High-efficiency and high-safety wafer drying device

Abstract

The utility model discloses an efficient high-safety wafer drying device which comprises a box body and a containing cavity formed in the box body, a heating plate is fixedly arranged in the containing cavity, and a liquid inlet spray head which is arranged on the box body and used for being communicated with an IPA solvent is arranged on one side of the heating plate; a dehydration disc is arranged above the heating plate, a condensation assembly fixedly arranged on the box body is arranged over the dehydration disc, and a transferring assembly capable of clamping and transferring the lifting basket to the position between the dehydration disc and the condensation assembly is arranged on the box body; a water collecting plate used for collecting condensate water is arranged under the condensation assembly, cover plates are symmetrically arranged on the top of the box body in a pivoted mode, and an arc-shaped flow guide plate is fixedly arranged on each cover plate. The beneficial effects of the utility model are mainly reflected in that the design is exquisite, the arc-shaped design of the guide plate can guide and drain the cooled IPA solvent liquid, the IPA solvent liquid is prevented from dropping on the wafer, the situation that the guide plate and the cover plate release metal ions at high temperature to pollute the wafer is avoided, and the yield is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device manufacturing technology, and more specifically, to a high-efficiency and high-safety wafer drying device. Background Technology

[0002] In semiconductor device manufacturing, wafer cleaning and wet etching are among the most commonly used processes. After cleaning and wet etching, the wafer often needs to undergo drying. Improper drying can directly result in watermark defects, significantly impacting chip yield.

[0003] As disclosed in patent announcement CN11511879B, a wafer chemical drying device includes a processing chamber and a basket. A lifting assembly is installed on the top of the processing chamber, and the basket is fixedly installed on the lifting assembly. A heating mechanism is fixedly installed at the bottom of the processing chamber, and a drying chamber is fixedly installed above the heating mechanism. A dehydration tray is fixedly installed inside the drying chamber, located directly below the basket. A condensation mechanism is fixedly installed on the top of the drying chamber, located directly above the basket. The drying chamber contains a drying reagent. However, during the wafer drying process, the cover of the processing chamber may release metal ions, etc. When some of the drying reagent vapor comes into contact with the cover, it will be cooled, forming a drying reagent liquid containing metal ions, etc. When this drying reagent liquid drips from the cover, it may fall onto the wafer, causing contamination and affecting the yield. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a wafer drying device with high efficiency and high safety.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A high-efficiency and high-safety wafer drying device includes a housing and a receiving cavity formed therein. A heating plate is fixedly installed in the receiving cavity. A liquid inlet nozzle for communicating with IPA solvent is provided on one side of the heating plate and mounted on the housing. A dehydration tray is provided above the heating plate. A condensation assembly is fixedly installed on the housing directly above the dehydration tray. A transfer assembly is provided on the housing to clamp and transfer a basket between the dehydration tray and the condensation assembly. A water collection plate for collecting condensate is provided directly below the condensation assembly. The top of the housing has symmetrically pivoted cover plates. The cover plates can be driven by a drive assembly to be aligned with the housing and seal the receiving cavity. An arc-shaped guide plate is fixedly installed on each cover plate. When the cover plates are aligned, the inner walls of the guide plates are in close contact with each other, the outer walls of the guide plates are located below the inner walls of the guide plates, and the outer walls of the guide plates are located directly above the water collection plates.

[0007] Preferably, the water collection plate includes at least a water receiving part fixed on the inner wall of the box and a water blocking part disposed on the other side of the water receiving part, wherein the minimum distance between the water blocking part and the inner wall of the box is greater than the maximum distance between the outer circumferential surface of the condenser tube on the condensation assembly and the inner wall of the box.

[0008] Preferably, the water-blocking part is vertically arranged, the included angle between the water-blocking part and the water-receiving part is an obtuse angle, and the included angle between the water-receiving part and the inner wall of the box is an acute angle.

[0009] Preferably, the drive assembly includes at least a pivot block fixedly mounted on the housing, a pivot plate pivotally mounted on the pivot block, and the other end of the pivot plate fixedly mounted on the cover plate; a cylinder seat is also fixedly mounted on the housing, the cylinder seat is pivotally connected to the housing of the drive cylinder, a drive connector is fixedly mounted on the cylinder shaft of the drive cylinder, the drive connector is pivotally connected to the middle part of the pivot plate, a blocking plate is fixedly mounted on the housing, and a blocker is fixedly mounted on the blocking plate.

