Magnetron sputtering sample loading support

Abstract

The utility model discloses a magnetron sputtering sample carrying support which comprises an objective table arranged in a sealed cavity and a guide shaft penetrating through a bottom plate of the sealed cavity to be connected with the objective table, and a rotating assembly and a lifting assembly which are used for driving the guide shaft are arranged outside the sealed cavity. The rotating assembly comprises a first motor located under the guide shaft, and the first motor is connected with the guide shaft through a first coupler and drives the guide shaft to rotate. The lifting assembly drives the first motor to lift and further drives the guide shaft to lift; the corrugated pipe is arranged on the guide shaft and an output shaft of the first motor in a sleeving manner; the upper end is hermetically arranged on the lower surface of the bottom plate, and the lower end is hermetically arranged on the output shaft of the first motor, so that the output shaft of the first motor can be connected with the guide shaft in the corrugated pipe and drives the guide shaft to rotate and lift. On the basis that the rotating and lifting functions of the objective table are achieved, the driving assembly is arranged outside the cavity, the size of the closed cavity is reduced, the sealing performance is improved, and the manufacturing cost is reduced.

Description

Technical Field

[0001] This utility model relates to the technical field of orthopedic medical device processing accessories, specifically to a magnetron sputtering sample carrier. Background Technology

[0002] Magnetron sputtering is a device that uses a powerful magnetic field to bombard a sputtering target and deposit nanofilms on the material surface. Nanofilms prepared by sputtering are uniform and stable, do not alter the material's inherent properties, and offer advantages such as fast deposition speed, low substrate temperature, and minimal damage to the film.

[0003] In the field of orthopedics, magnetron sputtering can be used to activate the surface coating of prosthetic implants. By applying special coatings or treatments to the surface of medical device implants through magnetron sputtering, the biocompatibility, stability and functionality of the implants can be improved.

[0004] For example, patent application number CN201520169679.7 discloses a magnetron sputtering stage, including a stage with a base mounted on top. The bottom surface of the stage has a placement groove for placing a target device, and the sidewalls of the placement groove have multiple metal plate slots, the axes of which are perpendicular to the axis of the stage. Each of the multiple metal plate slots contains a fixing device that moves horizontally or vertically relative to the target device. However, the magnetron sputtering stage in this application, by placing the target device on the stage, can only perform single-sided magnetron sputtering and cannot achieve omnidirectional coating.

[0005] Existing technologies include magnetron sputtering stages capable of rotation and lifting (e.g., utility model patent CN218969348U). These stages achieve multi-directional coating of the target device through rotation and lifting. However, magnetron sputtering requires a sealed chamber, and the cost of the sealed chamber is closely related to the degree of sealing and the size of the chamber. Therefore, how to achieve omnidirectional lifting and rotation of the stage inside the sealed chamber while minimizing the size of the sealed chamber is a problem that urgently needs to be solved. Utility Model Content

[0006] The purpose of this application is to solve the problem that the magnetron sputtering stage cannot rotate and move up and down in the prior art. Furthermore, the drive component is located in the closed chamber of magnetron sputtering, resulting in an excessively large volume of the closed chamber. Therefore, this utility model provides a magnetron sputtering sample holder that drives the stage inside the closed chamber to rotate and move up and down through a drive component set outside the closed chamber. In addition, a bellows is used for sealing. While realizing the rotation and movement of the stage, the drive component is set outside the chamber, reducing the volume of the closed chamber, improving sealing performance and manufacturing cost.

[0007] To achieve the above objectives, this utility model provides a magnetron sputtering sample carrier, including a stage disposed in a sealed chamber, and a guide shaft passing through the bottom plate of the sealed chamber and connected to the stage, wherein the stage rotates and rises and falls with the guide shaft;

[0008] The sealed cavity is equipped with a rotating assembly and a lifting assembly for driving the guide shaft.

[0009] The rotating assembly includes a first motor located directly below the guide shaft, and the first motor drives the guide shaft to rotate.

