Position calibration device

Abstract

The utility model provides a position calibration device, and relates to the technical field of optical illumination tools, the position calibration device comprises a first frame and a second frame sleeved in the first frame, a standard component is fixed in the second frame, and the first frame, the second frame and the standard component are located in the same plane; an adjusting assembly is arranged on the first frame and abuts against the second frame so as to drive the second frame to move in a plane in the first frame, and position adjustment of the standard part in the second frame is achieved. After the position of the standard part relative to the first frame is adjusted to the required standard position, the standard part is used as a reference, and the positions of other parts to be calibrated can be calibrated. According to the position calibration device, by adjusting the position of the standard part relative to the first frame, the adjusting effect is remarkable, the adjusting precision is high, operation is convenient, the structure is simple, and cost is low.

Description

Technical Field

[0001] This application relates to the field of optical lighting tooling technology, specifically to a position calibration device. Background Technology

[0002] A one-dimensional grating is an optical device with regularly spaced vertical alternating bright and dark fringes. The width and spacing of the grating fringes are small and fixed values, and it can be used for light diffraction. In the debugging of the illumination system of a lithography machine, gratings are generally used to assist in aligning some components. Therefore, before debugging, the grating needs to be adjusted to a standard position so that it can be used as a reference standard to adjust and align other components.

[0003] However, current calibration devices used to adjust gratings to standard positions have drawbacks such as high cost and difficulty in calibration operations, or the calibration devices have high requirements, making it difficult to apply them on a large scale, which imposes certain limitations on the calibration of grating positions. Utility Model Content

[0004] The purpose of this application is to provide a position calibration device with high calibration accuracy, strong operability, and low cost.

[0005] In one aspect of this application, a position calibration device is provided, including a first frame and a second frame sleeved within the first frame, a standard component fixed within the second frame, and the first frame, the second frame, and the standard component located in the same plane; an adjustment component is provided on the first frame, the adjustment component abutting against the second frame to drive the second frame to move in a plane within the first frame, thereby adjusting the position of the standard component within the second frame.

[0006] Optionally, the adjustment assembly includes a matching screw sleeve and a threaded component. The screw sleeve is disposed within the first frame, and the threaded component passes through the screw sleeve, with one end abutting against the second frame and the other end protruding through the screw sleeve for knob operation.

[0007] Optionally, a first fastener is further provided within the first frame, the first fastener being fastened to the threaded sleeve for fixing the threaded sleeve; the axis of the first fastener is perpendicular to the axis of the threaded sleeve.

[0008] Optionally, a pressing component is further provided on the opposite side of the adjusting component along the first direction, between the first frame and the second frame, so that when the adjusting component drives the second frame, the pressing component presses against the second frame so that the second frame remains horizontal within the first frame.

[0009] Optionally, the pressing assembly includes a threaded elastic pin, and a first pressing ball is provided at one end of the threaded elastic pin facing the second frame, through which the second frame can be pressed.

[0010] Optionally, in a second direction perpendicular to the line connecting the top pressing component and the adjusting component, a gap elimination component is further provided between the first frame and the second frame, the gap elimination component being used to eliminate the gap between the first frame and the second frame.

[0011] Optionally, the gap elimination assembly includes a press-in elastic pin, wherein a second pressure ball is disposed at one end of the press-in elastic pin facing the second frame, and a first elastic element is disposed at one end of the press-in elastic pin facing the first frame.

[0012] Optionally, the first frame is further provided with a clamping component, which is used to clamp the second frame in a third direction perpendicular to the first direction and the second direction.

[0013] Optionally, the clamping assembly includes an elastic clamping plate, which is fixed by a second fastener disposed on the first frame, and the elastic clamping plate extends onto the second frame to clamp the second frame;

[0014] Along the third direction upward, a second elastic element is also sleeved on the side of the second fastener facing the second frame, and the elastic pressure plate is sleeved on the second elastic element and fixed to the second fastener.

[0015] Optionally, along the third direction upward, an elastic support member is further provided between the first frame and the second frame, and the two ends of the elastic support member abut against the first frame and the second frame respectively;

[0016] The first frame forms a stepped structure along the third direction, and one end of the elastic support abuts against the stepped surface of the stepped structure of the first frame.

