Cathode backboard device and glass coating equipment thereof

Abstract

The utility model relates to the field of glass production, in particular to a cathode back plate device and glass coating equipment thereof, the cathode back plate structure comprises a support plate, one side of the support plate is provided with an accumulated slag adsorption net, one side of the accumulated slag adsorption net far away from the support plate is provided with a protective net, one side of the protective net facing the support plate is connected with the support plate, and the support plate is connected with the cathode back plate. The supporting plate is used for supporting glass, the deposited slag adsorption net is used for adsorbing deposited slag falling from the supporting plate, the mesh number of the protection net is 4, the mesh number of the deposited slag adsorption net is 60, the supporting plate, the deposited slag adsorption net and the protection net are combined into the cathode back plate, the deposited slag on the supporting plate can be adsorbed by the deposited slag adsorption net in the falling process, the probability that the deposited slag falls on the glass is reduced, and the service life of the glass is prolonged. And a protection net is arranged on the face, away from the supporting plate, of the accumulated slag adsorption net, the accumulated slag adsorption net is protected through the protection net, the accumulated slag adsorption net is prevented from being directly influenced by the working environment, and the service life of the accumulated slag adsorption net is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of glass production, and in particular to a cathode backplate device and its glass coating equipment. Background Technology

[0002] The current production of coatings for large-size low-emissivity energy-saving glass all uses horizontal magnetron sputtering equipment. In horizontal magnetron sputtering equipment, the target material is usually arranged horizontally, and the coated glass is located directly below the target material. The sputtering system achieves the sputtering of target material atoms in a vacuum environment and deposits them on the glass surface to form a film layer.

[0003] In traditional structures, the cathode backplate is located between the target and the cathode cover plate, closely attached to the lower surface of the cathode cover plate and directly above the coated glass. During sputtering, the target is bombarded by plasma, and atoms escape from the target surface and move in various directions within the cavity at high energy. Due to the random movement paths in the vacuum, some sputtered atoms deviate from the target direction and deposit in the non-coated areas within the cavity, forming unavoidable slag deposits. The surface of the cathode backplate is one of the areas prone to slag accumulation.

[0004] However, because the cathode backplate surface is typically a suspended structure lacking effective support, once the slag accumulates to a certain thickness, its adhesion weakens, making it prone to detaching from the cathode backplate surface and falling directly onto the coated glass below. This falling slag physically interferes with the depositing film, disrupting the continuity and uniformity of the film layer, producing pinhole defects, and severely affecting the product's appearance quality and film performance stability. It can even lead to the scrapping of the entire glass sheet, reducing the yield rate. Utility Model Content

[0005] The purpose of this invention is to overcome the shortcomings of existing technologies where slag on the cathode backplate falls off due to its own gravity during long-term accumulation, affecting the yield of coated glass below. This invention provides a cathode backplate device and its glass coating equipment.

[0006] In a first aspect, the present invention provides a cathode backplate device, comprising: a support plate, wherein a slag adsorption net is provided on one side of the support plate, a protective net is provided on the side of the slag adsorption net away from the support plate, and the side of the protective net facing the support plate is connected to the support plate, and the slag adsorption net is used to adsorb slag falling from the support plate;

[0007] The protective net has a mesh count of 4.

[0008] The slag adsorption mesh has a mesh size of 60.

[0009] This invention provides a cathode backplate device, which is constructed by combining a support plate, a slag adsorption mesh, and a protective mesh. The slag adsorption mesh has a mesh size of 60 mesh, characterized by its small diameter and dense structure. This increases the contact area between the slag falling from the support plate and the mesh during its descent, providing more adhesion points and effectively improving the cathode backplate's adsorption capacity for slag. This reduces the probability of slag falling onto the glass surface, thereby increasing the yield of glass products. A protective mesh with a mesh size of 4 mesh is installed on the side of the slag adsorption mesh away from the support plate, ensuring that the wire diameter of the protective mesh is larger than that of the slag adsorption mesh. When connected to the support plate, this protective mesh forms a stable support frame, effectively protecting the slag adsorption mesh without affecting its adsorption effect. This prevents the slag adsorption mesh from being directly affected by the working environment, thus extending its service life and reducing maintenance frequency and replacement costs.

