Substrate placing tool for stripping liquid test

Abstract

A substrate placing tool for a stripping liquid test comprises an upper batten, a plurality of rectangular windows are formed in the upper batten in the length direction of the upper batten, a lower plate is fixed to the lower wall of the upper batten through screws, a plurality of grooves are formed in the upper wall of the lower plate, the grooves and the rectangular windows are in one-to-one correspondence, and the grooves are located under the corresponding rectangular windows. A plurality of rubber rings of rectangular structures are arranged on the lower wall of the upper batten, and the rubber rings and the rectangular windows are in one-to-one correspondence. According to the utility model, the upper batten and the rectangular window play a role in blocking the stripping liquid dripping on the substrate, so that the stripping liquid is prevented from dripping. A rubber ring is arranged in order to ensure that no gap exists after the upper wall of the base plate is in contact with the upper batten, and the contact effect between the base plate and the rubber ring is ensured by pushing the base plate upwards.

Description

Technical Field

[0001] This utility model relates to the field of stripping fluid experimental preparation technology, and in particular to a substrate placement fixture for stripping fluid testing. Background Technology

[0002] When developing new formulations of stripping solutions, multiple substrates coated with photoresist are often prepared to verify their stripping effect. The stripping solution is then applied to the substrates, and the stripping effect on the photoresist is observed. Currently, to avoid the stripping solution dripping from the substrate, the area formed by the stripping solution is smaller than the area of ​​the substrate. However, due to the influence of the substrate's horizontal placement, the problem of stripping solution dripping still exists during operation. Furthermore, because the liquid stains formed by the stripping solution are small, it is not convenient to observe the stripping effect of the stripping solution. Utility Model Content

[0003] This invention provides a substrate placement fixture for a stripping fluid test, which overcomes the shortcomings of the prior art and solves the problem of dripping during the stripping fluid test, thus having strong practicality.

[0004] In order to achieve the purpose of this utility model, the following technology is proposed to be adopted:

[0005] A substrate placement fixture for a stripping fluid test includes an upper strip with multiple rectangular windows along its length.

[0006] The lower wall of the upper strip is fixed with a lower plate by screws. The upper wall of the lower plate has multiple grooves, which correspond one-to-one with the rectangular windows, and the grooves are located directly below the rectangular windows they correspond to.

[0007] The lower wall of the upper slat is provided with multiple rectangular rubber rings, and there is a one-to-one correspondence between the rubber rings and the rectangular windows.

[0008] Furthermore, the upper wall of the upper slat is formed with multiple upper extension frames, which correspond one-to-one with the rectangular windows, and the size of the upper extension frame and its corresponding rectangular window are equal.

[0009] Furthermore, a lower pad is movably provided within the groove, and a lower extension rod is threadedly connected to the lower pad. The lower extension rod passes through the lower plate, and an upper push plate is threadedly connected to the lower end of the lower extension rod. A spring is sleeved on the lower extension rod, and the spring is located between the upper push plate and the lower plate. A lower extension plate is welded to the lower wall of the upper push plate. An oblique hole is opened on the lower extension plate, and a moving rod passes through the oblique hole. A concave part is provided on the moving rod, and the concave part is sleeved on the lower extension plate. An L-shaped plate is formed on the outer end of the concave part. A strip hole is opened on the horizontal section of the L-shaped plate, and a limiting screw passes through the strip hole. The limiting screw is threadedly connected to the lower plate. An inner pressure rotating plate abuts against the outer wall of the vertical section of the L-shaped plate. A connecting shaft is provided on the inner pressure rotating plate, and a connecting protrusion is sleeved on the upper end of the connecting shaft. The inner end of the connecting protrusion is formed on the lower plate.

[0010] Furthermore, the inner end of the internal pressure plate has an arc-shaped structure.

[0011] Furthermore, one end of the lower pad is bent upward to form an end baffle, the lower end of the end baffle is provided with an embedded groove, the lower pad is provided with a cross-shaped groove, a movable pull plate is inserted through the cross-shaped groove, the two sides of the movable pull plate are formed with inner through strips, the inner through strips are inserted through the cross-shaped groove, and one end of the movable pull plate is formed with a push-out head, which is located in the embedded groove.

[0012] Furthermore, the other end of the movable pull plate bends downwards to form a pull-out head.

