Movable coating target mechanism

Abstract

The utility model belongs to the field of vacuum coating, and particularly relates to a movable coating target mechanism, which comprises a fixed main body; the coating target frame is movably arranged on one side of the fixed main body; the film coating target assembly is arranged on one side of the film coating target frame; and the displacement driving assembly is used for driving the coating target frame to move, is fixedly arranged on the other side of the fixed main body, and penetrates through the fixed main body to be in driving connection with the coating target frame. According to the coating target mechanism, the coating target assembly can be controlled to move, and the coating target mechanism has great advantages in the aspects of research and development efficiency, material utilization and protection and production flexibility.

Description

Technical Field

[0001] This application belongs to the field of vacuum coating, and specifically relates to a movable coating target mechanism. Background Technology

[0002] Vacuum coating is an important branch of materials science, involving the deposition of materials onto a substrate surface to form a thin film in a vacuum environment using physical or chemical methods. This technology is widely used in electronics, optics, decoration, automotive, and aerospace, among other fields. With technological advancements and industrial development, the demand for thin film materials is increasing, especially for those with specific properties such as high conductivity, high hardness, wear resistance, corrosion resistance, and high-temperature resistance. These demands drive the continuous innovation and development of vacuum coating technology.

[0003] As a key material in the vacuum coating process, the quality and performance of the coating target directly affect the quality and performance of the final thin film. During vacuum coating, atoms or molecules are detached from the target surface through heating, evaporation, or sputtering, and then condense on the substrate surface to form a thin film. This process requires the coating target to possess good thermal stability, chemical stability, and high purity to ensure the uniformity, adhesion, and performance stability of the thin film.

[0004] Current fixed coating targets have the following drawbacks:

[0005] 1. When the target assembly for film deposition is fixed in position, researchers find it difficult to flexibly adjust its location (distance from the target to the substrate). The optimal target assembly position may vary depending on factors such as the deposition material, substrate material, required film thickness, and properties. A fixed target limits the exploration of the optimal target assembly position, potentially hindering the efficient fabrication of films with the best performance. This prolongs the development cycle and increases experimental costs, as multiple trials are required to find relatively suitable conditions.

[0006] 2. For valuable target materials, such as gold targets used for gold-plated films, fixed targets present problems of low material utilization and difficulty in protection. When the gold target is close to the product (substrate), although material can be saved, there is no space to install protective devices to prevent other films from contaminating the gold target when multiple films are coated in the same cavity, and it is easy to scratch the product. If the gold target is too far from the product, damage will be greatly increased. In this process, the fixed target cannot be adjusted in position to reduce losses while ensuring safety.

[0007] 3. When the position of the goods changes, such as when the size is increased or decreased, or when the rotating frame is changed, the fixed target cannot adjust its relative position to the goods in time. This may further aggravate the unevenness of the film thickness, because the fixed position of the coating target assembly is no longer suitable for the new position of the goods. The layout of the entire coating equipment needs to be readjusted, which is cumbersome and time-consuming. Summary of the Invention

[0008] To address the aforementioned issues, the present invention aims to provide a movable coating target mechanism that can control the movement of the coating target assembly, offering significant advantages in terms of R&D efficiency, material utilization and protection, and production flexibility.

[0009] To achieve the above objectives, the technical solution of this application is as follows.

[0010] A movable coating target mechanism, characterized in that it comprises:

[0011] Fixed main body;

[0012] A coating target holder, wherein the coating target holder is movably mounted on one side of the fixed body;

[0013] A coating target assembly, wherein the coating target assembly is disposed on one side of the coating target holder;

[0014] A displacement driving assembly for driving the coating target frame to move is fixedly disposed on the other side of the fixed body, and the displacement driving assembly passes through the fixed body to drive the coating target frame.