[0010] Preferably, the slag adsorption mesh is spot-welded to the support plate.

[0011] The connection between the slag adsorption mesh and the support plate is made by spot welding, which makes it easier to replace the slag adsorption mesh in the future.

[0012] Preferably, the protective net is spot-welded to the support plate.

[0013] The protective netting is spot-welded to the support plate to facilitate future replacement of the protective netting.

[0014] Preferably, the support plate body is a stainless steel plate or an aluminum plate.

[0015] By designing the support plate as stainless steel or aluminum, it possesses excellent mechanical strength and thermal stability, enabling it to maintain structural integrity and ensure the overall stability of the cathode backplane under the high temperature and high energy conditions of magnetron sputtering equipment. Stainless steel offers superior corrosion resistance, making it suitable for highly corrosive working environments, while aluminum provides lighter weight and better thermal conductivity, helping to improve the equipment's thermal management capabilities and reduce its weight, thus offering more flexible material choices for different operating conditions.

[0016] Preferably, the side of the support plate facing the slag adsorption net is sandblasted.

[0017] Preferably, the surface of the slag adsorption mesh is sandblasted.

[0018] By sandblasting the surface of the slag adsorption mesh, several irregular grooves are created on the surface, thereby increasing the contact area between the slag adsorption mesh and the slag and improving the adsorption rate of the slag adsorption mesh.

[0019] In a second aspect, a glass coating apparatus includes the aforementioned cathode backplate device, and further includes a cathode cover plate located on the side of the support plate away from the slag adsorption mesh. The glass coating apparatus also includes a target material located in the area below the cathode backplate device.

[0020] This invention provides a glass coating equipment. By setting a cathode backplate in the glass coating equipment and arranging it between the target material and the cathode cover plate, it can effectively adsorb the splashed particles or slag generated during the target sputtering process, preventing impurities from adhering to the cathode cover plate or rebounding to the glass surface, thereby reducing the generation of film defects and improving the yield of glass products. The cathode backplate adopts a composite structure composed of a support plate, a slag adsorption mesh, and a protective mesh. The slag adsorption mesh has a mesh count of 60 mesh, which has a small mesh diameter and can significantly improve the particle adsorption capacity. At the same time, the protective mesh has a mesh count of 4 mesh and thicker steel wire, which can effectively support and shield the slag adsorption mesh, preventing it from being directly exposed to the high temperature and high energy particle environment, thus improving the stability and service life of the slag adsorption mesh.

[0021] Preferably, the lower end face of the cathode cover is connected to the support plate.

[0022] Preferably, the support plate is provided with a plurality of mounting holes, and the support plate is connected to the cathode cover plate through the mounting holes.

[0023] The mounting holes allow for the installation of the support plate and the cathode cover plate, making the connection between the cathode cover plate and the support plate more stable.

[0024] Preferably, the cathode cover plate is provided with a threaded hole, the threaded hole being positioned corresponding to the mounting hole, and the threaded hole and the mounting hole being connected by a screw.

[0025] Preferably, the glass coating equipment further includes a conveyor roller conveyor, on which a plurality of rollers are provided.

[0026] The glass body is conveyed via conveyor rollers.

[0027] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0028] 1. This utility model provides a cathode backplate device, which is composed of a support plate, a slag adsorption mesh, and a protective mesh. The slag adsorption mesh has a mesh size of 60 mesh, characterized by its small diameter and dense structure. This increases the contact area between the slag falling from the support plate and the mesh during its descent, providing more adhesion points and effectively improving the cathode backplate's adsorption capacity for slag. This reduces the probability of slag falling onto the glass surface, thus improving the yield of glass products. A protective mesh with a mesh size of 4 mesh is provided on the side of the slag adsorption mesh away from the support plate, ensuring that the wire diameter of the protective mesh is larger than that of the slag adsorption mesh. When connected to the support plate, this protective mesh forms a stable support frame, effectively protecting the slag adsorption mesh without affecting its adsorption effect. This prevents the slag adsorption mesh from being directly affected by the working environment, thereby extending its service life and reducing maintenance frequency and replacement costs.

