Pressure adjusting device and surface treatment equipment

Abstract

The utility model discloses a pressure regulating device and surface treatment equipment. The pressure regulating device comprises a mounting seat, a pressure regulating device and a pressure regulating device, the first pressure plate is arranged on the mounting seat, and the second pressure plate is arranged on one side of the first pressure plate; the adjusting assembly comprises a plurality of connecting pieces and a plurality of first adjusting pieces, the first adjusting pieces are close to the center of the first pressing disc relative to the connecting pieces, each connecting piece is connected with the first pressing disc and the second pressing disc, and the first adjusting pieces are installed on the first pressing disc and distributed at intervals in the circumferential direction; a part of the first adjusting part is suitable for penetrating through the first pressing disc to make contact with the second pressing disc, and the first adjusting part can move relative to the first pressing disc to drive the second pressing disc to deform. According to the pressure adjusting device provided by the embodiment of the utility model, the pressure applied to each area of the to-be-processed workpiece can be adjusted by arranging the plurality of first adjusting pieces, so that the removal rate of each area of the to-be-processed workpiece can be adjusted, and the processing effect of the to-be-processed workpiece can be improved.

Description

Technical Field

[0001] This utility model relates to the field of polishing and grinding technology, and in particular to a pressure regulating device and surface treatment equipment. Background Technology

[0002] Polishing is a processing method that uses mechanical, chemical, or electrochemical processes to reduce the surface roughness of a workpiece and obtain a bright, smooth surface. The entire process requires polishing tools such as polishing wheels to refine the workpiece surface and necessitates the use of a polishing machine. The pressure plate is an indispensable component within the polishing machine. In existing technologies, pressure plates typically place the workpiece (such as a wafer or wafer) on the polishing plate and apply pressure. However, the linear velocity of different areas of the workpiece varies as it rotates relative to the polishing plate, resulting in different removal rates from the edge to the center. This means the workpiece is prone to bulging or concave during polishing, and the parallelism and flatness of the workpiece are difficult to achieve the desired results, leading to poor processing quality and room for improvement. Utility Model Content

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. Therefore, one objective of the present invention is to provide a pressure regulating device that can adjust the removal rate of different areas of the workpiece, resulting in good processing effect.

[0004] This utility model also proposes a surface treatment device.

[0005] A pressure regulating device according to a first aspect of the present invention includes: a mounting base; a first pressure plate and a second pressure plate, the first pressure plate being disposed on the mounting base and the second pressure plate being disposed on one side of the first pressure plate; and an adjusting assembly, the adjusting assembly including a plurality of connecting members and a plurality of first adjusting members, the first adjusting members being close to the center of the first pressure plate relative to the connecting members, each of the connecting members being connected to the first pressure plate and the second pressure plate respectively, the first adjusting members being mounted on the first pressure plate and arranged at intervals along a circumferential direction, a portion of the first adjusting members being adapted to pass through the first pressure plate and contact the second pressure plate, and the first adjusting members being movable relative to the first pressure plate to cause the second pressure plate to deform.

[0006] According to the pressure regulating device of this utility model embodiment, by setting multiple first regulating members, and the multiple first regulating members being movable relative to the first pressure plate, so as to drive the deformation of each area of ​​the second pressure plate, the deformation of each area of ​​the second pressure plate can be controlled, and the pressure applied to each area of ​​the workpiece can be adjusted, thereby adjusting the removal rate of each area of ​​the workpiece, ensuring that the parallelism and flatness of the processed workpiece meet the expected requirements, and improving the processing effect of the workpiece.

[0007] According to some embodiments of the present invention, the adjustment assembly further includes: a plurality of elastic elements, the elastic elements being located between the first pressure plate and the second pressure plate, and the two ends of the elastic elements being in contact with the first pressure plate and the second pressure plate, respectively.

[0008] In some embodiments, the first pressure plate has a first receiving groove on the side near the second pressure plate, and the second pressure plate has a second receiving groove on the side near the second pressure plate, with both ends of the elastic member extending into the first receiving groove and the second receiving groove, respectively.

