Heating pipe structure

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, and discloses a heating tube structure, which comprises a terminal pin and a heating element arranged in a metal protection tube, the metal protection tube is filled with electrical insulation powder, the tail section of the terminal pin connected with the heating element is provided with a limiting part, and the heating element is in axial limiting connection with the limiting part. The terminal pins and the tail sections of the terminal pins form inclined step surfaces. The limiting part limits the axial movement of the heating element so as to prevent the heating element from sliding out of the terminal pin, and the electrical insulation powder filled in the metal protection tube also has a pressing effect on the heating element and the terminal pin, so that the radial direction of the heating element is limited, and the connection tightness of the heating element and the limiting part is further ensured; after the sheath heater is bent, the temperature of each part of the heating element is kept uniform and consistent, and the chemical vapor deposition effect of a semiconductor wafer is improved; when the sheath heater is bent, the inclined step surface can reduce the fracture phenomenon caused by stress.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and more specifically, to a heating tube structure. Background Technology

[0002] Semiconductor thin film technology is the process of depositing materials on the surface of a wafer through physical or chemical means. In the chemical vapor deposition process of semiconductor wafers, various metal heaters, including those made of aluminum, and ceramic heaters are commonly used as heating elements for the semiconductor wafer. The sheathed heater 7 of the metal heater is housed within the heating block 8. The metal protective tube of the sheathed heater 7 is typically made of nickel-chromium-iron alloy or stainless steel. Since the heating block 8 is made of a highly conductive metal, the heating wires within the heating block 8 are sheathed heaters designed to ensure electrical insulation from the heating block.

[0003] The sheathed heater 7 is made by inserting the heating element into a metal protective tube. In order to ensure electrical insulation between the heating element and the metal protective tube, magnesium oxide powder is filled into the metal protective tube. Then, the magnesium oxide powder is tightly compressed by rolling and rotary forging processes. In order for the magnesium oxide inside the metal protective tube to be tightly compressed, the strength of the metal protective tube material needs to reach a certain level. And a suitable metal protective tube material is selected according to the usage environment of the sheathed heater 7.

[0004] Currently, the existing technology has the following problems: before the prepared sheath heater 7 is inserted into the heating block, the straight-shaped sheath heater 7 needs to be bent according to the hot wire pattern required by the metal heater. However, two problems usually occur during bending: First, wire breakage. Since the step A at the end of the power lead is at a right angle, stress concentration occurs at step A when the sheath heater 7 is bent, leading to breakage. Second, when the sheath heater 7 is bent, part of the heating element connected to the end of the power lead may slip out, that is, part of the heating element may detach from the end, resulting in a stretching phenomenon. This causes the coil spacing of the heating element to be inconsistent, making the coil spacing larger at the stretching location, thus reducing the heat generation. The heating temperature of the sheath heater 7 is not uniform in various places, resulting in a decrease in the heating temperature at certain points of the heating block, leading to a decrease in the uniformity of the heating temperature of the semiconductor wafer.

[0005] Therefore, it is necessary to propose a heating tube structure to at least partially solve the problems existing in the prior art. Utility Model Content

[0006] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0007] To at least partially solve the above problems, this utility model provides a heating tube structure, including: lead wires and a heating element disposed in a metal protective tube, wherein the metal protective tube is filled with electrical insulating powder, the end of the lead wires connected to the heating element is provided with a limiting part, the heating element and the limiting part are axially limited and connected, and the lead wires and their end form an inclined stepped surface.

[0008] Preferably, the limiting part is a spiral groove provided at the end of the lead pin, and the heating element is disposed in the spiral groove.

[0009] Preferably, the cross-sectional shape of the spiral groove is triangular or trapezoidal.

[0010] Preferably, the angle between the lead and the stepped surface formed by the lead and the axis of the lead is 30° to 60°.

[0011] Preferably, the heating element is a heating coil, and the size of the spiral groove corresponds to the inner diameter of the heating coil.

[0012] Preferably, the depth to which the heating coil is disposed within the spiral groove is greater than or equal to half the wire diameter of the heating coil.

[0013] Preferably, the heating element is wound around the spiral groove at least three times.

[0014] Preferably, the length of the end of the lead is at most half the length of the lead inserted into the metal protective tube.

[0015] Preferably, the axis of the heating element is collinear with the axis of the metal protective tube.

[0016] Preferably, the electrical insulating powder is magnesium oxide powder.

[0017] Compared with the prior art, the present invention has at least the following beneficial effects:

[0018] The heating tube structure of this utility model has a limiting part at the end of the lead pin, which connects the heating element to the limiting part and limits the axial movement of the heating element to prevent it from sliding off the lead pin. In addition, the electrical insulating powder filled inside the metal protective tube also has a pressing effect on the heating element and the lead pin, thereby limiting the radial movement of the heating element and further ensuring the tightness of the connection between the heating element and the limiting part. After the sheath heater is bent, it maintains the uniformity of temperature throughout the heating element, improves the effect of chemical vapor deposition on semiconductor wafers, and ensures product quality.

[0019] The end of the lead wire and the step surface it forms are inclined, which reduces stress-induced breakage when the sheath heater is bent.

