Rapid film changing mechanism for exposure machine

Abstract

The utility model discloses a quick film changing mechanism for an exposure machine, which relates to the technical field of exposure machines and comprises a supporting photomask fixedly connected with a supporting rod; the telescopic mechanism is arranged in the supporting frame and is used for moving the mask plate; the rotating mechanism is arranged on the telescopic mechanism and is used for rotating the mask plate, so that the mask plate can be conveniently replaced; the clamping mechanism is arranged on the rotating mechanism and is used for clamping and fixing the mask plate to avoid collision; the clamping frame is used for clamping and fixing the mask plate; the clamping plate is fixedly connected with the clamping frame; by arranging the telescopic mechanism, the mask plate can be moved, so that the movement of the mask plate is more stable; by arranging the rotating mechanism, the mask plate is rotated, so that the mask plate is more convenient to replace; and by arranging the clamping mechanism, the mask plate is clamped and fixed, and the situation that the use of the mask plate is affected due to the fact that the mask plate is collided during replacement is avoided.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to a quick film changing mechanism for an exposure machine. Background Technology

[0002] The photomask of an exposure machine is a core component in the exposure process, primarily used in semiconductor manufacturing, microelectronics, and printed circuit board (PCB) industries. It is a metal or glass plate with a specific pattern; by illuminating it with a light source, the pattern on the photomask is precisely projected onto the material, thus achieving accurate pattern transfer.

[0003] In the existing technology, when replacing a photomask, it is necessary to first turn off the power of the exposure machine, then release the photomask fixing device, remove the photomask, clean the surface of the stage, and finally place the new photomask on the stage and align it with the stage positioning hole to complete the replacement of the photomask. However, when the operator removes the photomask, it is easy to cause shaking, which may cause the photomask to be bumped or knocked, thus affecting the use of the photomask. Therefore, this needs to be improved. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a quick film changing mechanism for an exposure machine, which aims to solve the technical problem that bumps and knocks are easily caused when changing the mask of the exposure machine.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A quick-change film mechanism for an exposure machine includes a support plate, a support frame, and a mask plate, wherein the support frame is fixedly connected to the support plate; and further includes:

[0007] A support frame is mounted on the support plate and fixedly connected to the support plate;

[0008] A support column is fixedly connected to the support plate, and the mask plate is placed on the support column;

[0009] The support rod is fixedly connected to the support frame;

[0010] A support cover is fixedly connected to the support rod;

[0011] A telescopic mechanism, located within the support frame, is used to move the mask plate;

[0012] A rotating mechanism, mounted on the telescopic mechanism, is used to rotate the mask plate, facilitating the replacement of the mask plate;

[0013] A clamping mechanism, mounted on the rotating mechanism, is used to clamp and fix the mask plate to prevent it from being bumped or knocked.

[0014] The clamping frame is used to clamp and fix the photomask.

[0015] The clamping plate is fixedly connected to the clamping frame.

[0016] Preferably, the telescopic mechanism includes:

[0017] The telescopic block is set inside the support frame and is fixedly connected to the support frame;

[0018] A telescopic cylinder is mounted on the telescopic block and is fixedly connected to the telescopic block;

[0019] A movable block is mounted on the telescopic block, slidably connected to the telescopic block, and fixedly connected to the output end of the telescopic cylinder.

[0020] Preferably, the rotating mechanism includes:

[0021] A rotating frame is mounted on the movable block and is fixedly connected to the movable block.

[0022] A rotary motor is fixedly connected to the rotary frame;

[0023] A rotating shaft is fixedly connected to the output end of the rotary motor;

[0024] A rotating gear is fixedly connected to the rotating shaft;

[0025] A transmission component is mounted on the moving block.

[0026] Preferably, the transmission component includes:

[0027] A transmission cylinder is mounted on the movable block and is fixedly connected to the movable block;

[0028] A transmission ring is disposed inside the transmission cylinder and is fixedly connected to the moving block;

[0029] The transmission column is rotatably connected to the transmission ring.

[0030] A transmission groove is formed on the transmission cylinder;

[0031] The transmission gear is fixedly connected to the transmission column and meshes with the rotating gear.

