Waste gas treatment device and semiconductor process waste gas treatment system

Abstract

The utility model discloses a waste gas treatment device and a semiconductor process waste gas treatment system, the device comprises a first washing tower and a second washing tower which are connected in series, and circulating water tanks are arranged in the first washing tower and the second washing tower; the circulating water tanks of the first washing tower and the second washing tower are communicated with each other through a communicating pipe, a switch piece for controlling the communicating pipe to be opened or closed is arranged on the communicating pipe, and the switch piece is connected with a switch controller for controlling the switch piece to be opened or closed. The waste gas treatment device is used for solving the problem of waste of washing liquid in the waste gas treatment process.

Description

Technical Field

[0001] This utility model relates to the field of waste gas treatment, and more specifically to waste gas treatment devices and semiconductor process waste gas treatment systems. Background Technology

[0002] A scrubbing tower is a common device for treating industrial waste gas (such as waste gas from semiconductor manufacturing). The scrubbing tower uses a scrubbing liquid (such as water, absorbent liquid, etc.) to contact the waste gas, thereby intercepting the pollutants in the waste gas into the scrubbing liquid, so as to purify the waste gas. The pollutants and the scrubbing liquid are separated and the purified and recovered scrubbing liquid is recycled.

[0003] Exhaust gas treatment systems typically consist of multi-stage scrubbing towers, each with its own scrubbing liquid for its own use. After passing through the preceding scrubbing towers, the exhaust gas may contain moisture, which is then recovered by the subsequent scrubbing towers. This process can lead to insufficient scrubbing liquid in the preceding towers, requiring replenishment, and excess scrubbing liquid in the subsequent towers, which must be naturally overflowed, resulting in waste of scrubbing liquid and increasing the operating costs of the exhaust gas treatment system. Utility Model Content

[0004] This invention provides a waste gas treatment device and a semiconductor process waste gas treatment system to solve the problem of wasted washing liquid during waste gas treatment.

[0005] The first aspect of this utility model provides a waste gas treatment device, including a first scrubbing tower and a second scrubbing tower arranged in series, each of which is equipped with a circulating water tank; the circulating water tanks of the first scrubbing tower and the second scrubbing tower are interconnected by a connecting pipe, and the connecting pipe is equipped with a switch for controlling the opening or closing of the connecting pipe.

[0006] In some embodiments of this application, the exhaust gas treatment device further includes a switch controller connected to the switch element, the switch controller being configured to control the opening and closing of the switch element.

[0007] In some embodiments of this application, the exhaust gas treatment device further includes a level monitor configured to monitor the liquid level in the circulating water tank. The level monitor is communicatively connected to the switch controller, and the switch controller controls the opening and closing of the switch based on the liquid level data output by the level monitor.

[0008] In some embodiments of this application, the level monitor includes a level gauge, and the switching element includes an electric valve.

[0009] In some embodiments of this application, the circulating water tank is provided with a communication port, the communication ports on the circulating water tank of the first washing tower and the circulating water tank of the second washing tower are located at the same height, and the two open ends of the communication pipe are respectively connected to the communication ports of the circulating water tank of the first washing tower and the circulating water tank of the second washing tower.

[0010] In some embodiments of this application, the connecting pipe sequentially includes a first connecting pipe section, a straight pipe section, and a second connecting pipe section, wherein the first connecting pipe section is connected to the connection port of the circulating water tank of the first washing tower, the second connecting pipe section is connected to the connection port of the circulating water tank of the second washing tower, and the position of the straight pipe section is higher than the position of the connection port of the circulating water tank.

[0011] In some embodiments of this application, the circulating water tank is further provided with an overflow port, and the position of the overflow port on the same circulating water tank is higher than the position of the connecting port.

[0012] In some embodiments of this application, when one circulating water tank in the first washing tower and the other circulating water tank in the second washing tower meet the discharge condition and the other circulating water tank meets the replenishment condition, the switch is opened to allow the liquid in the circulating water tank meeting the discharge condition to flow to the circulating water tank meeting the replenishment condition; wherein, the discharge condition of the circulating water tank includes the liquid level of the circulating water tank being higher than a preset upper limit threshold; the replenishment condition of the circulating water tank includes the liquid level of the circulating water tank being lower than a preset lower limit threshold.

