Quartz pendulous reed clamp and cleaning device

Abstract

The utility model relates to the technical field of vacuum coating, and particularly discloses a quartz pendulous reed clamp and a cleaning device. The quartz pendulous reed clamp comprises a first pressing plate, a mask plate, a pendulous reed fixing plate, a supporting plate, a second pressing plate and a plurality of lock pins, the supporting plate is arranged on the second pressing plate; the pendulous reed fixing plate is arranged on the supporting plate and is used for placing a quartz pendulous reed; the mask plate is arranged on the pendulous reed fixing plate and is positioned on the quartz pendulous reed; the first pressing plate is arranged on the mask plate; the plurality of locking nails are in threaded connection with the first pressing plate and the second pressing plate, so that the mask plate, the quartz pendulous reed and the supporting plate are tightly pressed by the first pressing plate and the second pressing plate. According to the scheme, the quartz pendulous reed clamp can clamp and fix the quartz pendulous reed, displacement of the quartz pendulous reed in the vacuum coating process is avoided, and the film adhesion and coating uniformity after coating are ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to a quartz pendulum piece clamp and cleaning device. BACKGROUND

[0002] The vacuum coating process is a technology of depositing a thin film on the surface of a substrate by physical or chemical methods. The vacuum coating process can be applied to many fields such as optics, building aerospace, aviation, navigation, weapons, oil exploitation, etc. Among them, the quartz pendulum piece has the characteristics of low thermal expansion coefficient and high chemical stability, and is used as a substrate for vacuum coating in many fields.

[0003] During the coating process of the quartz pendulum piece, small displacement may occur due to equipment vibration or air flow, affecting the adhesion and uniformity of the film layer. CONTENT OF THE UTILITY MODEL

[0004] Therefore, the purpose of the present application is to provide a quartz pendulum piece clamp and cleaning device to solve the problem of position deviation of the quartz pendulum piece during the coating process.

[0005] To achieve the above technical purpose, the first aspect of the present application provides a quartz pendulum piece clamp, comprising: a first pressing plate, a mask plate, a pendulum piece fixing plate, a support plate, a second pressing plate and a plurality of locking nails.

[0006] The support plate is arranged on the second pressing plate.

[0007] The pendulum piece fixing plate is arranged on the support plate and is used for placing the quartz pendulum piece.

[0008] The mask plate is arranged on the pendulum piece fixing plate and is located on the quartz pendulum piece.

[0009] The first pressing plate is arranged on the mask plate.

[0010] The plurality of locking nails are threadedly connected to the first pressing plate and the second pressing plate, so that the first pressing plate and the second pressing plate press the mask plate, the quartz pendulum piece and the support plate tightly.

[0011] Further, it further comprises a fixing column.

[0012] The fixing column passes through the mask plate and the quartz pendulum piece and abuts against the support plate.

[0013] Further, the pendulum piece fixing plate is provided with a through hole.

[0014] The through hole is used for placing the quartz pendulum piece, and the placed quartz pendulum piece abuts against the support plate.

[0015] Further, a difference between an inner diameter length of the through hole and an outer diameter length of the quartz pendulum plate is less than or equal to 0.1 mm.

[0016] Further, a region of the support plate opposite to the quartz pendulum plate is provided with a through pattern;

[0017] A region of the second pressing plate opposite to the through pattern is provided with a through groove;

[0018] The through groove is used for particles to pass through the through pattern and be deposited on the quartz pendulum plate.

[0019] Further, a region of the mask plate opposite to the quartz pendulum plate is provided with a second through pattern;

[0020] A region of the first pressing plate opposite to the second through pattern is provided with a second through groove;

[0021] A plurality of the locking nails are arranged around an outer periphery of the second through groove.

[0022] Further, a plurality of the second through grooves are arranged on the first pressing plate;

[0023] The pendulum plate fixing plate can accommodate a plurality of the quartz pendulum plates;

[0024] The plurality of the second through grooves correspond to the plurality of the quartz pendulum plates one by one.