[0032] Preferably, the clamping mechanism includes:

[0033] A clamping block is disposed on the transmission column and is fixedly connected to the transmission column;

[0034] The motor frame is fixedly connected to the clamping block;

[0035] The motor is clamped and fixedly connected to the motor frame;

[0036] The clamping shaft is fixedly connected to the output end of the clamping motor;

[0037] A sliding component is disposed on the clamping block.

[0038] Preferably, the sliding component includes:

[0039] A sliding groove is formed on the clamping block;

[0040] There are two sliding blocks, which are symmetrically arranged in the sliding groove, slidably connected to the sliding groove, and threadedly connected to the clamping shaft.

[0041] Preferably, the sliding block is fixedly connected to the clamping plate.

[0042] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0043] By incorporating a telescopic mechanism, the photomask can be moved more smoothly; by incorporating a rotating mechanism, the photomask can be rotated, making photomask replacement more convenient; and by incorporating a clamping mechanism, the photomask can be clamped and fixed, preventing bumps and knocks during replacement that could affect its use. Attached Figure Description

[0044] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0045] Figure 1 A three-dimensional structural schematic diagram of a quick film changing mechanism for an exposure machine is shown.

[0046] Figure 2 A three-dimensional cross-sectional schematic diagram of a quick film changing mechanism for an exposure machine is shown.

[0047] Figure 3 An exploded three-dimensional view of a quick film changing mechanism for an exposure machine is shown.

[0048] Figure 4 An exploded view of the telescopic mechanism of a quick film changing mechanism for an exposure machine is shown.

[0049] Figure 5 An exploded view of the rotating mechanism of a quick film changing mechanism for an exposure machine is shown.

[0050] Figure 6 An exploded view of the clamping mechanism of a quick film changing mechanism for an exposure machine is shown.

[0051] Legend:

[0052] 1. Support plate; 2. Support frame; 3. Mask plate; 4. Support frame; 5. Support column; 6. Support rod; 7. Support photomask; 8. Clamping frame; 9. Clamping plate; 10. Telescopic block; 11. Telescopic cylinder; 12. Moving block; 13. Rotating frame; 14. Rotary motor; 15. Rotating shaft; 16. Rotating gear; 17. Transmission cylinder; 18. Transmission ring; 19. Transmission column; 20. Transmission groove; 21. Transmission gear; 22. Clamping block; 23. Motor frame; 24. Clamping motor; 25. Clamping shaft; 26. Sliding groove; 27. Sliding block. Detailed Implementation

[0053] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0054] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0055] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0057] Reference Figures 1 to 6 The present invention provides a further description of an embodiment of a quick film changing mechanism for an exposure machine.

[0058] A quick-change film mechanism for an exposure machine includes a support plate 1, a support frame 2, and a mask plate 3, with the support frame 2 fixedly connected to the support plate 1. It also includes: a support bracket 4, disposed on and fixedly connected to the support plate 1; a support column 5, fixedly connected to the support plate 1, with the mask plate 3 placed on the support column 5; a support rod 6, fixedly connected to the support bracket 4; a support mask 7, fixedly connected to the support rod 6; a telescopic mechanism disposed within the support frame 2 for moving the mask plate 3; a rotating mechanism disposed on the telescopic mechanism for rotating the mask plate 3 to facilitate replacement; a clamping mechanism disposed on the rotating mechanism for clamping and fixing the mask plate 3 to prevent collisions; a clamping frame 8 for clamping and fixing the mask plate 3; and a clamping plate 9 fixedly connected to the clamping frame 8.

[0059] Reference Figure 4 In a preferred embodiment, the telescopic mechanism includes: a telescopic block 10, which is disposed within the support frame 2 and fixedly connected to the support frame 2; a telescopic cylinder 11, which is disposed on the telescopic block 10 and fixedly connected to the telescopic block 10; and a moving block 12, which is disposed on the telescopic block 10, slidably connected to the telescopic block 10, and fixedly connected to the output end of the telescopic cylinder 11.

[0060] This configuration allows the telescopic cylinder 11 to drive the moving block 12, which is fixedly connected to the output end of the telescopic cylinder 11, to move on the telescopic block 10 towards the edge of the support frame 2, thereby moving the mask plate 3.