[0009] According to some embodiments of the present invention, the elastic element is a spring sleeved on the first adjusting element, and the plurality of elastic elements and the plurality of first adjusting elements correspond one-to-one.

[0010] According to some embodiments of the present invention, the connecting member includes a second adjusting member and a second fastener. The second adjusting member is connected to the first pressure plate, and the second fastener is disposed on the side of the second pressure plate opposite to the first pressure plate. A portion of the second adjusting member is adapted to pass through the first pressure plate and the second pressure plate and is connected to the second fastener. The second adjusting member can move relative to the first pressure plate to drive the second pressure plate to move.

[0011] In some embodiments, the surface of the second pressure plate away from the first pressure plate is provided with a plurality of connecting grooves, and the plurality of connecting grooves correspond one-to-one with the plurality of connecting members for accommodating the second fastener.

[0012] In some embodiments, the pressure regulating device further includes: a plurality of first fasteners, wherein the first fasteners and the portion of the first regulating member located on the side of the first pressure plate away from the second pressure plate are threadedly connected and adapted to abut against the first pressure plate.

[0013] According to some embodiments of the present invention, the pressure regulating device further includes: a third adjusting member, the third adjusting member being disposed on the second pressure plate, and a portion of the third adjusting member being adapted to pass through the second pressure plate and be threadedly connected to the first pressure plate, the third adjusting member being movable relative to the first pressure plate to deform the second pressure plate.

[0014] According to some embodiments of the present invention, the pressure regulating device further includes: a support plate and an adsorption pad, wherein a mounting groove is defined on the side of the second pressure plate opposite to the first pressure plate, the support plate is installed in the mounting groove, the adsorption pad is disposed on the side of the support plate away from the first pressure plate, and the adsorption pad is provided with at least one adsorption hole for adsorbing the workpiece to be processed.

[0015] The surface treatment apparatus according to the second aspect of the present invention includes a pressure regulating device according to the first aspect of the present invention. By employing the pressure regulating device, the pressure applied to each area of ​​the workpiece to be processed can be adjusted, the removal rate of each area of ​​the workpiece to be processed can be adjusted, the parallelism and flatness of the processed workpiece can be guaranteed to meet the expected requirements, and the working effect of the surface treatment apparatus can be improved.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0018] Figure 1 This is a cross-sectional view of a pressure regulating device according to some embodiments of the present invention in one state;

[0019] Figure 2 This is a cross-sectional view of the pressure regulating device according to some embodiments of the present invention in another state;

[0020] Figure 3 This is a cross-sectional view of the pressure regulating device according to some embodiments of the present invention in another state;

[0021] Figure 4 This is a cross-sectional view of a pressure regulating device according to other embodiments of the present invention in one state;

[0022] Figure 5 yes Figure 7 Enlarged view of the A-structure in the middle;

[0023] Figure 6 This is a cross-sectional view of the pressure regulating device according to other embodiments of the present invention in another state;

[0024] Figure 7 This is a schematic diagram of the pressure regulating device according to some embodiments of the present invention from one perspective;

[0025] Figure 8 This is a schematic diagram of the operation of a pressure regulating device according to some embodiments of the present invention.

[0026] Figure label:

[0027] Pressure regulating device 100, polishing disc 200, horizontal line n,

[0028] Mounting base 10, first pressure plate 20, first receiving groove 21, second pressure plate 30, second receiving groove 31, connecting groove 32, clearance groove 33, mounting groove 34.

[0029] Adjustment assembly 40, first adjusting member 41, connecting member 42, second adjusting member 421, second fastener 422.

[0030] First fastener 50, third adjusting component 60, elastic component 70. Detailed Implementation

[0031] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0032] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] The following is for reference. Figures 1-8 Description of a pressure regulating device 100 according to an embodiment of the present invention.

[0035] like Figures 1-8As shown, the pressure regulating device 100 according to an embodiment of the present invention includes: a mounting base 10, a first pressure plate 20, a second pressure plate 30, and an adjusting assembly 40. The first pressure plate 20 can be disposed on the mounting base 10, which can fix the first pressure plate 20. The second pressure plate 30 can be disposed on one side of the first pressure plate 20 (e.g., ...). Figure 1 (as shown on the lower side), and the second pressure plate 30 can fix the workpiece to be processed (such as a wafer or a chip) so as to apply pressure to the workpiece, which is beneficial to polishing or grinding the workpiece.