[0013] The advantages of the above technical solution are:

[0014] This invention uses an upper strip and a rectangular window to prevent the release fluid from dripping onto the substrate. Furthermore, a rubber ring is provided to ensure a seamless connection between the upper wall of the substrate and the upper strip, and the contact between the substrate and the rubber ring is ensured by pushing the substrate upwards. Attached Figure Description

[0015] To make the objectives, technical solutions, and advantages of this utility model clearer, the following will provide a more detailed description of this utility model in conjunction with the accompanying drawings.

[0016] Figure 1 A three-dimensional structure of one embodiment is shown. Figure 1 .

[0017] Figure 2 A three-dimensional structure of one embodiment is shown. Figure 2 .

[0018] Figure 3 A magnified view of point A is shown.

[0019] Figure 4 A three-dimensional structural diagram of the upper slat is shown.

[0020] Figure 5 A three-dimensional structural diagram of the lower pad is shown.

[0021] Figure 6 A three-dimensional structural diagram of the lower plate was produced. Detailed Implementation

[0022] like Figures 1-6 As shown, a substrate placement fixture for a stripping fluid test includes an upper strip 1. Multiple rectangular windows 10 are formed along the length of the upper strip 1. Multiple upper extension frames 11 are formed on the upper wall of the upper strip 1, with a one-to-one correspondence between the upper extension frames 11 and the rectangular windows 10. The dimensions of each upper extension frame 11 and its corresponding rectangular window 10 are equal. The upper extension frames and rectangular windows prevent stripping fluid from dripping and ensure the thickness of the stripping fluid adhering to the substrate during testing. Multiple rectangular rubber rings are provided on the lower wall of the upper strip 1, with a one-to-one correspondence between the rubber rings and the rectangular windows 10. When the substrate moves upward, its upper wall acts on the rubber rings, forming a groove-shaped structure with the substrate as the bottom and the rectangular windows 10 and the upper extension frames 11 as the inner periphery, thus preventing stripping fluid from falling during testing. The lower wall of the upper plate 1 is fixed with a lower plate 13 by screws. The upper wall of the lower plate 13 has multiple grooves 14. The grooves 14 correspond one-to-one with the rectangular windows 10, and the grooves 14 are located directly below the corresponding rectangular windows 10. Multiple support legs 80 are installed on the lower plate 13 and the support legs 80 are placed on the water platform.

[0023] In this embodiment, the substrate is placed in the groove 14 during operation, and then the substrate is moved upward so that the upper wall of the substrate is in close contact with the rubber ring. At this time, a groove-shaped structure is formed with the substrate as the bottom rectangular window 10 and the upper extension frame 11 as the inner periphery. Then, the operator drops stripping liquid with different formulation components into the groove-shaped structure to perform the photoresist stripping operation through the stripping liquid and observe the stripping effect.

[0024] In some embodiments, a lower pad 28 is movably disposed within the groove 14, a substrate is placed on the lower pad 28, a lower extension rod 16 is threadedly connected to the lower pad 28, the lower extension rod 16 passes through the lower plate 13, and an upper push plate 17 is threadedly connected to the lower end of the lower extension rod 16. A spring 27 is sleeved on the lower extension rod 16, and the spring 27 is located between the upper push plate 17 and the lower plate 13. A lower extension plate 18 is welded to the lower wall of the upper push plate 17, and an oblique hole 19 is formed on the lower extension plate 18. A movable rod 20 is inserted through the lower extension plate 18. A concave part 21 is mounted on the movable rod 20 and fitted onto the lower extension plate 18. An L-shaped plate 22 is formed on the outer end of the concave part 21. A strip-shaped hole 25 is formed on the horizontal section of the L-shaped plate 22, and a limiting screw 24 is inserted through the strip-shaped hole 25. The limiting screw 24 is threaded onto the lower plate 13. An inner pressure rotating plate 34 abuts against the outer wall of the vertical section of the L-shaped plate 22. The inner end of the inner pressure rotating plate 34 has an arc-shaped structure to facilitate its rotation. A connecting shaft 33 is provided on the inner pressure rotating plate 34. A connecting protrusion 15 is fitted onto the upper end of the connecting shaft 33, and the inner end of the connecting protrusion 15 is formed on the lower plate 13. One end of the lower pad 28 is bent upward to form an end baffle 300. The lower end of the end baffle 300 has an embedded groove. The lower pad 28 has a cross-shaped groove. A movable pull plate 29 passes through the cross-shaped groove. Inner strips 32 are formed on both sides of the movable pull plate 29 and pass through the cross-shaped groove. One end of the movable pull plate 29 has a push-out head 30. The push-out head 30 is located in the embedded groove. The push-out head can act on one end of the substrate to pull the substrate out of the lower pad 28. The other end of the movable pull plate 29 is bent downward to form a pull-out head 31.

