Adjustable external limiting type coil support and radio frequency impedance matcher

Abstract

The utility model provides an adjustable external limitation type coil support and a radio frequency impedance matcher. The adjustable external limiting type coil support is used for fixing a coil, the coil comprises a coil body extending spirally, and the adjustable external limiting type coil support comprises a first main support, a second main support and a plurality of auxiliary supports arranged in pairs. The first main bracket and the second main bracket are spaced apart in an axial direction of the coil body. The auxiliary supports are connected between the first main support and the second main support, the distance between each pair of auxiliary supports is configured to be adjustable, so that the auxiliary supports can support coil bodies with different diameters, the auxiliary supports are provided with a plurality of fixing teeth extending towards the coil, and after the distance between the auxiliary supports is adjusted, the coil bodies can be supported by the fixing teeth. And a plurality of single turns of the coil main body can respectively extend into the fixing grooves among the fixing teeth, so that the coil is fixed by the coil bracket.

Description

Technical Field

[0001] This application relates to the field of coil mounting bracket technology, and more particularly to adjustable externally confined coil brackets and radio frequency impedance matching devices. Background Technology

[0002] In semiconductor technology, radio frequency (RF) impedance matching devices are widely used, and their placement on equipment varies. For example, some are fixed to the equipment, while others rotate with the mechanism. The coil inductor in an RF impedance matching device is a crucial component. During operation, the coil inductor must not fluctuate significantly; therefore, during the development of the RF impedance matching device structure, the coil inductor needs to be fixed in place using a support frame.

[0003] The supports for coil inductors can be broadly categorized into two types: internal support and external constraint. Internal support refers to the coil inductor being fitted onto an internal support, which expands outward to shape the inductor. External constraint refers to the coil inductor being located inside the support, with the frame within the support pressing inward to shape the coil inductor.

[0004] The bracket clamps the coil inductor at various individual points, placing high demands on the coil inductor's shape. A single RF impedance matching circuit typically uses two (or more) coil inductors that differ only in diameter. However, existing brackets have poor compatibility, requiring the development of brackets specifically for each coil, resulting in numerous and disorganized structural components.

[0005] Therefore, there is an urgent need to develop a coil support that can adjust the internal space to accommodate various diameter requirements. Utility Model Content

[0006] This application discloses an adjustable externally confined coil support and an RF impedance matching device for solving or mitigating at least one of the technical problems mentioned in the background art.

[0007] In a first aspect, the adjustable external limiting coil bracket provided in this application is used to fix a coil, the coil including a spirally extending coil body, the adjustable external limiting coil bracket including: a first main bracket and a second main bracket, the first main bracket and the second main bracket being spaced apart axially in the coil body; a plurality of paired auxiliary brackets, the auxiliary brackets being connected between the first main bracket and the second main bracket, and the distance between each pair of auxiliary brackets being configured to be adjustable, so that the auxiliary brackets can support coil bodies of different diameters, the auxiliary brackets being provided with a plurality of fixing teeth extending toward the coil, so that after adjusting the distance between the auxiliary brackets, a plurality of single turns of the coil body can respectively extend into the fixing grooves between the fixing teeth, so that the coil is fixed by the coil bracket.

[0008] This application designs the auxiliary support as a movable structure, enabling the coil support to accommodate coils of different diameters, achieving multi-purpose functionality and enhanced compatibility. In applications such as RF impedance matching devices that require fixing multiple coil inductors of different diameters, this reduces structural complexity and lowers costs.

[0009] In one possible implementation, the auxiliary support includes: a fixed support, fixedly disposed between the first main support and the second main support; and a sliding support, wherein the first main support and the second main support are each provided with a sliding groove, and both ends of the sliding support are slidably disposed in the sliding groove, with the sliding direction being towards or away from the fixed support. The sliding design of the sliding support facilitates adjustment of its position, allowing the coil support to be compatible with coils of different diameters and providing convenient adjustment.

[0010] In one possible implementation, the auxiliary support includes a first adjusting bracket and a second adjusting bracket, both connected between a first main bracket and a second main bracket. The distance between the first and second adjusting brackets is configured to be adjustable. On a cross-section perpendicular to the axial direction of the adjustable outer limiting coil bracket, the line connecting the first and second adjusting brackets is perpendicular to the line connecting the fixed bracket and the sliding bracket. This allows the coil's position to be limited in multiple directions, preventing radial movement of the coil.