[0015] In this coating target mechanism, the coating target frame can be moved in real time through the coating target assembly according to actual R&D and processing needs, thereby driving the coating target assembly located on the coating target frame to move, so that the coating target mechanism has the following advantages:

[0016] 1. The movable mechanism allows for precise adjustment of the coating target assembly's position according to R&D needs. In different R&D scenarios, the target assembly's position can be quickly changed, allowing for real-time observation of changes in thin film performance, thereby more efficiently determining the optimal film preparation conditions. For example, when developing novel optical thin films, the target assembly's position can be quickly located to achieve the best values ​​for the film's refractive index, transmittance, etc.

[0017] 2. The movable mechanism can pull valuable targets (such as gold targets) back into the protective cavity during the coating process. When other film layers are being coated, the valuable targets are moved away to avoid contamination. When the valuable targets are needed, they are then accurately moved to the appropriate position for coating, saving materials, effectively protecting the targets, and improving production efficiency and yield.

[0018] 3. The movable coating target can be adjusted at any time according to changes in the position of the goods. Whether the size of the goods changes or the rotating frame moves, the target can be moved to quickly adapt to new coating requirements, ensuring uniform film thickness and reducing production interruptions and quality problems caused by changes in the position of the goods. Attached Figure Description

[0019] Figure 1 This is a structural schematic diagram of an embodiment of this application.

[0020] Figure 2 This is a cross-sectional view of an embodiment of this application.

[0021] Figure 3 It is a cross-sectional view of the cooling assembly, the coating target holder, and the coating target assembly.

[0022] Figure 4 This is a cross-sectional view of the displacement drive component.

[0023] Figure 5 This is a cross-sectional view of the rotary drive component.

[0024] Icon labels:

[0025] 1. Fix the main body;

[0026] 2. Coating target holder; 21. First disassembly / assembly component; 211. Insertion hole; 212. Insertion port; 22. Second disassembly / assembly component; 221. First connecting channel; 222. Second connecting channel; 223. Positioning groove; 224. Disassembly / assembly part; 225. Limiting plate; 226. Limiting groove; 23. Disassembly / assembly position; 24. Limiting component;

[0027] 3. Coating target assembly; 31. Coating target; 311. Upper end cap; 312. Lower end cap; 313. Water guide rod; 314. Yoke; 315. Target body; 316. Magnet; 317. Inner water channel; 318. Outer water channel; 319. Second gear; 32. First target head; 321. Insertion part; 322. Fixing part; 33. Second target head; 331. Discharge inlet; 332. Discharge outlet; 333. Positioning convex ring;

[0028] 4. Displacement drive assembly; 41. Displacement drive component; 42. Displacement mounting base; 43. Push-pull rod; 44. First insulating sleeve; 45. First guide sleeve; 46. First oil seal;

[0029] 5. Rotary drive assembly; 51. Rotary drive component; 511. Motor; 512. Fourth gear; 52. Rotary mounting base; 53. First gear; 54. Rotary telescopic rod assembly; 541. Rotary rod; 542. Telescopic rod; 543. Telescopic cavity; 544. Third gear; 55. Second insulating sleeve; 56. Second guide sleeve; 57. Second oil seal; 58. Guide post; 581. Bearing; 582. Third oil seal;

[0030] 6. Cooling components; 61. Liquid inlet channel; 62. Liquid outlet channel;

[0031] 7. Baffle assembly; 71. Movable baffle; 72. Rotating retaining ring; 73. Limiting block; 74. Fixed baffle;

[0032] 8. Vacuum chamber. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0034] See Figure 1-5 In this embodiment, a movable coating target mechanism is provided. It is worth noting that this embodiment provides a complete coating target mechanism; the improvements sought in this application are only a portion thereof. The coating target mechanism includes:

[0035] Fixing body 1, specifically a part of the outer shell of the coating equipment;

[0036] The coating target holder 2 is movably disposed on one side of the fixed body 1, that is, the side of the fixed body 1 facing the vacuum cavity 8 applied to the coating, and the other side is the side facing the outside. The coating target holder 2 has a first disassembly and assembly component 21 and a second disassembly and assembly component 22 respectively vertically disposed at both ends, and a disassembly and assembly position 23 is formed between the first disassembly and assembly component 21 and the second disassembly and assembly component 22.