[0025] The second aspect of the present application provides a cleaning device, comprising: a cleaning assembly and the quartz pendulum plate clamp of any one of the above;

[0026] The cleaning assembly comprises: an ultrasonic cleaner;

[0027] The ultrasonic cleaner is used for cleaning the mask plate and the support plate before a vacuum coating process.

[0028] Further, the cleaning device further comprises: a baking instrument;

[0029] The baking instrument is used for baking the cleaned mask plate and the support plate.

[0030] Further, the cleaning device further comprises: an ion fan;

[0031] The ion fan is used for outputting ionized airflow to the baked mask plate and the support plate to perform ion cleaning.

[0032] From the above technical scheme can be seen, the present application provides a quartz pendulum piece clamp and cleaning device;Among them, the quartz pendulum piece clamp includes: the first pressing plate, the mask plate, the pendulum piece fixed plate, the support plate, the second pressing plate and a plurality of lock nails;The support plate is arranged on the second pressing plate;The pendulum piece fixed plate is arranged on the support plate, for the quartz pendulum piece is put into;The mask plate is arranged on the pendulum piece fixed plate, and is located on the quartz pendulum piece;The first pressing plate is arranged on the mask plate;A plurality of lock nails are screwed with the first pressing plate and the second pressing plate, so that the first pressing plate and the second pressing plate both compress the mask plate, the quartz pendulum piece and the support plate.

[0033] The quartz pendulum piece clamp in the scheme can clamp and fix the quartz pendulum piece, avoid displacement of the quartz pendulum piece in the process of vacuum coating, and ensure the adhesion of the film layer after coating and the uniformity of coating. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0035] Figure 1 A structure disassembly view of a quartz pendulum piece clamp provided by the embodiments of the present application is provided.

[0036] Figure 2 A whole structure view of a quartz pendulum piece clamp provided by the embodiments of the present application is provided.

[0037] In the figure: 1, the first pressing plate;11, the second through slot;2, the mask plate;21, the second through pattern;3, the pendulum piece fixed plate;31, the through hole;4, the support plate;41, the through pattern;5, the second pressing plate;51, the through slot;6, the lock nail;7, the fixed column;10, the quartz pendulum piece. DETAILED DESCRIPTION

[0038] The technical solutions of the embodiments of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of the present application.

[0039] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0040] In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be replaceably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0041] Please refer to Figure 1 With Figure 2 , the first aspect of the embodiments of the present application provides a quartz pendulum piece clamp, comprising: a first pressing plate 1, a mask plate 2, a pendulum piece fixing plate 3, a support plate 4, a second pressing plate 5 and a plurality of lock pins 6.

[0042] The second pressing plate 5 can be the bottom layer of the quartz pendulum piece clamp, and can support other components. The support plate 4 is arranged on the second pressing plate 5; the pendulum piece fixing plate 3 is arranged on the support plate 4 and used for placing the quartz pendulum piece 10. The mask plate 2 is arranged on the pendulum piece fixing plate 3 and located on the quartz pendulum piece 10. The first pressing plate 1 is arranged on the mask plate 2. The plurality of lock pins 6 are threadedly connected with the first pressing plate 1 and the second pressing plate 5, so that the first pressing plate 1 and the second pressing plate 5 press the mask plate 2, the quartz pendulum piece 10 and the support plate 4.

[0043] In the embodiments, the outer circle of the lock pin 6 has an external thread structure, which can connect the first pressing plate 1 and the second pressing plate 5 after sequentially penetrating the first pressing plate 1 and the second pressing plate 5, so that the first pressing plate 1 and the second pressing plate 5 clamp the mask plate 2, the pendulum piece fixing plate 3 and the support plate 4 therebetween.

