High-power UV lamp assembly and high-power UV curing equipment

Abstract

The utility model relates to the technical field of semiconductor preparation, and discloses a high-power UV lamp assembly which comprises a UV lamp shell, a gas containing device and a controller. Wherein a UV lamp and a temperature sensor are arranged in the UV lamp shell; the gas containing device communicates with one side of the UV lamp shell and communicates with the other side of the UV lamp shell through an air duct, and a power source is arranged in the air duct. The temperature sensor and the power source are electrically connected with the controller. The utility model further discloses high-power UV curing equipment which comprises the high-power UV lamp assembly. According to the high-power UV lamp assembly and the high-power UV curing equipment provided by the utility model, gas flows in the UV lamp shell, the gas accommodating device and the air duct in sequence under the action of the power source, so that the temperature near a UV lamp can be reduced in time, and the surface temperature of a UV lamp tube is prevented from continuously rising; nitrogen can be introduced into the UV lamp shell 1, and the amount of generated ozone is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fabrication technology, and in particular to a high-power UV lamp assembly and a high-power UV curing device. Background Technology

[0002] In semiconductor manufacturing, many processes require the use of UV adhesives for curing and bonding. The curing process of UV adhesives is controlled by light irradiation. Due to the high power and large heat generation of the high-energy lamps (such as UV lamps), the UV lamps are surrounded between a reflector and quartz glass. During the operation of the UV lamps, the temperature will continue to rise. If they cannot be cooled in time, the surface temperature of the UV lamp tube will continue to rise, the lamp tube material will age, the UV radiation energy will be reduced, and the service life will be shortened. In particular, high-power UV lamps require cooling treatment. However, the existing cooling devices have low cooling efficiency for high-power UV lamps and cannot meet the actual needs.

[0003] Therefore, there is an urgent need for a high-power UV lamp assembly to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this invention is to propose a high-power UV lamp assembly that can solve the problem that existing cooling devices have low cooling efficiency for high-power UV lamps and cannot meet practical needs.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A high-power UV lamp assembly, comprising

[0007] UV lamp housing, wherein a UV lamp and a temperature sensor are installed inside the UV lamp housing;

[0008] A gas containment device is connected to one side of the UV lamp housing. The gas containment device is connected to the other side of the UV lamp housing through an air duct. A power source is provided in the air duct. The power source is used to drive the gas to circulate sequentially inside the UV lamp housing, the gas containment device, and the air duct.

[0009] The controller, the temperature sensor and the power source are electrically connected to the controller respectively.

[0010] As an alternative, a cooling device is included, which is connected to the air duct and is used to cool the gas flowing in the air duct.

[0011] As an alternative, the cooling device includes a housing and a first pipe disposed inside the housing, the first pipe being connected to a refrigeration device via a pipeline.

[0012] As an optional solution, the inside of the enclosure is equipped with heat sinks that are connected to the first pipeline.

[0013] As an alternative, the gas containing device is connected to a nitrogen source via a second pipeline, the second pipeline being equipped with a solenoid valve, which is electrically connected to the controller.

[0014] As an optional solution, an ozone sensor is provided inside the UV lamp housing, and the ozone sensor is electrically connected to the controller.

[0015] As an alternative, the gas containment device is connected to the waste gas treatment device via a third pipeline.

[0016] As an alternative, the exhaust gas treatment device is a gas impurity filter and / or an activated carbon filter.

[0017] This application also provides a high-power UV curing device, including the aforementioned high-power UV lamp assembly.

[0018] This utility model has at least the following beneficial effects:

[0019] This utility model provides a high-power UV lamp assembly. Under the action of a power source, gas flows sequentially within the UV lamp housing, gas containment device, and air duct, thereby promptly reducing the temperature near the UV lamp and preventing the surface temperature of the UV lamp tube from continuously rising. The UV lamp housing, gas containment device, and air duct form a relatively closed gas flow channel, which effectively prevents the generated harmful gases from escaping into the external environment and causing pollution. Nitrogen gas can be introduced into the UV lamp housing 1 to reduce the amount of ozone generated. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments of this utility model will be briefly introduced below.