[0037] The coating target assembly 3 includes a coating target 31, a first target head 32, and a second target head 33. The two ends of the coating target 31 are rotatably connected to the first target head 32 and the second target head 33, respectively. The first target head 32 and the second target head 33 are detachably mounted on the first mounting / dismounting component 21 and the second mounting / dismounting component 22, respectively, so that the coating target 31 can be detachably installed in the mounting / dismounting position 23.

[0038] The displacement drive assembly 4 is used to drive the coating target 2 to move closer to or away from the fixed body 1. The displacement drive assembly 4 is fixedly disposed on the other side of the fixed body 1 and moves through the fixed body 1 to drive the coating target 2. By driving the coating target 2 closer to or away from the fixed body 1, the position of the coating target assembly 3 can be controlled.

[0039] The rotary drive assembly 5 is used to drive the coating target 31 to rotate. The rotary drive assembly 5 is located on the other side of the fixed body 1. The rotary drive assembly 5 moves through the fixed body 1 to connect with the coating target frame 2 and is driven to connect with the coating target 31 on the disassembly position 23. The rotary drive assembly 5 can drive the coating target 31 to rotate in real time. When the displacement drive assembly 4 drives the coating target frame 2 to move, the rotary drive assembly 5 can still drive the coating target 31 to rotate while moving synchronously.

[0040] Cooling component 6 is used for inputting and outputting coolant. Cooling component 6 is provided with inlet channel 61 and outlet channel 62. Cooling component 6 is located on the other side of fixed body 1 and moves through fixed body 1 to connect with coating target frame 2. The outlet channel 62 and inlet channel 61 are connected to coating target 31 on disassembly position 23 so that coolant is discharged into coating target 31 through inlet channel 61 and discharged from coating target 31 through outlet channel 62 so as to adjust the temperature of coating target 31 in real time.

[0041] The baffle assembly 7 automatically opens during the coating process on the coating target. The two ends of the baffle assembly 7 are respectively movably mounted on the first target head 32 and the second target head 33.

[0042] It is worth noting that when the displacement drive assembly 4 drives the coating target 2 to move closer to or away from the fixed body 1, the rotation drive assembly 5 and the cooling assembly 6 follow the coating target 2 to perform corresponding activities at the fixed body 1, so as to ensure that the cooling function, rotation function and displacement function of the coating target 31 can be realized simultaneously.

[0043] In this embodiment, a circulating cooling channel is provided inside the coating target 31, and the second target head 33 is also provided with an inlet 331 and an outlet 332 that are connected to the circulating cooling channel. The liquid inlet channel 61 and the liquid outlet channel 62 are connected to the inlet 331 and the outlet 332, respectively.

[0044] In this embodiment, the second disassembly component 22 is provided with a first connecting channel 221 and a second connecting channel 222. The liquid inlet channel 61 is connected to the outlet 331 through the first connecting channel 221, and the liquid outlet channel 62 is connected to the outlet 332 through the second connecting channel 222. That is to say, the liquid inlet channel 61 and the liquid outlet channel 62 are indirectly connected to the circulating cooling channel through the first connecting channel 221 and the second connecting channel 222 of the second disassembly component 22. When the coating target assembly 3 is installed, it is only necessary to install it on the coating target frame 2 to realize the connection between the liquid inlet channel 61, the liquid outlet channel 62 and the circulating cooling channel.

[0045] In this embodiment, the second disassembly component 22 is also provided with multiple positioning grooves 223 to connect with the first connecting channel 221 and the second connecting channel 222 respectively. The second target head 33 is also fixed with multiple positioning protrusions 333, which are respectively arranged around the outside of the outlet 332 and the inlet 331. When the coating target assembly 3 is installed on the coating target frame 2, the multiple positioning protrusions 333 are inserted into the multiple positioning grooves 223 respectively, so that the first connecting channel 221 and the second connecting channel 222 are connected with the liquid inlet channel 61 and the liquid outlet channel 62 respectively. It can be understood that when the coating target assembly 3 is installed, the multiple positioning protrusions 333 can be aligned with the positioning grooves 223 and inserted into them, thus completing the alignment and installation between the first connecting channel 221, the second connecting channel 222 and the liquid inlet channel 61 and the liquid outlet channel 62, and ensuring the accurate and stable installation position of the coating target assembly 3.