[0010] The lifting component is mounted on the base plate on one side of the rotating component, driving the rotating component to rise and fall, thereby driving the guide shaft to rise and fall;

[0011] It also includes a sealing assembly, which includes a bellows that is sleeved on the outer periphery of the guide shaft and the output shaft of the first motor;

[0012] The upper end of the bellows is sealed to the lower surface of the base plate, and the lower end is sealed to the output shaft of the first motor, so that the output shaft of the first motor is connected to the guide shaft inside the bellows and drives it to rotate and rise.

[0013] By adopting the above technical solution, the rotating component drives the guide shaft to rotate, and the lifting component drives the guide shaft to rise and fall. The stage moves with the guide shaft, thereby realizing the lifting and rotation of the stage and achieving all-round processing of the target device. Furthermore, in this application, both the rotating component and the lifting component are located outside the enclosed cavity. Then, the guide shaft extending outside the cavity and the first motor are sealed, minimizing the structure inside the enclosed cavity. Furthermore, in this application, a bellows is used for sealing, which is unaffected by the lifting and falling, resulting in a good sealing effect.

[0014] In some embodiments, the lifting assembly includes a lead screw arranged parallel to the guide shaft and a lifting slider threadedly connected to the lead screw;

[0015] The lead screw is rotatably mounted on the base plate and is driven to rotate by the second motor. When the lead screw rotates, it drives the lifting slider to rise and fall. The lifting slider is connected to the first motor, and when it rises and falls, it drives the first motor to rise and fall simultaneously.

[0016] The base plate is also provided with a guide rail parallel to the lead screw, and the lifting slider is slidably mounted on the guide rail.

[0017] Using the above technical solution, the first motor is driven to rise and fall through the cooperation of the lead screw and the slider. Since the first motor is connected to the guide roller, the rising and falling of the first motor can also drive the rising and falling of the lifting roller, thereby realizing the raising and falling of the platform. The lead screw has low cost and high stability.

[0018] In some embodiments, the first motor is mounted on a motor base, and the lifting slider is connected to the motor base;

[0019] The motor base is a vertically arranged barrel shape. The first motor is located at the lower end of the motor base, and its output axis passes through the motor base upward and extends out from the upper end of the motor base.

[0020] The lower end of the bellows is sealed on the upper surface of the motor base, and a magnetohydrodynamic seal is provided between the output shaft of the first motor and the upper opening of the motor base, thereby sealing the lower part of the bellows.

[0021] Using the above technical solution, the motor base provides a platform for the installation of the first motor. The lifting slider in the lifting assembly is fixed on the motor base to drive the first motor to lift. In addition, the upper surface of the motor base is connected to the lower end of the bellows. The bellows is fixed to the upper surface of the motor base by a flange and bolts. At this time, the inside of the bellows is the same as the inside of the motor base. Air enters the bellows from the inside through the gap between the drive shaft of the first motor and the motor base. Therefore, in order to ensure a better sealing effect, a magnetic fluid seal is provided between the output shaft of the first motor and the upper opening of the motor base.

[0022] In some embodiments, the first motor is connected to the guide shaft via a first coupling;

[0023] The output shaft of the first motor has two parts, including a motor shaft extending from the first motor and a connecting shaft connected to the guide shaft, and the motor shaft and the connecting shaft are connected by a second coupling;

[0024] The motor shaft and the second coupling are located inside the barrel-shaped motor base, and the connecting shaft extends out of the motor base and is provided with a magnetohydrodynamic seal between it and the motor base.

[0025] By adopting the above technical solution, the length of a single output shaft is reduced, and the stable rotation of the rotating shaft is ensured, thereby enhancing the effect of the magnetohydrodynamic seal.

[0026] In some embodiments, the first coupling is a cross coupling and the second coupling is a perforated rubber coupling.