[0013] In some embodiments of this application, both the first washing tower and the second washing tower are further provided with a spraying device and a circulating water pump. The spraying device is located above the circulating water tank. The spraying device is connected to the outlet of the circulating water pump through a circulating pipeline. The inlet of the circulating water pump is connected to the circulating water tank.

[0014] The second aspect of this utility model provides a semiconductor process waste gas treatment system, including the above-mentioned waste gas treatment device.

[0015] According to embodiments of this application, an exhaust gas treatment device and a semiconductor process exhaust gas treatment system include a first scrubbing tower and a second scrubbing tower connected in series. Each of the first and second scrubbing towers is equipped with a circulating water tank. The circulating water tanks of the first and second scrubbing towers are interconnected via a connecting pipe. A switch is installed on the connecting pipe to control its opening and closing, and this switch is connected to a switch controller that controls its opening and closing. This invention treats exhaust gas by connecting two scrubbing towers in series. The exhaust gas can pass through the two scrubbing towers sequentially. The two scrubbing towers can treat different pollutants in the exhaust gas in stages, or they can perform multi-stage treatment. Compared to a single scrubbing tower, this improves the removal rate of pollutants. Furthermore, if one scrubbing tower malfunctions, the other scrubbing tower can still treat the exhaust gas to a certain extent, reducing the risk of non-compliance with emission standards due to equipment failure. The circulating water tanks of the different scrubbing towers are connected via a connecting pipe, enabling the sharing of scrubbing liquid. That is, when the liquid level in the circulating water tank of one scrubbing tower is insufficient, it can be adjusted through the connecting pipe, reducing reliance on external scrubbing liquid replenishment and improving the overall utilization efficiency of the scrubbing liquid. Because the washing liquid can be shared, the operating cost of the entire waste gas treatment unit can be reduced. Meanwhile, the switching device installed on the connecting pipe allows for flexible control of the connection status between the circulating water tanks of the first and second washing towers. During normal operation, it can be determined whether the two circulating water tanks operate independently or in tandem, based on actual needs. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the structure of a waste gas treatment device according to an embodiment of the present invention is shown;

[0018] Figure 2 A control block diagram of the switching element of the waste gas treatment device according to an embodiment of the present invention is shown;

[0019] Figure 3 A schematic diagram of the connecting pipe of the waste gas treatment device in one embodiment of the present invention is shown;

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Waste gas treatment device; 2. First scrubbing tower; 3. Second scrubbing tower; 4. Circulating water tank; 5. Circulating water pump; 6. Circulating pipeline; 7. Connecting pipe; 8. Switching components. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model more apparent, exemplary embodiments according to this utility model will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this utility model, and not all embodiments of this utility model. It should be understood that this utility model is not limited to the exemplary embodiments described herein. Based on the embodiments of this utility model described herein, all other embodiments obtained by those skilled in the art without inventive effort should fall within the protection scope of this utility model.

[0023] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0024] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art.

[0025] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0026] Currently, a large amount of harmful waste gas is generated during the semiconductor manufacturing process. This harmful waste gas is generally treated using multi-stage scrubbing towers. That is, the waste gas enters multiple scrubbing towers connected in series in sequence, and the waste gas is scrubbed by the scrubbing towers. Each stage of the scrubbing tower is equipped with a spray device for chemical treatment before it is discharged into the atmosphere. Taking a two-stage scrubbing tower as an example, after the exhaust gas is purified by the first-stage scrubbing tower, although the demister layer of the first-stage scrubbing tower recovers some of the water vapor in the exhaust gas, a large amount of water vapor still enters the second-stage scrubbing tower with the exhaust gas. At this time, the scrubbing liquid recovered by the second-stage scrubbing tower includes the scrubbing liquid of the second-stage scrubbing tower itself and the water vapor carried by the exhaust gas. As a result, the scrubbing liquid level in the second-stage scrubbing tower is too high, that is, the liquid level in the water tank of the second-stage scrubbing tower is too high. Therefore, when the scrubbing liquid level reaches the overflow level, it will overflow. Meanwhile, because a large amount of scrubbing liquid is carried away by the exhaust gas, the scrubbing liquid level in the first-stage scrubbing tower is too low (insufficient). Thus, the scrubbing liquid added to the first-stage scrubbing tower and the scrubbing liquid overflowing from the second-stage scrubbing tower are both wasted scrubbing liquid. It can be seen that the current exhaust gas treatment device causes waste of scrubbing liquid, thereby increasing the operating cost of exhaust gas treatment.

