Cross-medium isolation device for air supply path of mechanical interface system of front open type wafer transfer box
By using pneumatic connectors and isolation box structures in the wafer cassette loading equipment, the problem of poor sealing of the gas supply pipeline was solved, achieving convenient and efficient gas sealing connection and ensuring isolation between the atmospheric environment and the nitrogen environment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ZHONGKEXIN MICRO INTELLIGENT EQUIP (SHENYANG) CO LTD
- Filing Date
- 2025-05-30
- Publication Date
- 2026-04-24
AI Technical Summary
In existing wafer cassette loading equipment, the gas supply lines and the mounting substrate have poor sealing, resulting in cumbersome sealing procedures and a high risk of leakage.
It adopts a pneumatic connector and isolation box structure, and is sealed at the opening of the mounting base plate through the first sealing element. The pneumatic connector is connected to the first air passage and the second air passage to realize the connection of the air supply pipeline between the atmospheric environment and the nitrogen environment, avoiding the need for glue treatment.
It simplifies the gas supply pipeline connection process, improves sealing, avoids gas leakage, and is easy and flexible to operate, adapting to different gas supply pipeline quantity requirements.
Smart Images
Figure CN224165077U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a cross-medium isolation device for the gas supply path of a front-opening wafer transfer box mechanical interface system. Background Technology
[0002] In semiconductor manufacturing, wafer cassettes primarily serve to place and transport wafers; they are storage devices that temporarily store wafers during wafer transport and maintain their sealed state.
[0003] In existing wafer cassette loading equipment, mounting holes are provided on the mounting substrate at the separation point between the atmospheric environment and the nitrogen environment to pass through the gas supply pipeline. The gas supply pipeline is sealed and fixed to the mounting substrate by applying glue. The entire sealing process is cumbersome and has poor sealing performance, making it prone to leakage.
[0004] In view of this, it is necessary to propose a cross-medium isolation device for the gas supply path of a front-opening wafer transfer box mechanical interface system to solve the above problems. Utility Model Content
[0005] The purpose of this invention is to provide a cross-medium isolation device for the gas supply path of a front-opening wafer transfer box mechanical interface system, in order to improve the problem of cumbersome sealing steps and poor sealing performance between the existing gas supply pipeline and the mounting substrate.
[0006] This utility model provides a cross-medium isolation device for the gas supply path of a front-opening wafer transfer box mechanical interface system, comprising:
[0007] The mounting substrate has a first side surface near the nitrogen environment and a second side surface near the atmospheric environment, and the mounting substrate is provided with an opening.
[0008] At least one operating table is disposed on the second side and is used to place a wafer cassette.
[0009] At least one first air passage is provided on the first side and extends to the opening;
[0010] The isolation mechanism includes an isolation box sealed on the second side by a first sealant and a plurality of pneumatic connectors on the isolation box. The isolation box covers the opening. One end of each pneumatic connector is located at the opening and connected to the first air passage, and the other end is located on the atmospheric environment side and connected to the second air passage.
[0011] The beneficial effects of the cross-medium isolation device for the gas supply path of the front-opening wafer transfer box mechanical interface system provided by this utility model are as follows: the isolation box seals the opening, thus sealing the opening; the pneumatic connector is located on the isolation box, facilitating pipeline connection; when connecting the gas supply pipeline, it is only necessary to connect the pneumatic connector to the first gas line located on the nitrogen environment side and the second gas line located on the atmospheric environment side, respectively, to realize the connection of the gas supply pipeline between the atmospheric environment and the nitrogen environment, without the need for adhesive treatment, which is more convenient, and solves the technical problem of poor sealing between the gas supply pipeline and the mounting substrate at the separation point between the atmospheric environment and the nitrogen environment.
[0012] In one possible embodiment, the isolation mechanism further includes an adapter box disposed on the isolation box and a plurality of regulating valves disposed on the adapter box. The regulating valves are configured in a one-to-one correspondence with the pneumatic connectors, with one end of the regulating valve connected to the corresponding pneumatic connector and the other end connected to the second air passage.
