Formic acid supply system

Abstract

The utility model relates to the technical field of formic acid injection, in particular to a formic acid supply system. The formic acid supply system comprises a formic acid barrel, a formic acid mixing barrel, an active foaming gas inlet pipe, a passive foaming gas inlet pipe, a mixed gas outlet pipe and a diaphragm valve, a formic acid outlet pipe of the formic acid barrel is arranged at the bottom of the formic acid barrel, a mixed formic acid inlet pipe of the formic acid mixing barrel is arranged at the top of the formic acid mixing barrel, the diaphragm valve is arranged at the inlet end of the mixed formic acid inlet pipe, and the active foaming gas inlet pipe is arranged at the top of the formic acid mixing barrel. The passive foaming gas inlet pipe is arranged at the top of the formic acid mixing barrel, a foaming pipe of the active foaming gas inlet pipe is arranged at the bottom of the formic acid mixing barrel, and the mixed gas outlet pipe is arranged at the top of the formic acid mixing barrel. The distribution uniformity in the formic acid mixing barrel is good, and the overall foaming quality is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to formic acid injection technical field especially relates to an ant acid supply system. BACKGROUND

[0002] Formic acid, commonly known as ant acid, is a colorless liquid with irritating odor, volatile, weak electrolyte, melting point 8.6 DEG C, boiling point 100.8 DEG C, strong acidity, corrosive, can stimulate the skin to bubble, is organic chemical raw material.Formic acid is strong reducing agent, formic acid gas itself can consume oxygen by chemical reaction under high temperature and form no oxygen welding, can also reduce the surface of the metal oxidized by reduction reaction and form clean metal surface.Therefore, in the field of semiconductors and other welding packaging fields, as cleaning agent or reducing agent, the equipment using formic acid process is more and more.

[0003] The distribution uniformity of the bubble in the formic acid mixing barrel of the prior art ant acid supply system is not good, and the overall quality of foaming is low. SUMMARY

[0004] The utility model provides an ant acid supply system to solve the problem of the distribution uniformity of the formic acid mixing barrel in the prior art, and the low overall quality of foaming.

[0005] An ant acid supply system, comprising a formic acid barrel, a formic acid mixing barrel, an active foaming gas inlet pipe, a passive foaming gas inlet pipe, a mixed gas outlet pipe and a diaphragm valve, wherein the formic acid outlet pipe of the formic acid barrel is arranged at the bottom of the formic acid barrel, the mixed formic acid inlet pipe of the formic acid mixing barrel is arranged at the top of the formic acid mixing barrel, the inlet end of the mixed formic acid inlet pipe is provided with the diaphragm valve, the active foaming gas inlet pipe is arranged at the top of the formic acid mixing barrel, the passive foaming gas inlet pipe is arranged at the top of the formic acid mixing barrel, the foaming pipe of the active foaming gas inlet pipe is arranged at the bottom of the formic acid mixing barrel, and the mixed gas outlet pipe is arranged at the top of the formic acid mixing barrel.

[0006] According to the ant acid supply system of the utility model, the inlet end of the passive foaming gas inlet pipe and the active foaming gas inlet pipe is provided with the filtering mechanism, and the inlet end of the filtering mechanism is provided with the gas tank.

[0007] According to the ant acid supply system of the utility model, the formic acid mixing barrel comprises a formic acid mixing barrel body, a temperature sensor and a heating belt, the temperature sensor is arranged inside the formic acid mixing barrel body, and the heating belt is arranged on the outer layer of the formic acid mixing barrel body.

[0008] The formic acid supply system also comprises a second pressure sensor and a second safety mechanism, and the top of the formic acid mixing barrel body is provided with the second pressure sensor and the second safety mechanism.

[0009] The formic acid supply system also comprises a formic acid barrel, a gas first inlet pipe, a first low liquid level sensor, a first high liquid level sensor and a formic acid inlet pipe, and the lower part of the formic acid barrel is provided with the first low liquid level sensor, the upper part of the formic acid barrel is provided with the first high liquid level sensor, the top of the formic acid barrel is provided with the formic acid inlet pipe, and the top of the formic acid barrel is provided with the gas first inlet pipe.

[0010] The formic acid supply system also comprises a pressure regulating valve and a gas inlet one-way valve, and the inlet end of the gas first inlet pipe is provided with the pressure regulating valve and the gas inlet one-way valve.

[0011] The formic acid supply system also comprises a first pressure sensor and a first safety mechanism, and the top of the formic acid barrel is provided with the first pressure sensor and the first safety mechanism.

