High-stability multi-arc ion plating device

Abstract

The utility model discloses a multi-arc ion plating device with high stability, which relates to the technical field of multi-arc ion plating, and comprises a box body, a clamping plate is arranged in the box body, a clamping groove is arranged on the clamping plate, the bottom wall of the clamping groove is connected with a bottom plate, the top surface of the clamping plate is provided with a pull rod, the pull rod is connected with a connecting rod, and the connecting rod is connected with the clamping plate. One end of the connecting rod is connected with a clamping groove, the other end of the connecting rod is connected with a limiting block, the top surface of the limiting block is connected with a spring, the other end of the spring is connected with the inner top wall of the clamping groove, the spring sleeves the pull rod, a clamping block is clamped between the limiting block and the bottom plate, and a base material is arranged at the other end of the clamping block. According to the utility model, the clamping block is clamped between the limiting block and the bottom plate, so that the mounting stability of the base material and the coating uniformity of the device are improved.

Description

Technical Field

[0001] This utility model relates to the field of multi-arc ion plating technology, specifically to a highly stable multi-arc ion plating device. Background Technology

[0002] With the continuous emergence of various high-performance alloys, new ceramics, and functional polymer materials, the demand for refined surface properties is becoming increasingly urgent. Traditional surface treatment methods, such as simple coating and hot-dip plating, are insufficient to meet the service requirements of modern materials under extreme working conditions, prompting the continuous development of multi-arc ion plating technology.

[0003] For example, an existing patent (publication number: CN213924991U) discloses a multi-arc ion plating device. A workpiece stage is fixedly arranged at the lower part of the inner shell. A rotating seat is installed at the upper end of the workpiece stage and is rotatably connected to the workpiece stage. Support rods are fixedly arranged on both sides of the upper end of the rotating seat. A fixing mechanism is installed between the support rods and is rotatably connected to the support rods. A target material is installed at the upper end of the inner shell. A target electrode is arranged at the lower end of the target material. A multi-arc ion power supply is installed above the target material. A heat-conducting box is welded and fixed on one side of the inner shell. An evaporator is installed inside the heat-conducting box. Several heat-conducting plates are arranged on the outside of the heat-conducting box and are distributed sequentially.

[0004] However, the multi-arc ion plating device described above still has some drawbacks in practical use: relying solely on friction to fix the substrate can easily make the substrate unstable during the plating process; when the rotating seat drives the substrate to rotate or the second motor tilts or flips the substrate, the substrate may experience slight displacement due to centrifugal force, its own gravity, and other factors. Once the position of the substrate changes, the uniformity of the plating will be affected, impacting the device's working efficiency and economic benefits.

[0005] To address these issues, we designed a highly stable multi-arc ion plating device. Utility Model Content

[0006] The purpose of this invention is to provide a highly stable multi-arc ion plating device to solve the problems mentioned in the background art.

[0007] To solve the above-mentioned technical problems, this utility model provides a highly stable multi-arc ion plating device, including a housing, a clamping plate disposed inside the housing, a snap-fit ​​groove formed on the clamping plate, a base plate connected to the bottom wall of the snap-fit ​​groove, a pull rod disposed on the top surface of the clamping plate, a connecting rod connected to the pull rod, a limit block connected to the other end of the connecting rod, a spring connected to the top surface of the limit block, the other end of the spring connected to the inner top wall of the snap-fit ​​groove, the spring being sleeved on the pull rod, a snap-fit ​​block snapping between the limit block and the base plate, and a substrate disposed at the other end of the snap-fit ​​block.

[0008] Furthermore, a first motor is connected to the inner bottom wall of the box, a turntable is connected to the drive end of the first motor, two standing plates are connected to the top surface of the turntable, an operating ring is provided between the two standing plates, and a clamping plate is provided on the operating ring.

[0009] Furthermore, a second motor is provided on the outer wall of one of the standing plates. The driving end of the second motor is connected to the outer wall of the operating ring. The other end of the operating ring is connected to a rotating rod, and the other end of the rotating rod is connected to the outer wall of the other standing plate.

[0010] Furthermore, a placement plate is connected to the outer wall of the standing plate, and the second motor is connected to the outer wall of the placement plate.

[0011] Furthermore, a vacuum tube is connected to the outer wall at the bottom of the box, and an air inlet pipe is also connected to the box.

[0012] Furthermore, the inner top wall of the box is provided with a target body, one end of the target body is provided with a multi-arc ion power source, and the bottom end of the target body is provided with a target stage.

[0013] Furthermore, a bolt is threaded onto the operating ring, one end of which passes through the operating ring and is rotatably connected to the outer wall of the clamping plate, and a nut is threaded onto the bolt.

[0014] Furthermore, a cavity is formed on the outer wall of the snap-fit ​​block, and a piston is abutted against the inner wall of the cavity. The other end of the piston is connected to a bolt. A negative pressure hole is also formed on the outer wall of the snap-fit ​​block, and the negative pressure hole is connected to the cavity.