[0017] The position calibration device provided in this application embodiment places a standard part within a second frame and fixes it in place. The second frame is placed within a first frame. Adjustment components on the first frame allow for planar movement of the second frame within the first frame, thereby enabling planar movement of the standard part within the second frame within the first frame, and adjusting the position of the standard part relative to the first frame. After adjusting the position of the standard part relative to the first frame to the desired standard position, the position of other parts to be calibrated can be calibrated using the standard part as a reference. The position calibration device provided in this application embodiment achieves significant adjustment effect and high adjustment accuracy by adjusting the position of the standard part relative to the first frame. It is also convenient to operate, has a simple structure, can be applied in batches, and has low cost. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the position calibration device provided in an embodiment of this application;

[0020] Figure 2 yes Figure 1 A top-down view;

[0021] Figure 3 yes Figure 2 Cross-sectional view in the UU direction.

[0022] Icons: 10-First fastener; 11-Raster sheet; 12-Second frame; 13-Elastic pressure plate; 131-Second fastener; 132-Second elastic element; 14-First frame; 140-Step surface; 15-Elastic support element; 16-Threaded sleeve; 17-Threaded element; 18-Threaded elastic pin; 19-Press-in elastic pin; F1-First direction; F2-Second direction; F3-Third direction. Detailed Implementation

[0023] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0024] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0025] It should also be noted that, unless otherwise explicitly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0026] Please refer to Figure 1As shown, this application embodiment provides a position calibration device, including: a first frame 14 and a second frame 12 sleeved within the first frame 14, a standard component fixed within the second frame 12, the first frame 14, the second frame 12 and the standard component being located in the same plane; an adjustment component is provided on the first frame 14, the adjustment component abutting against the second frame 12 to drive the second frame 12 to move in the plane within the first frame 14, thereby realizing the position adjustment of the standard component within the second frame 12.

[0027] This application uses a standard grating sheet 11 as an example, which can be used to assist in the debugging of components in the illumination system of a lithography machine. The grating sheet 11 can be clamped and bonded by two transparent glass plates to form an integral structure. This integral structure is fixed inside a second frame 12 and forms a whole with the second frame 12. The second frame 12 is fitted inside a first frame 14. The second frame 12 is driven to move in a plane within the first frame 14 by an adjustment component on the first frame 14, which in turn drives the grating sheet 11, which is integral with the second frame 12, to move in a plane within the first frame 14. This allows the position of the grating sheet 11 to be adjusted so that the stripe direction of the grating sheet 11 is parallel to the edge of the first frame 14, thus adjusting the grating sheet 11 to a standard position.

[0028] Then, the position calibration device is applied to the debugging of the lithography machine's illumination system. The light source is turned on so that the stripes of the grating plate 11 illuminate the target position. The positional relationship between the stripes of the grating plate 11 and the components at the target position is compared, thereby enabling alignment and other calibration operations for the components at the target position.

[0029] In the example of this application, the first frame 14 and the second frame 12 are both regular quadrilateral frames, and the center of the first frame 14 and the second frame 12 are both hollowed out. The second frame 12 is placed in the hollowed-out first frame 14, and the grating sheet 11 is placed in the hollowed-out second frame 12 and fixed. The adjustment component can adjust the second frame 12 and the grating sheet 11 as a whole, so that the second frame 12 can rotate in the plane within the first frame 14, thereby completing the adjustment of the position of the grating sheet 11.

[0030] Therefore, the position calibration device provided in this application embodiment fixes a standard part within a second frame 12, which is placed within a first frame 14. The second frame 12 can be adjusted within the first frame 14 via an adjustment component on the first frame 14, thereby allowing the standard part within the second frame 12 to move within the first frame 14, thus adjusting the position of the standard part relative to the first frame 14. After adjusting the position of the standard part relative to the first frame 14 to the desired standard position, the position of other parts to be calibrated can be calibrated using the standard part as a reference. The position calibration device provided in this application embodiment achieves significant adjustment effect and high accuracy by adjusting the position of the standard part relative to the first frame 14. It is also convenient to operate, has a simple structure, can be applied in batches, and has low cost.