[0013] Its beneficial effects are as follows: by setting an adapter box on the isolation box, setting a regulating valve on the adapter box, and connecting the pneumatic connector and the second air passage through the regulating valve, the regulating valve plays the role of regulating the gas flow rate.
[0014] In one possible embodiment, an adapter is provided on the side of the isolation box away from the mounting substrate, and the adapter box is sealed at the adapter.
[0015] Its beneficial effect is that: an adapter is provided on the isolation box, and the adapter box is placed at the adapter by a sealed connection, ensuring the airtightness of the adapter box installation.
[0016] In one possible embodiment, the adapter box is sealed at the adapter interface by a second seal.
[0017] Its beneficial effect is that the adapter box is sealed on the isolation box by means of a second sealing element, so as to seal the connection between the adapter box and the isolation box.
[0018] In one possible embodiment, the second seal is an O-ring and is disposed along the edge of the adapter box.
[0019] Its beneficial effect is that the second sealing element adopts an O-ring and is arranged around the edge of the adapter box between the adapter box and the isolation box, so as to achieve a full and effective sealing effect.
[0020] In one possible embodiment, the adapter box is provided with a plurality of adapter holes, and each adapter hole is provided with an adjustment valve.
[0021] Its beneficial effect is that, based on the number and arrangement of the regulating valves, the number and arrangement of the transition holes can be reasonably set.
[0022] In one possible embodiment, the regulating valve is a speed control valve or a throttle valve.
[0023] In one possible embodiment, the first seal is an O-ring and is disposed along the edge of the isolation box.
[0024] Its beneficial effect is that the first sealing element adopts an O-ring and is arranged around the edge of the isolation box between the second side of the isolation box and the mounting base plate, so as to achieve a full and effective sealing effect.
[0025] In one possible embodiment, the pneumatic connector is in two rows or two columns.
[0026] In one possible embodiment, the isolation box is hollow inside and the side of the isolation box closest to the second side is open. Attached Figure Description
[0027] Figure 1 This is a schematic diagram showing the gas supply path cross-medium isolation device of the front-opening wafer transfer box mechanical interface system of this utility model installed on the mounting substrate.
[0028] Figure 2 An exploded view of the gas supply path cross-medium isolation device for the front-opening wafer transfer box mechanical interface system of this utility model.
[0029] Explanation of reference numerals in the attached drawings: 100, mounting substrate; 110, first side surface; 120, second side surface; 200, operating table; 300, wafer cassette; 400, first air passage; 500, isolation mechanism; 510, pneumatic connector; 520, isolation box; 521, adapter; 530, adapter box; 531, adapter hole; 540, regulating valve; 550, second seal; 560, first seal. Detailed Implementation
[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0031] To address the problems existing in the prior art, embodiments of this utility model provide a cross-medium isolation device for the gas supply path of a front-opening wafer transfer box mechanical interface system. Figure 1 This diagram illustrates the installation of a cross-medium isolation device for the gas supply path of the front-opening wafer transfer box mechanical interface system of this invention on the mounting substrate. Figure 2 An exploded view of the gas supply path cross-medium isolation device for the front-opening wafer transfer box mechanical interface system of this utility model, see below. Figure 1 and Figure 2 The isolation device includes: a mounting substrate 100, at least one operating table 200, at least one first gas path 400, and an isolation mechanism 500. The mounting substrate 100 has a first side 110 near the nitrogen environment and a second side 120 near the atmospheric environment, and the mounting substrate 100 has an opening. The operating table 200 is disposed on the second side 120 and is used to place the wafer cassette 300. The first gas path 400 is disposed on the first side 110 and extends to the opening. The isolation mechanism 500 is disposed on the second side 120 in a sealed manner corresponding to the opening. The isolation mechanism 500 includes a plurality of pneumatic connectors 510, one end of which is located at the opening and connected to the first gas path 400, and the other end is located on the atmospheric environment side and connected to the second gas path. The isolation mechanism 500 also includes an isolation box 520 sealed on the second side 120 by a first sealing member 560. The isolation box 520 is hollow inside and the side of the isolation box 520 closest to the second side 120 is open. The isolation box 520 covers the opening, and a pneumatic connector 510 is provided on the isolation box 520.