[0027] To fully understand this utility model, a detailed structure will be presented in the following description to illustrate the technical solution proposed by this utility model. Optional embodiments of this utility model are described in detail below; however, in addition to these detailed descriptions, this utility model may have other embodiments.

[0028] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0029] Figure 1 A schematic diagram of the waste gas treatment device according to an embodiment of the present invention is shown, as follows: Figure 1 As shown, the waste gas treatment device 1 includes: a first scrubbing tower 2 and a second scrubbing tower 3 arranged in series, and each of the first scrubbing tower 2 and the second scrubbing tower 3 is equipped with a circulating water tank 4; the circulating water tanks 4 of the first scrubbing tower 2 and the second scrubbing tower 3 are interconnected by a connecting pipe 7, and a switch 8 is provided on the connecting pipe 7 to control the opening or closing of the connecting pipe 7.

[0030] The washing tower's circulating water tank 4 is configured to store the washing liquid required by the washing tower, and the connecting pipe 7 is configured to achieve mutual flow of washing liquid between the circulating water tanks of different washing towers. The switch 8 is configured to control the opening or closing of the connecting pipe 7. If the switch 8 is in the closed state, the connecting pipe 7 is in the closed state (not connected); if the switch 8 is in the open state, the connecting pipe 7 is in the connected state.

[0031] For example, the switch 8 can be a valve disposed on the connecting pipe 7, which can be a manual valve or an electric valve.

[0032] For example, the switch 8 is activated when one of the circulating water tanks 4 in the first washing tower 2 and the second washing tower 3 meets the discharge condition and the other meets the replenishment condition. The discharge condition for the circulating water tank 4 is that its liquid level is higher than a preset upper threshold, and the replenishment condition is that its liquid level is lower than a preset lower threshold. When the switch 8 is activated, the liquid in the circulating water tank that meets the discharge condition will flow to the circulating water tank that meets the replenishment condition.

[0033] It is worth noting that, since the demand for washing liquid may differ among the various washing towers, the circulating water tank 4 of the first washing tower 2 and the circulating water tank 4 of the second washing tower 3 can each be set with corresponding upper and lower threshold values. That is, the upper threshold values ​​for the first washing tower 2 and the second washing tower 3 can be the same or different; similarly, their lower threshold values ​​can also be the same or different. The upper and lower threshold values ​​of the washing tower circulating water tanks can be set according to the specific application scenario.

[0034] In this embodiment, two scrubbing towers connected in series are used to treat waste gas, which passes through them sequentially. These two scrubbing towers have two operating modes: first, they can treat different pollutants in the waste gas in stages; second, they can perform multi-stage treatment. Compared to a single scrubbing tower, this series connection improves the removal rate of pollutants. Furthermore, if one scrubbing tower malfunctions, the other can still treat the waste gas to a certain extent, thus reducing the risk of non-compliance with emission standards due to equipment failure. The circulating water tanks 4 of the different scrubbing towers are interconnected by connecting pipes 7, achieving a shared scrubbing liquid effect. That is, when the liquid level in the circulating water tank 4 of a certain scrubbing tower is insufficient, it can be adjusted using the connecting pipes 7, reducing reliance on external scrubbing liquid replenishment and improving the overall utilization efficiency of the scrubbing liquid. Because the scrubbing liquid can be shared, the operating cost of the entire waste gas treatment device is reduced. For example, the frequency of using additional liquid replenishment equipment is reduced, resulting in a decrease in scrubbing liquid costs and related equipment maintenance costs. In addition, a switch 8 is installed on the connecting pipe 7, which allows for flexible adjustment of the connection status between the circulating water tanks 4 of the first scrubbing tower 2 and the second scrubbing tower 3. During normal operation, the two circulating water tanks 4 can be configured to operate independently or in tandem, depending on actual needs. For example, when the circulating water tank 4 of one scrubbing tower needs individual cleaning or maintenance, the connecting pipe 7 can be closed to ensure the normal operation of the other scrubbing tower; while when co-processing of exhaust gas is required, the connecting pipe 7 can be opened to allow the flow of scrubbing liquid between the two towers.

[0035] In some embodiments, the exhaust gas treatment device further includes a switch controller connected to the switch element 8, and the switch controller is configured to control the opening and closing of the switch element 8.

