Cathode structure of semiconductor coating device

Abstract

The utility model discloses a cathode structure of a semiconductor coating device, which belongs to the technical field of semiconductor coating and comprises a shell, a fixing block is arranged on the inner wall of the shell, a rear stand column is fixedly connected to the left side face of the fixing block, a hinge rod is arranged on the inner side of the rear stand column, and a front stand column is arranged on one side, away from the rear stand column, of the hinge rod. In the aspects of mechanical structure stability and flexibility, the rear stand column and the front stand column are arranged to serve as supporting parts, the fixing blocks are connected with the inner wall of the shell, a stable foundation is provided for the whole shielding and protecting structure, and shaking and displacement during working are prevented; the shielding baffle can be flexibly unfolded and contracted like a folding door, the shielding range is adjusted according to needs, and the hinge rod is unfolded in the non-working state to protect the cathode body and the target material body.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor coating technology, and more specifically, to a cathode structure of a semiconductor coating apparatus. Background Technology

[0002] Semiconductors are materials whose conductivity at room temperature is between that of conductors and insulators. Semiconductors require coating during production, and the cathode plays multiple roles in the coating process. First, the cathode attracts positively charged particles or ions through the action of an electric field, causing them to deposit on the cathode surface. This is one of the basic mechanisms of the coating process. Second, factors such as the shape, material, and surface treatment of the cathode will affect the quality and performance of the coating.

[0003] The prior art patent document with authorization announcement number CN219508003U discloses "a cathodic protection device for a stretchable and retractable vacuum coating machine"; it includes a shell, a fixed box fixedly connected to the inner wall of the shell, a geared motor fixedly connected to the side wall of the fixed box, the output end of the geared motor passing through the side wall of the fixed box and fixedly connected to a worm gear, and a worm wheel meshing with the worm gear;

[0004] While existing technologies can shield the target material using a first L-shaped baffle and a second L-shaped baffle to prevent contamination of the target surface, the first and second L-shaped baffles have fixed dimensions and cannot be folded. In non-working conditions, they occupy a large space and cannot be adjusted according to the dimensions of the cathode body and the target body, resulting in low adaptability. Furthermore, it is impossible to clean the surface of the target body when the baffles are unfolded or stored, which reduces the coating quality. Utility Model Content

[0005] The main technical problem solved by this invention is to provide a cathode structure for a semiconductor coating device, which can solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, according to one aspect of the present invention, more specifically, a cathode structure of a semiconductor coating device includes a housing, a fixing block provided on the inner wall of the housing, a rear column fixedly connected to the left side of the fixing block, a hinge rod provided on the inner side of the rear column, a front column provided on the side of the hinge rod away from the rear column, an abutment block fixedly connected to the left side of the front column, a connecting block fixedly connected to the top of the front column, a side sliding groove provided in the middle of the inner side of the abutment block, a guide rod provided in the side sliding groove, a second slider slidably connected to the outer wall of the guide rod, a second spring sleeved on the outer wall of the guide rod, a cleaning brush fixedly connected to one side of the second slider, magnets provided at the upper and lower parts of the left side of the abutment block, and a shielding cloth provided on the outer side of the front column.

[0007] Furthermore, the front column, hinge rod, rear column, abutment block, and docking block form a shielding baffle, and there are two sets of shielding baffles in each case.

[0008] Furthermore, a drive motor is provided on the upper right side of the housing, and a top slide groove is symmetrically provided on the top inside the housing. A threaded rod is provided inside the top slide groove, and a first slider is rotatably connected to the outer wall of the threaded rod. An inverted concave block is fixedly connected to the bottom of the first slider, and a lever is provided on the outer wall of the inverted concave block.

[0009] Furthermore, the output end of the drive motor is connected to a threaded rod, and the threads on the left and right sides of the outer wall of the threaded rod are arranged opposite to each other.

[0010] Furthermore, a mounting base is provided in the middle of the top of the housing, a cathode body is provided at the bottom of the mounting base, and a target body is provided at the bottom of the cathode body.

[0011] Furthermore, a limiting ring is fixedly connected to the middle of the outer wall of the lever, a first spring is sleeved on the outer wall of the lever, and the first spring is located to the right of the limiting ring. An insertion hole is provided inside the docking block.

[0012] Furthermore, the covering fabric is made of aramid fiber material.

[0013] The beneficial effects of the cathode structure of the semiconductor coating apparatus of this utility model are as follows:

[0014] In terms of mechanical structure stability and flexibility, the rear and front columns are set as supporting components and connected to the inner wall of the shell through fixed blocks, providing a stable foundation for the entire shielding and protection structure and preventing shaking and displacement during operation. The hinge rod connects the front and rear columns, allowing the shielding baffle to be flexibly opened and closed like a folding door, adjusting the shielding range as needed. When not in operation, the hinge rod is opened to protect the cathode body and the target body. In terms of cleaning function, the cleaning brush directly contacts the surface of the target component when the shielding baffle moves, cleaning dust and impurities and improving the coating quality. The guide rod is installed in the side sliding groove to accurately guide the second slider, ensuring that the cleaning brush moves along the predetermined trajectory. After the two abutment blocks contact, the cleaning brush is compressed and retracted, facilitating a tight fit between the abutment blocks and avoiding gaps. The second spring is sleeved on the guide rod, providing a restoring force when the hinge rod is retracted, allowing the cleaning brush to return to its initial position.