[0021] Figure 1 A schematic diagram of a high-power UV lamp assembly at a first angle provided in an embodiment of this utility model;

[0022] Figure 2 This is a structural schematic diagram of a high-power UV lamp assembly from a second angle, provided as an embodiment of the present invention.

[0023] Figure label:

[0024] 1. UV lamp housing; 2. Gas containment device; 3. Air duct; 4. Cooling device; 5. Refrigeration equipment; 6. Cooling pipe; 7. Second pipeline; 8. Third pipeline; 81. Gas impurity filter; 82. Activated carbon filter. Detailed Implementation

[0025] In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0026] In the existing technology, high-energy lamps (such as UV lamps) have high power and generate a lot of heat. The UV lamp is surrounded between a reflector and quartz glass. During the operation of the UV lamp, the temperature will continue to rise. If it cannot be cooled in time, the surface temperature of the UV lamp tube will continue to rise, the lamp tube material will age, the UV radiation energy will be reduced, and the service life will be shortened. In particular, high-power UV lamps need to be cooled. However, the existing cooling devices have low cooling efficiency for high-power UV lamps and cannot meet the actual needs.

[0027] Therefore, such as Figures 1 to 2 As shown, an embodiment of this utility model provides a high-power UV lamp assembly to solve the above-mentioned technical problems.

[0028] Specifically, a high-power UV lamp assembly includes a UV lamp housing 1, a gas containing device 2, and a controller. The UV lamp housing 1 is at least partially transparent to ultraviolet light, and contains a UV lamp and a temperature sensor. The gas containing device 2 is connected to one side of the UV lamp housing 1 and to the other side of the UV lamp housing 1 via a duct 3. The UV lamp housing 1, the gas containing device 2, and the duct 3 form a relatively closed gas flow channel. A power source is located within the duct 3, which drives the gas to circulate sequentially within the UV lamp housing 1, the gas containing device 2, and the duct 3. The temperature sensor and the power source are electrically connected to the controller. The temperature sensor detects and transmits the temperature information to the controller. When the temperature sensor detects that the temperature inside the UV lamp housing 1 reaches a certain threshold (e.g., 50 degrees Celsius), the controller activates the power source. Under the action of the power source, gas flows sequentially within the UV lamp housing 1, the gas container 2, and the air duct 3, thereby promptly reducing the temperature near the UV lamp and preventing the surface temperature of the UV lamp tube from continuously rising. The UV lamp housing 1, the gas container 2, and the air duct 3 form a relatively closed gas flow channel, effectively preventing harmful gases from being released into the external environment and causing pollution. The power source can be a fan, and the controller can be a PLC controller.

[0029] In some embodiments, as the gas flows sequentially through the UV lamp housing 1, the gas containing device 2, and the air duct 3, the UV lamp continuously heats the gas, thereby reducing the gas's cooling effect on the UV lamp. Therefore, in order to reduce the temperature of the gas in the relatively enclosed gas flow channel formed by the UV lamp housing 1, the gas containing device 2, and the air duct 3, this application further includes a cooling device 4. The cooling device 4 is connected to the air duct 3, and when the gas flows through the air duct 3, the cooling device 4 cools the gas flowing in the cooling air duct 3.

[0030] In some embodiments, in order to facilitate the connection of the cooling device 4 to the air duct 3, the cooling device 4 includes a housing and a first pipe disposed inside the housing. The first pipe is connected to the refrigeration equipment 5 through a cooling pipe 6. The cooling pipe 6 includes an inlet pipe and an outlet pipe. The refrigeration equipment 5 contains a refrigerant. The refrigeration equipment 5 can condense the refrigerant and drive the refrigerant to flow in the cooling pipe 6 and the first pipe, thereby cooling the gas in the air duct 3.

[0031] In some embodiments, to improve the cooling effect of the cooling device 4 on the gas in the air duct 3, the housing is provided with heat sinks that are connected to the first pipeline.