[0036] For example, the switch controller can be a variety of electronic devices, including but not limited to microcontrollers, infrared controllers, Bluetooth controllers, smartphones, tablets, laptops, and desktop computers.

[0037] The control program for the switch controller to open and close the switch element 8 can be any suitable program. For example, the switch element 8 is an electric valve equipped with an infrared module or a Bluetooth module. The infrared module or Bluetooth module is configured to communicate with the main control CPU of the switch controller, so that the switch controller can control the operation of the electric valve through the infrared or Bluetooth module.

[0038] In some embodiments, Figure 2 The diagram shows a control block diagram of the switch element 8 of the waste gas treatment device according to an embodiment of the present invention, as follows: Figure 2 The exhaust gas treatment device also includes a liquid level monitor for monitoring the liquid level in the circulating water tank 4. The liquid level monitor is connected to a switch controller, which is configured to control the opening and closing of the switch 8 based on the liquid level data output by the liquid level monitor.

[0039] For example, the level monitor can be a level gauge, and each circulating water tank 4 is equipped with at least one level gauge. The level gauge monitors the level data of the circulating water tank 4 in real time and transmits the level data to the switch controller.

[0040] The liquid level monitor monitors the liquid level of the circulating water tank 4 in real time and sends the monitored liquid level data to the switch controller. The switch controller controls the opening or closing of the switch component 8 based on the liquid level data.

[0041] For example, the switch controller pre-stores the upper and lower threshold values ​​of the liquid levels in the circulating water tanks of the first and second washing towers. The level monitor of each washing tower sends the monitored liquid level data of the circulating water tank 4 to the switch controller. The switch controller compares the real-time liquid level data of the circulating water tank obtained from the level monitor with the corresponding upper and lower threshold values, and controls the opening or closing of the switch 8 based on the comparison result.

[0042] Example Scenario 1: When the liquid level in the circulating water tank 4 of one of the first washing towers 2 and the second washing tower 3 is higher than its corresponding upper limit threshold, while the liquid level in the other circulating water tank 4 is lower than its corresponding lower limit threshold, the switch controller will control the switch 8 to open, thereby allowing the washing liquid in the circulating water tank 4 with the liquid level above the upper limit threshold to flow to the circulating water tank 4 with the liquid level below the upper limit threshold. It is important to note that both the circulating water tank 4 of the first washing tower 2 and the circulating water tank 4 of the second washing tower 3 have their own corresponding normal liquid level range. During the process of washing liquid flowing from the high-level circulating water tank to the low-level circulating water tank, if at least one circulating water tank reaches its normal liquid level range, the switch controller will control the switch 8 to close, stopping the flow of washing liquid between the circulating water tanks. If the liquid levels of both circulating water tanks are within the normal range, no operation is required. If the liquid level of one circulating water tank is outside the normal range, washing liquid can be replenished to that circulating water tank externally.

[0043] For example, when the liquid level in the circulating water tank 4 of the second scrubbing tower 3 is higher than the upper threshold, it is necessary to determine whether the liquid level in the circulating water tank 4 of the first scrubbing tower 2 is lower than the lower threshold. If it is lower than the lower threshold, the switch controller will open the switch 8, opening the connecting pipe 7, so that water from the second scrubbing tower 3 will flow to the first scrubbing tower 2. This causes the liquid level in the second scrubbing tower 3 to drop and the liquid level in the first scrubbing tower 2 to rise. When the liquid level in the first scrubbing tower 2 returns to normal, the switch controller will close the switch 8. At this time, if the liquid level in the second scrubbing tower 3 is still high, some scrubbing liquid can overflow naturally; this process does not use additional water and there is no waste of water resources. Similarly, when the liquid level in the circulating water tank 4 of the first scrubbing tower 2 is higher than the upper threshold, it is necessary to determine whether the liquid level in the circulating water tank 4 of the second scrubbing tower 3 is lower than the preset lower threshold. If it is lower than the lower threshold, the switch controller will open the switch 8, opening the connecting pipe 7, so that water from the first scrubbing tower 2 will flow to the second scrubbing tower 3.