[0061] Reference Figure 5 In a preferred embodiment, the rotating mechanism includes: a rotating frame 13, which is disposed on the moving block 12 and fixedly connected to the moving block 12; a rotating motor 14, which is fixedly connected to the rotating frame 13; a rotating shaft 15, which is fixedly connected to the output end of the rotating motor 14; a rotating gear 16, which is fixedly connected to the rotating shaft 15; and a transmission component, which is disposed on the moving block 12.

[0062] This configuration ensures that when the rotary motor 14 is running, it drives the rotary shaft 15, which is fixedly connected to the output end of the rotary motor 14, to rotate, causing the rotary gear 16, which is fixedly connected to the rotary shaft 15, to rotate, thereby driving the transmission components to run.

[0063] Reference Figure 5 In a preferred embodiment, the transmission component includes: a transmission cylinder 17, which is disposed on the movable block 12 and fixedly connected to the movable block 12; a transmission ring 18, which is disposed inside the transmission cylinder 17 and fixedly connected to the movable block 12; a transmission column 19, which is rotatably connected to the transmission ring 18; a transmission groove 20, which is formed on the transmission cylinder 17; and a transmission gear 21, which is fixedly connected to the transmission column 19 and meshes with the rotating gear 16.

[0064] This configuration causes the transmission gear 21, which meshes with the rotating gear 16, to rotate, causing the transmission column 19, which is fixedly connected to the transmission gear 21, to rotate within the transmission ring 18. This causes the clamping block 22, which is fixedly connected to the transmission column 19, to rotate, thereby causing the clamping frame 8 to rotate the mask plate 3. This allows the mask plate 3 to rotate, making it easier to replace the mask plate 3.

[0065] Reference Figure 6 In a preferred embodiment, the clamping mechanism includes: a clamping block 22, which is disposed on the transmission column 19 and fixedly connected to the transmission column 19; a motor frame 23, which is fixedly connected to the clamping block 22; a clamping motor 24, which is fixedly connected to the motor frame 23; a clamping shaft 25, which is fixedly connected to the output end of the clamping motor 24; and a sliding component disposed on the clamping block 22.

[0066] This configuration ensures that when the clamping motor 24 is running, it drives the clamping shaft 25, which is fixedly connected to the output end of the clamping motor 24, to rotate, thereby driving the sliding component to move.

[0067] Reference Figure 6 In a preferred embodiment, the sliding component includes: a sliding groove 26 formed on the clamping block 22; two sliding blocks 27, which are symmetrically arranged in the sliding groove 26, slidably connected to the sliding groove 26, and threadedly connected to the clamping shaft 25; and the sliding blocks 27 are fixedly connected to the clamping plate 9.

[0068] This configuration causes the sliding block 27, which is threadedly connected to the clamping shaft 25, to rotate, thereby causing the sliding block 27 to slide within the sliding groove 26. This brings the sliding blocks 27 closer together, which in turn moves the clamping plate 9, which is fixedly connected to the sliding block 27. This causes the clamping frame 8, which is fixedly connected to the clamping plate 9, to move closer to the mask plate 3 until the inner surface of the clamping frame 8 contacts the outer surface of the mask plate 3, thus achieving the clamping and fixing of the mask plate 3.

[0069] Working principle: In use, first start the telescopic cylinder 11, which drives the moving block 12, which is fixedly connected to the output end of the telescopic cylinder 11, to slide on the telescopic block 10, so that the clamping frame 8 moves closer to the mask plate 3; then start the clamping motor 24, which drives the clamping shaft 25, which is fixedly connected to the output end of the clamping motor 24, to rotate, so that the sliding block 27, which is threadedly connected to the clamping shaft 25, rotates, and drives the sliding block 27 to slide in the sliding groove 26, so that the sliding blocks 27 move closer to each other, thereby driving the clamping plate 9, which is fixedly connected to the sliding block 27, to move, so that the clamping frame 8, which is fixedly connected to the clamping plate 9, moves closer to the mask plate 3, until the inner surface of the clamping frame 8 contacts the outer surface of the mask plate 3, thereby achieving the clamping and fixing of the mask plate 3;

