Optical lens alignment device with linked laser interferometer and nanometer displacement table

Abstract

The utility model provides a laser interferometer and nanometer displacement platform linked optical lens alignment device, which comprises an installation box, a laser interferometer is fixedly installed at the top of the installation box, the bottom of the laser interferometer penetrates through the top of the installation box and extends to the inner side of the installation box, and a glass door is hinged to the front side of the installation box. The laser interferometer and the nanometer displacement table are installed through the installation box, equipment placed on the top of the nanometer displacement table is detected through the laser interferometer, and the lens is installed through the adjustment mechanism and the lens placement mechanism. Meanwhile, front-back and left-right adjustment of the lens can be achieved through the adjusting mechanism, calibration of the lens is accelerated, subsequent detection is facilitated, front-back and left-right movement of the lens containing mechanism is driven through arrangement of a first mounting rod and a second mounting rod, and then adjustment and calibration of the optical lens installed in the lens containing mechanism are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to laser interferometer optical lens adjusting technical field, concretely relates to a kind of optical lens alignment device of laser interferometer and nanometer displacement platform linkage. BACKGROUND

[0002] Laser interferometer, with laser wavelength as known length, general length measurement using Michelson interference system to measure displacement, laser has high intensity, high directionality, spatial coherence, narrow bandwidth and high monochromaticity etc.Advantages, currently commonly used to measure the interferometer, mainly to Michelson interferometer, and with frequency stabilized helium-neon laser as light source, constitute a measurement system with interference effect, laser interferometer can cooperate with various refracting mirrors, reflecting mirrors etc.To linear position, speed, angle, flatness, straightness, parallelism and perpendicularity etc.Measurement work, and can be used as the calibration work of precision machine tool or measuring instrument.

[0003] Laser interferometer is often replaced according to different needs when detecting, after replacing lens, to meet the need of detection, it is often adjusted, so that its lens and the equipment placed on the top of nanometer displacement platform are calibrated, the traditional lens adjusting device has more adjusting parameters, and then lead to more cumbersome when adjusting, affect the rapid calibration of lens, cannot meet the need of detection. UTILITY MODEL CONTENT

[0004] The utility model provides a kind of optical lens alignment device of laser interferometer and nanometer displacement platform linkage for the purpose of solving the problems presented in background art.

[0005] The specific technical scheme is as follows:

[0006] A kind of optical lens alignment device of laser interferometer and nanometer displacement platform linkage, including installation box, the top of the installation box is fixedly installed with laser interferometer, the bottom of the laser interferometer is through the top of installation box and extends to the inside of installation box, the front side of the installation box is hingedly connected with glass door, the inside of the installation box is fixedly installed with nanometer displacement platform, the top of the inner chamber of the installation box is provided with adjusting mechanism, the bottom of the adjusting mechanism is movably connected with lens placing mechanism;

[0007] The adjusting mechanism includes two first installation rods fixedly installed in the inner chamber top of installation box, the bottom of the first installation rod is provided with mounting plate, the bottom of the mounting plate is fixedly installed with two second installation rods, the bottom of the second installation rod is provided with second sliding slot, the inside of the second sliding slot is slidably connected with second sliding block.

[0008] As a preferred scheme of the utility model, the inside of the second mounting rod is rotationally connected with a second threaded rod, the second threaded rod is inserted into the inside of the second sliding block and is connected with the second sliding block through threads, and the right side of the second threaded rod penetrates through the mounting box and extends to the right side of the mounting box.

[0009] As a preferred scheme of the utility model, the bottom of the first mounting rod is provided with a first sliding groove, the inside of the first sliding groove is slidingly connected with a first sliding block, and the bottom of the first sliding block is fixedly connected with the top of the mounting plate.

[0010] As a preferred scheme of the utility model, the inside of the first mounting rod is rotationally connected with a first threaded rod, the first threaded rod is inserted into the inside of the first sliding block and is connected with the first sliding block through threads.