[0012] The formic acid supply system also comprises a filter mechanism, and the filter mechanism comprises a filter valve, a gas second inlet pipe and a flow meter, the inlet end of the gas second inlet pipe is provided with the flow meter, and the inlet end of the flow meter is provided with the filter valve.

[0013] The formic acid supply system also comprises a gas tank, and the outer layer of the gas tank is provided with a heating belt.

[0014] The heating belt can be conveniently matched with a temperature controller, the temperature can be quickly and flexibly adjusted, the heating temperature can be accurately set and controlled, the heating belt has small volume and light weight, can be wound on the surface of the formic acid mixing barrel, is simple to operate, does not need to be large-scalely reconstructed or installed with a complex fixing device, has low maintenance cost and is convenient to check and replace, has high heating speed, can make the formic acid mixing barrel reach a required temperature in a short time, improves work efficiency and reduces waiting time, improves bubble distribution by active foaming and passive foaming, makes the bubble distribution in the formic acid mixing barrel more uniform, improves the overall quality of foaming, makes the foaming process more stable and less affected by external factors, guarantees that the performance and quality of each batch of products are more stable, and the filter valve guarantees the purity of nitrogen, removes impurity particles and separates liquid impurities. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0016] Figure 1 It is a schematic diagram of the perspective view structure of the injection system;

[0017] Figure 2 It is a schematic diagram of the perspective view structure of the formic acid barrel;

[0018] Figure 3 It is a schematic diagram of the perspective view structure of the formic acid mixing barrel;

[0019] Figure 4 It is a schematic diagram of the perspective view structure of the filtering mechanism;

[0020] The drawings are as follows: 1, formic acid barrel; 2, formic acid mixing barrel; 3, diaphragm valve; 11, formic acid barrel body; 12, first low liquid level sensor; 13, first high liquid level sensor; 14, gas first inlet pipe; 15, pressure regulating valve; 16, formic acid outlet pipe; 17, gas inlet check valve; 18, formic acid inlet pipe; 19, first pressure sensor; 20, first safety mechanism; 21, heating belt; 22, mixing barrel formic acid inlet pipe; 23, passive foaming gas inlet pipe; 24, active foaming gas inlet pipe; 25, mixed gas outlet pipe; 26, second safety mechanism; 27, second pressure sensor; 28, formic acid mixing barrel body; 29, second low liquid level sensor; 31, filtering valve; 32, flow meter; 33, gas second inlet pipe. DETAILED DESCRIPTION

[0021] The embodiments of the present application will be further described in detail below in combination with the drawings and examples. The following examples are used to illustrate the present application, but cannot be used to limit the scope of the present application.

[0022] In the description of the embodiments of the present application, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0023] In the description of the embodiments of the present application, it should be pointed out that, unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium. For ordinary skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0024] In the embodiments of the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature. The first and second features can be in direct contact, or the first and second features can be in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" of the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" of the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0025] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in the present application and the features of different embodiments or examples without contradiction.

[0026] The following will be described in detail Figures 1-4 The antacid supply system of the present application comprises a formic acid barrel 1, a formic acid mixing barrel 2, an active foaming gas inlet pipe 24, a passive foaming gas inlet pipe 23, a mixed gas outlet pipe 25 and a diaphragm valve 3. The formic acid outlet pipe 16 of the formic acid barrel 1 is arranged at the bottom of the formic acid barrel 1, the mixed formic acid inlet pipe 22 of the formic acid mixing barrel 2 is arranged at the top of the formic acid mixing barrel 2, the inlet end of the mixed formic acid inlet pipe 22 is provided with a diaphragm valve 3, the active foaming gas inlet pipe 24 is arranged at the top of the formic acid mixing barrel 2, the passive foaming gas inlet pipe 23 is arranged at the top of the formic acid mixing barrel 2, the foaming pipe of the active foaming gas inlet pipe 24 is arranged at the bottom of the formic acid mixing barrel 2, the passive foaming gas inlet pipe 23 is arranged above the formic acid of the formic acid mixing barrel 2, and the mixed gas outlet pipe 25 is arranged at the top of the formic acid mixing barrel 2.

[0027] In some embodiments, the gas tank and the filtering mechanism are further included, the filtering mechanism is arranged at the inlet end of the passive foaming gas inlet pipe 23 and the active foaming gas inlet pipe 24, and the gas tank is arranged at the inlet end of the filtering mechanism.

[0028] In some embodiments, the formic acid mixing barrel 2 comprises a formic acid mixing barrel body 28, a temperature sensor and a heating belt 21, the temperature sensor is arranged inside the formic acid mixing barrel body 28, and the heating belt 21 is arranged on the outer layer of the formic acid mixing barrel body 28.

