Stripping liquid testing device for wet electronic chemicals

Abstract

The utility model discloses a stripping liquid testing device for wet electronic chemicals, which comprises a water bath kettle, a liquid containing beaker is arranged in the water bath kettle, and a sample containing basket is arranged in the liquid containing beaker; the bottom of the sample containing basket is hollow, and a stirrer is arranged at the bottom of the sample containing basket. According to the device, the liquid containing beaker containing the stripping liquid is placed in the water bath kettle, the stirrer and the sample containing flower basket containing the development sample are placed in the liquid containing beaker, the water bath kettle is used for heating, and the stirrer is used for stirring; the sample containing basket ring is provided with a plurality of layers of blocking grooves, a plurality of samples can be placed at the same time for testing, the structure is simple, operation is convenient, and the research and development efficiency of the wet electronic chemical stripping liquid can be effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to stripping liquid testing device technical field, concretely relates to a stripping liquid testing device for wet electronic chemicals. BACKGROUND

[0002] Wet electronic chemicals, also known as electronic chemical materials, refer to special chemicals and chemical materials used in the electronic industry. The main component of the reagent has high purity, and the number of impurity ions and particles meets strict requirements. It is higher than the grade of ordinary chemical reagents. The purity and cleanliness of the product have a very important influence on the yield, performance and reliability of electronic products.

[0003] Stripping liquid is one of the supporting reagents in the photoetching process of wet electronic chemicals, and is widely used in photovoltaic solar energy, display panel and semiconductor fields. Stripping liquid is usually used after etching process to remove photoresist and residual substances, while preventing damage to the underlying substrate layer. Currently, the laboratory usually needs to manually operate when developing stripping liquid. The reaction container is usually a traditional glassware, which has poor temperature control performance and is difficult to maintain a stable and consistent temperature environment during the experiment. The experimental personnel can only rely on visual observation and manual recording, which is difficult to ensure the consistency of the test conditions. UTILITY MODEL CONTENT

[0004] The utility model discloses a stripping liquid testing device for wet electronic chemicals.

[0005] The utility model discloses a stripping liquid testing device for wet electronic chemicals.

[0006] The water bath pot is internally placed with a liquid containing beaker, the liquid containing beaker is used for containing stripping liquid, the liquid containing beaker is internally placed with a sample containing basket, and the sample containing basket is used for containing sample.

[0007] The sample containing basket is annularly provided with a blocking groove, the bottom of the sample containing basket is hollow, a stirrer is arranged in the bottom of the sample containing basket, and the stirrer is used for stirring glass liquid.

[0008] As a further description of the above technical scheme, the material of the sample containing basket is polytetrafluoroethylene, and the material of the liquid containing beaker is glass.

[0009] As a further description of the above technical scheme, the sample containing basket comprises a holding rod and a sample containing basket, and the holding rod and the sample containing basket are detachably connected.

[0010] As a further description of the above technical scheme, a threaded groove is formed in the top of the sample containing basket, and the bottom of the holding rod is threadedly connected with the sample containing basket through the threaded groove.

[0011] As a further description of the above technical scheme, the blocking groove ring is arranged on the top end face of the sample container, and the blocking grooves are symmetrically arranged in 4-6 groups.

[0012] As a further description of the above technical scheme, the blocking groove ring is arranged on the top end face of the sample container, and the blocking grooves are symmetrically arranged in 4-6 groups.

[0013] As a further description of the above technical scheme, the blocking groove ring is arranged on the top end face of the sample container, and the blocking grooves are symmetrically arranged in 4-6 groups.

[0014] As a further description of the above technical scheme, the blocking groove ring is arranged on the top end face of the sample container, and the blocking grooves are symmetrically arranged in 4-6 groups.

[0015] As a further description of the above technical scheme, the blocking groove ring is arranged on the top end face of the sample container, and the blocking grooves are symmetrically arranged in 4-6 groups.

[0016] As a further description of the above technical scheme, the blocking groove ring is arranged on the top end face of the sample container, and the blocking grooves are symmetrically arranged in 4-6 groups.

[0017] The beneficial effects of the present application are as follows:

[0018] The liquid container containing stripping liquid is placed in the water bath, the stirrer and the sample container containing development samples are placed in the liquid container, and the water bath is heated and stirred by the stirrer; the sample container is provided with multiple layers of blocking, multiple samples can be placed and tested at the same time, the structure is simple, the operation is convenient, and the development efficiency of wet electronic chemical stripping liquid can be effectively improved.