[0011] As a preferred scheme of the utility model, the lens placing mechanism comprises a mounting frame fixedly installed at the bottom of the second sliding block, and the inside of the mounting frame is slidingly connected with two extrusion frames.

[0012] As a preferred scheme of the utility model, the inside of the mounting frame is provided with a third sliding groove, the inside of the third sliding groove is slidingly connected with two third sliding blocks, and the bottom of the third sliding block is fixedly connected with the top of the extrusion frame.

[0013] As a preferred scheme of the utility model, one side of the third sliding block is fixedly installed with a spring, and one side of the spring is in contact with the inner cavity of the third sliding groove.

[0014] The utility model has the following beneficial effects:

[0015] The laser interferometer and nanometer displacement table linkage optical lens alignment device provided by the utility model realizes the installation of the laser interferometer and the nanometer displacement table through the installation of the mounting box, realizes the detection of the equipment placed on the top of the nanometer displacement table through the installation of the laser interferometer, realizes the installation of the lens through the installation of the adjusting mechanism and the lens placing mechanism, and the lens can be adjusted forward and backward and left and right through the adjusting mechanism, so that the calibration of the lens is accelerated and subsequent detection is facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 The structure diagram of the laser interferometer and nanometer displacement table linkage optical lens alignment device provided by the utility model embodiment is shown;

[0017] Figure 2The adjusting mechanism and the lens placing mechanism structure schematic view of the optical lens alignment device with the linkage of the laser interferometer and the nanometer displacement platform are provided for the embodiments of the utility model.

[0018] Figure 3 The adjusting mechanism and the lens placing mechanism structure schematic view of the optical lens alignment device with the linkage of the laser interferometer and the nanometer displacement platform are provided for the embodiments of the utility model.

[0019] Figure 4 The adjusting mechanism and the lens placing mechanism structure schematic view of the optical lens alignment device with the linkage of the laser interferometer and the nanometer displacement platform are provided for the embodiments of the utility model.

[0020] Figure 5 The adjusting mechanism and the lens placing mechanism structure schematic view of the optical lens alignment device with the linkage of the laser interferometer and the nanometer displacement platform are provided for the embodiments of the utility model.

[0021] Figure 6 The adjusting mechanism and the lens placing mechanism structure schematic view of the optical lens alignment device with the linkage of the laser interferometer and the nanometer displacement platform are provided for the embodiments of the utility model.

[0022] Figure 7 The adjusting mechanism and the lens placing mechanism structure schematic view of the optical lens alignment device with the linkage of the laser interferometer and the nanometer displacement platform are provided for the embodiments of the utility model.

[0023] In the drawing: 1, installation box; 2, laser interferometer; 3, adjusting mechanism; 301, first installation rod; 302, first threaded rod; 303, installation plate; 304, second installation rod; 305, second threaded rod; 306, first sliding block; 307, second sliding groove; 308, first sliding groove; 309, second sliding block; 4, nanometer displacement platform; 5, lens placing mechanism; 501, installation frame; 502, extrusion frame; 503, third sliding groove; 504, spring; 505, third sliding block; 6, glass door. DETAILED DESCRIPTION

[0024] The technical scheme of the utility model is further illustrated below by means of specific embodiments and the drawings.

[0025] Wherein, the drawing is only used for example explanation, and the representation is only schematic view, not real object drawing, and can not be understood as the limitation of the patent; in order to better explain the embodiments of the utility model, some components of the drawing can be omitted, enlarged or reduced, and do not represent the size of actual product; for the technical personnel in the art, some known structures in the drawing and their description can be omitted, which is understandable.

[0026] The same or similar reference signs in the drawings of the embodiments of the present utility model correspond to the same or similar components; in the description of the present utility model, it is understood that, if the terms "upper", "lower", "left", "right", "inner", "outer" and the like appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, and therefore the terms describing the position relationship in the drawings are only used for exemplary illustration, and cannot be understood as a limitation on the present patent, and for ordinary skilled persons in the art, the specific meanings of the above terms can be understood according to the specific circumstances.