[0029] In some embodiments, the second pressure sensor 27 and the second safety mechanism 26 are further included, and the second pressure sensor 27 and the second safety mechanism 26 are arranged at the top of the formic acid mixing barrel body 28.

[0030] In some embodiments, the formic acid barrel 1 comprises a formic acid barrel body 11, a gas first inlet pipe 14, a first low liquid level sensor 12, a first high liquid level sensor 13 and a formic acid inlet pipe 18, the first low liquid level sensor 12 is arranged at the lower part of the formic acid barrel 1, the first high liquid level sensor 13 is arranged at the upper part of the formic acid barrel 1, the formic acid inlet pipe 18 is arranged at the top of the formic acid barrel 1, and the gas first inlet pipe 14 is arranged at the top of the formic acid barrel 1.

[0031] In some embodiments, the pressure regulating valve 15 and the gas inlet one-way valve 17 are further included, and the pressure regulating valve 15 and the gas inlet one-way valve 17 are arranged at the inlet end of the gas first inlet pipe 14.

[0032] In some embodiments, the first pressure sensor 19 and the first safety mechanism 20 are further included, and the first pressure sensor 19 and the first safety mechanism 20 are arranged at the top of the formic acid barrel 1.

[0033] In some embodiments, the filtering mechanism comprises a filtering valve 31, a gas second inlet pipe 33 and a flow meter 32, the flow meter 32 is arranged at the inlet end of the gas second inlet pipe 33, and the filtering valve 31 is arranged at the inlet end of the flow meter 32.

[0034] In some embodiments, the heating belt is arranged on the outer layer of the gas tank.

[0035] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A formic acid supply system, characterized by, The device comprises a formic acid barrel, a formic acid mixing barrel, an active foaming gas inlet pipe, a passive foaming gas inlet pipe, a mixed gas outlet pipe and a diaphragm valve; the formic acid outlet pipe of the formic acid barrel is arranged at the bottom of the formic acid barrel, the mixed formic acid inlet pipe of the formic acid mixing barrel is arranged at the top of the formic acid mixing barrel, the inlet end of the mixed formic acid inlet pipe is provided with the diaphragm valve, the active foaming gas inlet pipe is arranged at the top of the formic acid mixing barrel, the passive foaming gas inlet pipe is arranged at the top of the formic acid mixing barrel, the foaming pipe of the active foaming gas inlet pipe is arranged at the bottom of the formic acid mixing barrel, and the mixed gas outlet pipe is arranged at the top of the formic acid mixing barrel.

2. The formic acid supply system according to claim 1, characterized in that The device further comprises a gas tank and a filtering mechanism, the inlet end of the passive foaming gas inlet pipe and the active foaming gas inlet pipe is provided with the filtering mechanism, and the inlet end of the filtering mechanism is provided with the gas tank.

3. The formic acid supply system according to claim 1, characterized in that The formic acid mixing barrel comprises a formic acid mixing barrel body, a temperature sensor and a heating belt; the temperature sensor is arranged inside the formic acid mixing barrel body, and the heating belt is arranged on the outer layer of the formic acid mixing barrel body.

4. The formic acid supply system according to claim 3, characterized in that The device further comprises a second pressure sensor and a second safety mechanism; the second pressure sensor and the second safety mechanism are arranged at the top of the formic acid mixing barrel body.

5. The formic acid supply system according to claim 1, characterized in that The formic acid barrel comprises a formic acid barrel body, a gas first inlet pipe, a first low liquid level sensor, a first high liquid level sensor and a formic acid inlet pipe; the first low liquid level sensor is arranged at the lower part of the formic acid barrel, the first high liquid level sensor is arranged at the upper part of the formic acid barrel, the formic acid inlet pipe is arranged at the top of the formic acid barrel, and the gas first inlet pipe is arranged at the top of the formic acid barrel.

6. The formic acid supply system according to claim 5, characterized in that The device further comprises a pressure regulating valve and a gas inlet one-way valve, and the inlet end of the gas first inlet pipe is provided with the pressure regulating valve and the gas inlet one-way valve.

7. The formic acid supply system according to claim 5, characterized in that The device further comprises a first pressure sensor and a first safety mechanism; the first pressure sensor and the first safety mechanism are arranged at the top of the formic acid barrel.

8. The formic acid supply system of claim 2, wherein The filtering mechanism comprises a filtering valve, a gas second inlet pipe and a flow meter, the inlet end of the gas second inlet pipe is provided with the flow meter, and the inlet end of the flow meter is provided with the filtering valve.

9. The formic acid supply system according to claim 2, characterized in that The outer layer of the gas tank is provided with a heating belt.

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