[0011] In one possible implementation, the first main support has a first main support groove and a second main support groove, and the second main support has a second main support groove and a second main support groove. Both ends of the first adjusting bracket can be simultaneously connected to the first main support groove and the second main support groove, or simultaneously connected to the first main support groove and the second main support groove. The shortest distance between the axis of the first main support groove and the axis of the coil that the first adjusting bracket abuts is installed therein is A, and the shortest distance between the axis of the first main support groove and the axis of the coil that the first adjusting bracket abuts is installed therein is B, where B < A. Therefore, by switching the installation position of the first adjusting bracket, coils of different diameters can be fixed accordingly.

[0012] In one possible implementation, the end of the first adjusting bracket abuts against either the first groove or the second groove of the first main bracket, where the depth of the first groove is C and the depth of the second groove is D, where C < D. This application directly sets the depths of the first and second grooves of the first main bracket to be different, allowing the same first adjusting bracket to adjust its axial position after changing the radial mounting position of the coil, facilitating engagement between the coil and the fixing groove. Therefore, one first adjusting bracket can accommodate multiple mounting positions, reducing the number of parts.

[0013] In one possible implementation, the first main support is provided with a first main support groove A for mounting one end of the first adjusting support and a first main support groove B for mounting one end of the second adjusting support. In the cross-section, the positions of the first main support groove A and the first main support groove B are symmetrical about the line connecting the fixed support and the sliding support, so that the installation height of the first adjusting support and the second adjusting support can be the same, which facilitates installation.

[0014] In one possible implementation, the second main bracket is provided with a second main bracket A groove for mounting the other end of the first adjusting bracket and a second main bracket B groove for mounting the other end of the second adjusting bracket. In the cross-section, the positions of the second main bracket A groove and the second main bracket B groove are symmetrical about the line connecting the fixed bracket and the sliding bracket. The depth of the first main bracket A groove is E, and the depth of the second main bracket A groove is F, where E < F. The depth of the first main bracket B groove is G, and the depth of the second main bracket B groove is H, where H < G, and E + F = G + H. This application sets the depths of the axially opposite grooves on the two brackets to be complementary, allowing the two adjusting brackets to have an axial positional difference after installation. Therefore, the first adjusting bracket and the second adjusting bracket can be identical, reducing the complexity of the parts.

[0015] Secondly, the RF impedance matching device provided in this application includes an adjustable externally constrained coil support and a coil inductor as described above, wherein the coil inductor is fixed within the adjustable externally constrained coil support. This application configures the auxiliary support as a movable structure, enabling the coil support to accommodate coils of different diameters, achieving multi-purpose functionality and enhanced compatibility. In applications such as RF impedance matching devices that require fixing multiple coil inductors of different diameters, this reduces structural complexity and lowers costs.

[0016] In one possible implementation, the coil inductor abuts against the fixed bracket and the sliding bracket, and the coil inductor also abuts against at least one of the first adjusting bracket and the second adjusting bracket. Even when the coil inductor is skewed or its shape is not an ideal spiral, its position can be fixed using only three auxiliary brackets, thus the requirements for the coil inductor's shape and position are not stringent.

[0017] In one possible implementation, in a pair of auxiliary supports, the coil inductor abuts against the groove wall on one axial side of the fixing slot on one auxiliary support, and the coil inductor abuts against the groove wall on the other axial side of the fixing slot on the other auxiliary support. This implementation provides a more secure fixation between the coil inductor and the fixing slot compared to a loosely inserted coil. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is an exploded view of an adjustable externally confined coil support according to an embodiment of this application.

[0020] Figure 2 This is a front view of an adjustable externally restricted coil support according to an embodiment of this application.

[0021] Figure 3 A side view of the first main support of the adjustable externally restricted coil support according to an embodiment of this application, showing its inner side.

[0022] Figure 4 A side view of the second main support of the adjustable externally restricted coil support according to an embodiment of this application shows its outer side.

[0023] Explanation of reference numerals in the attached figures:

[0024] 10 coils;

[0025] 101. Coil body;

[0026] 1011 Single turn;

[0027] 102 Connecting part;

[0028] 20 Coil Holder

[0029] 201 First main support;

[0030] 2011 First groove of the first main support; 2012 Second groove of the first main support; 2013 Groove A of the first main support; 2014 Groove B of the first main support;

[0031] 202 Second main support;

[0032] 2021 Second main support, first groove; 2022 Second main support, second groove; 2023 Second main support, groove A; 2024 Second main support, groove B;

[0033] 211 Fixed teeth;

[0034] 212 Fixing slot;

[0035] 2121 Tank wall;

[0036] 213 Slide;

[0037] 221 Fixed bracket;

[0038] 222 Sliding bracket;

[0039] 231 First adjustment bracket;

[0040] 232 Second adjustment bracket. Detailed Implementation

[0041] The embodiments of this application are described below with reference to the accompanying drawings.