[0029] 2. This utility model provides a glass coating equipment. By setting a cathode backplate in the glass coating equipment and arranging it between the target material and the cathode cover plate, it can effectively adsorb the splashed particles or slag generated during the sputtering process of the target material, preventing impurities from adhering to the cathode cover plate or rebounding to the glass surface, thereby reducing the generation of film defects and improving the yield of glass products. The cathode backplate adopts a composite structure composed of a support plate, a slag adsorption mesh, and a protective mesh. The slag adsorption mesh has a mesh count of 60 mesh, which has a small mesh diameter and can significantly improve the particle adsorption capacity. At the same time, the protective mesh has a mesh count of 4 mesh and thicker steel wire, which can effectively support and shield the slag adsorption mesh, avoiding its direct exposure to the high temperature and high energy particle environment, thus improving the stability and service life of the slag adsorption mesh. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the glass coating equipment in this utility model;

[0031] Figure 2 This is a schematic diagram of the cathode backplate structure of this utility model;

[0032] Figure 3 This is a schematic diagram of the support plate of this utility model.

[0033] The markings in the diagram are: 1-Cathode cover plate; 2-Target material; 3-Glass body; 4-Support plate; 41-Mounting hole; 5-Slag adsorption net; 6-Protective net; 7-Conveyor roller; 71-Roller. Detailed Implementation

[0034] The present invention will be further described in detail below with reference to specific embodiments. However, it should not be construed as limiting the scope of the present invention to the following embodiments; all technologies implemented based on the content of the present invention fall within the scope of the present invention.

[0035] Unless otherwise specified, the use of terms such as "upper," "lower," "left," "right," "center," "inner," and "outer" to indicate orientation or positional relationships in the description of specific embodiments of this utility model is based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product / equipment / device is typically placed during use. These terms are merely for the purpose of facilitating the description of the utility model solution or simplifying the description in specific embodiments, enabling those skilled in the art to quickly understand the solution, and do not indicate or imply that a specific device / component / element must have a specific orientation, or be constructed and operated in a specific positional relationship. Therefore, they should not be construed as limitations on this utility model.

[0036] Furthermore, the use of terms such as "horizontal," "vertical," "suspended," and "parallel" does not imply that the corresponding device / component / element must be absolutely horizontal, vertical, suspended, or parallel, but rather that it can be slightly tilted or have a deviation. For example, "horizontal" merely means that its direction is more horizontal relative to "vertical," not that the structure must be completely horizontal, but can be slightly tilted. Alternatively, it can be simplified to mean that the corresponding device / component / element, when set in a "horizontal," "vertical," "suspended," or "parallel" direction, can have an error / deviation of ±10% relative to the corresponding direction, more preferably within ±8%, more preferably within ±6%, more preferably within ±5%, and more preferably within ±4%. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its function in the present invention.

[0037] Furthermore, the use of terms such as "first," "second," and "third" in terminology is merely for distinguishing descriptions of identical or similar components and should not be interpreted as emphasizing or implying the relative importance of a particular component.

[0038] Furthermore, in the description of the embodiments of this utility model, "several", "multiple", and "several" represent at least two. The number can be any number, such as two, three, four, five, six, seven, eight, or nine, and can even exceed nine.

[0039] Furthermore, in the description of the technical solution of this utility model, unless otherwise explicitly specified / limited / restricted, the terms "set up," "install," "connect," "link," "equipped with," "laid out," and "arranged" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to common connection methods in the art, such as welding, riveting, bolting, and threaded connections. Such connections can be mechanical, electrical, or communication connections; they can be direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components.

[0040] Example 1

[0041] like Figure 2 As shown, a cathode backplate device includes a support plate 4. One side of the support plate 4 is provided with a slag adsorption net 5, which is used to receive slag falling from the support plate 4. The side of the slag adsorption net 5 away from the support plate 4 is provided with a protective net 6. The protective net 6 protects the entire slag adsorption net 5, preventing the slag adsorption net 5 from being directly affected by the working environment during actual operation, which would cause the slag adsorption net 5 to be damaged and fall off during operation, thus requiring frequent replacement of the slag adsorption net 5 and increasing costs.

