Rapid-clamping high-temperature-resistant molybdenum seed crystal chuck

Abstract

The utility model discloses a high-temperature-resistant molybdenum seed crystal chuck capable of rapidly clamping, and relates to the technical field of molybdenum seed crystal chucks, the high-temperature-resistant molybdenum seed crystal chuck comprises a chuck shell, and the outer wall of the chuck shell is fixedly connected with a supporting plate. A plurality of dampers on the inner side of the connecting shell can separate the connecting shell from the chuck, meanwhile, the pressure generated by vibration of the connecting shell is relieved through the elasticity of a damping spring, a positioning block and a second positioning block are connected through connecting rods, and therefore a shape similar to a triangle is formed between the two connecting rods to support the connecting shell and a bottom protection plate; damping is carried out through the damper and the spring, the shell and the chuck are separated through the multiple connecting rods, and the problem that in the process that the single crystal furnace carries out processing reaction on crystals in the chuck, the single crystal furnace possibly shakes, the chuck vibrates, and the crystals in the chuck are damaged due to vibration is solved.

Description

Technical Field

[0001] This utility model belongs to the field of molybdenum seed crystal chuck technology, and in particular relates to a high-temperature resistant molybdenum seed crystal chuck for rapid clamping. Background Technology

[0002] In crystal growth processes in semiconductors, optical crystals, and specialty materials, the seed crystal, as the initial nucleus for crystal growth, plays a crucial role in the quality and efficiency of crystal growth through its fixation and clamping. Molybdenum, due to its high melting point, excellent high-temperature mechanical properties, and chemical stability, is often used as a material for seed crystal chucks to reliably clamp seed crystals in high-temperature environments.

[0003] The existing molybdenum seed crystal chuck uses slots and jaws on the inside to slowly insert the object to be processed into the chuck, and uses the jaws to hold the object in place for quick fixation. Then, the chuck is quickly installed on the single crystal furnace using the threads on the outside of the chuck.

[0004] After the above equipment is completed, the single crystal furnace may shake and cause the chuck to vibrate during the processing reaction of the crystal in the chuck, which may lead to the crystal in the chuck being damaged due to vibration. Therefore, we propose a high-temperature resistant molybdenum seed crystal chuck for rapid clamping. Utility Model Content

[0005] The purpose of this invention is to provide a high-temperature resistant molybdenum seed crystal chuck for quick clamping. Through the shock absorption mechanism and the clamping mechanism, the problem of the single crystal furnace shaking and causing the chuck to vibrate during the processing reaction of the crystal in the chuck is solved, which may lead to the crystal in the chuck being damaged due to vibration.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution:

[0007] This utility model is a high-temperature resistant chuck for quick clamping of molybdenum seed crystals, including a chuck shell, and a support plate is fixedly connected to the outer wall of the chuck shell;

[0008] The outer wall of the chuck housing is provided with a shock-absorbing mechanism, which includes a connecting housing. The outer wall of the connecting housing is fixedly connected to the outer wall of the support plate. A partition is fixedly connected to the top outer wall of the chuck housing. A bottom protective plate is fixedly connected to the top outer wall of the partition. Several dampers are fixedly connected to the inner wall of the connecting housing. Shock-absorbing springs are fixedly connected to the outer walls of the dampers. Several positioning blocks are fixedly connected to the inner wall of the connecting housing. A connecting rod is rotatably connected to the outer wall of the positioning block. A second positioning block is rotatably connected to the outer wall of the connecting rod away from the positioning block. The outer wall of the second positioning block is fixedly connected to the outer wall of the bottom protective plate. A threaded fixing block is fixedly connected to the top outer wall of the connecting housing. A clamping mechanism is provided on the inner wall of the chuck housing.

[0009] Furthermore, the clamping mechanism includes a sensor, the outer wall of which is fixedly connected to the inner wall of the clamp housing, a micro motor is fixedly connected to the outer wall of the sensor, a connecting shaft is fixedly connected to the output end of the micro motor, and a gear is fixedly connected to the top outer wall of the connecting shaft.

[0010] Furthermore, a second gear meshes with the outer wall of the gear, and a plurality of gears three mesh with the outer wall of the second gear, and a positioning shaft is fixedly connected to the bottom outer wall of the gear three.