[0044] In the embodiment, the support plate 4 is placed on the second pressing plate 5 first, then the swing plate fixing plate 3, the quartz swing plate 10, the mask plate 2 and the first pressing plate 1 are placed in sequence, and finally the lock pin 6 is locked. After the lock pin 6 is tightened, the first pressing plate 1 and the second pressing plate 5 are pressed tightly, the bottom surface of the first pressing plate 1 abuts against the top surface of the mask plate 2 to provide a pressing force to the mask plate 2; at the same time, the bottom surface of the mask plate 2 abuts against the top surface of the quartz swing plate 10 to provide a pressing force to the quartz swing plate 10, and the bottom surface of the quartz swing plate 10 abuts against the top surface of the support plate 4, and the bottom surface of the support plate 4 abuts against the top surface of the second pressing plate 5, so that the quartz swing plate 10 is pressed and fixed tightly.

[0045] It should be noted that the mask plate 2 has a preset pattern, so that the particles can be deposited on the quartz swing plate 10 according to the pattern to form a specific structure. Specifically, the mask plate 2 is provided with a second through pattern 21 opposite the quartz swing plate 10; the first pressing plate 1 is provided with a second through groove 11 opposite the second through pattern 21. During the vacuum coating process, the particles can pass through the second through groove 11 and the second through pattern 21 to be deposited on the quartz swing plate 10.

[0046] In the embodiment, the quartz swing plate 10 is clamped by the quartz swing plate clamp, which can avoid the position deviation of the quartz swing plate 10 during the vacuum coating process, avoid the non-uniform coating caused by the position deviation and affect the adhesion of the coating layer after coating, and achieve the effects of improving the coating precision and improving the adhesion of the coating layer.

[0047] In a further improved embodiment, it further comprises a fixing column 7; the fixing column 7 passes through the mask plate 2 and the quartz swing plate 10 and abuts against the support plate 4.

[0048] In the embodiment, the quartz swing plate 10 for coating is provided with a through hole penetrating in the axial direction; at the same time, the mask plate 2 is also provided with a through hole opposite the through hole. During the assembly process, after the mask plate 2 is placed, the fixing column 7 passes through the through hole and the through hole in sequence to abut against the support plate 4. At the same time of tightening the lock pin 6, the fixing column 7 can further reduce the vibration and displacement of the quartz swing plate 10, and can ensure the accurate alignment between the quartz swing plate 10 and the mask plate 2, and improve the yield of coating.

[0049] In one embodiment, the swing plate fixing plate 3 is provided with a through hole 31; the through hole 31 is used for placing the quartz swing plate 10, and the placed quartz swing plate 10 abuts against the support plate 4.

[0050] The through hole 31 can play a positioning and limiting role after the quartz swing plate 10 is placed, so as to ensure that the quartz swing plate 10 does not deviate before the lock pin 6 is locked, thereby ensuring the assembly precision.

[0051] As an implementation, the swing plate fixing plate 3 can be integrally arranged with the support plate 4, and specifically, the support plate 4 can be arranged below the through hole 31 to support the quartz swing plate 10.

[0052] In an embodiment, the difference between the inner diameter length of the through hole 31 and the outer diameter length of the quartz swing plate 10 is less than or equal to 0.1 mm, that is, the spacing between the inner wall of the through hole 31 and the outer wall of the quartz swing plate 10 is less than or equal to 0.05 mm. Through such accurate positioning and limiting design, it is ensured that the quartz swing plate 10 can be placed in the through hole 31 and will not be deviated due to too large gap.

[0053] In another embodiment, the region of the support plate 4 opposite to the quartz swing plate 10 is provided with a through pattern 41; the region of the second pressing plate 5 opposite to the through pattern 41 is provided with a through groove 51; the through groove 51 is used for the particles to pass through the through pattern 41 and be deposited on the quartz swing plate 10.

[0054] In the embodiment, the support plate 4 provided with the through pattern 41 can also serve as a mask plate, so that the front surface and the back surface of the quartz swing plate 10 can be deposited at the same time in the vacuum coating process, improving the deposition efficiency.

[0055] In an embodiment provided in the present application, the plurality of locking nails 6 are arranged around the outer periphery of the second through groove 11.