[0036] The adjustment assembly 40 may include multiple connectors 42 and multiple first adjustment members 41. Each connector 42 is connected to the first pressure plate 20 and the second pressure plate 30 respectively, and can fix the second pressure plate 30 on the first pressure plate 20. A part of the first adjustment member 41 can pass through the first pressure plate 20, and the part of the first adjustment member 41 passing through the first pressure plate 20 can contact the second pressure plate 30. The first adjustment member 41 can move relative to the first pressure plate 20 to drive the second pressure plate 30 to deform.

[0037] Therefore, the pressure applied to the part of the workpiece corresponding to the deformed area of ​​the second pressure plate 30 can be adjusted, the removal rate of each area of ​​the workpiece can be adjusted, the workpiece can be prevented from bulging or denting during processing (such as polishing or grinding), and the parallelism and flatness of the processed workpiece can be guaranteed to meet the expected requirements, thereby improving the processing effect of the workpiece.

[0038] The first adjusting member 41 can be installed on the first pressure plate 20, and multiple first adjusting members 41 can be arranged at intervals along a circumference, which can increase the distribution range of the first adjusting members 41 and make the distribution of the first adjusting members 41 more uniform. This can realize the adjustment of the pressure applied to each area of ​​the workpiece and facilitate operation. The first adjusting member 41 can be close to the center of the first pressure plate 20 relative to the connecting member 42, which can increase the deformation range of the first pressure plate 20 and improve the adjustment effect of the pressure applied to the workpiece.

[0039] According to the pressure regulating device 100 of this utility model embodiment, by providing a plurality of first regulating members 41, and the plurality of first regulating members 41 being movable relative to the first pressure plate 20, thereby driving the deformation of each area of ​​the second pressure plate 30, the deformation of each area of ​​the second pressure plate 30 can be controlled, and the pressure applied to each area of ​​the workpiece can be adjusted, thereby adjusting the removal rate of each area of ​​the workpiece, ensuring that the parallelism and flatness of the processed workpiece meet the expected requirements, and improving the processing effect of the workpiece.

[0040] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 6 As shown, according to some embodiments of the present invention, the adjusting component 40 may further include a plurality of elastic elements 70, which may be located between the first pressure plate 20 and the second pressure plate 30, with the two ends of the elastic elements 70 (e.g., Figure 1 The upper and lower ends shown can respectively contact the first pressure plate 20 and the second pressure plate 30, so that the elastic element 70 can be compressed and deformed when the first pressure plate 20 and the second pressure plate 30 approach each other.

[0041] For example, when the first adjusting member 41 does not press the second pressure plate 30, the elastic member 70 can be in a compressed state, and the elastic member 70 can apply pressure to the first pressure plate 20 and the second pressure plate 30 respectively, thereby dispersing the pressure applied by the first adjusting member 41 to the second pressure plate 30, making the pressure distribution on the contact surface between the second pressure plate 30 and the first adjusting member 41 more uniform, which can improve the control effect on the deformation of each area of ​​the second pressure plate 30, and improve the adjustment effect of the pressure applied to each area of ​​the workpiece.

[0042] like Figure 4 and Figure 5 As shown, in some embodiments, the side of the first pressure plate 20 closest to the second pressure plate 30 (e.g.) Figure 5 The lower side shown may have a first receiving groove 21, and the side of the second pressure plate 30 near the second pressure plate 30 (e.g.) Figure 5 The upper side shown may have a second receiving groove 31, and both ends of the elastic member 70 (such as...) Figure 5 The upper and lower ends shown can respectively extend into the first receiving groove 21 and the second receiving groove 31, which can limit the elastic element 70, prevent the elastic element 70 from moving when the second pressure plate 30 deforms, ensure the uniformity of the pressure distribution on the contact surface between the second pressure plate 30 and the first adjusting element 41, thereby improving the control effect of deformation of the second pressure plate 30 and improving the adjustment effect of the pressure applied to the workpiece in each area.