[0046] In this embodiment, the coating target 31 includes an upper end cover 311, a lower end cover 312, a water guide rod 313, a yoke 314, a target body 315, and a magnet 316. The upper end cover 311 is rotatably mounted on the second target head 33, and the lower end cover 312 is rotatably mounted on the first target head 32. The target body 315 is sleeved on the yoke 314, and both ends of the target body 315 are fixed to the upper end cover 311 and the lower end cover 312, respectively. The magnet 316 is fixedly mounted on the yoke 314. One end of the water guide rod 313 passes through the upper end cover 311 and is connected to the yoke 314, and the other end of the water guide rod 313 extends into the second target head 33.

[0047] The circulating cooling channel includes an inner water channel 317 and an outer water channel 318. The outlet 331 is connected to one end of the inner water channel 317, and the other end of the inner water channel 317 passes through the water guide rod 313 and the yoke 314 in sequence. One end of the outer water channel 318 is connected to the outlet 332, and the other end of the outer water channel 318 passes through the space between the upper end cover 311 and the water guide rod 313, and between the yoke 314 and the target body 315 in sequence. The other end of the outer water channel 318 and the other end of the inner water channel 317 are connected at or near the lower end cover 312. After entering through the inlet channel 61, the external coolant passes through the first connecting channel 221 to the outlet 331, enters the inner water channel 317 of the guide rod 313, and then enters the inner water channel 317 of the yoke 314 from the inner water channel 317 of the guide rod 313, then enters the outer water channel 318 between the yoke 314 and the target 315, and finally enters the outer water channel 318 between the yoke 314 and the target 315. Finally, it passes through the outlet 332 and the second connecting channel 222 in sequence and is discharged from the outlet channel 62.

[0048] In this embodiment, the first disassembly component 21 is located below the second disassembly component 22; the first disassembly component 21 is provided with an insertion hole 211, and the first target head 32 includes an insertion part 321 and a fixing part 322. The insertion part 321 is fixedly disposed on the lower side of the fixing part 322, the insertion part 321 extends into the insertion hole 211, and the fixing part 322 abuts against the first disassembly component 21 so that the first disassembly component 21 first bears the weight of the coating target 31, and a first locking member for locking the two is provided between the fixing part 322 and the first disassembly component 21. The first locking member can preferably be a screw.

[0049] In this embodiment, the side of the insertion hole 211 extends through the end of the first disassembly and assembly component 21 away from the coating target holder 2 to form an insertion port 212. The insertion port 212 is adapted to the insertion part 321. When the first target head 32 is installed on the first disassembly and assembly component 21, its insertion part 321 is pushed into the insertion hole 211 through the insertion port 212 to reduce the installation difficulty of the coating target 31.

[0050] In this embodiment, the insertion hole 211, the insertion part 321, and the fixing part 322 are all circular, and the diameter of the insertion part 321 is smaller than the diameter of the fixing part 322.

[0051] In this embodiment, the second disassembly / assembly component 22 includes a disassembly / assembly section 224 and two limiting plates 225. The two limiting plates 225 are fixedly disposed on the left and right sides of the disassembly / assembly section 224, and a limiting groove 226 is formed between the second disassembly / assembly component 222 and the two limiting plates 225. The second target head 33 is disposed in the limiting groove 226, and the left and right sides of the second target head 33 are respectively attached to the two limiting plates 225. The second target head 33 is detachably connected to the disassembly / assembly section 224. This detachable connection can be achieved by using screws.

[0052] Specifically, the positioning groove 223 is located on one side of the disassembly and assembly part 224 within the limiting groove 226.