[0011] Furthermore, the outer wall of the positioning shaft is rotatably connected to the inner wall of the support plate, and gear two is fixedly connected to both the outer wall of the positioning shaft and the outer wall of the connecting shaft. A rack is embedded in the outer wall of gear two, and the outer wall of the rack is slidably connected to the inner wall of the support plate.

[0012] Furthermore, a connecting ring is fixedly connected to the bottom outer wall of the partition, and several fixed shafts are fixedly connected to the bottom outer wall of the connecting ring. Several push rods are rotatably connected to the top outer wall of the second gear.

[0013] Furthermore, a pressure plate is rotatably connected to the outer wall of the end of the push rod away from the second gear, and an elastic heat insulation plate is slidably connected to the outer wall of the pressure plate. The outer wall of the elastic heat insulation plate is fixedly connected to the outer wall of the partition.

[0014] Furthermore, the outer wall of the elastic heat insulation plate is rotatably connected to the inner wall of the clamp housing, a fixed shaft is fixedly connected to the bottom outer wall of the pressure plate, a sliding groove is provided on the inner wall of the clamp housing, and several positioning blocks are slidably connected to the inner wall of the sliding groove.

[0015] Furthermore, a push rod two is fixedly connected to the outer wall of the end of the fixed shaft away from the pressure plate, and the outer wall of the push rod two is rotatably connected to the inner wall of the positioning block three.

[0016] This utility model has the following beneficial effects:

[0017] 1. This utility model incorporates dampers and connecting rods. During crystal growth, vibrations may occur. Multiple dampers connected to the inner side of the outer shell can separate the outer shell from the chuck. Simultaneously, the elasticity of the damping springs alleviates the pressure generated by the vibration of the connecting shell. The connecting rods connect the positioning block and the second positioning block, forming a triangular shape between the two connecting rods to support the connecting shell and the bottom protective plate. This achieves vibration reduction through dampers and springs, and separates the outer shell from the chuck using multiple connecting rods. This prevents the single crystal furnace from shaking and causing the chuck to vibrate during the crystal processing reaction in the chuck, which could lead to crystal breakage due to vibration.

[0018] 2. This utility model incorporates push rods and pressure plates. The rotation of the second gear drives multiple push rods to move, which in turn move the pressure plate. During the movement of the push rods, they come into contact with a fixed shaft. This fixed shaft is secured by a connecting ring, which cannot move. Therefore, the fixed shaft pushes the push rods to rotate around the second gear, causing the push rods to push the pressure plate. The pressure plate then pushes the elastic heat insulation plate, causing it to deform and clamp the object. This achieves the goal of using the second gear to drive the push rods to move, causing the fixed shaft to rotate the push rods, and pushing the pressure plate to deform the elastic heat insulation plate, thus clamping the crystal. This prevents the crystal from shifting due to the slot method, which can lead to inconsistent crystal growth quality.

[0019] Of course, any product implementing this utility model does not necessarily need to achieve all of the advantages described above at the same time. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a cross-sectional view of the shock-absorbing structure of this utility model;

[0023] Figure 3 This is a cross-sectional view of the overall structure of this utility model;

[0024] Figure 4 This is a cross-sectional view of the clamping structure of this utility model;

[0025] Figure 5 This utility model Figure 4 Enlarged view of point A in the middle.

[0026] The attached diagram lists the components represented by each number as follows:

[0027] 1. Chuck housing; 101. Support plate; 2. Shock absorption mechanism; 201. Connecting housing; 202. Bottom protection plate; 203. Partition plate; 204. Damper; 205. Shock absorption spring; 206. Positioning block; 207. Connecting rod; 208. Positioning block two; 209. Threaded fixing block; 3. Clamping mechanism; 301. Sensor; 302. Micro motor; 303. Connecting shaft; 304. Gear; 305. Gear two; 306. Rack; 307. Positioning shaft; 308. Gear three; 309. Second gear; 310. Push rod; 311. Pressure plate; 312. Connecting ring; 313. Fixed shaft two; 314. Fixed shaft; 315. Push rod two; 316. Slide groove; 317. Positioning block three; 318. Elastic heat insulation plate. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0029] Please see Figure 1-5 As shown, this utility model is a high-temperature resistant molybdenum seed crystal chuck for quick clamping, including a chuck shell 1, and a support plate 101 is fixedly connected to the outer wall of the chuck shell 1.

