Dismounting jig for electrostatic chuck

Abstract

The utility model relates to the technical field of electrostatic chuck dismounting equipment, and provides a dismounting jig for an electrostatic chuck, which comprises a rotatable worm vertically mounted in the center of a base, and a plurality of support arm components sequentially arranged on the base at intervals around the worm and used for being connected to the bottom of the electrostatic chuck.

Description

Technical Field

[0001] This utility model relates to the technical field of electrostatic chuck disassembly equipment, and specifically to a disassembly fixture for an electrostatic chuck. Background Technology

[0002] In semiconductor equipment such as semiconductor etching machines, electrostatic chucks (ESCs) are one of the important tools for wafer adsorption and process reactions. When an ESC has been used for a long time, or when there are voltage / etching rate problems and it needs to be replaced or sent for repair, the electrostatic chuck needs to be disassembled and removed.

[0003] In the existing technology, removing the electrostatic chuck requires lifting it up and then manually applying force to separate the electrostatic chuck in a vacuum state. During the manual separation process, uneven force application can cause the parts assembled inside the electrostatic chuck to shake or even tilt and fall off, resulting in damage caused by the collision of the internal parts of the electrostatic chuck.

[0004] Therefore, we propose a disassembly fixture for electrostatic chucks. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this utility model provides a disassembly fixture for electrostatic chucks. It features several support arm assemblies that are evenly connected to the bottom of the electrostatic chuck. A worm gear synchronously transmits power to the transmission gear, ensuring synchronized swinging of the support arms. Furthermore, a chuck connecting rod is hinged to the first end of each support arm, and a bolt structure is hinged to the end of the chuck connecting rod. This reduces the impact of the support arm swinging process on the bottom of the electrostatic chuck, improves the stability of disassembling the electrostatic chuck, and lowers construction costs.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, this utility model provides the following technical solution:

[0009] A disassembly fixture for an electrostatic chuck is characterized by comprising: a rotatable worm gear vertically mounted at the center of a base, and a plurality of support arm assemblies arranged at intervals around the worm gear on the base for connecting to the bottom of the electrostatic chuck.

[0010] Preferably, the support arm assembly includes a support arm, the end of which is rotatably connected to the base via a bearing seat, and the end of the support arm is provided with a mounting groove, in which a drive shaft is assembled and a drive gear meshing with a worm gear is keyed to the drive shaft.

[0011] Preferably, the first end of the support arm is bent, and the bending direction is towards the axis of the worm gear, and a suction cup connecting rod is hinged to the first end of the support arm.

[0012] Preferably, the bending angle of the first end of the support arm is 90 degrees.

[0013] Preferably, the number of support arm assemblies is three.

[0014] Preferably, the end of the suction cup connecting rod is hinged to a bolt structure, which is assembled with the threaded hole of the electrostatic suction cup.

[0015] Preferably, a vacuum suction cup is installed at the end of the suction cup connecting rod.

[0016] (III) Beneficial Effects

[0017] This utility model provides a disassembly fixture for an electrostatic chuck. It offers the following advantages: by incorporating several support arm assemblies that are evenly connected to the bottom of the electrostatic chuck, and using a worm gear to synchronously transmit power to the transmission gear, the support arms swing synchronously. Furthermore, a chuck connecting rod is hinged to the first end of each support arm, and a bolt structure is hinged to the end of the chuck connecting rod. This reduces the impact of the support arm swinging process on the bottom of the electrostatic chuck, improves the stability of disassembling the electrostatic chuck, and lowers construction costs. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural schematic diagram of the present utility model;

[0019] Figure 2 This is a schematic diagram of the initial state of the structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the lowering of the support arm structure of this utility model.