[0043] like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 6As shown, according to some embodiments of the present invention, the elastic element 70 can be a spring, which can be sleeved on the first adjusting element 41. Multiple elastic elements 70 and multiple first adjusting elements 41 can correspond one-to-one, so that the elastic element 70 can directly disperse the pressure applied by the first adjusting element 41 to the second pressure plate 30, which can improve the pressure dispersion effect at the force-bearing point of the second pressure plate 30, thereby making the pressure distribution on the contact surface between the second pressure plate 30 and the first adjusting element 41 more uniform, which can improve the control effect of deformation of each area of ​​the second pressure plate 30, and can improve the adjustment effect of the pressure applied to each area of ​​the workpiece.

[0044] like Figure 1 and Figure 2 As shown, in some embodiments, the first adjusting member 41 can be connected to the first pressure plate 20 (e.g., by a threaded connection), a portion of the first adjusting member 41 can pass through the first pressure plate 20, and the portion of the first adjusting member 41 passing through the first pressure plate 20 can contact the second pressure plate 30. The first adjusting member 41 can move relative to the first pressure plate 20 to cause the second pressure plate 30 to deform.

[0045] For example, the first adjusting member 41 can move relative to the first pressure plate 20 towards the second pressure plate 30, so that each region of the second pressure plate 30 moves away from the first pressure plate 20 (e.g., Figure 2 The direction shown (from top to bottom) is slightly convex relative to the horizontal line n, which can increase the pressure applied to each area of ​​the workpiece, improve the removal rate of each area of ​​the workpiece, and ensure the processing effect of the workpiece.

[0046] The pressure regulating device 100 may further include a plurality of first fasteners 50, the first fasteners 50 and the first adjusting member 41 being located on the side of the first pressure plate 20 away from the second pressure plate 30 (e.g. Figure 1 The upper part of the diagram shows a threaded connection, and the first fastener 50 can abut against the first pressure plate 20, which can limit the first adjusting member 41, prevent the first adjusting member 41 and the first pressure plate 20 from separating from each other, improve the control effect on the deformation of each area of ​​the second pressure plate 30, and improve the reliability of the pressure regulating device 100. It is understood that the first adjusting member 41 can be a bolt and the first fastener 50 can be a nut for easy operation.

[0047] like Figure 1 , Figure 2 and Figure 3As shown, according to some embodiments of the present invention, the connector 42 may include a second adjusting member 421 and a second fastener 422. The second adjusting member 421 may be connected to the first pressure plate 20 (e.g., by a threaded connection). A portion of the second adjusting member 421 may pass through the first pressure plate 20 and the second pressure plate 30 in sequence, and the second adjusting member 421 may be movable relative to the first pressure plate 20 to drive the second pressure plate 30 to move, thereby realizing the adjustment of the spacing between the regions of the first pressure plate 20 and the second pressure plate 30.

[0048] Among them, multiple second adjustment components 421 move synchronously and in the same direction, which can make the first pressure plate 20 and the second pressure plate 30 move closer or further apart from each other, and can realize fine adjustment of the position of the second pressure plate 30, thereby realizing fine adjustment of the position of the workpiece to be processed, so that the pressure adjustment device 100 can be applied to the workpiece to be processed (such as wafers) whose actual thickness deviates slightly from the standard thickness.

[0049] For example, a surface treatment device (such as a polishing machine) can polish a batch of wafers, the thickness range of which is a standard thickness range. If the thickness of the next batch of wafers is greater than or less than the standard thickness range, the second pressure plate 30 can be finely adjusted upward or downward by operating multiple second adjustment components 421 synchronously and in the same direction, so that the surface treatment device can be used to polish the next batch of wafers. Alternatively, if the thickness of individual wafers in the batch is greater than the standard thickness range, the second pressure plate 30 can be adjusted upward to be suitable for multiple wafers in the batch.

[0050] Specifically, the standard thickness of the aforementioned batch of wafers before polishing can be in the range of 350μm to 360μm. If the thickness of the next batch of wafers is 370μm, then by adjusting the second pressure plate 30 by about 10μm, it can be applied to the next batch of wafers. Alternatively, if the thickness of individual wafers in the aforementioned batch of wafers is 370μm, then by adjusting the second pressure plate 30, it can be applied to multiple wafers in the aforementioned batch of wafers.