[0042] For ease of understanding, the relevant technical terms involved in the embodiments of this application will be explained and described below.

[0043] It should be understood that the described embodiments are merely some, not all, of the embodiments in this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

[0044] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0045] It should be understood that the term "and / or" used in this document is merely a description of the same field in the related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0046] Depending on the context, the word "if" as used here can be interpreted as "when," "when," "in response to determination," or "in response to detection." Similarly, depending on the context, the phrase "if determination" or "if detection (of the stated condition or event)" can be interpreted as "when determination," "in response to determination," "when detection (of the stated condition or event)," or "in response to detection (of the stated condition or event)."

[0047] It should be understood that the terms "first," "second," etc., used in this application are for distinguishing purposes only and should not be construed as indicating or implying relative importance or order.

[0048] In the description of this application, the terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0049] The phrase "within the range" used in this application, unless otherwise specified, includes both endpoints of the range by default. For example, in the range of 1 to 5, it includes the values ​​1 and 5.

[0050] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation", "connection" and "joining" should be interpreted broadly, for example, they can be fixed connections, detachable connections, mating connections or integral connections; those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0051] RF power supplies experience power loss during transmission. RF impedance matching couplers couple energy from a high-power RF power supply to a load, such as a reaction chamber. The load is a variable impedance that changes with the operation of the chamber. The RF impedance matching coupler automatically detects these load changes and adjusts internal tuning elements (variable capacitors and inductors, etc.) to achieve impedance matching between the load and the RF power supply, maximizing the power output of the chamber while minimizing the power reflected back to the RF power supply. RF impedance matching couplers can be used in ICP / CCP (Inductively Coupled Plasma / Capacitively Coupled Plasma) chambers, or in processes such as ETCH (Etching), CVD (Chemical Vapor Deposition), and PVD (Physical Vapor Deposition).

[0052] This application provides an adjustable externally constrained coil holder (hereinafter, sometimes referred to as "coil holder") and an RF impedance matching device.

[0053] See Figure 1 An adjustable external limiting coil bracket 20 can be used to fix the coil 10. The coil 10 can be a coil inductor or other types of coil. The coil 10 may include a spirally extending coil body 101, which is shaped like a spring. The coil 10 may also include connecting portions 102 at both ends of the coil body 101 for connecting to other components.

[0054] The adjustable external limiting coil support 20 may include a first main support 201, a second main support 202 and a plurality of paired auxiliary supports (e.g., fixed support 221, sliding support 222, first adjusting support 231 and second adjusting support 232).

[0055] The first main support 201 and the second main support 202 can be separated axially from the coil body 101.

[0056] Multiple pairs of auxiliary supports are connected between the first main support 201 and the second main support 202, and the distance between each pair of auxiliary supports is adjustable. Multiple fixing teeth 211 extending toward the coil 10 can be provided on the auxiliary supports, so that after adjusting the distance between the auxiliary supports, multiple single turns 1011 (single-turn coils) of the coil body 101 can respectively extend into the fixing grooves 212 between the fixing teeth 211, thereby fixing the coil 10 to the coil support 20. Exemplarily, the coil 10 can abut against the auxiliary support in its radial direction and against the groove wall 2121 of the fixing groove 212 in its axial direction.

[0057] This application designs the auxiliary support as a movable structure, enabling the coil support 20 to accommodate coils 10 of different diameters, achieving multi-purpose functionality and enhanced compatibility. Consequently, in applications such as RF impedance matching devices that require fixing multiple coil inductors of different diameters, the complexity of the structural components can be reduced, resulting in lower costs.

[0058] In one embodiment, the auxiliary support may include a fixed support 221 and a sliding support 222. The fixed support 221 is fixedly disposed between the first main support 201 and the second main support 202. The first main support 201 and the second main support 202 are respectively provided with sliding grooves 213, and the two ends of the sliding support 222 are respectively slidably disposed in the sliding grooves 213, and the sliding direction is towards or away from the fixed support 221.

[0059] For example, the coil 10 can be first engaged with the fixing slot 212 on the fixing bracket 221, and the single turn 1011 can be inserted into the fixing slot 212 of the fixing bracket 221. Then the sliding bracket 222 can be slid so that the sliding bracket 222 abuts against the coil 10, and the single turn 1011 can also be inserted into the fixing slot 212 of the sliding bracket 222.