[0015] By setting up a detachable structure consisting of a fixed block, a lever, a limit ring, a first spring, and a docking block, damaged parts can be directly and quickly replaced when a malfunction occurs after long-term use, shortening downtime for maintenance and improving production efficiency. In addition, detachable parts are easier to classify, recycle, and reuse, which is in line with the concept of environmental protection and sustainable development, and can also reduce the company's resource costs to a certain extent. Attached Figure Description

[0016] The present invention will now be described in further detail with reference to the accompanying drawings and specific implementation methods.

[0017] Figure 1 This is a schematic diagram showing the unfolded cathode structure of a semiconductor coating apparatus according to the present invention;

[0018] Figure 2 This is a schematic diagram showing the storage of the cathode structure of a semiconductor coating device according to the present invention;

[0019] Figure 3 This is a schematic diagram of the top of the inner wall of the cathode structure of a semiconductor coating apparatus according to the present invention;

[0020] Figure 4 This is an enlarged view of part A of the cathode structure of a semiconductor coating apparatus according to the present invention;

[0021] Figure 5 This is a schematic diagram of the folded structure of the cathode structure of a semiconductor coating device according to the present invention;

[0022] Figure 6 This is a schematic diagram of the unshielded cloth folding structure of the cathode structure of a semiconductor coating device according to the present invention;

[0023] Figure 7 This is a partial top view of the front column of the cathode structure of a semiconductor coating device according to this utility model.

[0024] In the diagram: 1. Housing; 2. Fixing block; 3. Rear column; 4. Hinge rod; 5. Front column; 6. Abutting block; 7. Connecting block; 8. Side sliding groove; 9. Guide rod; 10. Second slider; 11. Second spring; 12. Cleaning brush; 13. Magnet; 14. Shielding cloth; 15. Drive motor; 16. Top sliding groove; 17. Threaded rod; 18. First slider; 19. Inverted concave block; 20. Toggle lever; 21. Mounting base; 22. Cathode body; 23. Target body; 24. Limiting ring; 25. First spring; 26. Insertion hole. Detailed Implementation

[0025] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] Example 1

[0027] like Figures 1-7As shown, according to one aspect of this utility model, a cathode structure for a semiconductor coating apparatus is provided, including a housing 1. A fixing block 2 is provided on the inner wall of the housing 1. A rear column 3 is fixedly connected to the left side of the fixing block 2. A hinge rod 4 is provided on the inner side of the rear column 3. A front column 5 is provided on the side of the hinge rod 4 away from the rear column 3. An abutment block 6 is fixedly connected to the left side of the front column 5. A connecting block 7 is fixedly connected to the top of the front column 5. A side sliding groove 8 is provided in the middle of the inner side of the abutment block 6. A guide rod 9 is provided in the side sliding groove 8. A second slider 10 is slidably connected to the outer wall of the guide rod 9. A second spring 11 is sleeved on the outer wall of the guide rod 9. A cleaning brush 12 is fixedly connected to one side of the second slider 10. Magnets 13 are provided at the upper and lower parts of the left side of the abutment block 6. A shielding cloth 14 is provided on the outer side of the front column 5. In terms of mechanical structure stability and flexibility, the rear column 3 and the front column 5 are used as supports. The components are connected to the inner wall of the housing 1 via the fixing block 2, providing a stable foundation for the entire shielding and protection structure and preventing shaking and displacement during operation. The hinge rod 4 connects the front column 5 and the rear column 3, allowing the shielding baffle to be flexibly opened and closed like a folding door, adjusting the shielding range as needed. When not in operation, the hinge rod 4 is opened to protect the cathode body 22 and the target body 23. In terms of cleaning function, the cleaning brush 12 directly contacts the surface of the target body 23 when the shielding baffle moves, cleaning dust and impurities and improving the coating quality. The guide rod 9 is installed in the side sliding groove 8 to accurately guide the second slider 10, ensuring that the cleaning brush 12 moves along the predetermined trajectory. After the two abutment blocks 6 come into contact, the cleaning brush 12 is compressed and retracted, facilitating a tight fit between the abutment blocks 6 and avoiding gaps. The second spring 11 is sleeved on the guide rod 9, providing a restoring force when the hinge rod 4 is retracted, so that the cleaning brush 12 returns to the initial position.

[0028] In this embodiment, the front column 5, hinge rod 4, rear column 3, abutment block 6, and docking block 7 form a shielding baffle, and there are two sets of shielding baffles. This can achieve simultaneous shielding on both sides, enhance the protection effect on the cathode body 22 and the target body 23, improve the overall stability through the symmetrical structure, and flexibly adjust the shielding range according to actual needs, thereby improving the adaptability and flexibility of the device.