[0010] Preferably, a carbon dioxide box is fixed on the box body, and nozzles are opened on the upper surface and the inside of the carbon dioxide box, and the carbon dioxide box is connected to the carbon dioxide chamber outside.

[0011] Preferably, the condensation assembly includes at least a limiting block fixed to the inner wall of the housing, and the limiting block has a limiting groove adapted to the condenser tube; the condenser tube is arranged in a ring and is locked in the limiting groove, one end of the condenser tube is connected to the liquid inlet pipe fixed to the housing, and the other end is connected to the liquid outlet pipe fixed to the housing.

[0012] Preferably, the transfer assembly includes at least a bracket fixed to one side of the box body, a transmission frame fixed on the bracket, a transmission screw pivotally mounted on the transmission frame, a transmission nut for screw-driven transmission on the transmission screw, a transmission block fixed on the transmission nut, a support rod fixed on the transmission block, a positioning groove adapted to the outer contour of the support rod on the cover plate, a support plate fixed to the end side of the support rod, and the basket fixed on the support plate.

[0013] Preferably, an exhaust pump is fixed on the bracket, an exhaust pipe is provided on the exhaust pump, the exhaust pipe is connected to a bypass pipe, and the other end of the bypass pipe is connected to an exhaust box fixed on the housing.

[0014] Preferably, the dehydration tray is provided with a drain port, and the box body is fixed with a drain pipe, which is connected to the drain port through a branch pipe.

[0015] Preferably, the bottom of the chamber is also provided with a cooling pipe, which is located below the heating plate. The cooling pipe is provided with a control valve, which is electrically connected to a temperature sensor installed inside the chamber.

[0016] The beneficial effects of this utility model are mainly reflected in:

[0017] 1. The ingenious design, with its arc-shaped guide plate, directs and guides the cooled IPA solvent liquid, preventing it from dripping onto the wafer. This eliminates the possibility of the guide plate and cover plate releasing metal ions at high temperatures and contaminating the wafer, thus improving yield. Furthermore, the cover plates work together to seal the enclosure, preventing IPA solvent vapor from contacting air and thus avoiding explosions, enhancing safety.

[0018] 2. The cleverly positioned water collection plate can collect IPA solvent liquid from the condenser tube and the guide plate, making it easy for the IPA solvent liquid to be discharged from the outlet on the water collection plate. At the same time, it can also prevent the IPA solvent liquid containing metal ions from evaporating under the action of the heating plate, causing secondary contamination to the wafer, and greatly improving the yield.

[0019] 3. This utility model uses a limiting block to snap-fit ​​the condenser tube, which makes assembly simple and convenient, and facilitates disassembly, replacement and maintenance, greatly improving assembly and maintenance efficiency.

[0020] 4. The exhaust box can draw out IPA solvent vapor with the help of the exhaust pump, preventing IPA solvent vapor from flashing and exploding when it comes into contact with sparks, thus improving safety.

[0021] 5. The temperature sensor can detect the temperature inside the containment cavity in real time. When the temperature of the temperature sensor exceeds the preset temperature, the heating plate can be shut off in time. At the same time, the temperature can be cooled through the cooling pipe to avoid accidents caused by excessively high temperature of IPA solvent vapor, thus further improving safety. Attached Figure Description

[0022] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0023] Figure 1 : A perspective view of a preferred embodiment of the present invention;

[0024] Figure 2 : Figure 1 Enlarged view of section A;

[0025] Figure 3 : A cross-sectional view of a preferred embodiment of this utility model;

[0026] Figure 4 : A cross-sectional view of the housing and its internal components in a preferred embodiment of this utility model. Detailed Implementation

[0027] The present invention will now be described in detail with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments are not limited to the present invention, and any structural, methodological, or functional modifications made by those skilled in the art based on these embodiments are included within the protection scope of the present invention.

[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection. They can refer to a mechanical connection or an electrical connection. They can refer to a direct connection or an indirect connection through an intermediate medium, or a connection within two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood through the specific circumstances.