[0042] Furthermore, the protective net 6 body is a stainless steel mesh with a mesh count of 4. By setting the protective net 6 to a 4-mesh stainless steel mesh, since the 4-mesh stainless steel mesh has a larger wire diameter, it can better connect with the surface of the support plate 4 in subsequent work, improve the stability of the overall structure, prevent the protective net 6 from loosening or deforming, and at the same time prevent the slag adsorption net 5 from being subjected to a large impact during work, thus preventing the connection between it and the support plate 4 from breaking.

[0043] Furthermore, the slag adsorption mesh 5 is a 60-mesh stainless steel mesh. By setting the slag adsorption mesh 5 to a 60-mesh stainless steel mesh, the 60-mesh stainless steel mesh has a smaller mesh size and a higher specific surface area, which can effectively capture and adsorb the fine metal particles generated during the magnetron sputtering process, significantly improving the adsorption efficiency of slag, reducing the probability of particles falling onto the glass surface, and increasing the glass yield. At the same time, the stainless steel material has good corrosion resistance and high temperature resistance, which can withstand the impact of high temperature and high energy particles in the sputtering environment, extend the service life, reduce the replacement frequency, and improve the continuity and economy of equipment operation.

[0044] Preferably, the sludge adsorption mesh 5 can be provided with multiple layers, preferably two layers;

[0045] Optionally, when the slag adsorption mesh 5 is made of two layers, the slag adsorption mesh 5 closer to the support plate 4 is made of 100-mesh stainless steel mesh, and the slag adsorption mesh 5 farther from the support plate 4 is made of 60-mesh stainless steel mesh. Specifically, for the slag generated by sputtering different target materials, when nitride sputtering produces relatively large slag in the form of flakes (about 1 mm on the long side), the slag adsorption mesh 5 can be made of one layer of 60-mesh stainless steel mesh. When oxides produce small spherical slag in the form of small particles (about 0.2 mm in diameter), the slag adsorption mesh 5 can be made of two layers, 100 mesh and 60 mesh respectively.

[0046] In one or more embodiments, the protective net 6 is connected to the support plate 4, and a gap is formed between the protective net 6 and the support plate 4. This gap is used to install the slag-absorbing net 5. By connecting the protective net 6 to the support plate 4 and forming a gap between them for installing the slag-absorbing net 5, the slag-absorbing net 5 can be stably embedded in the structure, facilitating installation and replacement and improving maintenance convenience. Simultaneously, this structure prevents the slag-absorbing net 5 from being directly exposed, effectively preventing it from shifting or falling off due to vibration, thermal expansion and contraction, or impact during use. This further enhances the overall reliability and service life of the cathode backplate 4 structure. Figure 2 As shown.

[0047] In one or more embodiments, the sludge adsorption mesh 5 may be made of 100-mesh stainless steel mesh.

[0048] In one or more embodiments, the slag adsorption mesh 5 is spot welded to the support plate 4, and the connection between the slag adsorption mesh 5 and the support plate 4 is set as spot welding, which makes it more convenient to replace the slag adsorption mesh 5 in the future.

[0049] Furthermore, the protective net 6 is spot-welded to the support plate 4, making it convenient to replace the protective net 6 later.

[0050] In one or more embodiments, the support plate 4 is made of stainless steel or aluminum. By designing the support plate 4 as stainless steel or aluminum, it can maintain structural integrity in the high-temperature and high-energy environment of the magnetron sputtering equipment, ensuring the overall stability of the cathode backplate 4. Stainless steel has excellent corrosion resistance and is suitable for working environments with strong corrosive atmospheres, while aluminum has lighter weight and good thermal conductivity, which helps to improve the thermal management capability of the equipment and reduce the weight of the equipment, providing more flexible material selection for different working conditions.

[0051] In one or more embodiments, the side of the support plate 4 facing the slag adsorption net 5 is sandblasted.

[0052] In one or more embodiments, the surface of the slag adsorption net 5 is sandblasted. By sandblasting the surface of the slag adsorption net 5, several irregular grooves appear on the surface of the slag adsorption net 5, thereby increasing the contact area between the slag adsorption net 5 and the slag and improving the adsorption rate of the slag adsorption net 5.