[0053] In this embodiment, the displacement driving assembly 4 includes a displacement driving component 41, a displacement mounting base 42, and a push-pull rod 43. The displacement driving component 41 is fixedly mounted on the displacement mounting base 42. One end of the push-pull rod 43 movably passes through the displacement mounting base 42 and the fixing body 1 to be fixed to the coating target frame 2, and the other end of the push-pull rod 43 is drivenly connected to the displacement driving component 41. The displacement driving component 41 pushes and pulls the push-pull rod 43 to push and pull the coating target frame 2 away from the fixing body 1 and closer to the workpiece to be coated in the vacuum chamber 8, or to bring it closer to the fixing body 2 and away from the workpiece to be coated in the vacuum chamber 8.

[0054] In this embodiment, the displacement drive 41 includes an adjustable stroke cylinder, whose stroke can be adjusted as needed; it is worth noting that the displacement drive 41 can also be replaced by other drive structures that can drive the push-pull rod 43.

[0055] In this embodiment, one side of the displacement mounting base 42 is embedded in the fixing body 1, and a first insulating sleeve 44 is provided between the displacement mounting base 42 and the fixing body 1.

[0056] In this embodiment, a first guide sleeve 45 is provided between the push-pull rod 43 and the displacement mounting seat 42.

[0057] In this embodiment, a first oil seal 46 is provided between the push-pull rod 43 and the displacement mounting seat 42.

[0058] In this embodiment, the rotary drive assembly 5 includes a rotary drive component 51, a rotary mounting base 52, a first gear 53, and a rotary telescopic rod assembly 54 that can extend and retract while being driven to rotate by the rotary drive component 51. A second gear 319 is provided on the coating target 31. The rotary mounting base 52 is fixedly mounted on the fixed body 1, and the rotary drive component 51 is fixedly mounted on the rotary mounting base 52. One end of the rotary telescopic rod assembly 54 is driven to connect with the rotary drive component 51 so that the rotary drive component 51 drives the telescopic rod assembly to rotate. The other end of the rotary telescopic rod assembly 54 passes through the rotary mounting base 52 and the fixed body 1 to extend into the disassembly / assembly position 23 of the coating target frame 2. The first gear 53 is sleeved on the other end of the rotary telescopic rod assembly 54, and the first gear 53 meshes with the second gear 319. When the coating target frame 2 moves, the rotary telescopic rod assembly 54 moves synchronously with it. At this time, the relative position of the first gear 53 on the disassembly / assembly position 23 remains unchanged, and it can work continuously.

[0059] In this embodiment, both the first gear 53 and the second gear 319 are bevel gears.

[0060] It is worth noting that when the coating target 31 is installed, the first target head 32 at its lower end is placed on the first disassembly and assembly part 21 and supported by the first disassembly and assembly part 21. At this time, the second gear 319 on the coating target 31 can mesh with the first gear 53. The second target head 33 at its upper end is placed in the limiting groove 226 of the second disassembly and assembly part 22. Finally, the first target head 32 and the second target head 33 are locked onto the first disassembly and assembly part 21 and the second disassembly and assembly part 22 respectively with screws to complete the installation process.

[0061] In this embodiment, the rotating telescopic rod assembly 54 includes a rotating rod 541 and a telescopic rod 542. A rotating drive member 51 is driven to rotate the rotating rod 541. The rotating rod 541 has a telescopic cavity 543 that restricts the telescopic rod 542 from rotating relative to it. One end of the telescopic rod 542 is telescopically disposed in the telescopic cavity 543, and the other end of the telescopic rod 542 passes through the rotating mounting base 52 and the fixing body 1 to extend into the disassembly / assembly position 23 of the coating target frame 2. The first gear 53 is sleeved on the other end of the telescopic rod 542. It can be seen that when the rotating drive member 51 drives the rotating rod 541 to rotate, the rotating rod 541 will synchronously drive the telescopic rod 542 to rotate, so as to drive the first gear 53 to rotate through the telescopic rod 542; at the same time, the telescopic rod 542 can also move under the drive of the coating target frame 2 to extend and retract relative to the rotating rod 541. Specifically, the telescopic cavity 543 and the telescopic rod 542 can be designed as flat or as non-cylindrical cylindrical structures to achieve the function that the telescopic rod 542 can extend and retract within the telescopic cavity 543 but cannot rotate.