[0019] To more clearly illustrate the structural features and effects of the present application, the present application will be described in detail below with reference to the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a structural schematic view of the stripping liquid test device for wet electronic chemicals;

[0021] Figure 2 is Figure 1 a structural schematic view of the sample container in the present application;

[0022] Figure 3 is Figure 1 a front view of the sample container in the present application;

[0023] Figure 4 is Figure 1 a top view of the sample container in the present application; Figure 1

[0024] Figure 5 is Figure 1 a top view of the sample container in the present application;​Figure 2 .

[0025] Reference signs:

[0026] 1, water bath; 2, liquid containing beaker; 3, sample containing basket; 31, holding rod; 32, sample containing basket; 321, blocking groove; 322, threaded groove; 323, flow groove; 324, containing cavity; 4, stirrer; 5, driving base; 51, control button. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model more clear, the technical scheme in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model.

[0028] As Figures 1-5 shown, in one embodiment, a stripping solution testing device for wet electronic chemicals comprises a water bath 1, a liquid containing beaker 2, a sample containing basket 3 and a stirrer 4.

[0029] It can be understood that, in the experiment, the liquid containing beaker 2 containing the stripping solution is first placed in the water bath 1, then the stirrer 4 and the sample containing basket 3 containing the development sample are placed in the liquid containing beaker 2, and then heated by the water bath 1 and stirred by the stirrer 4.

[0030] It needs to be explained in detail that the water bath 1 is provided with a driving base 5 at the bottom, and the inside is provided with a heating device and a driving coil (as prior art, not shown in the figure), and the driving base 5 is provided with a control button 51, which can set the heating temperature of the water bath 1 and the stirring speed of the stirrer 4 in the experiment through the control button 51, and then the sample (such as wafer) is subjected to stripping experiment under different conditions.

[0031] Please continue to refer to Figures 1-5 In the embodiment, the sample containing basket 3 comprises a holding rod 31 and a sample containing basket 32, and the holding rod 31 and the sample containing basket 32 are detachably connected. Specifically, the sample containing basket 32 is provided with a threaded groove 322 at the top, and the holding rod 31 is correspondingly provided with an external thread at the bottom. Before the experiment, the holding rod 31 can be rotated to be screwed with the sample containing basket 32 through the threaded groove 322, which not only ensures the connection strength, but also enables the experimenter to easily assemble or disassemble the holding rod 31 and the sample containing basket 32.

[0032] Further, the sample containing basket 3 is provided with a plurality of blocking grooves 321 for containing the samples to be tested. Specifically, the blocking grooves 321 are provided on the top end surface of the sample containing basket 32, and 4-6 groups of the blocking grooves 321 are symmetrically and equidistantly arranged. In addition, a flow groove 323 is further arranged below the blocking grooves 321, and 4-6 groups of the flow grooves 323 are symmetrically and equidistantly arranged. It can be understood that when the experiment is performed, the upper blocking grooves 321 can position and separate the samples placed therein, so as to ensure that the multiple samples do not interfere with each other. The lower flow grooves 323 can promote the uniform flow of the stripping liquid around the samples, so that each sample can be fully and uniformly contacted with the stripping liquid.

[0033] Further, the bottom of the sample containing basket 3 is hollow, so that the inside thereof can be used for placing the stirrer 4. Specifically, the bottom of the sample containing basket 32 is provided with a containing cavity 324, and the side wall of the containing cavity 324 is perpendicular to the top end surface of the sample containing basket 32. Meanwhile, the stirrer 4 is arranged in the containing cavity 324, and the stirrer 4 is a magnetic stirrer. The magnetic stirrer can rotate at a high speed under the action of an external magnetic field, thereby producing a stirring effect on the surrounding stripping liquid.

[0034] The liquid containing beaker 2 containing the stripping liquid is placed in the water bath kettle 1, the stirrer 4 and the sample containing basket 3 containing the development samples are placed in the liquid containing beaker 2, and the water bath kettle 1 is heated and the stirrer 4 is stirred. The sample containing basket 3 is provided with a plurality of blocking grooves, and a plurality of samples can be placed simultaneously for testing. The structure is simple, the operation is convenient, and the efficiency of the development of the wet electronic chemical stripping liquid can be effectively improved.

[0035] Specifically, the materials of the sample containing basket 3 and the stirrer 4 are polytetrafluoroethylene (PTFE), which has good corrosion resistance and can be suitable for the development of various wet electronic chemicals. The material of the liquid containing beaker 2 is glass, and the transparent material is convenient for the experimenter to observe the experimental process in real time.

