Blowing sample table

Abstract

The utility model discloses an air blowing sample table which comprises a grounding floor, an isolation part is arranged on the grounding floor, and an isolation inner ring flush with the upper surface of the isolation part is embedded in a containing part of the isolation part; the sample table is arranged in the isolation inner ring, and the sample table is flush with the upper surface of the isolation inner ring; the grounding ring is sleeved outside the isolation part; an air blowing channel is formed in the upper surface of the grounding ring, and the air blowing channel is located above the sample table; and the sealing ring seals the upper surface of the blowing channel. According to the utility model, the sealed annular hole groove is additionally arranged on the upper surface of the grounding ring, and gas enters the annular hole groove from the gas inlet and then is blown into a sample on the sample table from the gas outlet hole, so that different gases are selected for blowing according to different experiment requirements, and the grounding ring is suitable for various experiment scenes; through the arrangement of the shielding part and the shielding inner ring, the sample table is subjected to triple isolation, and the isolation and shielding effects are good; the blowing sample table can provide a stable airflow environment and ensure the reliability of experimental results.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of blow sample stage, especially a kind of blow sample stage for material analysis and testing. BACKGROUND

[0002] At present, in the test of analyzing and testing some materials, it is necessary to keep the sample dry and remove the dust or impurities on the surface of the sample to ensure the cleanliness of the sample, or it is also necessary to create a specific gas environment to realize the functions of analysis and testing. Most of the current testing methods are to place the sample on a sample stage of a special device, and then realize it through relevant mechanisms. Such devices are mostly expensive and occupy a large area.

[0003] At present, with the need for small-scale testing in the laboratory, there is an urgent need for a small-scale sample stage with simple structure and low production cost, high testing accuracy to meet the needs of sample drying, cleaning and changing the related gas environment. SUMMARY

[0004] The utility model aims at overcoming the shortcomings of the prior art and providing a blow sample stage with simple structure, low cost and high testing accuracy to meet the needs of sample testing.

[0005] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of a blow sample stage, which comprises a grounding floor, an isolation part, an isolation inner ring, a sample stage, a grounding ring and a sealing ring. The isolation part is arranged on the grounding floor. The isolation part has a containing part inside. The containing part is embedded with an isolation inner ring flush with the upper surface of the isolation part. The sample stage is arranged inside the isolation inner ring and flush with the upper surface of the isolation inner ring. The grounding ring is sleeved outside the isolation part and has its bottom arranged on the grounding floor. The upper surface of the grounding ring is provided with a gas blowing channel above the sample stage. The sealing ring is arranged above the gas blowing channel to seal the upper surface of the gas blowing channel. After the gas blowing channel is ventilated, the gas is blown onto the sample stage.

[0006] In an embodiment, the isolation part comprises a second isolation component embedded in a first isolation component. The first isolation component comprises an isolation plate arranged on the grounding floor. The upper surface of the isolation plate is provided with a shielding ring. The second isolation component comprises a shielding ring floor arranged in the shielding ring. The upper surface of the shielding ring floor is provided with an isolation ring. The isolation inner ring is arranged in the isolation ring.

[0007] In an embodiment, the air blowing channel comprises an annular hole groove arranged on the upper surface of the grounding ring, a plurality of air outlet holes are arranged on the side of the grounding ring facing the sample table, and the air outlet holes are communicated with the annular hole groove; the outer side of the grounding ring is provided with an air inlet communicated with the annular hole groove.

[0008] In an embodiment, the number of the air outlet holes is six, and the six air outlet holes are arranged in a circular array with the sample table as the center.

[0009] In an embodiment, the air inlet is further provided with a gas regulating valve for regulating the flow rate of the gas.

[0010] In an embodiment, the grounding ring and the isolation part are provided with wire holes arranged transversely therethrough, and the wire holes are used to connect an external controller with the side circuit of the sample table.

[0011] In an embodiment, the grounding ring and the sealing ring are made of metal.

[0012] Thanks to the use of the above technical scheme, the utility model has the following advantages compared with the prior art:

[0013] The air blowing sample table of the utility model adds a sealed annular hole groove on the upper surface of the grounding ring, the gas enters the annular hole groove from the air inlet, and then is blown into the sample on the sample table from the air outlet hole, different gases are selected for blowing according to different experimental requirements, and the air blowing sample table is suitable for various experimental scenes; secondly, the sample table is triple-isolated through the arrangement of the shielding part and the shielding inner ring, and the isolation shielding effect is good; in addition, the air blowing sample table has high stability, can provide a stable airflow environment for the sample, and ensures the reliability of the experimental results. BRIEF DESCRIPTION OF DRAWINGS

[0014] The technical scheme of the utility model will be further described below with reference to the drawings:

[0015] Figure 1 It is a three-dimensional structure schematic view of an embodiment of the utility model;

[0016] Figure 2 It is Figure 1 It is a three-dimensional structure schematic view of the utility model after omitting the sealing ring;