[0015] The beneficial effects of this utility model are as follows: When it is necessary to fix the substrate, the substrate and the snap-fit ​​block are attracted by negative pressure through the bolts. Then, the clamping plate is moved to the appropriate position by rotating the bolts. Then, the snap-fit ​​block is inserted into the clamping plate. The limiting block is pushed upward by the inward pushing force. At this time, the spring is compressed by the pressure. The snap-fit ​​block is snapped between the limiting block and the base plate, which improves the stability of the substrate installation and the uniformity of the coating of the device.

[0016] The beneficial effects of this utility model are as follows: the air inside the chamber is then extracted through a vacuum tube to create a vacuum state inside the chamber. Then, gases such as nitrogen are discharged into the chamber through an air inlet pipe. After that, the first motor and the multi-arc ion power supply are started to drive the turntable to rotate slowly, so that the film layer can be evenly applied to the surface of the substrate. Then, the second motor is started to rotate the operating ring 180 degrees, which facilitates double-sided coating of the substrate. This improves the convenience of the device operation. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the operating ring in this utility model;

[0019] Figure 3 This is a schematic diagram of the card-connecting block in this utility model;

[0020] Figure 4 This is a schematic diagram of the bolt structure in this utility model.

[0021] In the diagram: 1. Box body; 2. Multi-arc ion power supply; 3. Target body; 4. Target grade; 5. Vacuum tube; 6. Inlet pipe; 7. Spring; 8. First motor; 9. Turntable; 10. Standing plate; 11. Placement plate; 12. Second motor; 13. Rotating rod; 14. Operating ring; 15. Bolt 1; 16. Substrate; 17. Clamping plate; 18. Pull rod; 1801. Limiting block; 19. Snap-fit ​​block; 1901. Bolt 2; 1902. Piston; 20. Base plate; 21. Negative pressure hole. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 3 as well as Figure 4This utility model provides a technical solution: a highly stable multi-arc ion plating device, including a housing 1, a clamping plate 17 disposed inside the housing 1, a snap-fit ​​groove formed on the clamping plate 17, a bottom plate 20 connected to the bottom wall of the snap-fit ​​groove, a pull rod 18 disposed on the top surface of the clamping plate 17, a connecting rod connected to the pull rod 18, a limit block 1801 connected to the other end of the connecting rod, a spring 7 connected to the top surface of the limit block 1801, and the other end of the spring 7... The end is connected to the inner top wall of the snap-fit ​​groove. The spring 7 is sleeved on the pull rod 18. A snap-fit ​​block 19 is snapped between the limit block 1801 and the base plate 20. The other end of the snap-fit ​​block 19 is provided with a base material 16. A cavity is opened on the outer wall of the snap-fit ​​block 19. The inner wall of the cavity abuts against the piston 1902. The other end of the piston 1902 is connected to the bolt 1901. A negative pressure hole 21 is also opened on the outer wall of the snap-fit ​​block 19. The negative pressure hole 21 is connected to the cavity.

[0024] In specific implementation, when it is necessary to fix the substrate 16, first align the substrate 16 with the negative pressure hole 21 on the snap-fit ​​block 19, and then move the piston 1902 in the cavity by pulling the bolt 1901 outward, so that the space in the cavity increases, the air is diluted, and negative pressure is generated in the negative pressure hole 21. The substrate 16 is adsorbed through the negative pressure hole 21. Then, move the clamping plate 17 to the appropriate position by rotating the bolt 15, and then insert the snap-fit ​​block 19 into the clamping plate 17. The limiting block 1801 is pushed upward by the inward force. At this time, the spring 7 is compressed by the pressure, and the snap-fit ​​block 19 is snapped between the limiting block 1801 and the base plate 20, which improves the stability of the substrate 16 installation and the uniformity of the device coating.

[0025] See Figure 2 As shown, a first motor 8 is connected to the inner bottom wall of the housing 1. A turntable 9 is connected to the drive end of the first motor 8. Two standing plates 10 are connected to the top surface of the turntable 9. An operating ring 14 is provided between the two standing plates 10. A clamping plate 17 is provided on the operating ring 14. A second motor 12 is provided on the outer wall of one of the standing plates 10. The drive end of the second motor 12 is connected to the outer wall of the operating ring 14. A rotating rod 13 is connected to the other end of the operating ring 14. The other end of the rotating rod 13 is connected to the outer wall of the other standing plate 10. A placement plate 11 is connected to the outer wall of the standing plate 10. The second motor 12 is connected to the outer wall of the placement plate 11. A bolt 15 is threaded on the operating ring 14. One end of the bolt 15 passes through the operating ring 14 and is rotatably connected to the outer wall of the clamping plate 17. A nut is threaded on the bolt 15.

[0026] In practice, the first motor 8 and the multi-arc ion power supply 2 are then started to drive the turntable 9 to rotate slowly so that the film layer can be evenly placed on the surface of the substrate 16. Then the second motor 12 is started to rotate the operating ring 14 180 degrees, which facilitates double-sided coating of the substrate 16.