[0060] It is understandable that the sliding design of the sliding bracket 222 facilitates the adjustment of its position, allowing the coil bracket 20 to be compatible with coils 10 of different diameters and making adjustment convenient. After the coil 10 is installed, the sliding bracket 222 can be fixedly installed on the first main bracket 201 and the second main bracket 202 using bolts or other fasteners.

[0061] Of course, this application does not limit the usage posture of the coil 10 after the coil bracket 20 fixes it. For example, as Figure 1 As shown, the coil support 20 can be used in a horizontal position, with the axis of the coil body 101 parallel to the horizontal plane. Alternatively, the coil support 20 can be used in a vertical position (not shown in the figure), with the axis of the coil body 101 perpendicular to the horizontal plane.

[0062] In one embodiment, the auxiliary support may include a first adjusting support 231 and a second adjusting support 232. The first adjusting support 231 and the second adjusting support 232 are both connected between the first main support 201 and the second main support 202, and the distance between the first adjusting support 231 and the second adjusting support 232 is configured to be adjustable.

[0063] On the cross-section perpendicular to the axial direction of the adjustable external limiting coil bracket 20, the line connecting the first adjusting bracket 231 and the second adjusting bracket 232 is perpendicular to the line connecting the fixed bracket 221 and the sliding bracket 222. Therefore, the position of the coil 10 can be limited in multiple directions, preventing radial movement of the coil 10.

[0064] In one implementation, see Figure 3 The first main support 201 is provided with a first main support first groove 2011 and a first main support second groove 2012. The second main support 202 is provided with a second main support first groove 2021 and a second main support second groove 2022.

[0065] The two ends of the first adjusting bracket 231 can be simultaneously connected to the first groove 2011 of the first main bracket and the first groove 2021 of the second main bracket, or simultaneously connected to the second groove 2012 of the first main bracket and the second groove 2022 of the second main bracket.

[0066] The shortest distance between the axis of the first groove 2011 of the first main bracket and the axis of the coil 10 that abuts against the first adjusting bracket 231 installed therein is A.

[0067] The shortest distance between the axis of the second groove 2012 of the first main bracket and the axis of the coil 10 that abuts against the first adjusting bracket 231 installed therein is B, where B < A.

[0068] It can be understood that when the first adjusting bracket 231 is connected to the first groove 2011 of the first main bracket and the first groove 2021 of the second main bracket, it can accommodate a coil 10 with a larger diameter. When the first adjusting bracket 231 is connected to the second groove 2012 of the first main bracket and the second groove 2022 of the second main bracket, it can accommodate a coil 10 with a smaller diameter. That is, by switching the installation position of the first adjusting bracket 231, coils 10 of different diameters can be fixed.

[0069] Of course, this application does not limit the number of grooves on the first main support 201 that connect to the first adjusting support 231. Figure 3 Three recessed positions are shown for mounting the first adjustment bracket 231, allowing the coil bracket 20 to accommodate coils 10 of three different diameters.

[0070] In one implementation, see Figure 1 The end of the first adjusting bracket 231 can abut against the first groove 2011 or the second groove 2012 of the first main bracket. The depth of the first groove 2011 of the first main bracket is C, and the depth of the second groove 2012 of the first main bracket is D, where C < D. It should be understood that the end of the adjusting bracket abuts against the groove (bottom of the groove), and the groove depth is approximately equal to the axial insertion depth of the adjusting bracket into the groove.

[0071] This application makes the inner groove deeper, which means that when the first adjusting bracket 231 switches from the first groove 2011 of the first main bracket to the second groove 2012 of the first main bracket, the axial position will change synchronously.

[0072] It should be understood that when the diameter of coil 10 changes, while the number of turns and the turn spacing remain unchanged, and the engagement position of coil 10 with the fixing groove 212 of the fixed bracket 221 and the sliding bracket 222 remains unchanged, the engagement position of coil 10 with the fixing groove 212 of the first adjusting bracket 231 and the second adjusting bracket 232 will change axially. This application directly sets the depths of the first groove 2011 and the second groove 2012 of the first main bracket to be different, so that the same first adjusting bracket 231 can also adjust its position axially after changing the radial installation position of coil 10, which facilitates the engagement of coil 10 with the fixing groove 212. Therefore, one first adjusting bracket 231 can adapt to multiple installation positions, reducing the number of parts.