[0020] The heating tube structure described in this utility model, other advantages, objectives and features of this utility model will be partly apparent from the following description, and partly understood by those skilled in the art through study and practice of this utility model. Attached Figure Description

[0021] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0022] Figure 1 This is a schematic diagram of the connection structure between the lead wires and the heating element when the existing sheathed heater is not bent.

[0023] Figure 2 A schematic diagram of the connection structure between the lead wires and the heating element when the sheathed heater of the prior art is bent.

[0024] Figure 3 This is a schematic diagram of the stepped portion of the lead wire in the prior art;

[0025] Figure 4 A top view of the bent structure of the sheathed heater;

[0026] Figure 5 This is a side view of the sheathed heater after it has been bent.

[0027] Figure 6 This is a schematic diagram of an X-ray scan of a sheathed heater at the transition between a straight line and a curve in the prior art;

[0028] Figure 7 This is a schematic diagram of an X-ray scan of a sheathed heater in the curve section of the prior art;

[0029] Figure 8This is a schematic diagram of the heating tube structure described in this utility model;

[0030] Figure 9 This is a schematic diagram of the lead wire structure in the heating tube structure described in this utility model;

[0031] Figure 10 An X-ray scan diagram of the sheathed heater with the heating tube structure described in this utility model at the transition between a straight line and a curve;

[0032] Figure 11 This is a schematic diagram of an X-ray scan of a sheathed heater with the heating tube structure described in this utility model at a curved section. Detailed Implementation

[0033] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments, so that those skilled in the art can implement it based on the description.

[0034] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0035] like Figure 1 The figure shows a schematic diagram of the heating element 2 wrapped around the lead 1 in the prior art. There is no axial restriction between the heating element 2 and the lead 1. The heating element 2 is only pressed by the electrical insulating powder 4 filled in the metal protective tube 3.

[0036] like Figure 4 and Figure 5 The image shows the shape of the prepared sheath heater 7 after bending. The bent sheath heater 7 is inserted into the heating block 8.

[0037] like Figure 2 , Figure 6 and Figure 7 As shown, when the sheath heater 7 in the prior art is bent, the heating element 2 connected to the lead 1 will slide out partially, resulting in stretching, which in turn increases the spacing of the heating coils at this location; as Figure 6 and Figure 7 As shown, on the bent sheath heater 7, the heating element 2 will detach from the lead 1 at the transition between straight lines and curves, as well as at the curve segment.

[0038] like Figure 3 As shown, in the prior art, after the sheath heater 7 is bent, the step portion A is at a right angle. When the sheath heater 7 is bent, the stress at the step portion A is concentrated, resulting in fracture and thus causing a wire breakage fault.

[0039] In order to solve the problems in the prior art, such as Figure 8 As shown, this utility model provides a heating tube structure, including: lead wire 1 and heating element 2 disposed in metal protective tube 3. The metal protective tube 3 is filled with electrical insulating powder 4. The end of the lead wire 1 connected to the heating element 2 is provided with a limiting part. The heating element 2 is axially limited and connected to the limiting part. The lead wire 1 and its end form an inclined stepped surface 6.

[0040] Furthermore, the limiting part can be any structure that can axially limit the heating element 2 while ensuring a stable connection between the heating element 2 and the lead pin 1. The limiting part and the heating element 2 can be connected by snap-fit ​​or fixed connection.

[0041] This invention provides a limiting part at the end of the lead 1, connecting the heating element 2 to the limiting part to limit the axial movement of the heating element 2, thereby preventing the heating element 2 from sliding off the lead 1. Furthermore, the electrical insulating powder 4 filled inside the metal protective tube 3 also has a pressing effect on the heating element 2 and the lead 1, thereby limiting the radial movement of the heating element 2, further ensuring the tightness of the connection between the heating element 2 and the limiting part. Thus, after the sheath heater 7 is bent, the temperature of the heating element 2 is kept uniform, improving the effect of chemical vapor deposition on the semiconductor wafer and ensuring product quality.

[0042] The end of lead 1 and the step surface 6 it forms are set as an inclined surface, thereby reducing stress-induced breakage when the sheath heater 7 is bent.

[0043] like Figure 10 and Figure 11 As shown, with the heating tube structure of this utility model, the heating element 2 and lead 1 will not separate and stretch at the transition between straight lines and curves and at the curve section of the bent sheath heater 7, and the coil spacing of the heating element 2 is relatively consistent.

[0044] like Figure 9 As shown, in one embodiment, the limiting part is a spiral groove 5 provided at the end of the lead 1, and the heating element 2 is provided in the spiral groove 5.

[0045] In this embodiment, the spiral groove 5 can be a thread groove formed by machining the end of the lead 1, and the inclination angle between the end of the lead 1 and the step surface 6 formed therefrom is the angle of the thread.

[0046] The heating element 2 is wound inside the spiral groove 5, and the spiral protrusion of the thread limits the axial movement of the heating element 2.

[0047] Furthermore, the cross-sectional shape of the spiral groove 5 is triangular or trapezoidal.