[0027] In some embodiments, a sleeve is provided between the guide shaft and the bottom plate of the enclosed chamber; the inner wall of the sleeve is fitted with the guide shaft, and the outer wall is fitted with the hole wall of the hole on the bottom plate. A fixing ring is also fitted on the outer surface of the sleeve, and the fixing ring abuts against the lower surface of the bottom plate to lock the sleeve onto the bottom plate.

[0028] By adopting the above technical solution, a larger area of ​​support is provided for the guide roller, enabling the guide roller to move more rapidly and stably.

[0029] In some embodiments, the upper end of the bellows is fixed to the base plate by a flange and bolts, while the flange covers the fixing ring, and the inner side of the flange is provided with a groove to accommodate the fixing ring, thereby fixing the fixing ring to the base plate.

[0030] Using the above technical solution, the corrugated pipe is fixed to the sleeve at the same time as the template.

[0031] In some embodiments, the stage includes a support base and at least three gripping claws disposed on the support base;

[0032] The support base is bolted to the end of the guide shaft, and the clamping claws are evenly distributed along the center of the support base;

[0033] The lower part of the clamping claw is provided with a moving component, which includes a lead screw and a slider threadedly connected to the lead screw. The slider is driven to move by rotating the lead screw. The bottom of the clamping claw is disposed on the slider and moves with the slider. Multiple clamping claws move closer to each other to clamp the target device.

[0034] Using the above technical solution, multiple grippers can stably clamp target devices of various shapes.

[0035] In some embodiments, a loading platform is bolted to the center of the support base to achieve surface coating of the two-dimensional sheet-like device.

[0036] The above technical solution facilitates the processing of sheet-like materials.

[0037] In summary, compared with the prior art, the beneficial effects of this utility model are as follows: the rotation of the platform is achieved by the first motor located below the platform, and the lifting of the platform is achieved by the second motor and the lead screw driving the first motor. In this application, the drive structure is located outside the sealed chamber. In order to ensure the sealing of the sealed chamber, a bellows is sleeved on the guide roller extending out of the sealed chamber. One end of the bellows is sealed to the template, and the other end is sealed to the motor base. A magnetohydrodynamic seal is also provided between the output shaft of the first motor and the motor base. Thus, a sealed environment is formed in the sealed chamber and inside the bellows, and the sealed environment does not affect the normal movement of the platform.

[0038] Other features and corresponding beneficial effects of this application will be described in the latter part of the specification, and it should be understood that at least some of the beneficial effects will become obvious from the description in this application. Attached Figure Description

[0039] The present invention, its features, shape, and advantages will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings. Like reference numerals denote like parts throughout the drawings. The drawings are not drawn to scale; their purpose is to illustrate the gist of the invention.

[0040] Figure 1 This is an overall schematic diagram of the magnetron sputtering sample carrier in an embodiment of the present invention;

[0041] Figure 2 Another cross-sectional view of the magnetron sputtering sample carrier in this embodiment of the present invention;

[0042] Figure 3 A cross-sectional view of the magnetron sputtering sample carrier in this embodiment of the present invention;

[0043] Figure 4 A cross-sectional view of the rotating assembly in this embodiment of the present invention;

[0044] Figure 5 A schematic diagram of a loading platform provided in this embodiment of the present invention.

[0045] Explanation of reference numerals in the attached figures:

[0046] 1. Base plate; 2. Stage; 21. Support base; 22. Clamping claw; 23. Moving component;

[0047] 3. Guide shaft;

[0048] 4. Rotating assembly; 41. First motor; 411. Motor shaft; 412. Connecting shaft; 42. First coupling;

[0049] 5. Lifting assembly; 51. Second motor; 52. Lead screw; 53. Lifting slider; 54. Guide rail;

[0050] 6. Sealing assembly; 61. Bellows; 62. Flange; 63. Magnetohydrodynamic seal;

[0051] 7. Motor mount; 8. Sleeve; 81. Fixing ring; 9. Loading platform. Detailed Implementation

[0052] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0053] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0054] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0055] Example

[0056] See Figures 1-4 This embodiment provides a magnetron sputtering sample carrier, including,

[0057] The stage 2 is located in the sealed chamber, and the guide shaft 3 passes through the bottom plate 1 of the sealed chamber and is connected to the stage 2. The stage 2 rotates and rises and falls with the guide shaft 3. The stage 2 is used to hold the target device.