[0073] In one implementation, see Figure 3The first main support 201 is provided with a first main support groove A 2013 for mounting the first adjusting support 231 at one end and a first main support groove B 2014 for mounting the second adjusting support 232 at the other end. In cross-section, the positions of the first main support groove A 2013 and the first main support groove B 2014 are symmetrical about the line connecting the fixed support 221 and the sliding support 222.

[0074] Therefore, the first adjusting bracket 231 and the second adjusting bracket 232 can be installed at the same height, which facilitates installation.

[0075] It can be understood that the first groove 2011 and the second groove 2012 of the first main support are different installation positions of the first adjusting support 231. The first groove A 2013 and the first groove B 2014 of the first main support are the installation positions of the first adjusting support 231 and the second adjusting support 232, respectively. The first groove 2011 and the first groove A 2013 of the first main support can overlap.

[0076] In one implementation, see Figure 4 The second main support 202 is provided with a second main support groove A 2023 for mounting the other end of the first adjusting support 231 and a second main support groove B 2024 for mounting the other end of the second adjusting support 232. In cross-section, the positions of the second main support groove A 2023 and the second main support groove B 2024 are symmetrical about the line connecting the fixed support 221 and the sliding support 222.

[0077] See Figure 2 The depth of the first main support groove 2013 is E, and the depth of the second main support groove 2023 is F, where E < F.

[0078] In addition, the depth of the first main support groove 2014 is G, and the depth of the second main support groove 2024 is H, where H < G. E + F = G + H.

[0079] It should be understood that the coil body 101 extends spirally, and the portions of the coil body 101 that extend into the first adjusting bracket 231 and the second adjusting bracket 232 are offset in the axial direction. That is, the positions of the single turn 1011 extending into the fixing groove 212 of the first adjusting bracket 231 and the positions of the single turn 1011 extending into the fixing groove 212 of the second adjusting bracket 232 are different in the axial direction.

[0080] This application sets the depths of the grooves on the two brackets to be complementary, so that the two adjusting brackets can form a positional difference in the axial direction after installation. As a result, the first adjusting bracket 231 and the second adjusting bracket 232 can be identical, reducing the complexity of the parts.

[0081] In addition, it should be understood that, besides the aforementioned auxiliary supports, this application may provide more pairs of auxiliary supports, and this application does not limit the specific number of them.

[0082] The auxiliary support can be fixed to the main support using fasteners such as bolts.

[0083] Alternatively, the grooves on the main bracket for mounting the first adjusting bracket 231 and the second adjusting bracket 232 can be replaced with sliding grooves to achieve stepless adjustment of the mounting positions of the first adjusting bracket 231 and the second adjusting bracket 232. Of course, the depth of the corresponding sliding grooves also needs to be adjusted accordingly.

[0084] The first adjusting bracket 231 and the second adjusting bracket 232 can be lower than the height of the axis of the coil 10, and the fixing teeth 211 of the first adjusting bracket 231 and the second adjusting bracket 232 can be tilted towards the coil 10 relative to the horizontal plane.

[0085] Of course, if the auxiliary support is replaced as a whole, the coil support 20 provided in this application can also fix coils 10 with different numbers of turns and turn spacing.

[0086] The radio frequency impedance matching device provided in this application may include the aforementioned adjustable external limiting coil support and coil inductor, wherein the coil inductor is fixed in the adjustable external limiting coil support.

[0087] In one embodiment, the coil inductor may abut against the fixed bracket 221 and the sliding bracket 222, and may also abut against at least one of the first adjusting bracket 231 and the second adjusting bracket 232. Ideally, it could abut against four auxiliary brackets simultaneously. However, if the coil inductor is skewed or its shape is not an ideal spiral, its position can be fixed using only three auxiliary brackets, and the requirements for the coil inductor's shape and position are not stringent. Exemplarily, the number of auxiliary brackets may not be limited to four or an even number; for example, the coil inductor may be fixed using only the sliding bracket 222, the first adjusting bracket 231, and the second adjusting bracket 232.

[0088] In one embodiment, in a pair of auxiliary supports, the coil inductor abuts against one axial side of the groove wall 2121 of the fixing groove 212 on one auxiliary support, and the coil inductor abuts against the other axial side of the groove wall 2121 of the fixing groove 212 on the other auxiliary support. Exemplarily, in Figure 2 In this embodiment, the auxiliary support includes a fixed support 221 and a sliding support 222. The coil inductor abuts against the right side of the groove wall 2121 of the fixed slot 212 of the fixed support 221 and against the left side of the groove wall 2121 of the fixed slot 212 of the sliding support 222. Compared to a loosely inserted coil into the fixed slot, this embodiment provides a more secure fixation between the coil inductor and the fixed slot 212.