[0027] See Figure 1 A vacuum tube 5 is connected to the outer wall at the bottom of the chamber 1, and an air inlet pipe 6 is also connected to the chamber 1. The vacuum tube 5 keeps the chamber 1 in a vacuum state, which is convenient for coating the substrate 16. The air inlet pipe 6 introduces the required gas into the chamber 1 to promote the completion of the coating work.

[0028] See Figure 1 The inner top wall of the box 1 is provided with a target body 3. One end of the target body 3 is provided with a multi-arc ion power source 2, and the bottom end of the target body 3 is provided with a target stage 4. The multi-arc ion power source 2 and the target body 3 are used to form a magnetic field required for coating inside the box 1, thereby completing the coating of the substrate 16.

[0029] It should be noted that the coating device inside the housing 1 also includes an arc cathode and an arc anode, etc. The coating effect of the device is guaranteed by the use of the coating device inside the housing 1.

[0030] Working principle: When it is necessary to fix the substrate 16, the substrate 16 and the snap-fit ​​block 19 are attracted by negative pressure through the bolt 1901. Then, the clamping plate 17 is moved to the appropriate position by rotating the bolt 15. Then, the snap-fit ​​block 19 is inserted into the clamping plate 17. The limiting block 1801 is pushed upward by the inward pushing force. At this time, the spring 7 is compressed by the pressure. The snap-fit ​​block 19 is snapped between the limiting block 1801 and the base plate 20, which improves the stability of the substrate 16 installation and the uniformity of the coating during the device coating process. Then, the air in the box 1 is extracted through the vacuum tube 5, so that the inside of the box 1 is shaped as follows: A vacuum state is established, and then nitrogen and other gases are discharged into the chamber 1 through the inlet pipe 6. Then, the first motor 8 and the multi-arc ion power supply 2 are started, driving the turntable 9 to rotate slowly, so that the film layer can be evenly applied to the surface of the substrate 16. Then, the second motor 12 is started, and the operating ring 14 is rotated 180 degrees, which facilitates double-sided coating of the substrate 16 and improves the convenience of device operation. When it is necessary to remove the substrate 16, the pull rod 18 is pulled upward to compress the spring 7, so that the connecting rod no longer abuts against the locking block 19, and then the substrate 16 is pulled out. Then, the substrate 16 is disassembled from the locking block 19.

Claims

1. A high-stability multi-arc ion plating device, comprising a box body (1), characterized in that, The housing (1) is provided with a clamping plate (17), and the clamping plate (17) has a snap-fit ​​groove. The bottom wall of the snap-fit ​​groove is connected to a bottom plate (20). The top surface of the clamping plate (17) is provided with a pull rod (18), and a connecting rod is connected to the pull rod (18). The other end of the connecting rod is connected to a limit block (1801). The top surface of the limit block (1801) is connected with a spring (7). The other end of the spring (7) is connected to the inner top wall of the snap-fit ​​groove. The spring (7) is sleeved on the pull rod (18). A snap-fit ​​block (19) is snapped between the limit block (1801) and the bottom plate (20). The other end of the snap-fit ​​block (19) is provided with a base material (16).

2. The high-stability multi-arc ion plating device according to claim 1, characterized in that: The inner bottom wall of the box (1) is connected to a first motor (8), the drive end of the first motor (8) is connected to a turntable (9), the top surface of the turntable (9) is connected to two standing plates (10), an operating ring (14) is provided between the two standing plates (10), and the clamping plate (17) is provided on the operating ring (14).

3. The high-stability multi-arc ion plating device according to claim 2, characterized in that: A second motor (12) is provided on the outer wall of one of the standing plates (10). The driving end of the second motor (12) is connected to the outer wall of the operating ring (14). The other end of the operating ring (14) is connected to a rotating rod (13). The other end of the rotating rod (13) is connected to the outer wall of the other standing plate (10).

4. The high-stability multi-arc ion plating apparatus as described in claim 3, characterized in that: A placement plate (11) is connected to the outer wall of the standing plate (10), and the second motor (12) is connected to the outer wall of the placement plate (11).

5. The high-stability multi-arc ion plating device according to claim 4, characterized in that: A vacuum tube (5) is connected to the outer wall at the bottom of the box (1), and an air inlet pipe (6) is also connected to the box (1).

6. The high-stability multi-arc ion plating device according to claim 5, characterized in that: The inner top wall of the box (1) is provided with a target body (3), one end of the target body (3) is provided with a multi-arc ion power supply (2), and the bottom end of the target body (3) is provided with a target stage (4).

7. The high-stability multi-arc ion plating device according to claim 6, characterized in that: A bolt (15) is threaded onto the operating ring (14). One end of the bolt (15) passes through the operating ring (14) and is rotatably connected to the outer wall of the clamping plate (17). A nut is threaded onto the bolt (15).

8. The high-stability multi-arc ion plating device according to claim 7, characterized in that: A cavity is provided on the outer wall of the snap-fit ​​block (19), and a piston (1902) is abutted against the inner wall of the cavity. The other end of the piston (1902) is connected to a bolt (1901). A negative pressure hole (21) is also provided on the outer wall of the snap-fit ​​block (19), and the negative pressure hole (21) is connected to the cavity.

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