[0058] Specifically, the stage 2 includes a bottom support 21 and three gripping claws 22 mounted on the support 21. The support 21 is bolted to the end of the guide shaft 3. Preferably, the support 21 can be removed from the guide shaft 3 to replace different stages 2 for different target devices. The three gripping claws 22 are evenly distributed along the center of the support 21. Each gripping claw 22 has a moving component 23 at its lower part. The moving component 23 includes a lead screw 52 and a slider threadedly connected to the lead screw 52. The slider can be moved by rotating the lead screw 52. The bottom of the gripping claw 22 is fixed to the slider and moves with the slider. Therefore, the three gripping claws 22 can be brought closer together and grip the target device by rotating the lead screw 52. The three gripping claws 22 can simultaneously move towards the center by rotating the lead screw 52 below them to clamp the target device. The top of the gripping claw 22 is provided with a contact block. The three gripping claws 22 contact and grip the target device through the contact block.

[0059] See Figure 5 The support base 21 can be bolted to install the loading platform 9, thereby achieving the surface coating of the two-dimensional sheet device.

[0060] Specifically, the lower end of the loading platform 9 is connected to the loading stage 2 by bolts, and the upper end has a platform for placing sheet-like devices. Placing the two-dimensional sheet-like device on the upper end of the loading platform 9 can achieve surface coating of the two-dimensional sheet-like device.

[0061] The sealed chamber is equipped with a rotating assembly 4 for driving the guide shaft 3 and a lifting assembly 5. The rotating assembly 4 includes a first motor 41 located directly below the guide shaft 3. The first motor 41 is connected to the guide shaft 3 via a first coupling 42 and drives the guide shaft 3 to rotate. The lifting assembly 5 is located on the base plate 1 and drives the first motor 41 to lift, thereby driving the guide shaft 3 to lift. The chamber also includes a sealing assembly 6, which includes a bellows 61. The bellows 61 is sleeved on the outer periphery of the guide shaft 3 and the output shaft of the first motor 41. The bellows 61 is located outside the sealed chamber, with its upper end sealed on the lower surface of the base plate 1 and its lower end sealed on the output shaft of the first motor 41, so that the output shaft of the first motor 41 can be connected to the guide shaft 3 inside the bellows 61 and drive it to rotate and lift.

[0062] In the existing technology, the rotation and lifting of the stage 2 in the enclosed space has always been a difficult problem. In order to ensure the sealing effect, the guide rollers in the existing technology often only have the lifting function. If the rotation function is required, the motor that drives the stage 2 to rotate is often placed inside the enclosed cavity. This occupies additional space in the enclosed cavity, requires a larger enclosed cavity, and thus increases the cost. On the other hand, the power supply and maintenance of the motor placed inside is also a problem.

[0063] The solution in this application places the second motor 51 outside the closed cavity and seals it with a bellows 61. The structure is simple and the power supply and maintenance of the motor are more convenient.

[0064] Specifically, the lifting assembly 5 is disposed on the base plate 1 on one side of the rotating assembly 4. The lifting assembly 5 includes a lead screw 52 disposed parallel to the guide shaft 3 and a lifting slider 53 threadedly connected to the lead screw 52. The lead screw 52 is disposed adjacent to the guide roller and rotatably disposed on the lower surface of the base plate 1. It is driven to rotate by the second motor 51. When the lead screw 52 rotates, it drives the lifting slider 53 to rise and fall. The lifting slider 53 is connected to the first motor 41. When it rises and falls, it drives the first motor 41 to rise and fall simultaneously.