[0056] In actual application, the first pressing plate 1, the swing plate fixing plate 3 and the second pressing plate 5 can be configured as rectangular block structures of the same size in a top view, facilitating alignment after superposition. The mask plate 2 and the support plate 4 can be configured as thin sheets smaller in size than the first pressing plate 1. Moreover, the outer diameter of the mask plate 2 and the support plate 4 is greater than the inner diameter of the through hole 31 and the second through groove 11, so that the mask plate 2 and the support plate 4 can abut against the bottom surface of the first pressing plate 1 and the top surface of the second pressing plate 5, respectively.

[0057] In the embodiment, the locking nails 6 around the second through groove 11 can tightly fix the outer periphery of the second through groove 11 and the through groove 51, ensuring that the mask plate 2 and the support plate 4 are pressed tightly, and further ensuring that the quartz swing plate 10 is pressed tightly.

[0058] It should be noted that the position of the locking nail 6 is kept away from the outer periphery of both the mask plate 2 and the support plate 4, avoiding unnecessary damage to the mask plate 2 and the support plate 4 during locking.

[0059] In an embodiment, the first pressing plate 1 is provided with a plurality of second through grooves 11; the swing plate fixing plate 3 can accommodate a plurality of quartz swing plates 10; the plurality of second through grooves 11 correspond to the plurality of quartz swing plates 10 one by one.

[0060] Correspondingly, in the case that the through grooves 51 are also arranged on the second pressing plate 5, the through grooves 51 are provided in plurality and correspond to the plurality of second through grooves 11 one by one.

[0061] The quartz pendulum piece clamp in the embodiment can simultaneously place multiple quartz pendulum pieces 10, simultaneously press by the first pressing plate 1 and the second pressing plate 5, and simultaneously perform the vacuum coating process, so that batch efficient processing of the multiple quartz pendulum pieces is realized, and the production efficiency is improved.

[0062] In the embodiment provided in the application, the second aspect provides a cleaning device, which comprises the quartz pendulum piece clamp in any one of the embodiments and a cleaning assembly; the cleaning assembly comprises an ultrasonic cleaner; and the ultrasonic cleaner is used to clean the mask plate 2 and the support plate 4 before the vacuum coating process is performed.

[0063] In the embodiment, the ultrasonic cleaner has an ultrasonic cleaning tank; after the mask plate 2 and the support plate 4 are placed in the ultrasonic cleaning tank, dust and impurities on surfaces of the mask plate 2 and the support plate 4 are effectively removed through high-frequency vibration, so that the cleanliness of the mask plate 2 and the support plate 4 in the vacuum coating process is ensured.

[0064] It should be noted that the ultrasonic cleaner can be an ultrasonic cleaning instrument in the prior art, and therefore the use process of the ultrasonic cleaner is not described in detail in the embodiment.

[0065] In another embodiment, the cleaning device further comprises a baking instrument; and the baking instrument is used to bake the mask plate 2 and the support plate 4 after cleaning.

[0066] Similarly, the baking instrument can be a baking instrument in the prior art, and specifically, the baking instrument can only be capable of baking the mask plate 2 and the support plate 4. Through baking, moisture and residues on surfaces of the mask plate 2 and the support plate 4 can be removed, so that air bubbles are not generated in the vacuum coating process.

[0067] Further, the cleaning device further comprises an ion fan; and the ion fan is used to output ionized airflow to the mask plate 2 and the support plate 4 after baking, so as to perform ion cleaning. The ion fan can be an ion fan in the prior art, and specifically, the ion fan can only be capable of blowing out ion wind to remove static electricity on surfaces of the mask plate 2 and the support plate 4 after baking.