[0089] Of course, coil 10 can be a coil inductor or other types of coil 10. Coil bracket 20 can be used not only in RF impedance matching devices, but also in other types of devices that require coil fixation.

[0090] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be included within the protection scope of this application.

Claims

1. An adjustable outer limiting coil holder, characterized by, The application relates to a coil fixing device, which comprises a coil body extending spirally, and an adjustable outer-limit coil support. a first main support and a second main support, which are spaced apart in the axial direction of the coil body; a plurality of pairs of auxiliary supports, which are connected between the first main support and the second main support, and the distance between each pair of the auxiliary supports is adjustable, so that the auxiliary supports can support the coil body with different diameters, and the auxiliary supports are provided with a plurality of fixing teeth extending towards the coil, so that after the distance between the auxiliary supports is adjusted, a plurality of single turns of the coil body can respectively extend into fixing grooves between the fixing teeth, and the coil is fixed by the coil support.

2. The adjustable outer limit profile coil cradle of claim 1, wherein, The auxiliary supports comprise: a fixed support, which is fixedly arranged between the first main support and the second main support; a sliding support, and the first main support and the second main support are respectively provided with sliding grooves, and the two ends of the sliding support are slidingly arranged in the sliding grooves, and the sliding direction is towards or away from the fixed support.

3. The adjustable outer limit profile coil cradle of claim 2, wherein, The auxiliary supports comprise a first adjusting support and a second adjusting support, which are connected between the first main support and the second main support, and the distance between the first adjusting support and the second adjusting support is adjustable, In the cross section of the adjustable outer-limit coil support perpendicular to the axial direction, the connecting direction of the first adjusting support and the second adjusting support is perpendicular to the connecting direction of the fixed support and the sliding support.

4. The adjustable outer limit profile coil cradle of claim 3, wherein, The first main support is provided with a first main support first recess and a first main support second recess, The second main support is provided with a second main support first recess and a second main support second recess, The two ends of the first adjusting support can be simultaneously connected to the first main support first recess and the second main support first recess, or simultaneously connected to the first main support second recess and the second main support second recess, The shortest distance between the axis of the first main support first recess and the axis of the coil abutting the first adjusting support installed therein is A, The shortest distance between the axis of the first main support second recess and the axis of the coil abutting the first adjusting support installed therein is B, and B 5. The adjustable outer limit profile coil cradle of claim 4, wherein, The end of the first adjusting support abuts the first main support first recess or the first main support second recess, The depth of the first main support first recess is C, and the depth of the first main support second recess is D, and C 6. The adjustable outer limit profile coil support of any of claims 3-5, wherein, The first main support is provided with a first main support alpha recess for installing one end of the first adjusting support and a first main support beta recess for installing one end of the second adjusting support, In the cross section, the positions of the first main support alpha recess and the first main support beta recess are symmetrical about the connecting direction of the fixed support and the sliding support.

7. The adjustable outer limit profile coil support of claim 6, wherein, The second main support is provided with a second main support alpha groove for mounting the other end of the first adjusting support and a second main support beta groove for mounting the other end of the second adjusting support, In the cross section, the positions of the second main support alpha groove and the second main support beta groove are symmetrical about the connecting line direction of the fixed support and the sliding support, The depth of the first main support alpha groove is E, and the depth of the second main support alpha groove is F, E The depth of the first main support beta groove is G, and the depth of the second main support beta groove is H, H And E+F=G+H.

8. A radio frequency impedance matcher, characterized by, An adjustable outer-limit type coil support and a coil inductance according to any one of claims 1 to 7 are included, and the coil inductance is fixed in the adjustable outer-limit type coil support.

9. A radio frequency impedance matcher, characterized by, An adjustable outer-limit type coil support and a coil inductance according to any one of claims 3 to 7 are included, and the coil inductance is in contact with the fixed support and the sliding support, and the coil inductance is also in contact with at least one of the first adjusting support and the second adjusting support.

10. The radio frequency impedance matcher of claim 9, wherein, In a pair of auxiliary supports, the coil inductance is in contact with one axial side of the groove wall of the fixed groove on one auxiliary support, and the coil inductance is in contact with the other axial side of the groove wall of the fixed groove on the other auxiliary support.

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