[0032] Existing methods use adhesive sealing to fix the gas supply pipeline to the mounting base 100, which is cumbersome and prone to sealing defects. In this invention, the isolation mechanism 500 is an integral part of the mounting base 100, and during manufacturing, it is sealed at the opening of the mounting base 100 using a superior process. A pneumatic connector 510 is used to connect the gas supply pipeline. The pneumatic connector 510 is a connector between pipelines with good sealing performance, ensuring a reliable seal at the connection point and effectively preventing gas leakage. When connecting the gas supply pipeline, simply connect the pneumatic connector 510 to the first gas path 400 on the nitrogen environment side and the second gas path on the atmospheric environment side to connect the gas supply pipeline between the atmospheric and nitrogen environments. This eliminates the need for cumbersome adhesive application, making the entire operation simple and convenient, greatly improving operational efficiency. Simultaneously, it solves the technical problem of poor sealing between the gas supply pipeline and the mounting base 100 at the separation point between the atmospheric and nitrogen environments.
[0033] Furthermore, if the number of mounting holes on the mounting base 100 does not match the actual number of air supply lines, additional holes need to be drilled on the mounting base 100, making the operation more cumbersome. In contrast, this invention provides a sufficient number of pneumatic connectors 510. When connecting air supply lines, the required number of pneumatic connectors 510 can be selected based on the actual number of air supply lines, making the connection more flexible and convenient.
[0034] The isolation box 520 is disposed on the second side 120 of the mounting substrate 100 and covers the opening. The isolation box 520 seals the opening. Furthermore, the connection between the isolation box 520 and the mounting substrate 100 is sealed by the first sealing member 560, further ensuring the sealing effect.
[0035] Next, let's combine... Figure 1 and Figure 2 The specific structure of the isolation mechanism 500 is explained in detail.
[0036] In one embodiment, see Figure 1 and Figure 2 The isolation mechanism 500 also includes a transfer box 530 disposed on the isolation box 520 and a plurality of regulating valves 540 disposed on the transfer box 530. The transfer box 530 is hollow inside and is located on the side of the isolation box 520 away from the mounting base plate 100. The regulating valves 540 are provided in a one-to-one correspondence with the pneumatic connectors 510. One end of the regulating valve 540 is connected to the corresponding pneumatic connector 510 and the other end is connected to the second air passage.
[0037] By further setting an adapter box 530 on the isolation box 520, and setting a regulating valve 540 on the adapter box 530, a corresponding regulating valve 540 is connected to each pneumatic connector 510. The first air passage 400 is connected to the corresponding second air passage through the pneumatic connector 510 and the regulating valve 540. A regulating valve 540 is set on each air passage, and the gas flow rate of each air passage can be adjusted individually through the regulating valve 540.
[0038] In one specific embodiment, see Figure 1 and Figure 2 An adapter 521 is provided on the side of the isolation box 520 away from the mounting base plate 100. The adapter 521 is provided in the area corresponding to the pneumatic connector 510. The adapter box 530 is sealed at the adapter 521.
[0039] By providing an adapter 521 on the side of the isolation box 520 away from the mounting base plate 100, on the one hand, the adapter 521 is used to install the adapter box 530, and the adapter box 530 is sealed at the adapter 521; on the other hand, the adapter 521 is provided in the area corresponding to the pneumatic connector 510, so that the regulating valve 540 on the adapter box 530 can be aligned and connected with the pneumatic connector 510.
[0040] In one embodiment, see Figure 1 and Figure 2 The adapter box 530 is sealed at the adapter interface 521 by the second sealing member 550. The second sealing member 550 seals the adapter box 530 at the adapter interface 521 to ensure the airtightness of the connection between the adapter box 530 and the isolation box 520 and to avoid airtightness problems at the adapter interface 521.