[0025] In this embodiment, when fixing the substrate, the operator places the substrate on the lower pad 28, and then the operator rotates the inner pressure plate 34. The rotation of the inner pressure plate 34 will cause its inner end to act on the outer wall of the vertical section of the L-shaped plate 22, thereby causing the L-shaped plate 22 and the concave part 21 to move inward. During the movement, the moving rod 20 on it will act on the oblique hole 19, thereby causing the lower extension plate 18 to move upward. During the movement, the lower pad 28 will drive the substrate to move upward until the upper wall of the substrate is pressed against the lower wall of the rubber ring.

[0026] In this embodiment, when removing the substrate, the operator rotates the inner pressure plate 34 outward, causing the lower pad 28 to move downward under the action of the spring 27. After that, the operator pulls the moving plate 29 outward and pushes the substrate out through the push-out head 30.

[0027] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations of this utility model fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A substrate placement fixture for a stripping fluid test, characterized in that, It includes an upper strip (1), and the upper strip (1) has multiple rectangular windows (10) along its length. The lower wall of the upper strip (1) is fixed with a lower plate (13) by screws. The upper wall of the lower plate (13) is provided with multiple grooves (14). The grooves (14) correspond one-to-one with the rectangular window (10), and the grooves (14) are located directly below the rectangular window (10) they correspond to. The lower wall of the upper strip (1) is provided with multiple rectangular rubber rings, and there is a one-to-one correspondence between the rubber rings and the rectangular window (10).

2. The substrate placement fixture for the stripping fluid test according to claim 1, characterized in that, The upper wall of the upper strip (1) is formed with multiple upper extension frames (11), and there is a one-to-one correspondence between the upper extension frames (11) and the rectangular window (10), and the upper extension frame (11) and its corresponding rectangular window (10) are equal in size.

3. The substrate placement fixture for the stripping fluid test according to claim 1, characterized in that, A lower pad (28) is movably disposed within the groove (14). A lower extension rod (16) is threadedly connected to the lower pad (28). The lower extension rod (16) passes through the lower plate (13). An upper push plate (17) is threadedly connected to the lower end of the lower extension rod (16). A spring (27) is sleeved on the lower extension rod (16). The spring (27) is located between the upper push plate (17) and the lower plate (13). A lower extension plate (18) is welded to the lower wall of the upper push plate (17). An oblique hole (19) is opened on the lower extension plate (18). A moving rod (20) passes through the oblique hole (19). A concave part is provided on the moving rod (20). 21) A concave part (21) is fitted onto the lower extension plate (18). An L-shaped plate (22) is formed on the outer end of the concave part (21). A strip hole (25) is opened on the horizontal section of the L-shaped plate (22). A limiting screw (24) is inserted through the strip hole (25). The limiting screw (24) is connected to the lower plate (13) by thread. An inner pressure rotating plate (34) is abutted against the outer wall of the vertical section of the L-shaped plate (22). A connecting shaft (33) is provided on the inner pressure rotating plate (34). A connecting convex plate (15) is fitted on the upper end of the connecting shaft (33). The inner end of the connecting convex plate (15) is formed on the lower plate (13).

4. The substrate placement fixture for the stripping fluid test according to claim 3, characterized in that, The inner end of the internal pressure plate (34) has an arc-shaped structure.

5. The substrate placement fixture for the stripping fluid test according to claim 1, characterized in that, One end of the lower pad (28) is bent upward to form an end baffle (300). The lower end of the end baffle (300) is provided with an embedded groove. A cross-shaped groove is provided on the lower pad (28). A movable pull plate (29) is inserted through the cross-shaped groove. Inner through strips (32) are formed on both sides of the movable pull plate (29). The inner through strips (32) are inserted through the cross-shaped groove. One end of the movable pull plate (29) is formed with a push-out head (30). The push-out head (30) is located in the embedded groove.

6. The substrate placement fixture for the stripping fluid test according to claim 5, characterized in that, The other end of the movable pull plate (29) is bent downwards to form a pull-out head (31).

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