[0070] Next, the telescopic cylinder 11 is activated, which drives the moving block 12, which is fixedly connected to the output end of the telescopic cylinder 11, to move on the telescopic block 10 towards the edge of the support frame 2, thereby moving the mask plate 3. After the mask plate 3 is moved to the replacement position, the rotary motor 14 is activated, which drives the rotary shaft 15, which is fixedly connected to the output end of the rotary motor 14, to rotate. This causes the rotary gear 16, which is fixedly connected to the rotary shaft 15, to rotate, thereby driving the transmission gear 21, which meshes with the rotary gear 16, to rotate. This causes the transmission column 19, which is fixedly connected to the transmission gear 21, to rotate within the transmission ring 18, thereby driving the clamping block 22, which is fixedly connected to the transmission column 19, to rotate. This causes the clamping frame 8 to drive the mask plate 3 to rotate, thereby rotating the mask plate 3 and facilitating the replacement of the mask plate 3.

[0071] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A quick mask changing mechanism for an exposure machine, comprising a support plate (1), a support frame (2) and a mask plate (3), the support frame (2) being fixedly connected with the support plate (1); characterized in that, Also includes: A support frame (4) is mounted on the support plate (1) and is fixedly connected to the support plate (1); The support column (5) is fixedly connected to the support plate (1), and the mask plate (3) is placed on the support column (5); The support rod (6) is fixedly connected to the support frame (4); The support photomask (7) is fixedly connected to the support rod (6); A telescopic mechanism is provided inside the support frame (2) for moving the mask plate (3); A rotating mechanism is provided on the telescopic mechanism for rotating the mask plate (3) to facilitate the replacement of the mask plate (3); A clamping mechanism is provided on the rotating mechanism to clamp and fix the mask plate (3) to avoid collisions; The clamping frame (8) is used to clamp and fix the mask plate (3); The clamping plate (9) is fixedly connected to the clamping frame (8).

2. The quick film changing mechanism for an exposure machine according to claim 1, wherein The telescopic mechanism includes: The telescopic block (10) is set inside the support frame (2) and is fixedly connected to the support frame (2); Telescopic cylinder (11) is mounted on the telescopic block (10) and is fixedly connected to the telescopic block (10); The movable block (12) is disposed on the telescopic block (10), is slidably connected to the telescopic block (10), and is fixedly connected to the output end of the telescopic cylinder (11).

3. The quick film changing mechanism for an exposure machine according to claim 2, wherein The rotating mechanism includes: A rotating frame (13) is disposed on the movable block (12) and fixedly connected to the movable block (12); A rotary motor (14) is fixedly connected to the rotating frame (13); The rotating shaft (15) is fixedly connected to the output end of the rotating motor (14); A rotating gear (16) is fixedly connected to the rotating shaft (15); The transmission component is mounted on the moving block (12).

4. The quick film changing mechanism for an exposure machine according to claim 3, wherein The transmission component includes: A transmission cylinder (17) is mounted on the movable block (12) and is fixedly connected to the movable block (12); A transmission ring (18) is disposed inside the transmission cylinder (17) and is fixedly connected to the moving block (12); The transmission column (19) is rotatably connected to the transmission ring (18); A transmission groove (20) is formed on the transmission cylinder (17); The transmission gear (21) is fixedly connected to the transmission column (19) and meshes with the rotating gear (16).

5. The quick film changing mechanism for an exposure machine according to claim 4, wherein The clamping mechanism includes: A clamping block (22) is disposed on the transmission column (19) and fixedly connected to the transmission column (19); The motor frame (23) is fixedly connected to the clamping block (22); The clamping motor (24) is fixedly connected to the motor frame (23); The clamping shaft (25) is fixedly connected to the output end of the clamping motor (24); A sliding component is disposed on the clamping block (22).

6. The quick film changing mechanism for an exposure machine according to claim 5, wherein The sliding component includes: A sliding groove (26) is formed on the clamping block (22); There are two sliding blocks (27), and the two sliding blocks (27) are symmetrically arranged in the sliding groove (26), are slidably connected to the sliding groove (26), and are threadedly connected to the clamping shaft (25).

7. The quick film changing mechanism for an exposure machine according to claim 6, wherein The sliding block (27) is fixedly connected to the clamping plate (9).

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