[0031] Specifically, the adjustment assembly includes a matching screw sleeve 16 and a threaded component 17. The screw sleeve 16 is disposed within the first frame 14, and the threaded component 17 passes through the screw sleeve 16, with one end abutting against the second frame 12 and the other end protruding through the screw sleeve 16 for knob operation.

[0032] The threaded sleeve 16 is used in conjunction with the threaded component 17. The threaded sleeve 16 is laterally fixed inside one side of the first frame 14 along the first direction F1. The threaded component 17 passes through the threaded sleeve 16 and is threadedly connected to the threaded sleeve 16. The other end of the threaded component 17 can be exposed through the side of the first frame 14. In this way, by turning the threaded component 17, the second frame 12 can be pushed to move within the first frame 14 along the first direction F1.

[0033] in, Figure 1 In the example, the first direction F1 is perpendicular to the stripe direction of the grating plate 11. Therefore, the threaded part 17 can be used to adjust the stripe direction of the grating plate 11 so that the stripe direction of the grating plate 11 is parallel to the vertical edge of the first frame 14. That is, the stripe direction of the grating plate 11 is parallel to the second direction F2, which can be regarded as adjusting the grating plate 11 to the standard position.

[0034] For example, the threaded component 17 of this application can be a screw or a micrometer with a precision threaded pair. The threaded component 17 and the threaded sleeve 16 cooperate to adjust the second frame 12. A ball can also be provided at the end of the threaded component 17 facing the second frame 12, and the ball pushes the second frame 12.

[0035] Reference Figure 3 As shown, a first fastener 10 is also provided in the first frame 14. The first fastener 10 is fastened to the threaded sleeve 16 to fix the threaded sleeve 16. The axis of the first fastener 10 is perpendicular to the axis of the threaded sleeve 16.

[0036] The first fastener 10 can be a fixing screw. The first fastener 10 and the screw sleeve 16 are set perpendicular to each other. The first fastener 10 can press and fix the screw sleeve 16, and fix the screw sleeve 16 firmly in the first frame 14, so that the screw sleeve 16 and the first frame 14 will not rotate or move relative to each other. This ensures that the threaded part 17 can push the second frame 12 along the first direction F1 without deviating, and improves the accuracy of adjustment.

[0037] There are two sets of threaded sleeves 16 and threaded parts 17, which are distributed along the second direction F2 on one side of the first frame 14, so that the second frame 12 can be adjusted by swinging along the second direction F2.

[0038] A pressing component is also provided on the opposite side of the adjusting component along the first direction F1, between the first frame 14 and the second frame 12, so that when the adjusting component drives the second frame 12, the pressing component presses the second frame 12 so that the second frame 12 remains horizontal within the first frame 14.

[0039] The pressing component is located on the opposite side of the adjusting component along the first direction F1, and the pressing component is located between the inner frame edge of the first frame 14 and the outer frame edge of the second frame 12. Its function is that when the adjusting component pushes the second frame 12 along the first direction F1, the opposing pressing component can press the second frame 12 to keep the second frame 12 stable.

[0040] In the example of this application, the pressing assembly includes a threaded resilient pin 18, and a first pressing ball is provided at one end of the threaded resilient pin 18 facing the second frame 12, through which the second frame 12 can be pressed.

[0041] The threaded elastic pin 18 presses against the second frame 12 by setting a first pressure ball. Generally, the pressure ball is a sphere. When the sphere presses against the second frame 12, it can provide stable support, which is suitable for scenarios such as the grating sheet 11 that require precise positioning. In addition, the threaded elastic pin 18 also has the advantages of thread and elasticity, which further increases the stability of the support and the accuracy of positioning.

[0042] On the second direction F2, which is perpendicular to the first direction F1 and perpendicular to the line connecting the top pressing component and the adjusting component, a gap elimination component is also provided between the first frame 14 and the second frame 12. The gap elimination component is used to eliminate the gap between the first frame 14 and the second frame 12.