[0029] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0030] like Figures 1 to 4 As shown, this utility model discloses a high-efficiency and high-safety drying device for wafers, including a housing 1 and a receiving cavity 11 opened therein. A heating plate 3 is fixed in the receiving cavity 11. The heating plate 3 is prior art, as disclosed in publication number CN1791286A, etc., and will not be described in detail here.

[0031] A liquid inlet nozzle 31 for communicating with IPA solvent is provided on one side of the heating plate 3 and mounted on the housing 1. A dehydration plate 4 is provided above the heating plate 3, and a drain port is provided on the dehydration plate 4. A drain pipe 41 is fixed on the housing 1, and the drain pipe 41 is connected to the drain port through a branch pipe 42.

[0032] A condenser assembly 5 is fixedly mounted on the housing 1 directly above the dehydration tray 4. The condenser assembly 5 includes at least a limiting block 52 fixed on the inner wall of the housing 1. The limiting block 52 has a limiting groove that matches the condenser pipe 51. The condenser pipe is snapped into place by the limiting block, making assembly simple and convenient, and facilitating disassembly, replacement and maintenance, which greatly improves assembly and maintenance efficiency.

[0033] In this embodiment, the condenser tubes 51 are arranged in a circular pattern and are fitted into the limiting groove. One end of each condenser tube 51 is connected to an inlet pipe 53 fixed to the housing 1, and the other end is connected to an outlet pipe 54 fixed to the housing 1. The inlet pipe 53 and the outlet pipe 54 are connected to an external cooling device, which cools the coolant in the condenser tubes 51 to ensure that the coolant is always within the operating temperature range and allows for the circulation of condensate.

[0034] The housing 1 is equipped with a transfer assembly 2 that can clamp and transfer the basket 100 between the dehydration tray 4 and the condensation assembly 5. Specifically, the transfer assembly 2 includes at least a bracket 6 fixed to one side of the housing 1. A transmission frame 62 is fixed on the bracket 6, and a transmission screw is pivotally mounted on the transmission frame 62. A transmission nut, which drives the transmission screw, is mounted on the transmission screw. A transmission block 63 is fixed on the transmission nut, and a support rod 64 is fixed on the transmission block 63. A positioning groove adapted to the outer contour of the support rod 64 is provided on the cover plate 8. A support plate 65 is fixed to the end of the support rod 64, and the basket 100 is fixed on the support plate 65. The use of screw drive utilizes the high precision and stable reliability of screw drive. In addition, this structure is easy to maintain and improves work efficiency.

[0035] Another key design feature of this invention is that the top of the housing 1 is symmetrically and pivotally mounted on the cover plate 8. The cover plate 8, driven by a drive assembly, can be aligned with the cover plate to seal the receiving cavity 11. Each cover plate 8 is fixedly equipped with an arc-shaped guide plate 9. When the cover plates 8 are aligned, the inner walls of the guide plates 9 are in close contact with each other, and the outer wall of the guide plate 9 is located below the inner wall of the guide plate 9, and directly above the water collection plate 7. This ingenious design, with the cover plates 8 working together to seal the housing 1, prevents IPA solvent vapor from contacting air, avoiding explosions and improving safety. Furthermore, the arc-shaped design of the guide plates guides and diverts the cooled IPA solvent liquid, preventing it from dripping onto the wafer and eliminating the possibility of metal ions being released from the guide plates and cover plates at high temperatures, thus contaminating the wafer and improving yield.

[0036] In this preferred embodiment, the drive assembly includes at least a pivot block 81 fixedly mounted on the housing 1. A pivot plate 82 is pivotally mounted on the pivot block 81, and the other end of the pivot plate 82 is fixedly mounted on the cover plate 8. A cylinder seat 83 is also fixedly mounted on the housing 1. The cylinder seat 83 is pivotally connected to the housing of a drive cylinder 84. A drive connector 85 is fixedly mounted on the cylinder shaft of the drive cylinder 84, and the drive connector 85 is pivotally connected to the center of the pivot plate 82. In the above embodiment, the drive assembly has a sophisticated drive structure, stable and reliable movement, and can achieve precise control of the movement position.

[0037] Furthermore, a baffle plate 86 is fixedly provided on the housing 1, and a blocker 87 is fixedly provided on the baffle plate 86, which can play a limiting role.