[0041] In one specific embodiment, see Figure 1 and Figure 2 The second sealing element 550 is an O-ring and is set along the edge of the adapter box 530. The second sealing element 550 uses an O-ring with good sealing performance, and it is set around the edge of the adapter box 530, forming a continuous seal on the periphery of the adapter box 530. This ensures a complete seal at the connection between the adapter box 530 and the isolation box 520, avoids leakage, and facilitates later maintenance.
[0042] In one specific embodiment, see Figure 2 The adapter box 530 is provided with several adapter holes 531, and a regulating valve 540 is provided at each adapter hole 531. Specifically, the regulating valve 540 is sealed at the corresponding adapter hole 531.
[0043] In some specific embodiments, see Figure 2 The regulating valve 540 is either a speed control valve or a throttle valve. A speed control valve is a combination valve consisting of a differential pressure reducing valve and a throttle valve connected in series; it is also known as a flow control valve. The main function of a speed control valve is flow control; it can maintain a stable flow rate by automatically adjusting the pressure difference under varying load conditions. A throttle valve, on the other hand, controls fluid flow by changing the throttling cross-section or throttling length. Its main function is to regulate fluid flow. It controls the fluid throughput by changing the cross-sectional area of the passage, thereby achieving precise regulation of the system flow rate.
[0044] In one specific embodiment, see Figure 1 and Figure 2 The first sealing element 560 is an O-ring and is disposed along the edge of the isolation box 520. The first sealing element 560 uses an O-ring with good sealing performance and is disposed around the edge of the isolation box 520, forming a continuous seal on the periphery of the isolation box 520. This ensures a complete seal at the connection between the isolation box 520 and the mounting base plate 100, avoids leakage, and facilitates later maintenance.
[0045] In some specific embodiments, see Figure 1 and Figure 2 The pneumatic connector 510 has two rows or two columns.
[0046] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.
[0047] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0048] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.
[0049] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as defined in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.
Claims
1. A front opening unified pod mechanical interface system gas supply path cross-media isolation device, characterized by, include: The mounting substrate has a first side surface near the nitrogen environment and a second side surface near the atmospheric environment, and the mounting substrate is provided with an opening. At least one operating table is disposed on the second side and is used to place a wafer cassette. At least one first air passage is provided on the first side and extends to the opening; The isolation mechanism includes an isolation box sealed on the second side by a first sealant and a plurality of pneumatic connectors on the isolation box. The isolation box covers the opening. One end of each pneumatic connector is located at the opening and connected to the first air passage, and the other end is located on the atmospheric environment side and connected to the second air passage.
2. The FOWLP mechanical interface system gas path cross-media isolation device of claim 1, wherein, The isolation mechanism also includes an adapter box on the isolation box and a plurality of regulating valves on the adapter box. The regulating valves are configured in a one-to-one correspondence with the pneumatic connectors. One end of the regulating valve is connected to the corresponding pneumatic connector and the other end is connected to the second air path.
3. The FOWLP mechanical interface system gas path cross-media isolation device of claim 2, wherein, An adapter is provided on the side of the isolation box away from the mounting base plate, and the adapter box is sealed at the adapter.
4. The FOWLP mechanical interface system gas supply path cross- medium isolation device of claim 3, wherein, The adapter box is sealed at the adapter interface by a second sealing element.
5. The FOWLP mechanical interface system gas supply path cross-media isolation device of claim 4, wherein, The second seal is an O-ring and is disposed along the edge of the adapter box.
6. The FOWLP mechanical interface system gas supply path cross-media isolation device of claim 2, wherein, The adapter box has several adapter holes, and each adapter hole is equipped with a regulating valve.
7. The FOWLP mechanical interface system gas supply path cross-media isolation device of claim 2, wherein, The regulating valve is a speed control valve or a throttle valve.
8. The FOWLP mechanical interface system gas supply path cross-media isolation device of claim 1, wherein, The first sealing element is an O-ring and is disposed along the edge of the isolation box.
9. The FOWLP mechanical interface system gas path cross-media isolation device of any of claims 1-8, wherein, The pneumatic connector has two rows or two columns.
10. The FOWLP mechanical interface system gas path cross-media isolation device of any of claims 1-8, wherein, The isolation box is hollow inside, and the side of the isolation box closest to the second side is open.