[0027] In the description of the present utility model, unless explicitly specified and limited, if the term "connection" and the like appear to indicate the connection relationship between components, the term should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through an intermediate medium; it can be the communication inside two components or the interaction relationship between two components. For ordinary skilled persons in the art, the specific meanings of the above terms in the present utility model can be understood according to the specific circumstances.

[0028] Embodiment

[0029] The optical lens alignment device provided by the embodiment is connected with the laser interferometer and the nanometer displacement table, as shown in Figures 1-7 The laser interferometer 2 is fixedly installed on the top of the mounting box 1, the bottom of the laser interferometer 2 penetrates through the top of the mounting box 1 and extends to the inside of the mounting box 1, the front side of the mounting box 1 is hingedly connected with a glass door 6, the inside of the mounting box 1 is fixedly installed with a nanometer displacement table 4, the top of the inner cavity of the mounting box 1 is provided with an adjusting mechanism 3, and the bottom of the adjusting mechanism 3 is movably connected with a lens placing mechanism 5.

[0030] The adjusting mechanism 3 comprises two first mounting rods 301 fixedly installed on the top of the inner cavity of the mounting box 1, the bottom of the first mounting rod 301 is provided with a mounting plate 303, the bottom of the mounting plate 303 is fixedly installed with two second mounting rods 304, the bottom of the second mounting rod 304 is provided with a second sliding groove 307, and the inside of the second sliding groove 307 is slidably connected with a second sliding block 309. The first mounting rod 301 and the second mounting rod 304 are arranged to drive the lens placing mechanism 5 to move forward and backward and left and right, so as to adjust and calibrate the optical lens installed in the lens placing mechanism 5.

[0031] The second installation rod 304 is rotatably connected with a second threaded rod 305 inside, the second threaded rod 305 is inserted into the second sliding block 309 and is connected with the second sliding block 309 through threads, the right side of the second threaded rod 305 penetrates through the installation box 1 and extends to the right side of the installation box 1, the left and right adjustment of the mounting frame 501 is realized through the second threaded rod 305, threads and the second sliding block 309, and then the lens inside the mounting frame 501 is driven to move to realize the calibration of the lens.

[0032] The bottom of the first installation rod 301 is provided with a first sliding groove 308, the first sliding groove 308 is slidably connected with a first sliding block 306 inside, the bottom of the first sliding block 306 is fixedly connected with the top of the installation plate 303, and the cooperation between the first sliding block 306 and the first sliding groove 308 is used to realize the fixed installation of the installation plate 303 and facilitate the subsequent adjustment of the installation plate 303.

[0033] The first installation rod 301 is rotatably connected with a first threaded rod 302 inside, the first threaded rod 302 is inserted into the first sliding block 306 and is connected with the first sliding block 306 through threads, and the cooperation between the first threaded rod 302, the first sliding block 306 and threads is used to drive the installation plate 303 to move forward and backward, and then the lens placing mechanism 5 and the optical lens are driven to move forward and backward to realize the adjustment and calibration of the optical lens.

[0034] The lens placing mechanism 5 comprises a mounting frame 501 fixedly installed at the bottom of the second sliding block 309, two extrusion frames 502 are slidably connected inside the mounting frame 501, and the cooperation between the mounting frame 501 and the extrusion frame 502 is used to realize the installation and fixation of the optical lens for the subsequent use.

[0035] The inner side of the mounting frame 501 is provided with a third sliding groove 503, the third sliding groove 503 is slidably connected with two third sliding blocks 505 inside, the bottom of the third sliding block 505 is fixedly connected with the top of the extrusion frame 502, and the cooperation between the third sliding groove 503 and the third sliding block 505 is used to realize the installation of the extrusion frame 502 and facilitate the movement of the extrusion frame 502, so that the lenses of different sizes are installed.

[0036] The third sliding block 505 is fixedly installed with a spring 504 on one side, one side of the spring 504 is in contact with the inner cavity of the third sliding groove 503, and the spring 504 is used to push the third sliding block 505 to drive the extrusion frame 502 to move to the relatively close side, so that the optical lens is extruded and fixed.