[0038] A water collection plate 7 is provided directly below the condenser assembly 5 to collect condensate. The water collection plate 7 includes at least a water receiving part 71 fixed to the inner wall of the housing 1 and a water blocking part 72 on the other side of the water receiving part 71. The minimum distance between the water blocking part 72 and the inner wall of the housing 1 is greater than the maximum distance between the outer circumferential surface of the condenser tube 51 on the condenser assembly 5 and the inner wall of the housing 1. In the above description, the water collection plate 7 is cleverly positioned to collect IPA solvent liquid on the condenser tube 51 and the guide plate, facilitating the discharge of IPA solvent liquid from the outlet on the water collection plate 7. At the same time, it can also prevent the evaporation of IPA solvent liquid containing metal ions under the action of the heating plate 3, which would cause secondary contamination to the wafer, and greatly improve the yield.

[0039] In this preferred embodiment, the water-blocking part 72 is vertically arranged, the included angle between the water-blocking part 72 and the water-receiving part 71 is an obtuse angle, and the included angle between the water-receiving part 71 and the inner wall of the housing 1 is an acute angle. The above is a preferred embodiment. Of course, other angles are also possible. This utility model does not make specific limitations and all of them fall within the protection scope of this utility model.

[0040] A vacuum pump 66 is fixedly mounted on the support 6. The vacuum pump 66 has an exhaust pipe 67 connected to a bypass pipe 68. The other end of the bypass pipe 68 is connected to an exhaust box 69 fixed to the housing 1. The exhaust box 69, under the action of the vacuum pump 66, can exhaust IPA solvent vapor, preventing IPA solvent vapor from flashing and exploding upon contact with a spark, thus improving safety.

[0041] The bottom of the housing 1 is also equipped with a cooling pipe 10, which is located below the heating plate 3. The cooling pipe 10 is equipped with a control valve, which is electrically connected to a temperature sensor installed inside the housing 1. When the temperature of the temperature sensor exceeds the predetermined temperature, the heating plate can be shut off in time. At the same time, the temperature can be reduced through the cooling pipe 10 to prevent the IPA solvent vapor temperature from becoming too high and causing an accident.

[0042] A carbon dioxide box 11 is fixed on the housing 1. The carbon dioxide box 11 has nozzles 12 on its upper surface and inside. The carbon dioxide box 11 is connected to the carbon dioxide storage tank outside. The carbon dioxide box 11 can be used for emergency fire extinguishing in case of an accident.

[0043] The working process of this utility model is briefly described below:

[0044] In use, the transfer assembly 2 controls the basket 100 to move downwards to a predetermined position within the receiving cavity 11. At this time, the drive cylinder 84 controls the cover plate 8 to close via the drive connector 85 and the pivot plate 82. After the cover plate 8 is closed, the exhaust pump 66 starts, drawing air from the exhaust box 69 through the exhaust pipe 67, creating a vacuum in the receiving cavity 11. IPA solvent is then sprayed into the receiving cavity 11 through the liquid inlet nozzle 31. Under the action of the heating plate 3, the IPA solvent vaporizes and rises. After passing through the dehydration tray 4, the IPA solvent vapor combines with the moisture on the wafers within the basket 100. The combined IPA solvent vapor becomes IPA solvent liquid, which falls into the dehydration tray under gravity and is discharged from the drain port. The remaining IPA solvent vapor that has not combined with moisture continues to rise and is condensed into IPA solvent liquid as it passes through the condensation assembly, falling into the water collection plate 7. The remaining IPA solvent vapor comes into contact with the guide plate to form IPA solvent liquid, which also falls into the water collection plate 7 and is discharged from the outlet on the water collection plate 7.

[0045] It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This way of describing the specification is only for clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0046] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

Claims

1. A high-efficiency and high-safety wafer drying device, comprising a housing (1) and a receiving cavity (11) therein, wherein a heating plate (3) is fixedly disposed in the receiving cavity (11), and a liquid inlet nozzle (31) disposed on one side of the heating plate (3) for communicating with IPA solvent is provided on the housing (1); a dehydration tray (4) is provided above the heating plate (3), and a condensation assembly (5) is fixedly disposed on the housing (1) directly above the dehydration tray (4); and a transfer assembly (2) is provided on the housing (1) for clamping and transferring a basket (100) between the dehydration tray (4) and the condensation assembly (5); characterized in that: A water collection plate (7) for collecting condensate is provided directly below the condensation component (5). A symmetrical and pivotally arranged cover plate (8) is provided on the top of the housing (1). The cover plate (8) can be driven by the drive component to make the two be in the same plane to seal the receiving cavity (11) relative to each other. An arc-shaped guide plate (9) is fixed on each cover plate (8). When the cover plate (8) is in the same plane, the inner walls of the guide plates (9) are in close contact with each other, the outer wall of the guide plate (9) is located below the inner wall of the guide plate (9), and the outer wall of the guide plate (9) is located directly above the water collection plate (7).