[0030] The outer wall of the chuck housing 1 is provided with a shock-absorbing mechanism 2. The shock-absorbing mechanism 2 includes a connecting housing 201, the outer wall of which is fixedly connected to the outer wall of the support plate 101. A partition 203 is fixedly connected to the top outer wall of the chuck housing 1, and a bottom protective plate 202 is fixedly connected to the top outer wall of the partition 203. The partition 203 and the bottom protective plate 202 isolate the single crystal furnace from the chuck to avoid direct contact. Several dampers 204 are fixedly connected to the inner wall of the connecting housing 201, and shock-absorbing springs 205 are fixedly connected to the outer wall of the dampers 204. The dampers 204 and the shock-absorbing springs 205 alleviate the vibration generated in the single crystal furnace, and the elasticity of the shock-absorbing springs 205 absorbs the generated vibration. Several positioning blocks 206 are fixedly connected to the inner wall of the connecting shell 201. A connecting rod 207 is rotatably connected to the outer wall of the positioning block 206. A second positioning block 208 is rotatably connected to the outer wall of the connecting rod 207 away from the positioning block 206. The outer wall of the second positioning block 208 is fixedly connected to the outer wall of the bottom protective plate 202. By alternately fixing multiple positioning blocks 206 and second positioning blocks 208, and by connecting multiple connecting rods 207 to the positioning blocks 206 and second positioning blocks 208, a triangle is formed between the two connecting rods 207, thereby supporting the connecting shell 201 and the bottom protective plate 202. A threaded fixing block 209 is fixedly connected to the top outer wall of the connecting shell 201. A clamping mechanism 3 is provided on the inner wall of the chuck shell 1.

[0031] The clamping mechanism 3 includes a sensor 301, model Omron E3X-DA, which can be used to detect whether the seed crystal is accurately placed in the predetermined position of the chuck. Through precise through-beam or diffuse reflection detection, it can quickly and accurately determine the presence and position of the seed crystal, providing signal feedback for the rapid clamping of the chuck and ensuring the accuracy and stability of the seed crystal installation. The outer wall of sensor 301 is fixedly connected to the inner wall of chuck housing 1. A micro motor 302 is fixedly connected to the outer wall of sensor 301. Sensor 301 starts micro motor 302. The output end of micro motor 302 is fixedly connected to connecting shaft 303. Gear 304 is fixedly connected to the top outer wall of connecting shaft 303. Second gear 309 meshes with the outer wall of gear 304. Micro motor 302 drives connecting shaft 303 to rotate, which in turn drives gear 304 to rotate. Since gear 304 meshes with second gear 309, gear 304 drives second gear 309 to rotate. Several gears 308 mesh with the outer wall of second gear 309. The bottom of gear 308... A positioning shaft 307 is fixedly connected to the outer wall of the part. It meshes with multiple gears 308 through a second gear 309, thereby causing the second gear 309 to drive the gears 308 to rotate and drive the multiple positioning shafts 307 to rotate. The outer wall of the positioning shaft 307 is rotatably connected to the inner wall of the support plate 101. Gears 305 are fixedly connected to the outer wall of the positioning shaft 307 and the outer wall of the connecting shaft 303. A rack 306 meshes with the outer wall of the gears 305. The outer wall of the rack 306 is slidably connected to the inner wall of the support plate 101. The connecting shaft 303 and the positioning shaft 307 drive the multiple gears 305 to rotate in the same direction. Because the gears 305 mesh with the rack 306, the gears 305 drive the rack 306 to rotate.

