is arranged on the slide rail and located on the side of the slide rail close to the carrying frame.

[0009] Further, the main part of the clamp is fixed on the connecting plate, and the clamping part is arranged towards and sleeved on the slide rail.

[0010] Further, the baffle is a rectangular plate, which is fixed perpendicularly on the connecting plate and located on the side of the connecting plate away from the slide rail.

[0011] Further, the fixing plate is fixed on the carrying frame by fasteners and located on the top of the carrying frame away from the track assembly.

[0012] Further, the sheet metal box is a rectangular box structure, which is fixed on the fixing plate and buckles the mounting plates, hydraulic buffers and baffle in the internal accommodating cavity.

[0013] Compared with existing technologies, the buffer device for the transport mechanism provided by this utility model, by setting the driven component, ensures that the top of the transport frame is supported during movement, thus guiding and stabilizing the mechanism. Furthermore, by using the hydraulic damper to abut and cushion the connecting plate, the buffer component significantly reduces vibration at the top of the transport frame, significantly shortening the time of top vibration caused by rapid start-stop of the transport mechanism, and greatly improving the stability and efficiency of the mechanism. Simultaneously, the buffer structure combining the driven component and the buffer component is convenient and reliable to install, saves space, provides greater storage space for stockers, and is easy to install and disassemble, greatly reducing the possibility of small dust particles being generated during movement, providing strong technical support for safe production. Attached Figure Description

[0014] Figure 1 This utility model provides an assembly structure diagram of a buffer device for a conveying mechanism.

[0015] Figure 2 for Figure 1 An enlarged schematic diagram of the buffer device used for the conveying mechanism at point A.

[0016] Figure 3 for Figure 1 A schematic diagram of the driven component and the buffer component of the buffer device used for the conveying mechanism. Detailed Implementation

[0017] The specific embodiments of this utility model are described in further detail below. It should be understood that the description of the embodiments of this utility model herein is not intended to limit the scope of protection of this utility model.

[0018] like Figures 1 to 3 The diagram shows a schematic of the buffer device for a transport mechanism provided by this utility model. The buffer device includes a transport mechanism 10, a driven component 20 disposed on one side of the transport mechanism 10, and a buffer component 30 disposed between the driven component 20 and the transport mechanism 10. It is conceivable that the buffer device for the transport mechanism also includes other functional modules such as a motor for controlling the movement of the transport mechanism 10, pneumatic devices for controlling the clamps, etc., which are technologies well known to those skilled in the art and will not be described in detail here.

[0019] The conveying mechanism 10 includes a track assembly 11, a conveying frame 12 disposed on the track assembly 11, and a plurality of drive devices 13 disposed on the track assembly 11.

[0020] The track assembly 11 comprises horizontally extending sliding tracks and sliding discs arranged on the sliding tracks, which are widely used in the field of industrial automation and are well known to those skilled in the art, and thus are only briefly described herein without detailed description.

[0021] The carrier 12 is arranged on the track assembly 11 to move horizontally. The carrier 12 is further provided with a lifting assembly to lift products vertically, and forms a double-axis structure with the track assembly 11, which is widely used in the field of industrial automation and is well known to those skilled in the art, and thus is only briefly described herein without detailed description.

[0022] The driving device 13 can be a motor or an oil cylinder, and can adopt a chain, track or gear structure to connect and drive the carrier 12 to move on the track assembly 11 and to lift inside the carrier 12, which is not specifically limited herein.

[0023] The driven assembly 20 is arranged on the top of the carrier 12 away from the track assembly 11, and comprises a sliding rail 21, two sliding blocks 22 arranged on the sliding rail 21, a connecting plate 23 arranged on the two sliding blocks 22, a clamp 24 arranged on the connecting plate 23, and a baffle 25 arranged on the connecting plate 23.

[0024] The sliding rail 21 extends in the same direction as the movement direction of the track assembly 11, and is in the same plane as the track assembly 11 in the transport direction of the carrier 12, to serve as the basis for the sliding of the driven assembly 20.

[0025] The sliding blocks 22 are arranged on the sliding rail 21 and located on the side of the sliding rail 21 close to the carrier 12, to arrange the connecting plate 23 and enable the connecting plate 23 to slide along the sliding rail 21.

[0026] The connecting plate 23 spans and is fixed on the two sliding blocks 22, and is located on the side of the sliding blocks 22 close to the carrier 12, to serve as a connecting function.

[0027] The main part of the clamp 24 is fixed on the connecting plate 23, and the clamping part is towards and sleeved on the slide rail 21, so that the clamp 24 clamps the slide rail 21 when braking is needed. The clamp should be a prior art widely used in the fields of mechanical equipment, industrial automation, numerical control machine tools and machining centers, etc., and the main functions include fixing workbench, precise positioning, preventing vibration and improving rigidity, through clamping guide rail or workbench, to ensure the stability and accuracy in the movement process, thereby improving the overall performance and stability of the equipment.

[0028] The baffle 25 can be a rectangular plate vertically fixed on the connecting plate 23 and located on the side of the connecting plate 23 away from the slide rail 21, for the corresponding structure of the buffer assembly 30 to abut against.