[0017] Figure 3 It is Figure 2 It is a three-dimensional structure schematic view of the utility model after omitting the grounding ring;

[0018] Figure 4 It is Figure 3 It is a three-dimensional structure schematic view of the utility model after omitting the shielding ring;

[0019] Figure 5The utility model discloses a three -dimensional structure schematic diagram of grounding ring in one embodiment of the utility model,

[0020] Wherein: 1, grounding floor, 2, isolation part, 3, isolation inner ring, 4, sample stage, 5, grounding ring, 6, sealing ring, 7, blow channel, 8, gas regulating valve, 9, wiring hole, 20, isolation plate, 21, shielding ring, 22, shielding ring floor, 23, isolation ring, 70, annular hole groove, 71, air outlet, 72, air inlet. DETAILED DESCRIPTION

[0021] In order to make the personnel in the technical field better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor shall belong to the scope of protection of the present application.

[0022] The utility model provides a kind of blow sample stage to solve the most expensive test equipment in prior art, it is large in area, cannot satisfy experiment miniaturization, and simple structure, low in cost needs problem.

[0023] For easy understanding, the specific process in the embodiments of the present application will be described below, please refer to Figures 1 to 4 The blow sample stage in the embodiments of the present application includes grounding floor 1, isolation part 2, isolation inner ring 3, sample stage 4, grounding ring 5 and sealing ring 6;The isolation part 2 is arranged on the grounding floor 1;The isolation part 2 has a containing part, and the containing part is embedded with the isolation inner ring 3 flush with the upper surface of the isolation part 2;The sample stage 4 is arranged inside the isolation inner ring 3, and the upper surface of the sample stage 4 is flush with the upper surface of the isolation inner ring 3;The grounding ring 5 is sleeved outside the isolation part 2, and the bottom is arranged on the grounding floor 1;The upper surface of the grounding ring 5 is provided with a blow channel 7, and the blow channel 7 is located above the sample stage 4;The sealing ring 6 is arranged above the blow channel 7 to seal the upper surface of the blow channel 7;Wherein, the blow channel 7 blows gas to the sample stage 4 after aeration.

[0024] The blow sample stage of the utility model, through isolation part 2 and isolation inner ring 3, sample stage 4 is effectively isolated and shielded, then gas is blown to sample stage 4 by blow channel 7, so that the sample on sample stage 4 can be dried or cleaned, and different test environment required gas can also be blown into sample stage 4 by blow channel, overall miniaturization, simple structure, convenient testing, low in cost, meet the test demand in laboratory.

[0025] In an embodiment, referring to Figure 3 and Figure 4 , the isolation part 2 comprises a second isolation assembly embedded in a first isolation assembly; the first isolation assembly comprises an isolation plate 20 arranged on the grounding floor 1; the upper surface of the isolation plate 20 is provided with a shielding ring 21; the second isolation assembly comprises a shielding ring floor 22 arranged in the shielding ring 21, and the shielding ring floor 22 is arranged on the isolation plate 20; the upper surface of the shielding ring floor 22 is provided with an isolation ring 23; and the isolation inner ring 3 is arranged inside the center of the isolation ring 23. In this embodiment, the sample stage 4 is triple-isolated by using two isolation assemblies and the isolation inner ring 3, and the first isolation assembly, the second isolation assembly and the isolation inner ring 3 are sequentially isolated from the inside to the outside, so that the sealing degree is high and the isolation and shielding effect is good; and the isolation material can be selected from metal materials such as copper and aluminum.

[0026] In an embodiment, referring to Figure 2 and Figure 5 , the air blowing channel 7 comprises a ring-shaped hole groove 70 arranged on the upper surface of the grounding ring 5, a plurality of air outlet holes 71 are opened on the side of the grounding ring 5 towards the sample stage 4, and the air outlet holes 71 are communicated with the ring-shaped hole groove 70; and the outer side of the grounding ring 5 is provided with an air inlet 72 communicated with the ring-shaped hole groove 70.

[0027] In operation, after the air inlet 72 is connected with the gas source outside, the gas enters the ring-shaped hole groove 70 through the air inlet 72, and then is blown to the sample stage 4 through the air outlet holes 71; and in order to ensure that the air outlet holes 71 can effectively blow the gas to the sample stage 4, the air outlet holes 71 can be arranged to be inclined to the sample stage 4.

[0028] Further, in this embodiment, the number of the air outlet holes 7 is six, and the six air outlet holes are circularly arranged around the sample stage; and the six air outlet holes 71 can be arranged to be inclined at different angles, so that the sample on the sample stage 4 can be blown at multiple angles, and the blowing efficiency is high. Of course, the number of the air outlet holes 71 is not limited to six, and can be adjusted according to actual needs.

[0029] In an embodiment, referring to Figure 1 , the air inlet 72 is further provided with a gas regulating valve 8 for adjusting the flow rate of the gas; the gas regulating valve 8 is connected to the gas source through a gas pipe; and the flow rate of the gas entering the ring-shaped hole groove 70 can be adjusted through the gas regulating valve 8, so that the flow, pressure and direction of the gas can be accurately adjusted to meet different experimental needs.