[0062] In this embodiment, the rotary drive 51 includes a motor 511, which is fixedly mounted on the rotary mounting base 52. A third gear 544 is fixed to the outside of the rotating rod 541, and a fourth gear 512 is fixed to the output shaft of the motor 511. The fourth gear 512 meshes with the third gear 544.

[0063] In this embodiment, one side of the rotating mounting base 52 is embedded in the fixed body 1, and a second insulating sleeve 55 is provided between the rotating mounting base 52 and the fixed body 1.

[0064] In this embodiment, a second guide sleeve 56 is provided between the telescopic rod 542 and the rotating mounting base 52.

[0065] In this embodiment, a second oil seal 57 is provided between the telescopic rod 542 and the rotating mounting base 52.

[0066] In this embodiment, the rotating telescopic rod assembly 54 further includes a guide post 58, which telescopically passes through the rotating mounting base 52 and the fixed body 1, and is rotatably sleeved on the outside of the telescopic rod 542. Specifically, the second guide sleeve 56 and the second oil seal 57 are located between the guide post 58 and the rotating mounting base 52.

[0067] In this embodiment, a bearing 581 is provided between the telescopic rod 542 and the guide post 58.

[0068] In this embodiment, a third oil seal 582 is provided between the telescopic rod 542 and the guide post 58.

[0069] In this embodiment, the baffle assembly 7 includes a movable baffle 71 and two rotating retaining rings 72. The two ends of the movable baffle 71 are respectively fixed to the two rotating retaining rings 72, and the rotating retaining rings 72 are respectively connected to the coating target 31 in a damped rotational manner.

[0070] The rotation process of the rotating baffle 72 includes a first position for blocking the coating target 31 and a second position for exposing the coating target 31; when the rotating baffle 72 rotates to the first position, it will synchronously drive the movable baffle 71 to rotate to block the coating target 31; when the rotating baffle 72 rotates to the second position, it will synchronously drive the movable baffle 71 to rotate to expose the coating target 31.

[0071] The first assembly / disassembly component 21 and / or the second assembly / disassembly component 22 are provided with a limiting component 24 that restricts the rotation of the movable baffle 71 when it rotates to the first position in the first direction and to the second position in the second direction. When the coating target 31 rotates, based on the certain damping between the coating target 31 and the rotating retaining ring 72, the rotating retaining ring 72 and the movable baffle 71 are rotated synchronously. When it rotates to the first position in the first direction and to the second position in the second direction, the limiting component 24 limits the baffle assembly 7 to stop its rotation; specifically, " / " means "or", and the first direction and the second direction are opposite directions.

[0072] In this embodiment, a limiting block 73 is provided on the rotating retaining ring 72, and the limiting member 24 corresponds to the limiting block 73.

[0073] In this embodiment, there are two limiting blocks 73, and the two limiting blocks 73 are fixed on the two limiting plates 225 respectively, so as to correspond to the two limiting blocks 73 respectively.

[0074] In this embodiment, at least one limiting plate 225 is detachably provided with a fixing baffle 74 on the side away from the limiting groove 226.

[0075] In this embodiment, a fixed baffle 74 is detachably provided on the side of each of the two limiting plates 225 away from the limiting groove 226, and the coating target 31 is located between the two fixed baffles 74.

[0076] It should be emphasized that in this application, the displacement drive assembly 4, the rotation drive assembly 5, and the baffle assembly 7 can also work in coordination:

[0077] Before starting work, the coating target 2 is placed close to the fixed body 1 to keep away from the coating workpiece inside the vacuum chamber 8.