[0021] In the picture:

[0022] 1. Base;

[0023] 2. Worm gear;

[0024] 3. Support arm assembly; 31. Support arm; 32. Transmission gear; 33. Suction cup connecting rod;

[0025] 4. Support legs. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0027] See attached document Figure 1-3 A disassembly fixture for an electrostatic chuck includes a base 1. Several support legs 4 are installed on the bottom of the base 1 and are spaced apart from each other. The arrangement of the support legs 4 creates a gap between the base 1 and the placement surface, which also improves the stability of the base 1.

[0028] A rotatable worm gear 2 is vertically mounted at the center of the base 1. Correspondingly, a drive unit is installed at the bottom of the base 1 to drive the worm gear 2 to rotate.

[0029] Several support arm assemblies 3 are arranged sequentially and at intervals around the worm gear 2 on the base 1. Each support arm assembly 3 includes a support arm 31. The end of the support arm 31 is rotatably connected to the base 1 through a bearing seat. The end of the support arm 31 is provided with a mounting groove, and a drive shaft is assembled in the mounting groove. A drive gear 32 is keyed to the drive shaft. It can be understood that the drive gear 32 meshes with the worm gear 2. The rotation of the worm gear 2 drives the support arm 31 to swing back and forth through the drive gear 32.

[0030] The first end of the support arm 31 is bent, and the bending direction is towards the axis of the worm gear 2. In some embodiments, the bending angle of the first end of the support arm 31 is 90 degrees.

[0031] The first end of the support arm 31 is hinged to a suction cup connecting rod 33, and the end of the suction cup connecting rod 33 is hinged to a bolt structure. The bolt structure is assembled with the threaded hole of the electrostatic chuck. Specifically, the fixation between the bolt structure and the electrostatic chuck is achieved by tightening the bolt structure.

[0032] In other embodiments, a vacuum suction cup is installed at the end of the suction cup connecting rod 33. The vacuum suction cup is adsorbed onto the surface of the electrostatic suction cup, which facilitates the fixation between the suction cup connecting rod 33 and the electrostatic suction cup.

[0033] refer to Figure 2 In the initial state, several support arms 31 swing and rise to their initial positions, and the bolt structure (vacuum suction cup) of the suction cup connecting rod 33 of each support arm 31 is sequentially installed on the bottom of the electrostatic suction cup. The top structure of the electrostatic suction cup can be clamped and fixed from all sides by a clamp or by adsorption and fixation by a vacuum suction cup. After the above installation is completed, the worm gear 2 is started to rotate, causing the support arms 31 to swing (see reference). Figure 3 This allows the electrostatic chuck to be pulled evenly at its bottom.

[0034] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0035] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A dismounting tool for an electrostatic chuck, characterized by: include: A rotatable worm gear (2) is vertically mounted in the center of the base (1). Several support arm assemblies (3) are also arranged around the worm gear (2) on the base (1) at intervals to connect to the bottom of the electrostatic chuck.

2. A dismounting tool for an electrostatic chuck as defined in claim 1, characterized in that: The support arm assembly (3) includes a support arm (31), the end of which is rotatably connected to the base (1) via a bearing seat, and the end of the support arm (31) is provided with a mounting groove, and a drive shaft and a drive gear (32) that meshes with the worm (2) are mounted in the mounting groove.

3. The disassembly fixture for an electrostatic chuck as described in claim 2, characterized in that: The first end of the support arm (31) is bent, and the bending direction is towards the axis of the worm (2). The first end of the support arm (31) is hinged to a suction cup connecting rod (33).

4. The electrostatic chuck of claim 2, wherein: The first end of the outrigger (31) is bent at an angle of 90 degrees.

5. The electrostatic chuck of claim 1, wherein: The number of the support arm assemblies (3) is three.

6. A dismounting tool for an electrostatic chuck as defined in claim 3, characterized in that: The end of the suction cup connecting rod (33) is hinged to a bolt structure, which is assembled with the threaded hole of the electrostatic suction cup.

7. A dismounting tool for an electrostatic chuck as defined in claim 3, characterized in that: A vacuum suction cup is installed at the end of the suction cup connecting rod (33).

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