[0036] Specifically, the water bath kettle 1 is used to provide a constant temperature environment, the capacity thereof is 5L, the temperature control range is 20-90℃, and the temperature control accuracy is ±0.5℃. The liquid containing beaker 2 is used to contain the stripping liquid and is placed in the water bath kettle 1, and the capacity thereof is 1000mL. The sample containing basket 3 is used to contain the development samples (such as wafers) and is placed in the liquid containing beaker 2, and the size thereof is 80mm in diameter and 100mm in height. The sample containing basket 3 is provided with 4 or 5 groups of blocking grooves 321 (as shown in Figure 4 and Figure 5 ), and each layer of the blocking grooves 321 can place 8 / 10 development samples for simultaneous testing. The stirrer 4 is used to stir the stripping liquid in the beaker, and the rotating speed range thereof is 0-1000r / min, and the rotating speed accuracy thereof is ±10r / min.

[0037] Working principle:

[0038] First, pour the stripping liquid into the beaker, then put the assembled sample basket 3 into the liquid containing beaker 2, and put the development sample into the grid slot 321 of the sample basket 3; second, turn on the water bath 1, set the corresponding experimental temperature by driving the control button 51 on the base 5, so that the stripping liquid gradually warms up to the preset temperature; then turn on the stirrer 4, set the corresponding speed by driving the control button 51 on the base 5, so that the stripping liquid is fully stirred; then observe the test process in real time through the transparent liquid containing beaker 2 and record the test data correspondingly; finally, when the test is completed, turn off the water bath 1 and the stirrer 4, take out the liquid containing beaker 2, the sample basket 3 and the development sample, and clean the liquid containing beaker 2 and the sample basket 3 for standby.

[0039] Through the above technical scheme, the water bath 1 has accurate temperature control, and the speed of the stirrer 4 is adjustable, which can meet the needs of different test conditions, and the sample basket 3 is provided with multiple grid slots 321, so that multiple samples can be placed and tested at the same time; the device has simple overall structure and convenient operation, and can effectively improve the experimental efficiency of wet electronic chemical stripping liquid research and development (such as photoresist stripping liquid, metal stripping liquid, etc.).

[0040] The above description of disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A test apparatus for stripping solutions used in wet electronic chemicals, characterized in that, Include: A water bath (1) is placed inside a liquid containing beaker (2), which is used to contain the stripping liquid, and a sample containing basket (3) is placed inside the liquid containing beaker (2), which is used to contain the sample. The sample containing basket (3) is provided with a blocking groove (321), the bottom of the sample containing basket (3) is hollow, and the bottom of the sample containing basket (3) is provided with a stirrer (4) for stirring the glass liquid.

2. The wet electronic chemical peeling solution testing device according to claim 1, characterized by The material of the sample containing basket (3) is polytetrafluoroethylene, and the material of the liquid containing beaker (2) is glass.

3. The peeling solution test device for wet electronic chemicals according to claim 2, characterized by The sample containing basket (3) includes a holding rod (31) and a sample containing basket (32), and the holding rod (31) and the sample containing basket (32) are detachably connected.

4. The peeling solution test device for wet electronic chemicals according to claim 3, characterized by The top of the sample containing basket (32) is provided with a threaded groove (322), and the bottom of the holding rod (31) is threadedly connected with the sample containing basket (32) through the threaded groove (322).

5. The wet electronic chemical peeling solution testing device according to claim 1, characterized by The blocking groove (321) is arranged on the top end surface of the sample containing basket (32), and 4-6 groups of the blocking groove (321) are symmetrically arranged.

6. The peeling solution test device for wet electronic chemicals according to claim 5, characterized by The flow channel (323) is arranged below the blocking groove (321), and 4-6 groups of the flow channel (323) are symmetrically arranged.

7. The peeling solution test device for wet electronic chemicals according to claim 5, characterized by The bottom of the sample containing basket (32) is provided with a containing cavity (324), and the side wall of the containing cavity (324) is perpendicular to the top end surface of the sample containing basket (32).

8. The wet electronic chemical peeling solution testing device according to claim 7, characterized by The stirrer (4) is arranged in the containing cavity (324), and the stirrer (4) is a magnetic stirrer.

9. The wet electronic chemical peeling solution testing device according to claim 8, characterized by The outer material of the stirrer (4) is polytetrafluoroethylene.

10. The wet electronic chemical peeling solution testing device according to claim 1, characterized by The bottom of the water bath (1) is provided with a driving base (5), and the driving base (5) is provided with a control button (51).

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