[0051] The second fastener 422 can be set on the side of the second pressure plate 30 opposite to the first pressure plate 20 (e.g., Figure 1 (As shown on the lower side), the portion of the second adjusting member 421 that passes through the first pressure plate 20 and the second pressure plate 30 can be connected to the second fastener 422, and the second fastener 422 can abut against the second pressure plate 30, which can limit the second adjusting member 421 and prevent the second adjusting member 421 and the second pressure plate 30 from separating, thereby preventing the second pressure plate 30 and the first pressure plate 20 from separating from each other, and improving the reliability of the pressure regulating device 100. It is understood that the second adjusting member 421 can be a bolt and the second fastener 422 can be a nut for easy operation.

[0052] like Figure 1, Figure 2 and Figure 3 As shown, in some embodiments, the side of the second pressure plate 30 furthest from the first pressure plate 20 (e.g.) Figure 1 The lower surface shown can be provided with multiple connecting grooves 32, and the multiple connecting grooves 32 and multiple connecting parts 42 correspond one-to-one to accommodate the second fastener 422. This can prevent the second fastener 422 from protruding from the surface of the second pressure plate 30, prevent the second pressure plate 30 from squeezing the workpiece through the second fastener 422, improve the adjustment effect of the pressure applied to each area of ​​the workpiece, and ensure that the surface of the second pressure plate 30 is flat, which is convenient for the installation of other components (such as ceramic discs, wax-free pads, and workpieces).

[0053] like Figure 1 , Figure 2 , Figure 3 and Figure 7 As shown, in some embodiments, multiple connectors 42 can be arranged at intervals along a circumference, which can increase the distribution range of connectors 42 and make the distribution of connectors 42 more uniform, which can improve the smoothness of the relative movement of the first pressure plate 20 and the second pressure plate 30, and can improve the fine-tuning effect of the position of the second pressure plate 30.

[0054] Furthermore, the multiple connectors 42 and the multiple first adjusting members 41 can correspond one-to-one, and at least one connector 42 and at least one first adjusting member 41 can be arranged in the same radial direction on the first pressure plate 20. For example, the adjusting assembly 40 can include multiple components, and the multiple adjusting assemblies 40 can be arranged at intervals along the circumference of the first pressure plate 20. Each adjusting assembly 40 includes a connector 42 and a first adjusting member 41, and the connector 42 and the first adjusting member 41 of each adjusting assembly 40 are both along the same radial direction of the first pressure plate 20 (e.g., ...). Figure 7 Arranged in the left-right or front-back direction as shown.

[0055] Taking the adjustment component 40 located on the left side of the mounting base 10 as an example, based on ensuring that the other adjustment components 40 are inactive, the first adjustment component 41 is driven to move upward to reserve space for the left side of the second pressure plate 30, and the second adjustment component 421 of the connecting component 42 is driven to move upward to move the left side of the second pressure plate 30. This allows the entire second pressure plate 30 to tilt slightly downward relative to the horizontal line n in the direction from left to right. Alternatively, the first adjustment component 41 is driven to move downward to compress the left side of the second pressure plate 30, and the second adjustment component 421 of the connecting component 42 is driven to move downward to move the left side of the second pressure plate 30. This allows the entire second pressure plate 30 to tilt slightly upward relative to the horizontal line n in the direction from left to right.

[0056] Therefore, when one side of the workpiece is flat while the other side is inclined, if the inclined surface of the workpiece needs to be treated, the inclination of the second pressure plate 30 can be adjusted to match the inclination of the inclined surface of the workpiece, and the flat surface of the workpiece can be installed facing the second pressure plate 30. This ensures that the inclined surface of the workpiece is parallel to the polishing disc 200. Alternatively, if the flat surface of the workpiece needs to be treated, the inclination of the second pressure plate 30 can be adjusted to match the inclination of the inclined surface of the workpiece, and the inclined surface of the workpiece can be installed facing the second pressure plate 30. This ensures that the flat surface of the workpiece is parallel to the polishing disc 200, thus guaranteeing the processing effect of the workpiece.