[0029] The buffer assembly 30 includes a fixed plate 31 arranged on the carrying frame 12, two mounting plates 32 arranged on the fixed plate 31, two groups of hydraulic buffers 33 arranged on the mounting plates 32 respectively, and a sheet metal box 34 arranged on the fixed plate 31.

[0030] The fixed plate 31 can be fixed on the carrying frame 12 by fasteners and located on the top of the carrying frame 12 away from the track assembly 11, as the installation basis of the mounting plates 32, hydraulic buffers 33 and sheet metal box 34.

[0031] The two mounting plates 32 can be rectangular plates vertically fixed on the fixed plate 31. The two mounting plates 32 are respectively located on the two sides of the connecting plate 23 and arranged in parallel and spaced apart with the connecting plate 23, for mounting the hydraulic buffers 33.

[0032] The main part of the hydraulic buffer 33 is fixed on the mounting plate 32, and the abutting part connected with the piston rod is vertically abutted against the baffle 25. The two groups of hydraulic buffers 33 are oppositely arranged to respectively play a buffering role in two directions along the slide rail 21. The hydraulic buffer relies on hydraulic damping to buffer and decelerate the object acting on it to stop, and plays a certain degree of protection, which is a prior art widely used in the fields of hoisting and transportation, elevators, metallurgy, port machinery, railway vehicles, etc. It is well known to those skilled in the art, and its function is to prevent hard collision from causing damage to the mechanism during work.

[0033] The sheet metal box 34 can be a rectangular box structure, fixed on the fixing plate 31, and the mounting plate 32, hydraulic buffer 33 and baffle 25 are fastened in the internal accommodating cavity to play a protective role, preventing the hydraulic buffer 33 from being damaged by impact during transportation, and at the same time preventing small dust particles generated by movement from falling and adhering to the product.

[0034] Compared with existing technologies, the buffer device for the transport mechanism provided by this utility model, by setting the driven component 20, provides support for the top of the transport frame 12 during movement, thus guiding and stabilizing the mechanism. Furthermore, by setting the buffer component 30, the hydraulic damper 33 cushions and supports the connecting plate 23, significantly reducing vibration at the top of the transport frame 12 and shortening the vibration time caused by rapid start-stop of the transport mechanism, greatly improving the stability and movement efficiency of the mechanism. Simultaneously, the buffer structure combining the driven component 20 and the buffer component 30 is convenient and reliable to install, saves space, provides greater storage space for stockers, and is easy to install and disassemble, significantly reducing the possibility of small dust particles being generated during movement, providing strong technical support for safe production.

[0035] The above are merely preferred embodiments of the present utility model and are not intended to limit the scope of protection of the present utility model. Any modifications, equivalent substitutions or improvements within the spirit of the present utility model are covered within the scope of the claims of the present utility model.

Claims

1. A buffer device for a conveying mechanism, characterized in that: The buffer device for the conveying mechanism includes a conveying mechanism, a driven component disposed on one side of the conveying mechanism, and a buffer component disposed between the driven component and the conveying mechanism. The conveying mechanism includes a track assembly and a conveying frame disposed on the track assembly. The driven component is disposed at the top of the conveying frame away from the track assembly and includes a slide rail, two sliders disposed on the slide rail, a connecting plate disposed on the two sliders, a clamp disposed on the connecting plate, and a baffle disposed on the connecting plate. The connecting plate spans across and is fixed to the two sliders. The buffer assembly includes a fixed plate on the slider and located on the side of the slider closer to the transport frame, two mounting plates on the fixed plate, two sets of hydraulic buffers respectively on the mounting plates, and a sheet metal box on the fixed plate. The two mounting plates are vertically fixed on the fixed plate and are located on both sides of the connecting plate, and are parallel to and spaced apart from the connecting plate. The main body of the hydraulic buffer is fixed on the mounting plate, and the abutment part of the piston rod connection is vertically abutting against the baffle. The two sets of hydraulic buffers are arranged opposite to each other.

2. The buffer device for a conveying mechanism as described in claim 1, characterized in that: The transport mechanism also includes multiple drive devices mounted on the track assembly.

3. The buffer device for a conveying mechanism as described in claim 1, characterized in that: The extension direction of the slide rail is consistent with the movement direction of the track assembly, and it is on the same plane as the track assembly in the transport direction of the transport frame.

4. The buffer device for a conveying mechanism as described in claim 1, characterized in that: The slider is mounted on the slide rail and located on the side of the slide rail closest to the transport frame.

5. The buffer device for a conveying mechanism as described in claim 1, characterized in that: The main body of the clamp is fixed to the connecting plate, and the clamping part faces the slide rail and is sleeved on the slide rail.

6. The buffer device for a conveying mechanism as described in claim 1, characterized in that: The baffle is a rectangular plate, which is vertically fixed to the connecting plate and located on the side of the connecting plate away from the slide rail.

7. The buffer device for a conveying mechanism as described in claim 1, characterized in that: The fixing plate is secured to the transport frame by fasteners and is located on top of the transport frame away from the track assembly.

8. The buffer device for a conveying mechanism as described in claim 1, characterized in that: The sheet metal box is a rectangular box structure, fixed on the fixing plate, and the mounting plate, hydraulic buffer and baffle are fastened in the internal receiving cavity.

Images