[0037] In use, the glass door 6 is opened, the equipment to be detected is placed on the top of the nano displacement table 4, the required optical lens is selected according to the equipment to be detected, the optical lens is placed between the pressing frames 502 and is pressed to the inner side of the pressing frames 502, the pressing frames 502 press and fix the optical lens under the pressing of the springs 504 and the third sliding block 505, after the fixing is completed, the first threaded rod 302 is rotated to drive the first sliding block 306 to drive the second mounting rod 304, the mounting frame 501 and the optical lens to move forward and backward under the action of threads, meanwhile, the second threaded rod 305 drives the second sliding block 309 to drive the mounting frame 501 and the optical lens to move left and right, so that the optical lens is adjusted to the required position, after the adjustment is completed, the equipment is detected by the laser interferometer 2.

[0038] The above is only the preferred embodiment of the present application, and does not limit the implementation and protection scope of the present application. For those skilled in the art, it should be realized that any equivalent replacement and obvious change obtained by applying the content of the present application should be included in the protection scope of the present application.

Claims

1. A laser interferometer and nanometer displacement stage linked optical lens alignment device, characterized in that, Including the installation box (1), the top of the installation box (1) is fixedly installed with a laser interferometer (2), the bottom of the laser interferometer (2) penetrates the top of the installation box (1) and extends to the inside of the installation box (1), the front side of the installation box (1) is hingedly connected with a glass door (6), the inside of the installation box (1) is fixedly installed with a nano displacement table (4), the top of the inside cavity of the installation box (1) is provided with an adjusting mechanism (3), the bottom of the adjusting mechanism (3) is movably connected with a lens placing mechanism (5); The adjusting mechanism (3) comprises two first mounting rods (301) fixedly installed on the top of the inside cavity of the installation box (1), the bottom of the first mounting rod (301) is provided with a mounting plate (303), the bottom of the mounting plate (303) is fixedly installed with two second mounting rods (304), the bottom of the second mounting rod (304) is provided with a second sliding groove (307), and the inside of the second sliding groove (307) is slidably connected with a second sliding block (309).

2. The laser interferometer and nanometer displacement stage combined optical lens alignment apparatus according to claim 1, wherein, The inside of the second mounting rod (304) is rotatably connected with a second threaded rod (305), the second threaded rod (305) penetrates the inside of the second sliding block (309) and is connected with the second sliding block (309) through threads, and the right side of the second threaded rod (305) penetrates the installation box (1) and extends to the right side of the installation box (1).

3. The laser interferometer and nanometer displacement stage combined optical lens alignment apparatus according to claim 2, wherein, The bottom of the first mounting rod (301) is provided with a first sliding groove (308), the inside of the first sliding groove (308) is slidably connected with a first sliding block (306), and the bottom of the first sliding block (306) is fixedly connected with the top of the mounting plate (303).

4. The laser interferometer and nanometer displacement stage combined optical lens alignment apparatus according to claim 3, wherein, The inside of the first mounting rod (301) is rotatably connected with a first threaded rod (302), the first threaded rod (302) penetrates the inside of the first sliding block (306) and is connected with the first sliding block (306) through threads.

5. The laser interferometer and nanometer displacement stage combined optical lens alignment apparatus according to claim 1, wherein, The lens placing mechanism (5) comprises a mounting frame (501) fixedly installed on the bottom of the second sliding block (309), and the inside of the mounting frame (501) is slidably connected with two extrusion frames (502).

6. The laser interferometer and nanometer displacement stage combined optical lens alignment apparatus according to claim 5, wherein, The inside of the mounting frame (501) is provided with a third sliding groove (503), the inside of the third sliding groove (503) is slidably connected with two third sliding blocks (505), and the bottom of the third sliding block (505) is fixedly connected with the top of the extrusion frame (502).

7. The laser interferometer and nanometer displacement stage combined optical lens alignment apparatus according to claim 6, wherein, One side of the third sliding block (505) is fixedly installed with a spring (504), and one side of the spring (504) is in contact with the inside cavity of the third sliding groove (503).

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