[0078] During operation, the displacement drive assembly 4 drives the coating target holder 2, which in turn moves the coating target assembly 3 closer to the workpiece to be coated inside the vacuum chamber 8. Simultaneously, the rotation drive assembly 5 operates to drive the coating target 31 to rotate. When the coating target 31 rotates, it will synchronously drive the rotating retaining ring 72 to rotate under the action of damping. The rotating retaining ring 72 will drive the movable baffle 71 to rotate in the first direction to the first position, so that the coating target 31 is exposed. At this time, the coating target 31 can be coated. It should be noted that when the coating target 31 is rotating for coating, the displacement drive assembly 4 can stop to keep it in a fixed position, or it can continue to work and change its position in real time.

[0079] After the work is completed, the displacement drive assembly 4 drives the coating target holder 2 to move the coating target assembly 3 away from the coating workpiece in the vacuum chamber 8. At the same time, the rotation drive assembly 5 drives the coating target 31 to rotate in the opposite direction. When the coating target 31 rotates in the opposite direction, it will drive the rotating retaining ring 72 to rotate synchronously under the action of damping. The rotating retaining ring 72 drives the movable baffle 71 to rotate in the second direction to the second position to block the coating target. At this time, the coating target 31 can avoid contamination.

[0080] The above are merely preferred embodiments of this application and are not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A movable coating target mechanism, characterized in that, include: Fixed main body; A coating target holder, wherein the coating target holder is movably mounted on one side of the fixed body; A coating target assembly, wherein the coating target assembly is disposed on one side of the coating target holder; A displacement driving assembly for driving the coating target holder to move, the displacement driving assembly is fixedly disposed on the other side of the fixed body, and the displacement driving assembly passes through the fixed body to be drivenly connected to the coating target holder; The displacement driving assembly includes a displacement driving component, a displacement mounting base, and a push-pull rod. The displacement driving component is fixedly mounted on the displacement mounting base. One end of the push-pull rod movably passes through the displacement mounting base and the fixed body to be fixed to the coating target frame. The other end of the push-pull rod is drivenly connected to the displacement driving component.

2. The movable coating target mechanism according to claim 1, characterized in that, The displacement mounting base is embedded in the fixing body on one side, and a first insulating sleeve is provided between the displacement mounting base and the fixing body.

3. The movable coating target mechanism according to claim 1, characterized in that, A first guide sleeve is provided between the push-pull rod and the displacement mounting seat.

4. The movable coating target mechanism according to claim 1, characterized in that, A first oil seal is provided between the push-pull rod and the displacement mounting seat.

5. A movable coating target mechanism according to any one of claims 1-4, characterized in that, The coating target frame is provided with a first disassembly component and a second disassembly component at both ends, and a disassembly position is formed between the first disassembly component and the second disassembly component. The coating target assembly includes a coating target, a first target head, and a second target head. The two ends of the coating target are rotatably connected to the first target head and the second target head, respectively. The first target head and the second target head are detachably mounted on a first mounting / dismounting component and a second mounting / dismounting component, respectively, so that the coating target can be detachably installed in the mounting / dismounting position.

6. A movable coating target mechanism according to claim 5, characterized in that, The first disassembly component is located below the second disassembly component.

7. A movable coating target mechanism according to claim 6, characterized in that, The first disassembly component is provided with an insertion hole, and the first target head includes an insertion part and a fixing part. The insertion part is fixedly disposed on the lower side of the fixing part, the insertion part extends into the insertion hole, and the fixing part abuts against the first disassembly component. A first locking member for locking the two is provided between the fixing part and the first disassembly component.

8. A movable coating target mechanism according to claim 7, characterized in that, The side of the insertion hole extends through the end of the first disassembly component away from the coating target frame to form an insertion port, and the insertion port is adapted to the insertion part; The second assembly / disassembly component includes an assembly / disassembly section and two limiting plates. The two limiting plates are fixedly disposed on the left and right sides of the assembly / disassembly section, respectively. A limiting groove is formed between the second assembly / disassembly component and the two limiting plates. The second target head is disposed in the limiting groove, and the second target head is detachably connected to the assembly / disassembly section.

9. A movable coating target mechanism according to claim 8, characterized in that, The second target head is attached to two limiting plates on its left and right sides, respectively.

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