2. The high-efficiency and high-safety wafer drying device according to claim 1, characterized in that: The water collection plate (7) includes at least a water receiving part (71) fixed on the inner wall of the box (1) and a water blocking part (72) provided on the other side of the water receiving part (71). The minimum distance between the water blocking part (72) and the inner wall of the box (1) is greater than the maximum distance between the outer circumferential surface of the condenser tube (51) on the condenser assembly (5) and the inner wall of the box (1).

3. The wafer high-efficiency and high-safety drying device according to claim 2, characterized in that: The water-blocking part (72) is vertically arranged, and the included angle between the water-blocking part (72) and the water-receiving part (71) is an obtuse angle, while the included angle between the water-receiving part (71) and the inner wall of the box (1) is an acute angle.

4. The high-efficiency and high-safety wafer drying device according to claim 1, characterized in that: The drive assembly includes at least a pivot block (81) fixedly mounted on the housing (1), a pivot plate (82) pivotally mounted on the pivot block (81), and the other end of the pivot plate (82) fixedly mounted on the cover plate (8); a cylinder seat (83) is also fixedly mounted on the housing (1), the cylinder seat (83) is pivotally connected to the housing of the drive cylinder (84), a drive connector (85) is fixedly mounted on the cylinder shaft of the drive cylinder (84), and the drive connector (85) is pivotally connected to the middle part of the pivot plate (82); a baffle plate (86) is fixedly mounted on the housing (1), and a blocker (87) is fixedly mounted on the baffle plate (86).

5. The high-efficiency and high-safety wafer drying device according to claim 1, characterized in that: A carbon dioxide box (11) is fixed on the box (1). The upper surface and the inside of the carbon dioxide box (11) are provided with nozzles (12). The carbon dioxide box (11) is connected to the carbon dioxide storage tank outside.

6. The high-efficiency and high-safety wafer drying device according to claim 2, characterized in that: The condensation assembly (5) includes at least a limiting block (52) fixed on the inner wall of the housing (1). The limiting block (52) has a limiting groove adapted to the condenser tube (51). The condenser tube (51) is arranged in a ring and is locked in the limiting groove. One end of the condenser tube (51) is connected to the liquid inlet pipe (53) fixed on the housing (1), and the other end is connected to the liquid outlet pipe (54) fixed on the housing (1).

7. The high-efficiency and high-safety wafer drying apparatus according to claim 1, characterized in that: The transfer assembly (2) includes at least a bracket (6) fixed on one side of the box (1), a transmission frame (62) fixed on the bracket (6), a transmission screw pivotally mounted on the transmission frame (62), a transmission nut for screw transmission on the transmission screw, a transmission block (63) fixed on the transmission nut, a support rod (64) fixed on the transmission block (63), a positioning groove adapted to the outer contour of the support rod (64) on the cover plate (8), a support plate (65) fixed on the end side of the support rod (64), and the basket (100) fixed on the support plate (65).

8. The high-efficiency and high-safety wafer drying apparatus according to claim 7, characterized in that: A blower pump (66) is fixed on the bracket (6), and a blower pipe (67) is provided on the blower pump (66). The blower pipe (67) is connected to a bypass pipe (68), and the other end of the bypass pipe (68) is connected to an exhaust box (69) fixed on the box (1).

9. The high-efficiency and high-safety wafer drying apparatus according to claim 7, characterized in that: The dehydration tray (4) is provided with a drain port, and the box body (1) is fixed with a drain pipe (41). The drain pipe (41) is connected to the drain port through a branch pipe (42).

10. The high-efficiency and high-safety wafer drying apparatus according to claim 7, characterized in that: The bottom of the box (1) is also provided with a cooling pipe (10), which is located below the heating plate (3). The cooling pipe (10) is provided with a control valve, which is electrically connected to a temperature sensor installed in the box (1).

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