[0030] In an embodiment, referring to Figure 1The ground ring 5 and the isolation part 3 are provided with wire holes 9 which are transversely arranged and are used to connect the external controller with the side circuit of the sample table 4, so that the sample table 4 can be effectively controlled.

[0031] In an embodiment, the ground ring 5 and the sealing ring 6 are made of metal, which has good electromagnetic shielding effect and can effectively reduce the influence of external electromagnetic interference on the test results, and is not easy to deform, so as to cause the gas in the annular groove 70 to leak.

[0032] The working process is as follows: first, the external controller is connected with the sample table 4 through the wire hole 9, so that the sample table 4 can be controlled, and then the flow of the gas flowing through the annular groove 70 is set by adjusting the gas regulating valve 8.

[0033] When the sample on the sample table 4 needs to be dried, high-temperature hot gas flows into the annular groove 70 from the gas inlet 72, and then the sample on the sample table 4 is dried by the six gas outlets 71, and then the relevant test can be carried out.

[0034] When the sample on the sample table 4 needs to be cleaned, normal-temperature gas flows into the annular groove 70 from the gas inlet 72, and then the sample on the sample table 4 is cleaned by the six gas outlets 71, and then the relevant test can be carried out.

[0035] When the sample on the sample table 4 needs to be tested in a simulated gas environment, the set environment gas flows into the annular groove 70 from the gas inlet 72, and then the sample on the sample table 4 is blown by the six gas outlets 71, so that the sample is in the simulated gas environment, and then the test can be carried out.

[0036] The gas blowing sample table has multifunctionality, which can select different gases for blowing according to different experimental requirements and adapt to various experimental scenes. Secondly, it has high stability and can provide a stable gas flow environment for the sample to ensure the reliability of the experimental results.

[0037] Of course, in addition to the need to keep the sample dry, clean, or create a specific gas environment in material analysis and testing; in the electronic industry, the manufacturing and testing process of electronic components requires preventing static electricity accumulation and dust pollution. In the field of biological medicine, cell culture, drug research and development, etc., the sample is provided with a suitable gas environment to promote the experiment. In the field of chemical analysis, the sample needs to be free from external interference during analysis to improve the accuracy of the analysis results, etc., which can be used with the gas blowing sample table.

[0038] The above-described embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacements for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A blowing sample stage, characterized in that, The device includes a grounding plate (1), an isolation section (2), an inner isolation ring (3), a sample stage (4), a grounding ring (5), and a sealing ring (6). The isolation section (2) is disposed on the grounding plate (1). The isolation section (2) has a receiving section, and the inner isolation ring (3) is embedded in the receiving section and is flush with the upper surface of the isolation section (2). The sample stage (4) is disposed inside the inner isolation ring (3) and is flush with the upper surface of the inner isolation ring (3). The grounding ring (5) is sleeved on the outside of the isolation section (2) and its bottom is disposed on the grounding plate (1). The upper surface of the grounding ring (5) has an air blowing channel (7) and the air blowing channel (7) is located above the sample stage (4). The sealing ring (6) is located above the air blowing channel (7) to seal the upper surface of the air blowing channel (7). The air blowing channel (7) blows gas onto the sample stage (4) after it is ventilated.

2. The air-blowing sample stage as described in claim 1, characterized in that: The isolation part (2) includes a second isolation component embedded in the first isolation component; the first isolation component includes an isolation plate (20) disposed on the grounding floor (1); the upper surface of the isolation plate (20) is provided with a shielding ring (21); the second isolation component includes a shielding ring floor (22) disposed in the shielding ring (21); the upper surface of the shielding ring floor (22) is provided with an isolation ring (23); wherein, the inner isolation ring (3) is disposed in the isolation ring (23).

3. The air-blowing sample stage as described in claim 1, characterized in that: The air blowing channel (7) includes an annular groove (70) on the upper surface of the grounding ring (5). Multiple air outlets (71) are opened in the grounding ring (5) on the side facing the sample stage (4), and the air outlets (71) communicate with the annular groove (70). An air inlet (72) communicating with the annular groove (70) is provided on the outer side of the grounding ring (5).

4. The air-blowing sample stage as described in claim 3, characterized in that: The number of air vents (71) is six, and the six air vents (71) are arranged in a circular array with the sample stage (4) as the center.

5. The air-blowing sample stage as described in claim 3, characterized in that: The air inlet (72) is also provided with a gas regulating valve (8) for regulating the gas flow rate.

6. The air-blowing sample stage as described in claim 1, characterized in that: The grounding ring (5) and the isolation part (2) have horizontally through wiring holes (9) for connecting the external controller to the side wiring of the sample stage (4).

7. The air-blowing sample stage as described in claim 1, characterized in that: The grounding ring (5) and sealing ring (6) are made of metal.

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