[0029] In this embodiment, a drive motor 15 is provided on the upper right side of the housing 1. A top slide groove 16 is symmetrically provided on the top inside the housing 1. A threaded rod 17 is provided inside the top slide groove 16. A first slider 18 is rotatably connected to the outer wall of the threaded rod 17. An inverted concave block 19 is fixedly connected to the bottom of the first slider 18. A lever 20 is provided on the outer wall of the inverted concave block 19. The drive motor 15 on the upper right side of the housing 1 drives the threaded rod 17 to rotate in the top slide groove 16, thereby driving the first slider 18 and the inverted concave block 19 to move. This achieves precise driving of the shielding baffle, ensuring its stable expansion and contraction, and effectively improving the automation and reliability of the cathode structure protection operation of the semiconductor coating device.

[0030] In this embodiment, the output end of the drive motor 15 is connected to a threaded rod 17. The threads on the left and right sides of the outer wall of the threaded rod 17 are arranged opposite to each other, so that when the threaded rod 17 rotates, it drives the first sliders 18 on both sides to move synchronously in opposite directions, accurately and efficiently controlling the synchronous expansion or contraction of the two sets of shielding baffles, and improving the coordination and stability of the protective structure operation.

[0031] In this embodiment, a mounting base 21 is provided in the middle of the top of the housing 1, a cathode body 22 is provided at the bottom of the mounting base 21, and a target body 23 is provided at the bottom of the cathode body 22. This allows the core components to be in a stable central position of the device, which is convenient for precise positioning and fixing. At the same time, it provides a symmetrical reference for the layout of surrounding shielding, protection, cleaning and other structures, ensuring the stability and efficiency of the coating process.

[0032] In this embodiment, a limiting ring 24 is fixedly connected to the middle of the outer wall of the lever 20. A first spring 25 is sleeved on the outer wall of the lever 20, and the first spring 25 is located on the right side of the limiting ring 24. An insertion hole 26 is provided inside the docking block 7. When the blocking baffle is driven to move, the limiting ring 24 can limit the movement range of the lever 20, and the first spring 25 provides a restoring force. After the operator loosens the lever 20, the lever 20 can be inserted into the insertion hole 26, making the connection more stable and facilitating the subsequent disassembly and replacement of the blocking structure by the operator pulling the lever 20.

[0033] In this embodiment, the shielding cloth 14 is made of aramid fiber material, which has the advantages of high strength, high heat resistance, good wear resistance and corrosion resistance, thus extending the service life of the shielding cloth 14.

[0034] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A cathode structure of a semiconductor coating device, comprising a housing (1), characterized in that: The inner wall of the housing (1) is provided with a fixing block (2), the left side of the fixing block (2) is fixedly connected with a rear column (3), the inner side of the rear column (3) is provided with a hinge rod (4), the side of the hinge rod (4) away from the rear column (3) is provided with a front column (5), the left side of the front column (5) is fixedly connected with an abutting block (6), the top of the front column (5) is fixedly connected with a connecting block (7), the middle of the inner side of the abutting block (6) is provided with a side sliding groove (8), the side sliding groove (8) is provided with a guide rod (9), the outer wall of the guide rod (9) is slidably connected with a second slider (10), the outer wall of the guide rod (9) is sleeved with a second spring (11), the side of the second slider (10) is fixedly connected with a cleaning brush (12), the upper and lower parts of the left side of the abutting block (6) are both provided with magnets (13), and the outer side of the front column (5) is provided with a shielding cloth (14).

2. The cathode structure of a semiconductor coating apparatus according to claim 1, wherein: The front column (5), hinge rod (4), rear column (3), abutment block (6), and docking block (7) form a shielding baffle, and there are two sets of shielding baffles.

3. The cathode structure of a semiconductor coating apparatus according to claim 1, wherein: A drive motor (15) is provided on the upper right side of the housing (1). A top slide groove (16) is symmetrically provided on the top inside the housing (1). A threaded rod (17) is provided inside the top slide groove (16). A first slider (18) is rotatably connected to the outer wall of the threaded rod (17). An inverted concave block (19) is fixedly connected to the bottom of the first slider (18). A lever (20) is provided on the outer wall of the inverted concave block (19).

4. The cathode structure of a semiconductor coating apparatus according to claim 3, wherein: The output end of the drive motor (15) is connected to a threaded rod (17), and the threads on the left and right sides of the outer wall of the threaded rod (17) are arranged opposite to each other.

5. The cathode structure of a semiconductor coating apparatus according to claim 1, wherein: An installation base (21) is provided in the middle of the top of the housing (1), a cathode body (22) is provided at the bottom of the installation base (21), and a target body (23) is provided at the bottom of the cathode body (22).

6. The cathode structure of a semiconductor coating apparatus according to claim 3, wherein: A limiting ring (24) is fixedly connected to the middle of the outer wall of the lever (20). A first spring (25) is sleeved on the outer wall of the lever (20), and the first spring (25) is located to the right of the limiting ring (24). An insertion hole (26) is provided inside the docking block (7).

7. The cathode structure of a semiconductor coating apparatus according to claim 1, wherein: The shielding cloth (14) is made of aramid fiber material.

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