[0032] A connecting ring 312 is fixedly connected to the bottom outer wall of the partition 203. Several fixed shafts 313 are fixedly connected to the bottom outer wall of the connecting ring 312. Several push rods 310 are rotatably connected to the top outer wall of the second gear 309. The rotation of the second gear 309 drives the push rods 310 to move, and the fixed shafts 313 push the push rods 310 to rotate around the second gear 309. A pressure plate 311 is rotatably connected to the outer wall of the end of the push rod 310 away from the second gear 309. An elastic heat insulation plate 318 is slidably connected to the outer wall of the pressure plate 311. The rotation of the push rods 310 pushes the pressure plate 311 to move, and the pressure plate 311 pushes the elastic heat insulation plate 318, deforming it and clamping the object. The outer wall of the elastic heat insulation plate 318... The outer wall of the partition 203 is fixedly connected, the outer wall of the elastic heat insulation plate 318 is rotatably connected to the inner wall of the clamp housing 1, the bottom outer wall of the pressure plate 311 is fixedly connected to the fixed shaft 314, the inner wall of the clamp housing 1 is provided with a sliding groove 316, and a number of positioning blocks 317 are slidably connected to the inner wall of the sliding groove 316. The outer wall of the fixed shaft 314 away from the pressure plate 311 is fixedly connected to the push rod 315, the outer wall of the push rod 315 is rotatably connected to the inner wall of the positioning block 317. The movement of the pressure plate 311 drives the fixed shaft 314 to move, and at the same time, the push rod 315 rotates around the positioning block 317. The push rod 310 rotates around the second gear 309, thereby pulling the positioning block 317 to slide along the inside of the sliding groove 316.

[0033] One specific application of this embodiment is:

[0034] When the operator needs to use the equipment, the object to be processed is slightly inserted into the chuck housing 1 through the narrow opening. During the process of the object entering the chuck housing 1, the object is detected by the sensor 301, which then activates the micro motor 302. The object is then continuously pushed inward until it is enveloped by the elastic heat insulation plate 318. The micro motor 302 then drives the connecting shaft 303 to rotate, which in turn drives the gear 305 to rotate. Since the gear 305 meshes with the rack 306, it causes the rack 306 to slide along the support plate 101. Simultaneously, multiple positioning shafts 307 are provided inside the support plate 101, and multiple identical teeth are fixed to the outer side of each positioning shaft 307. Gear 305 is a second gear, and these gears 305 mesh with rack 306, causing rack 306 to drive gears 305 to rotate. Gears 305 then drive positioning shaft 307 to rotate, which in turn drives top gear 308 to rotate. Gear 308 meshes with second gear 309, causing second gear 309 to rotate within the chuck housing 1. During the rotation of connecting shaft 303, gear 304 rotates, and through meshing with second gear 309, gear 304 drives second gear 309 to rotate. Since gear 304 rotates by driving connecting shaft 303 via micro motor 302, the force released by gear 304 is the greatest. The large gear first drives the second gear 309 to rotate, while the other gears 308 play an auxiliary role. The rotation of the second gear 309 then drives multiple push rods 310 to move, which in turn moves the pressure plate 311. During the movement of the push rods 310, they come into contact with the fixed shaft 313. Since the fixed shaft 313 is fixed by the connecting ring 312 and the connecting ring 312 cannot move, the fixed shaft 313 pushes the push rods 310 to rotate around the second gear 309, causing the push rods 310 to push the pressure plate 311. The pressure plate 311 then pushes the elastic heat insulation plate 318, causing it to deform and clamp the object. During the movement of the pressure plate 311, it drives the fixed shaft 314 to move, causing the fixed shaft 314 to move. Shaft 314 drives the bottom push rod 315 to rotate around the positioning block 317. Simultaneously, the movement of the pressure plate 311 causes the fixed shaft 314 to pull the push rod 315, causing the positioning block 317 to slide along the inside of the groove 316. This, combined with the fixed shaft 314 and push rod 315, causes the elastic heat insulation plate 318 to deform over a large area, thus securing the object more firmly. The device is then fixed by the threaded fixing block 209 on the outside of the connecting shell 201. During crystal growth, vibrations may occur. Multiple dampers 204 on the inside of the connecting shell 201 can separate the connecting shell 201 from the bottom protective plate 202. Simultaneously, the elasticity of the damping spring 205 alleviates the pressure generated by the vibration of the connecting shell 201.Meanwhile, multiple positioning blocks 206 and positioning blocks 208 are provided between the connecting outer shell 201 and the bottom protective plate 202, and the positioning blocks 206 and 208 are alternately fixed. Multiple connecting rods 207 connect the positioning blocks 206 and 208, forming a triangle-like structure between the two connecting rods 207. The properties of a triangle provide stable support between the connecting outer shell 201 and the bottom protective plate 202, reducing the possibility of shaking.