[0057] like Figure 1 and Figure 6 As shown, according to some embodiments of the present invention, the pressure regulating device 100 may further include a third adjusting member 60. The third adjusting member 60 may be disposed on the second pressure plate 30 and may be connected to the second pressure plate 30 (e.g., by thread). A portion of the third adjusting member 60 may pass through the second pressure plate 30, and the portion of the third adjusting member 60 passing through the second pressure plate 30 may be threadedly connected to the first pressure plate 20. The third adjusting member 60 may be movable relative to the first pressure plate 20 to deform the second pressure plate 30.

[0058] It is understood that the third adjusting member 60 can be a bolt, and the head of the bolt can contact the second pressure plate 30, allowing the third adjusting member 60 to move relative to the first pressure plate 20 to deform the second pressure plate 30. For example, the third adjusting member 60 can move upward relative to the first pressure plate 20, so that each area of ​​the second pressure plate 30 moves towards the direction closer to the first pressure plate 20 (e.g., ...). Figure 2 The bottom-up direction shown is slightly concave relative to the horizontal line n, which can effectively control the shape of the second pressure plate 30, thereby making slight adjustments to the polishing pressure and ensuring the processing effect of the workpiece.

[0059] like Figure 1 and Figure 6 As shown, in some embodiments, the side of the second pressure plate 30 furthest from the first pressure plate 20 (e.g.) Figure 1 The lower surface shown can be provided with a relief groove 33, which corresponds to the position of the third adjusting member 60 and is used to accommodate the head of the third adjusting member 60. This can prevent the third adjusting member 60 from protruding from the surface of the second pressure plate 30, prevent the second pressure plate 30 from squeezing the workpiece through the third adjusting member 60, improve the adjustment effect of the pressure applied to each area of ​​the workpiece, and ensure that the surface of the second pressure plate 30 is flat, which is convenient for the installation of other components (such as ceramic discs, wax-free pads, and workpieces).

[0060] According to some embodiments of the present invention, the pressure regulating device 100 may further include a support plate (not shown in the figure) and an adsorption pad (not shown in the figure), and the side of the second pressure plate 30 opposite to the first pressure plate 20 (e.g.) Figure 1 The lower surface shown can define a mounting groove 34, and the bearing plate can be installed in the mounting groove 34. For example, the bearing plate can be snapped into the mounting groove 34, thereby dispersing the pressure applied by the entire second pressure plate 30 to the workpiece, so that the pressure applied by the second pressure plate 30 to the workpiece can be distributed more evenly, and the adjustment effect of the pressure applied to each area of ​​the workpiece can be improved.

[0061] The adsorption pad can be placed on the side of the carrier plate away from the first pressure plate 20 (e.g., Figure 1 (As shown on the lower side), the adsorption pad can be bonded to the carrier plate with adhesive backing, and the adsorption pad can have at least one adsorption hole for adsorbing the workpiece to be processed, which can achieve the fixation of the workpiece to be processed. It is understood that the carrier plate can be a ceramic plate, which can increase the hardness of the carrier plate, and the bottom wall of the mounting groove 34 can be provided with an elastic pad. The carrier plate and the elastic pad can be in direct contact, which can absorb the impact force acting on the workpiece to be processed, and can make the pressure applied by the second pressure plate 30 to the workpiece to be processed more uniform, which can improve the reliability of the pressure regulating device 100.

[0062] The pressure regulating device 100 of this application can adjust the shape of the second pressure plate 30 through the adjusting component 40, so that the second pressure plate 30 can have a slightly convex or slightly concave shape, thereby realizing the adjustment of the pressure distribution on the bearing plate and the workpiece mounted on the bearing plate. That is, in the radial direction of the second pressure plate 30, the pressure acting on the bearing plate and the workpiece mounted on the bearing plate can decrease or increase from the edge to the center, thereby realizing the adjustment of the removal rate of each area of ​​the workpiece, ensuring that the parallelism and flatness of the processed workpiece meet the expected requirements, and improving the processing effect of the workpiece.