[0044] Example Scenario Two: When the liquid level in the circulating water tank 4 of one of the first washing towers 2 and the second washing tower 3 is higher than the upper limit threshold, while the liquid level in the other's circulating water tank 4 is not lower than the lower limit threshold, the switch controller will control the switch 8 to close. If the liquid level in the circulating water tank reaches the overflow level, the washing liquid in the circulating water tank will overflow naturally. It should be noted that the upper limit threshold of the circulating water tank may be the same as or different from the overflow level of the circulating water tank; the lower limit threshold of the circulating water tank may be the same as or different from the replenishment level of the circulating water tank. The replenishment level mentioned here refers to the level in the circulating water tank when the liquid level is lower than the replenishment level, at which point washing liquid needs to be added to the circulating water tank.

[0045] Example Scenario 3: When the liquid levels in both the circulating water tank 4 of the first washing tower 2 and the circulating water tank 4 of the second washing tower 3 are higher than their respective upper limit thresholds, the switch controller will operate the switch 8 to close. When the liquid level in the circulating water tank reaches the overflow level, the washing liquid will overflow naturally.

[0046] In this embodiment, the level monitor prevents the circulating water tank 4 from operating in a water-deficient state, thus avoiding serious damage to the equipment. Taking the scrubbing tower as an example, it has an internal circulating water pump for drawing scrubbing liquid from the circulating water tank. If the circulating water tank level is too low, the level monitor can promptly stop the circulating water pump, thus preventing damage. During the waste gas treatment process, the level monitor also ensures that the circulating water tank level remains within a suitable range, allowing each stage of waste gas treatment to operate stably according to design requirements, thereby improving the efficiency of waste gas treatment. The level monitor automatically monitors the level of the circulating water tank 4 and automatically transmits the level data to the switch controller. The entire process requires no manual intervention; staff do not need to constantly monitor the level of the circulating water tank 4, thus reducing the workload of manual operation. Furthermore, the level monitor can also be connected to an alert system. When the level of the circulating water tank 4 exceeds the normal range, it can send an alert to the staff, helping them to promptly detect potential leaks or abnormal replenishment of the waste gas treatment device.

[0047] In some embodiments, the circulating water tank 4 is provided with a communication port, and the communication ports on the circulating water tanks 4 of the first washing tower 2 and the second washing tower 3 are located at the same height. The two open ends of the connecting pipe 7 are respectively connected to the communication ports of the circulating water tank 4 in the first washing tower 2 and the second washing tower 3.

[0048] In this embodiment, since the connecting ports on the circulating water tanks 4 of the first washing tower 2 and the second washing tower 3 are at the same height, it helps to simplify the pipeline layout design and avoids the complex pipeline slope design due to the height difference. Since the connecting pipe 7 connects to the connecting ports at the same height, when there is a difference in the liquid level of the circulating water tanks 4 of the two washing towers, water will flow from the circulating water tank 4 with the higher liquid level to the circulating water tank 4 with the lower liquid level through the connecting pipe 7, thereby automatically achieving liquid level balance.

[0049] In some embodiments, Figure 3 A schematic diagram of the connecting pipe 7 of the waste gas treatment device in one embodiment of the present invention is shown, as follows: Figure 3 As shown, the connecting pipe 7 includes a first connecting pipe section, a straight pipe section, and a second connecting pipe section in sequence. The first connecting pipe section is connected to the connecting port of the circulating water tank 4 inside the first washing tower 2, and the second connecting pipe section is connected to the connecting port of the circulating water tank 4 inside the second washing tower 3. The position of the straight pipe section is higher than the position of the connecting port on the circulating water tank 4.

[0050] Among them, the straight pipe section is a straight pipe segment, and the first connecting pipe segment and the second connecting pipe segment can be a connecting straight pipe segment perpendicular to the straight pipe segment.

[0051] In this implementation, by rationally designing the three-section structure of the connecting pipe 7, on the one hand, the three-section design facilitates the inspection and maintenance of different parts. For example, if problems such as poor drainage occur, it is easier to determine which section is faulty, reducing the difficulty of troubleshooting and improving maintenance efficiency. On the other hand, the straight pipe section is positioned higher than the connection port of the circulating water tank 4, allowing gravity to ensure that water flows naturally from the connection port to the connecting pipe 7, eliminating the need for additional power equipment to drive drainage and saving energy.

[0052] In some embodiments, the circulating water tank 4 is also provided with an overflow port, and the overflow port on the same circulating water tank 4 is located higher than the connection port.