[0043] Specifically, the gap elimination assembly includes a press-in elastic pin 19, with a second top pressure ball at one end of the press-in elastic pin 19 facing the second frame 12 and a first elastic element at the other end facing the first frame 14.

[0044] There are four press-in elastic pins 19, which are arranged in pairs opposite each other in the lateral gap between the second frame 12 and the first frame 14 along the second direction F2. The press-in elastic pins 19 can be threaded pins or other elastic elements, the purpose of which is to eliminate the gap between the sides of the first frame 14 and the second frame 12.

[0045] The end of the press-in elastic pin 19 facing the second frame 12 has a second top pressure ball pressing against the second frame 12, and the end facing the first frame 14 has a first elastic element such as a spring. When the second top pressure ball is squeezed, the first elastic element has a certain amount of elastic compression, which can be used to reduce or eliminate the gap between the first frame 14 and the second frame 12.

[0046] Thus, in the plane direction in which the second frame 12 can move, namely the plane formed by the first direction F1 and the second direction F2, one side frame edge of the second frame 12 is pushed by the screw sleeve 16 and the threaded part 17, while the other three side frame edges are pressed into the elastic pin 19 and the threaded elastic pin 18. The plane position of the second frame 12 within the first frame 14 can be adjusted precisely, ensuring the horizontal stability of the second frame 12 during adjustment.

[0047] Based on this, a clamping component is also provided on the first frame 14. The clamping component is used to clamp the second frame 12 on a third direction F3 that is perpendicular to the first direction F1 and the second direction F2.

[0048] The third direction F3 is the vertical direction. The second frame 12 needs to be pressed in the vertical direction to prevent the second frame 12 from moving in the vertical direction, so that the second frame 12 can only move and adjust within the plane formed by the first direction F1 and the second direction F2.

[0049] The clamping assembly includes an elastic clamping plate 13, which is fixed by a second fastener 131 disposed on the first frame 14, and the elastic clamping plate 13 extends onto the second frame 12 to clamp the second frame 12.

[0050] Four second fasteners 131 are respectively provided on the two frame edges of the first frame 14 along the first direction F1, arranged in pairs opposite each other. The elastic pressure plate 13 is fixed to the first frame 14 by the second fasteners 131. The elastic pressure plate 13 has a portion extending to the second frame 12 to press the second frame 12, thus restricting the movement of the second frame 12 in the third direction F3.

[0051] Furthermore, along the third direction F3, a second elastic element 132 is also sleeved on the side of the second fastener 131 facing the second frame 12, and an elastic pressure plate 13 is sleeved on the second elastic element 132 and fixed to the second fastener 131.

[0052] A second elastic element 132, such as a spring, can be sleeved below the second fastener 131. When the elastic pressure plate 13 is tightened by the second fastener 131, the setting of the second elastic element 132 provides a certain elastic clamping force to the elastic pressure plate 13 in the third direction F3, ensuring that the elastic pressure plate 13 has good contact with the second frame 12 and improving the reliability of the elastic pressure plate 13 clamping the second frame 12.

[0053] like Figure 2 , Figure 3As shown, the clamping assembly clamps the second frame 12 from above along the third direction F3. An elastic support 15 is also provided below the second frame 12. The elastic support 15 is located along the third direction F3 between the first frame 14 and the second frame 12. The two ends of the elastic support 15 abut against the first frame 14 and the second frame 12, respectively.

[0054] The second frame 12 can be held in place by the elastic support 15 in the third direction F3 from the bottom, and pressed by the elastic pressure plate 13 at the top, so that the second frame 12 is restricted in the vertical direction and prevents the second frame 12 from moving in the third direction F3.

[0055] Furthermore, such as Figure 3 As shown, the first frame 14 forms a stepped structure along the third direction F3, and one end of the elastic support 15 abuts against the stepped surface 140 of the stepped structure of the first frame 14.

[0056] The first frame 14 is hollow inside to accommodate the second frame 12. The bottom wall of the first frame 14 is hollow, so that the first frame 14 forms an L-shaped cross section in the third direction F3. The L-shaped cross section gives the first frame 14 a stepped structure. One end of the elastic support 15 abuts against the stepped surface 140 of the stepped structure, and the other end abuts against the bottom wall of the second frame 12.