[0065] The base plate 1 is also provided with a guide rail 54 parallel to the lead screw 52, ​​and the lifting slider 53 slides along the guide rail 54. The second motor 51 is located at the bottom of the guide rail 54, directly below the lead screw 52, ​​and drives the lead screw 52 to rotate.

[0066] Specifically, the first motor 41 is mounted on the motor base 7, and the lifting slider 53 is bolted to the top of the motor base 7;

[0067] The motor base 7 is a vertically arranged barrel shape. The first motor 41 is fixed to the lower end of the motor base 7 by bolts. The output axis of the first motor 41 passes through the motor base 7 upward and extends from the upper end of the motor base 7.

[0068] Furthermore, the output shaft of the first motor 41 has two parts, including a motor shaft 411 extending from the first motor 41 and a connecting shaft 412 connected to the guide shaft 3. The motor shaft 411 and the connecting shaft 412 are connected by a second coupling. The motor shaft 411 and the second coupling are located inside the barrel-shaped motor base 7. The connecting shaft 412 extends out of the motor base 7 and is provided with a magnetic fluid seal 63 between it and the motor base 7.

[0069] The lower end of the bellows 61 is sealed and fixed to the upper surface of the motor base 7 by the flange 62 and bolts, and a magnetohydrodynamic seal 63 is provided between the output shaft of the first motor 41 and the upper opening of the motor base 7, thereby sealing the lower part of the bellows 61.

[0070] Specifically, the first coupling 42 is a cross coupling, and the second coupling is a plum blossom rubber coupling.

[0071] Specifically, a sleeve 8 is provided between the guide shaft 3 and the bottom plate 1 of the closed chamber; the length of the sleeve 8 is greater than the thickness of the bottom plate 1. The sleeve 8 is fitted on the guide shaft 3, the inner wall of the sleeve 8 is in contact with the guide shaft 3, and the outer wall is in contact with the hole wall on the bottom plate 1. A fixing ring 81 is also fixed on the outer surface of the sleeve 8. The fixing ring 81 abuts against the lower surface of the bottom plate 1, and the sleeve 8 is locked on the bottom plate 1.

[0072] The upper end of the bellows 61 is fixed to the base plate 1 by the flange 62 and bolts. At the same time, the flange 62 covers the fixing ring 81, and the inner side of the flange 62 is provided with a groove to accommodate the fixing ring 81, thereby fixing the fixing ring 81 to the base plate 1.

[0073] Those skilled in the art should understand that variations can be implemented by combining existing technology with the above embodiments, which will not be elaborated here. Such variations do not affect the substantive content of this utility model, and will not be elaborated here.

[0074] The preferred embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above. Devices and structures not described in detail herein should be understood as being implemented in a conventional manner within the art. Any person skilled in the art can make many possible variations and modifications to the technical solutions of this utility model using the disclosed methods and techniques, or modify them into equivalent embodiments with equivalent changes, without departing from the scope of the technical solution of this utility model. This does not affect the essential content of this utility model. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of this utility model, without departing from the content of the technical solution of this utility model, still fall within the protection scope of the technical solution of this utility model.

Claims

1. A magnetron sputtering sample carrier, characterized in that, include, A platform (2) is provided in a sealed chamber, and a guide shaft (3) is connected to the platform (2) through the bottom plate (1) of the sealed chamber. The platform (2) rotates and rises and falls with the guide shaft (3). The sealed cavity is provided with a rotating assembly (4) for driving the guide shaft (3) and a lifting assembly (5). The rotating assembly (4) includes a first motor (41) located directly below the guide shaft (3), which drives the guide shaft (3) to rotate. The lifting component (5) is disposed on the base plate (1) on one side of the rotating component (4), driving the rotating component (4) to rise and fall, thereby driving the guide shaft (3) to rise and fall; It also includes a sealing assembly (6), which includes a bellows (61) that is sleeved on the outer periphery of the guide shaft (3) and the output shaft of the first motor (41); The upper end of the corrugated pipe (61) is sealed on the lower surface of the base plate (1), and the lower end is sealed on the output shaft of the first motor (41), so that the output shaft of the first motor (41) is connected to the guide shaft (3) inside the corrugated pipe (61) and drives it to rotate and rise.