[0053] In this implementation, the positions of the connecting port and overflow port are set in accordance with the adjustment logic of the circulating water tank level. The level of the circulating water tank is best controlled within a reasonable range. The connecting port is configured to maintain the water tank level within the normal range, while the overflow port only functions when the level exceeds the normal range (reaching a high danger level). The high level corresponding to the overflow port should be higher than the normal operating level range of the connecting port, therefore the overflow port should be located higher than the connecting port.

[0054] Of course, the position of the overflow port on the same circulating water tank can also be no higher than the position of the connecting port. For example, an overflow valve can be set above the overflow port of the circulating water tank. The overflow valve is only opened when there is an overflow demand. In this case, the position of the overflow port on the same circulating water tank and the position of the connecting port can be at the same height, or the position of the overflow port on the same circulating water tank can be lower than the position of the connecting port.

[0055] In some embodiments, both the first washing tower 2 and the second washing tower 3 are further provided with spraying equipment, which is located above the circulating water tank 4 and is connected to the circulating water tank 4 through a circulation pipeline 6.

[0056] In some embodiments, both the first washing tower 2 and the second washing tower 3 are further provided with a spraying device and a circulating water pump 5. The spraying device is located above the circulating water tank 4. The spraying device is connected to the outlet of the circulating water pump 5 through the circulating pipeline 6. The inlet of the circulating water pump 5 is connected to the circulating water tank 4.

[0057] In this implementation, the spraying equipment is installed at a high position in the washing tower, so the circulating water pump 5 is required to pump the water from the circulating water tank 4 to the spraying equipment. The circulating water pump 5 can provide stable water pressure and water flow to ensure the normal operation of the spraying equipment and improve the spraying effect.

[0058] In some embodiments, the top of the first scrubbing tower 2 is connected to the bottom of the second scrubbing tower 3 via an exhaust gas pipe.

[0059] It is worth noting that in some embodiments, the exhaust gas treatment device of this application does not limit the number of scrubbing towers and may include at least three scrubbing towers. Each of the multiple scrubbing towers is equipped with a circulating water tank, and the circulating water tanks in different scrubbing towers are interconnected through a connecting pipe. The connecting pipe is equipped with a switch to control the opening or closing of the connecting pipe.

[0060] For example, the exhaust gas treatment device includes: at least three-stage scrubbing towers, with multiple-stage scrubbing towers connected in series, and the circulating water tanks of different scrubbing towers connected sequentially by connecting pipes, that is, the circulating water tank of the previous stage scrubbing tower and the circulating water tank of the next stage scrubbing tower are connected by connecting pipes, and the connecting pipes 7 are provided with a switch to control the opening or closing of the connecting pipes 7.

[0061] Understandably, the flow of water can be controlled by the switching devices on the connecting pipe. By properly controlling these devices, water can be rationally allocated according to the actual needs of each stage of the scrubbing tower. For example, when water needs to be replenished in a certain stage of the scrubbing tower, an appropriate amount of liquid can be obtained from the circulating water tanks of other stages through the connecting pipe, reducing water waste.

[0062] In some embodiments, the waste gas treatment device includes: at least three-stage scrubbing towers, multiple-stage scrubbing towers connected in series, and circulating water tanks of any two scrubbing towers connected by a connecting pipe, with a switch on the connecting pipe for controlling the opening or closing of the connecting pipe.

[0063] Understandably, the circulating water tanks of any two scrubbing towers are connected by a connecting pipe, which is equipped with a switch. This design allows for flexible adjustment of the scrubbing liquid in the circulating water tanks. When the scrubbing liquid in a certain stage of the scrubbing tower needs adjustment, suitable scrubbing liquid can be introduced from the circulating water tanks of other scrubbing towers through the connecting pipe.

[0064] The semiconductor process waste gas treatment system provided in this application includes the waste gas treatment device described in the above embodiments.

[0065] The specific implementation process of the waste gas treatment device can be found in the above-mentioned device embodiments, and its specific structure and technical effects are similar, so they will not be described in detail here.

[0066] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of the invention. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of the invention. All such changes and modifications are intended to be included within the scope of the invention as claimed in the appended claims.