[0068] The quartz pendulum piece clamp provided in the embodiment of the application can include the following processes before use:

[0069] First, the front surface and the back surface of the mask plate 2 and the support plate 4 are wiped clean on a clean bench;

[0070] Then, the mask plate 2 and the support plate 4 are placed in an ultrasonic cleaning tank and cleaned through high-frequency vibration;

[0071] Subsequently, the cleaned mask plate 2 and the support plate 4 are taken out and placed in a baking instrument for baking, wherein the baking temperature can be 200°C, and the baking time can be 30 minutes;

[0072] Then, the baked mask plate 2 and the support plate 4 are placed under an ion fan to remove surface static electricity.

[0073] Finally, the components are assembled.

[0074] The quartz pendulum piece clamp and the cleaning device provided by the embodiments of the present application are easy to implement, and can plate a film layer with higher precision, better adhesion and more uniformity.

[0075] The above is only a preferred embodiment of the present application and is not intended to limit the present application. Although the present application is described in detail with reference to the examples, those skilled in the art can still modify the technical solutions described in the foregoing examples or make equivalent replacements for some of the technical features, but any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A quartz pendulum clamp, characterized in that, include: First pressure plate (1), mask plate (2), swing plate fixing plate (3), support plate (4), second pressure plate (5) and multiple locking pins (6); The support plate (4) is disposed on the second pressure plate (5); The pendulum fixing plate (3) is disposed on the support plate (4) for placing the quartz pendulum (10); The mask plate (2) is disposed on the pendulum fixing plate (3) and located on the quartz pendulum (10); The first pressure plate (1) is disposed on the mask plate (2); Multiple locking pins (6) are threadedly connected to the first pressure plate (1) and the second pressure plate (5) so that the first pressure plate (1) and the second pressure plate (5) press the mask plate (2), the quartz pendulum (10) and the support plate (4) together.

2. The quartz pendulum clamp according to claim 1, characterized in that, Also includes: Fixed column (7); The fixed post (7) passes through the mask plate (2) and the quartz pendulum (10) and abuts against the support plate (4).

3. The quartz pendulum clamp according to claim 1, characterized in that, The swing plate fixing plate (3) is provided with a through opening (31); The through-hole (31) is used to insert the quartz pendulum (10), and the inserted quartz pendulum (10) abuts against the support plate (4).

4. The quartz pendulum clamp according to claim 3, characterized in that, The difference between the inner diameter of the through-hole (31) and the outer diameter of the quartz pendulum (10) is less than or equal to 0.1 mm.

5. The quartz pendulum clamp according to claim 3, characterized in that, A through pattern (41) is provided on the area of ​​the support plate (4) directly opposite the quartz pendulum (10). A through groove (51) is provided on the second pressure plate (5) in the area directly opposite the through pattern (41); The through groove (51) is used to allow particles to pass through the through pattern (41) and be deposited on the quartz pendulum (10).

6. The quartz pendulum clamp according to any one of claims 1 to 5, characterized in that, A second through pattern (21) is provided on the area of ​​the mask plate (2) directly opposite the quartz pendulum (10). A second through groove (11) is provided on the first pressure plate (1) in the area directly opposite the second through pattern (21); Multiple locking pins (6) are arranged around the outer periphery of the second through groove (11).

7. The quartz pendulum clamp according to claim 6, characterized in that, The first pressure plate (1) is provided with a plurality of second through slots (11); The oscillating plate fixing plate (3) can hold multiple quartz oscillating plates (10); Multiple second through slots (11) correspond one-to-one with multiple quartz pendulums (10).

8. A cleaning device, characterized in that, include: The cleaning assembly and the quartz pendulum clamp as described in any one of claims 1 to 7; The cleaning assembly includes: an ultrasonic cleaner; The ultrasonic cleaner is used to clean the mask plate (2) and the support plate (4) before performing the vacuum coating process.

9. The cleaning apparatus according to claim 8, characterized in that, Also includes: Baking equipment; The baking apparatus is used to bake the cleaned mask plate (2) and the support plate (4).

10. The cleaning apparatus according to claim 9, characterized in that, Also includes: Ionizing fan; The ion fan is used to output ionized airflow to the baked mask plate (2) and the support plate (4) for electro-ion cleaning.

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