[0053] In one or more embodiments, the support plate 4 has vertically formed mounting holes 41. The support plate 4 is installed with the cathode cover plate 1 through the mounting holes 41. The mounting holes 41 facilitate the installation of the support plate 4 and the cathode cover plate 1, making the connection between the cathode cover plate 1 and the support plate 4 more stable. Figure 3 As shown.

[0054] This invention utilizes sandblasting to create irregular shapes on the surface of the slag-absorbing mesh 5, enabling it to better absorb slag falling from the support plate 4. Furthermore, a 4-mesh stainless steel protective mesh 6 is incorporated. Because the protective mesh 6 has a 4-mesh diameter, the steel wire used is thicker than that of the slag-absorbing mesh 5, resulting in better rigidity and structural stability. The thicker wire in the protective mesh 6 also allows for a larger contact area when connected to the support plate 4, further enhancing the overall fixing strength and reliability of the protective mesh 6.

[0055] In addition, the protective net 6 can provide good coverage and protection for the slag adsorption net 5 without affecting the adsorption function. It plays multiple roles in the sandblasting process, such as buffering impact, suppressing vibration, and limiting shedding. Through the combined use of the slag adsorption net 5 and the protective net 6, the two form a synergistic effect in terms of function: the slag adsorption net 5 is responsible for effectively adsorbing the slag, and the protective net 6 is responsible for fixing and protecting the adsorption layer. Together, they improve the stability and service life of the entire structure under high-intensity treatment and long-term operation conditions.

[0056] Example 2

[0057] like Figure 1 As shown, a glass coating equipment adopts a cathode backplate device in Embodiment 1. The equipment includes a cathode cover plate 1, a target material 2 and a glass body 3 are arranged in sequence below the cathode cover plate 1, a cathode backplate 4 is arranged between the target material 2 and the glass body 3, and the lower end face of the cathode cover plate 1 is connected to the support plate 4 of the cathode backplate 4.

[0058] Furthermore, the glass coating equipment also includes a conveyor roller 7, on which several rollers 71 are provided to convey the glass body 3.

[0059] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A cathode backsheet device, characterized by, include: A support plate (4) is provided with a slag adsorption net (5) on one side of the support plate (4), and a protective net (6) is provided on the side of the slag adsorption net (5) away from the support plate (4). The side of the protective net (6) facing the support plate (4) is connected to the support plate (4). The slag adsorption net (5) is used to adsorb the slag falling from the support plate (4). The protective net (6) has 4 meshes; The slag adsorption mesh (5) has a mesh size of 60.

2. The cathode backsheet device of claim 1, wherein The slag adsorption mesh (5) is spot welded to the support plate (4).

3. The cathode backsheet device of claim 1, wherein The protective net (6) is spot-welded to the support plate (4).

4. The cathode backsheet device of claim 1, wherein The support plate (4) is made of stainless steel or aluminum.

5. A cathode backplate device according to claim 4, characterized in that, The side of the support plate (4) facing the slag adsorption net (5) is sandblasted.

6. The cathode backsheet device of claim 5, wherein, The surface of the slag adsorption mesh (5) is sandblasted.

7. A glass coating apparatus, characterized by, The cathode backplate device according to any one of claims 1-6 further includes a cathode cover plate (1), the cathode cover plate (1) being located on the side of the support plate (4) away from the slag adsorption net (5), and the glass coating equipment further includes a target material (2), the target material (2) being located in the lower region of the cathode backplate device.

8. The glass coating apparatus of claim 7, wherein, The lower end face of the cathode cover plate (1) is connected to the support plate (4).

9. The glass coating apparatus of claim 8, wherein, The support plate (4) is provided with a plurality of mounting holes (41), and the support plate (4) is connected to the cathode cover plate (1) through the mounting holes (41).

10. A glass coating apparatus as claimed in any one of claims 7 to 9, wherein, The glass coating equipment also includes a conveyor roller conveyor (7), on which a plurality of rollers (71) are provided.

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