[0067] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of the present invention may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0068] Similarly, it should be understood that, in order to simplify the present invention and aid in understanding one or more aspects of the various inventions, in the description of exemplary embodiments of the present invention, various features of the present invention are sometimes grouped together in a single embodiment, figure, or description thereof. However, this method of the present invention should not be construed as reflecting an intention that the claimed invention requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, its novelty lies in the fact that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of the present invention.

[0069] Those skilled in the art will understand that, apart from the mutual exclusion of features, all features disclosed in this specification (including the accompanying claims, abstract, and drawings) and all processes or elements of any method or apparatus so disclosed can be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstract, and drawings) may be replaced by an alternative feature serving the same, equivalent, or similar purpose.

[0070] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this invention and form different embodiments. For example, in the claims, any of the claimed embodiments can be used in any combination.

[0071] The various component embodiments of this utility model can be implemented in hardware, or as software modules running on one or more processors, or a combination thereof. Those skilled in the art will understand that microprocessors or digital signal processors (DSPs) can be used in practice to implement some or all of the functions of some modules according to embodiments of this utility model. This utility model can also be implemented as an apparatus program (e.g., a computer program and computer program product) configured to perform part or all of the methods described herein. Such an implementation of this utility model can be stored on a computer-readable medium, or can be in the form of one or more signals. Such signals can be downloaded from an Internet website, provided on a carrier signal, or provided in any other form.

[0072] It should be noted that the above embodiments are illustrative of the present invention and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The present invention can be implemented by means of hardware comprising several different elements and by means of a suitably programmed computer. In the unit claims enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A waste gas treatment device, characterized in that, The system includes a first washing tower and a second washing tower connected in series. Both the first washing tower and the second washing tower are equipped with circulating water tanks. The circulating water tanks of the first washing tower and the second washing tower are connected to each other through a connecting pipe. The connecting pipe is equipped with a switch to control the opening or closing of the connecting pipe.

2. The waste gas treatment device according to claim 1, characterized in that, The exhaust gas treatment device further includes a switch controller, which is connected to the switch element and configured to control the opening and closing of the switch element.

3. The waste gas treatment device according to claim 2, characterized in that, The waste gas treatment device also includes a liquid level monitor configured to monitor the liquid level in the circulating water tank. The liquid level monitor is communicatively connected to the switch controller, and the switch controller controls the opening and closing of the switch based on the liquid level data output by the liquid level monitor.

4. The waste gas treatment device according to claim 3, characterized in that, The liquid level monitor includes a liquid level gauge, and the switching device includes an electric valve.

5. The waste gas treatment device according to claim 1, characterized in that, The circulating water tank is provided with a connecting port. The connecting ports on the circulating water tanks of the first washing tower and the second washing tower are located at the same height. The two open ends of the connecting pipe are respectively connected to the connecting ports of the circulating water tanks of the first washing tower and the second washing tower.

6. The waste gas treatment device according to claim 5, characterized in that, The connecting pipe sequentially includes a first connecting pipe section, a straight pipe section, and a second connecting pipe section. The first connecting pipe section is connected to the connection port of the circulating water tank of the first washing tower, and the second connecting pipe section is connected to the connection port of the circulating water tank of the second washing tower. The position of the straight pipe section is higher than the position of the connection port of the circulating water tank.

7. The waste gas treatment device according to claim 5, characterized in that, The circulating water tank is also provided with an overflow port, and the position of the overflow port on the same circulating water tank is higher than the position of the connecting port.

8. The waste gas treatment device according to any one of claims 1 to 7, characterized in that, When one circulating water tank in the first washing tower and the other circulating water tank in the second washing tower meet the discharge conditions and the other meets the replenishment conditions, the switch is opened to allow the liquid in the circulating water tank that meets the discharge conditions to flow to the circulating water tank that meets the replenishment conditions. The discharge conditions of the circulating water tank include the liquid level of the circulating water tank being higher than a preset upper limit threshold; the replenishment conditions of the circulating water tank include the liquid level of the circulating water tank being lower than a preset lower limit threshold.

9. The waste gas treatment device according to any one of claims 1 to 7, characterized in that, Both the first and second washing towers are equipped with spraying equipment and circulating water pumps. The spraying equipment is located above the circulating water tank and is connected to the outlet of the circulating water pump through a circulating pipeline. The inlet of the circulating water pump is connected to the circulating water tank.

10. A semiconductor manufacturing process waste gas treatment system, characterized in that, Includes the waste gas treatment device according to any one of claims 1 to 9.

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