[0035] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0036] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to the specific implementations described. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A quick clamping high temperature resistant molybdenum seed crystal chuck comprising a chuck housing (1), characterized in that: A support plate (101) is fixedly connected to the outer wall of the chuck housing (1); The outer wall of the chuck housing (1) is provided with a shock-absorbing mechanism (2). The shock-absorbing mechanism (2) includes a connecting housing (201). The outer wall of the connecting housing (201) is fixedly connected to the outer wall of the support plate (101). A partition plate (203) is fixedly connected to the top outer wall of the chuck housing (1). A bottom protective plate (202) is fixedly connected to the top outer wall of the partition plate (203). A plurality of dampers (204) are fixedly connected to the inner wall of the connecting housing (201). A shock-absorbing spring (204) is fixedly connected to the outer wall of the damper (204). 05), a plurality of positioning blocks (206) are fixedly connected to the inner wall of the connecting shell (201), a connecting rod (207) is rotatably connected to the outer wall of the positioning block (206), a second positioning block (208) is rotatably connected to the outer wall of the connecting rod (207) away from the positioning block (206), the outer wall of the second positioning block (208) is fixedly connected to the outer wall of the bottom protective plate (202), a threaded fixing block (209) is fixedly connected to the top outer wall of the connecting shell (201), and a clamping mechanism (3) is provided on the inner wall of the chuck shell (1).

2. The quick clamping high temperature molybdenum seed crystal chuck of claim 1, wherein, The clamping mechanism (3) includes a sensor (301), the outer wall of the sensor (301) is fixedly connected to the inner wall of the chuck housing (1), a micro motor (302) is fixedly connected to the outer wall of the sensor (301), a connecting shaft (303) is fixedly connected to the output end of the micro motor (302), and a gear (304) is fixedly connected to the top outer wall of the connecting shaft (303).

3. The quick clamped high temperature molybdenum seed holder as claimed in claim 2, wherein, The outer wall of the gear (304) is meshed with a second gear (309), and the outer wall of the second gear (309) is meshed with a plurality of gears (308). The bottom outer wall of the gears (308) is fixedly connected with a positioning shaft (307).

4. The quick clamping high temperature molybdenum seed holder as claimed in claim 3, wherein, The outer wall of the positioning shaft (307) is rotatably connected to the inner wall of the support plate (101). The outer wall of the positioning shaft (307) and the outer wall of the connecting shaft (303) are both fixedly connected to a second gear (305). The outer wall of the second gear (305) contains a rack (306). The outer wall of the rack (306) is slidably connected to the inner wall of the support plate (101).

5. The quick clamping high temperature molybdenum seed holder as claimed in claim 4, wherein, A connecting ring (312) is fixedly connected to the bottom outer wall of the partition (203), and a number of fixed shafts (313) are fixedly connected to the bottom outer wall of the connecting ring (312). A number of push rods (310) are rotatably connected to the top outer wall of the second gear (309).

6. The quick clamping high temperature molybdenum seed holder as claimed in claim 5, wherein, The push rod (310) is rotatably connected to a pressure plate (311) on the outer wall of the end away from the second gear (309). The outer wall of the pressure plate (311) is slidably connected to an elastic heat insulation plate (318). The outer wall of the elastic heat insulation plate (318) is fixedly connected to the outer wall of the partition (203).

7. A high-temperature resistant molybdenum seed crystal chuck for rapid clamping according to claim 6, characterized in that, The outer wall of the elastic heat insulation plate (318) is rotatably connected to the inner wall of the clamp housing (1). The bottom outer wall of the pressure plate (311) is fixedly connected to a fixed shaft (314). The inner wall of the clamp housing (1) is provided with a sliding groove (316). The inner wall of the sliding groove (316) is slidably connected to several positioning blocks (317).

8. The quick clamping high temperature molybdenum seed holder as claimed in claim 7, wherein, A push rod two (315) is fixedly connected to the outer wall of the end of the fixed shaft (314) away from the pressure plate (311), and the outer wall of the push rod two (315) is rotatably connected to the inner wall of the positioning block three (317).

Images