[0057] When the position calibration device of this application is applied to the grating sheet 11, after fixing the grating sheet 11 inside the second frame 12 and pressing the second frame 12 firmly, the position calibration device is placed horizontally on the optical platform. When light shines through the grating sheet 11, alternating bright and dark stripes of the grating can be seen on the receiving plate. Figure 1 For example, assuming the stripes are tilted to the right, adjust the upper threaded part 17 to push the second frame 12, causing the grating stripes to return to the left until they are visually vertical. Conversely, if the grating stripes are tilted to the left, adjust the lower threaded part 17, and the grating stripes will return to the right until they are visually vertical.

[0058] In practical applications, the position calibration device of this application will be installed on the workpiece according to a certain installation reference. Through the above adjustment, it is ensured that the grating stripes and the vertical frame edge (second direction F2) of the first frame 14 are parallel. After the position calibration device is fixed on the workpiece, the light is shone, and by adjusting the workpiece and calibrating the angle of the grating stripes, it can be ensured that the workpiece is horizontal or vertical.

[0059] The position calibration device of this application is simple to operate and has a low cost, but the actual effect is quite significant; moreover, the one-dimensional grating can be selected with different line widths according to the adjustment accuracy requirements.

[0060] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A position calibration device, characterized in that, include: A first frame and a second frame fitted inside the first frame, a standard component fixed inside the second frame, the first frame, the second frame and the standard component being located in the same plane; an adjustment component is provided on the first frame, the adjustment component abutting against the second frame to drive the second frame to move in the plane within the first frame, thereby adjusting the position of the standard component within the second frame.

2. The position calibration device according to claim 1, characterized in that, The adjustment assembly includes a matching screw sleeve and a threaded component. The screw sleeve is disposed within the first frame, and the threaded component passes through the screw sleeve, with one end abutting against the second frame and the other end protruding through the screw sleeve for knob operation.

3. The position calibration device according to claim 2, characterized in that, The first frame is further provided with a first fastener, which is fastened to the threaded sleeve to fix the threaded sleeve; the axis of the first fastener is perpendicular to the axis of the threaded sleeve.

4. The position calibration device according to any one of claims 1 to 3, characterized in that, A pressing component is further provided on the opposite side of the adjusting component along the first direction, between the first frame and the second frame, so that when the adjusting component drives the second frame, the pressing component presses against the second frame so that the second frame remains horizontal within the first frame.

5. The position calibration device according to claim 4, characterized in that, The top-pressing assembly includes a threaded elastic pin, and a first top-pressing ball is provided at one end of the threaded elastic pin facing the second frame, through which the second frame can be pressed.

6. The position calibration device according to claim 4, characterized in that, In a second direction perpendicular to the line connecting the top pressure assembly and the adjustment assembly, a gap elimination assembly is further provided between the first frame and the second frame, the gap elimination assembly being used to eliminate the gap between the first frame and the second frame.

7. The position calibration device according to claim 6, characterized in that, The gap elimination assembly includes a press-in elastic pin, with a second top pressure ball at one end of the press-in elastic pin facing the second frame and a first elastic element at one end of the press-in elastic pin facing the first frame.

8. The position calibration device according to any one of claims 1 to 3, 5 to 7, characterized in that, The first frame is further provided with a clamping component, which is used to clamp the second frame in a third direction perpendicular to the first direction and the second direction.

9. The position calibration device according to claim 8, characterized in that, The clamping assembly includes an elastic clamping plate, which is fixed by a second fastener disposed on the first frame, and the elastic clamping plate extends to the second frame to clamp the second frame; Along the third direction upward, a second elastic element is also sleeved on the side of the second fastener facing the second frame, and the elastic pressure plate is sleeved on the second elastic element and fixed to the second fastener.

10. The position calibration device according to claim 8, characterized in that, Along the third direction upward, an elastic support member is also provided between the first frame and the second frame, and the two ends of the elastic support member abut against the first frame and the second frame respectively; The first frame forms a stepped structure along the third direction, and one end of the elastic support abuts against the stepped surface of the stepped structure of the first frame.

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