[0032] In some embodiments, to further improve the cooling efficiency of the gas inside the UV lamp housing 1, the gas containing device 2 is connected to a nitrogen source through a second pipe 7. The second pipe 7 is equipped with a solenoid valve, which is electrically connected to the controller. When the temperature sensor detects that the temperature inside the UV lamp housing 1 reaches a certain threshold (e.g., 60 degrees Celsius), the controller controls the solenoid valve to open. Nitrogen from the nitrogen source flows into the UV lamp housing 1 through the second pipe 7 and the gas containing device 2 in sequence to cool the UV lamp. Of course, the nitrogen temperature at the nitrogen source is relatively low (e.g., below 0 degrees Celsius).

[0033] In some embodiments, the gas inside the UV lamp housing 1 generates ozone under the irradiation of the UV lamp. To prevent ozone from polluting the surrounding environment, an ozone sensor is installed inside the UV lamp housing 1. The ozone sensor is electrically connected to the controller. The ozone sensor transmits the detected ozone concentration value to the controller. When the ozone concentration value reaches a certain threshold (e.g., 0.15 ppm), the controller controls the solenoid valve to open. Nitrogen gas from the nitrogen source flows into the UV lamp housing 1 through the second pipe 7 and the gas container 2 in sequence. In this way, the addition of nitrogen gas to the UV lamp housing 1 can effectively reduce the probability of contact between oxygen and UV light, thereby reducing the generation of ozone.

[0034] In some embodiments, since nitrogen is introduced into the gas containing device 2, in order to keep the gas pressure in the gas containing device 2 relatively stable, it is necessary to discharge some of the gas in the gas containing device 2 into the surrounding environment. In order to avoid pollution of the surrounding environment caused by the discharge, the gas containing device 2 is connected to the waste gas treatment device through the third pipeline 8. After the gas is treated by the waste gas treatment device, it is discharged into the surrounding environment.

[0035] In some embodiments, to reduce the manufacturing cost of producing the high-power UV lamp assembly of this application, the exhaust gas treatment device is preferably a gas impurity filter 81 or an activated carbon filter 82, or a combination of both.

[0036] This application also provides a high-power UV curing device, including a high-power UV lamp assembly.

[0037] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A high-power UV lamp assembly, characterized by, The utility model relates to a high-power UV lamp assembly, which comprises a UV lamp housing (1) internally provided with a UV lamp and a temperature sensor; a gas containing device (2) connected with one side of the UV lamp housing (1); a wind channel (3) connected with the other side of the UV lamp housing (1) and internally provided with a power source for driving the gas to flow in the UV lamp housing (1), the gas containing device (2) and the wind channel (3) in turn; and a controller electrically connected with the temperature sensor and the power source respectively. The utility model further comprises a cooling device (4) connected with the wind channel (3) and used for cooling the gas flowing in the wind channel (3). The cooling device (4) comprises a box body and a first pipeline provided in the box body and connected with a refrigeration device (5) through a pipeline. The box body is internally provided with a heat dissipation fin connected with the first pipeline.

2. A high-power UV lamp assembly according to claim 1, characterized in that The gas containing device (2) is connected with a nitrogen gas source through a second pipeline (7) provided with a solenoid valve electrically connected with the controller.

3. A high-power UV lamp assembly according to claim 2, characterized in that The UV lamp housing (1) is internally provided with an ozone sensor electrically connected with the controller.

4. A high-power UV lamp assembly according to claim 3, characterized in that The gas containing device (2) is connected with a waste gas treatment device through a third pipeline (8).

5. A high power UV lamp assembly according to any one of claims 1 to 4, wherein The waste gas treatment device is a gas impurity filter (81) and / or an activated carbon filter (82).

6. A high-power UV lamp assembly according to claim 5, wherein, The utility model further comprises a high-power UV lamp assembly according to any one of claims 1 to 8.

7. A high power UV lamp assembly according to any one of claims 1 to 4, characterized in that ​ 8. A high-power UV lamp assembly according to claim 7, characterized in that ​ 9. A high-power UV curing apparatus characterized by comprising: ​

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