[0048] Both triangles and trapezoids make the sides of the spiral groove 5 inclined, which can accommodate the heating element 2, and the side of the spiral groove 5 away from the heating element 2 is the step surface 6, thus making the step surface 6 an inclined surface.

[0049] In one embodiment, the angle between the lead 1 and the stepped surface 6 formed at its end and the axis of the lead 1 is 30° to 60°.

[0050] Since the diameter of lead 1 is about 0.5mm, it is prone to breakage under stress. The step surface 6 is improved from a right angle in the existing technology to an angle of less than 90°, which can reduce the phenomenon of breakage caused by stress when bending.

[0051] like Figure 8 As shown, in one embodiment, the heating element 2 is a heating coil, and the size of the spiral groove 5 corresponds to the inner diameter of the heating coil.

[0052] The heating element 2 is wound around the spiral groove 5, so that the outer diameter of the heating element 2 connected to the lead pin 1 is the same as the outer diameter of the heating element 2 not connected to the lead pin 1, further ensuring the stability of the connection between the heating element 2 and the spiral groove 5.

[0053] like Figure 8 As shown, in one embodiment, the depth to which the heating coil is disposed within the spiral groove 5 is greater than or equal to half the wire diameter of the heating coil.

[0054] The heating coil has a circular cross-section, and the depth of the cross-section within the spiral groove 5 is greater than or equal to half the diameter of the cross-section, thus limiting at least half of the heating coil's cross-section within the spiral groove 5, further ensuring the stability of the connection between the heating element 2 and the lead pin 1.

[0055] In one embodiment, the heating element 2 is wound around the spiral groove 5 at least three times.

[0056] The spiral groove 5 at the end of the lead pin 1 is set to at least three turns to improve the limiting effect of the spiral groove 5 on the heating element 2, so that the heating element 2 can be more firmly connected to the lead pin 1.

[0057] In one embodiment, the length of the end of the lead 1 is at most half the length of the lead 1 inserted into the metal protective tube 3.

[0058] The length of the lead 1 inserted into the metal protective tube 3 and the length of the end of the lead 1 should be set appropriately to prevent the lead 1 from sliding inside the metal protective tube 3 when bending, which would stretch the heating element 2. The spiral groove 5 can also increase the contact area between the electrical insulating powder 4 and the lead 1, and increase the pressing effect of the electrical insulating powder 4 on the lead 1.

[0059] Preferably, the length of the end of lead 1 is 1 / 100 to 1 / 10 of the length of lead 1 inserted into the metal protective tube 3;

[0060] Depending on the actual product size, the length of the lead wire 1 inserted into the metal protective tube 3 varies, generally from 100mm to 1000mm, while the length of the end of the lead wire 1 is roughly the same, which is 10mm.

[0061] In one embodiment, the axis of the heating element 2 is collinear with the axis of the metal protective tube 3.

[0062] Since the distance between the heating element 2 and the metal protective tube 3 is small, it is necessary to ensure that the axis of the heating element 2 is located at the center position (i.e., the axis position) of the metal protective tube 3 to ensure the stability of the position of the heating element 2. The heating element 2 and the metal protective tube 3 are effectively electrically isolated by the electrical insulating powder 4 to prevent them from contacting each other after bending.

[0063] In one embodiment, the electrical insulating powder 4 is magnesium oxide powder.

[0064] Magnesium oxide powder has high fire resistance and insulation properties, effectively providing electrical isolation between the heating element 2 and the metal protective tube 3, while also being able to withstand the high-temperature heating of the heating element 2.

[0065] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0066] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0067] Although the embodiments of this utility model have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for this utility model. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by this utility model, this utility model is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A heating tube structure, characterized by, include: The lead (1) and the heating element (2) are disposed in a metal protective tube (3). The metal protective tube (3) is filled with electrical insulating powder (4). The end of the lead (1) connected to the heating element (2) is provided with a limiting part. The heating element (2) and the limiting part are axially limited and connected. The lead (1) and its end form an inclined stepped surface (6).

2. The structure of claim 1, wherein The limiting part is a spiral groove (5) located at the end of the lead (1), and the heating element (2) is located in the spiral groove (5).

3. The structure of claim 2, wherein The cross-sectional shape of the spiral groove (5) is triangular or trapezoidal.

4. The structure of claim 1 wherein, The angle between the lead pin (1) and the stepped surface (6) formed by its end segment and the axis of the lead pin (1) is 30° to 60°.

5. The structure of claim 2 wherein, The heating element (2) is a heating coil, and the size of the spiral groove (5) corresponds to the inner diameter of the heating coil.

6. The structure of claim 5, wherein The depth at which the heating coil is set in the spiral groove (5) is greater than or equal to half the wire diameter of the heating coil.

7. The structure of claim 2 wherein, The heating element (2) is wound in the spiral groove (5) at least three times.

8. The structure of claim 1 wherein, The length of the end of the lead (1) is at most half the length of the lead (1) inserted into the metal protective tube (3).

9. The structure of claim 1 wherein, The axis of the heating element (2) is collinear with the axis of the metal protective tube (3).

10. The structure of claim 1 wherein, The electrical insulating powder (4) is magnesium oxide powder.

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