2. The magnetron sputtering sample holder according to claim 1, characterized in that: The lifting assembly (5) includes a lead screw (52) arranged parallel to the guide shaft (3) and a lifting slider (53) threadedly connected to the lead screw (52). The lead screw (52) is rotatably mounted on the base plate (1) and driven to rotate by the second motor (51). When the lead screw (52) rotates, it drives the lifting slider (53) to rise and fall. The lifting slider (53) is connected to the first motor (41), and when it rises and falls, it drives the first motor (41) to rise and fall simultaneously. The base plate (1) is also provided with a guide rail (54) parallel to the lead screw (52), and the lifting slider (53) is slidably disposed on the guide rail (54).

3. The magnetron sputtering sample holder according to claim 2, characterized in that: The first motor (41) is mounted on the motor base (7), and the lifting slider (53) is connected to the motor base (7); The motor base (7) is a vertically arranged barrel shape. The first motor (41) is located at the lower end of the motor base (7), and its output axis passes through the motor base (7) upward and extends from the upper end of the motor base (7). The lower end of the bellows (61) is sealed on the upper surface of the motor base (7), and a magnetic fluid seal (63) is provided between the output shaft of the first motor (41) and the upper opening of the motor base (7), thereby sealing the lower part of the bellows (61).

4. The magnetron sputtering sample holder according to claim 3, characterized in that: The first motor (41) is connected to the guide shaft (3) via a first coupling (42); The output shaft of the first motor (41) has two parts, including a motor shaft (411) extending from the first motor (41) and a connecting shaft (412) connected to the guide shaft (3). The motor shaft (411) and the connecting shaft (412) are connected by a second coupling. The motor shaft (411) and the second coupling are located inside the barrel-shaped motor base (7), and the connecting shaft (412) extends out of the motor base (7) and is provided with a magnetic fluid seal (63) between it and the motor base (7).

5. The magnetron sputtering sample holder according to claim 4, characterized in that: The first coupling (42) is a cross coupling, and the second coupling is a plum blossom rubber coupling.

6. The magnetron sputtering sample holder according to claim 1, characterized in that: A sleeve (8) is provided between the guide shaft (3) and the base plate (1); the inner wall of the sleeve (8) is fitted with the guide shaft (3), and the outer wall is fitted with the hole wall on the base plate (1). A fixing ring (81) is also fitted on the outer surface of the sleeve (8). The fixing ring (81) abuts against the lower surface of the base plate (1) to lock the sleeve (8) onto the base plate (1).

7. The magnetron sputtering sample holder according to claim 6, characterized in that: The upper end of the corrugated pipe (61) is fixed to the base plate (1) by a flange (62) and bolts. At the same time, the flange (62) covers the fixing ring (81), and the inner side of the flange (62) is provided with a groove to accommodate the fixing ring (81), thereby fixing the fixing ring (81) to the base plate (1).

8. The magnetron sputtering sample holder according to claim 1, characterized in that: The stage (2) includes a support base (21) and at least three gripping claws (22) disposed on the support base (21). The support base (21) is bolted to the end of the guide shaft (3), and the clamping claws (22) are evenly distributed along the center of the support base (21); The lower part of the gripper (22) is provided with a moving component (23), the moving component (23) includes a lead screw (52) and a slider threadedly connected to the lead screw (52), the slider is driven to move by rotating the lead screw (52); the bottom of the gripper (22) is provided on the slider and moves with the slider, and multiple grippers (22) move close to each other to grip the target device.

9. The magnetron sputtering sample holder according to claim 8, characterized in that: The support base (21) is bolted to the center position of the loading platform (9) to achieve surface coating of the two-dimensional sheet device.

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