[0063] The surface treatment equipment according to the present invention includes a pressure regulating device 100. By using the pressure regulating device 100, the pressure applied to each area of ​​the workpiece can be adjusted, the removal rate of each area of ​​the workpiece can be adjusted, the parallelism and flatness of the processed workpiece can be guaranteed to meet the expected requirements, and the working effect of the surface treatment equipment can be improved.

[0064] In this application, the mounting base 10 of the pressure regulating device 100 can be a rotating shaft. The movement of the rotating shaft can drive the workpiece to be processed to move. For example, the mounting base 10 can move in the horizontal direction to move the workpiece to be processed closer to or away from the designated area (such as directly above the polishing disc 200), which is convenient for the operator to pick up and put down the workpiece. Furthermore, when the workpiece to be processed moves to the designated area, the mounting base 10 can move in the vertical direction, which can realize the coarse adjustment of the position of the workpiece to be processed, which is convenient for operation. Furthermore, based on the rotation of the polishing disc 200, the mounting base 10 can drive the workpiece to rotate, which can improve the removal rate of each area of ​​the workpiece to be processed and improve the processing speed of the workpiece to be processed.

[0065] The surface treatment equipment can be a polishing machine, which can include a polishing disc 200. The pressure regulating device 100 can place the workpiece to be processed on the polishing disc 200 and apply pressure to the workpiece. The workpiece to be processed and the polishing disc 200 can rotate relative to each other, which can achieve polishing treatment of the workpiece to be processed. It is understood that the range of pressure applied to the workpiece by the pressure regulating device 100 of this application is equivalent to the range of pressure applied to the workpiece by an object with a mass range of 200Kg to 400Kg under the action of gravity. The second pressure disc 30 can achieve a deformation of 1 to 20μm.

[0066] Alternatively, the surface treatment equipment can be a grinding machine, which can include a grinding disc. The pressure regulating device 100 can place the workpiece to be processed on the grinding disc and apply pressure to the workpiece. The workpiece to be processed and the grinding disc can rotate relative to each other, thereby achieving the grinding treatment of the workpiece to be processed. It should be noted that the workpiece to be processed can be glass, metal parts, sapphire, silicon wafers or silicon carbide wafers, etc.

[0067] It is understood that the number of pressure regulating devices 100 can be one, and the center of the pressure regulating device 100 and the center of the polishing disc 200 can be aligned vertically. A workpiece to be processed can be installed in the middle of the mounting groove 34 of the pressure regulating device 100. Furthermore, such as... Figure 8 As shown, there can be multiple pressure regulating devices 100, each pressure regulating device 100 can be equipped with at least one workpiece to be processed, and multiple pressure regulating devices 100 can be arranged at intervals along a circumferential direction.

[0068] Other configurations and operations of the pressure regulating device 100 according to embodiments of the present invention are known to those skilled in the art and will not be described in detail here. In the description of the present invention, "first feature" and "second feature" may include one or more of the features. The up-down direction, left-right direction, and front-back direction are defined as shown in the figures.

[0069] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features not in direct contact but through another feature between them. Moreover, "above," "over," and "on top" of the second feature include the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature.

[0070] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0071] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A pressure regulating device, characterized in that, include: Mounting base; A first pressure plate and a second pressure plate, wherein the first pressure plate is disposed on the mounting base and the second pressure plate is disposed on one side of the first pressure plate; An adjustment assembly includes multiple connectors and multiple first adjustment members. The first adjustment members are located near the center of the first pressure plate relative to the connectors. Each connector is connected to the first pressure plate and the second pressure plate, respectively. The first adjustment members are mounted on the first pressure plate and arranged at intervals along a circumferential direction. A portion of the first adjustment member is adapted to pass through the first pressure plate and contact the second pressure plate. The first adjustment member is movable relative to the first pressure plate to cause the second pressure plate to deform.

2. The pressure regulating device according to claim 1, characterized in that, The connector includes a second adjusting member and a second fastener. The second adjusting member is connected to the first pressure plate, and the second fastener is located on the side of the second pressure plate opposite to the first pressure plate. A portion of the second adjusting member is adapted to pass through the first pressure plate and the second pressure plate and is connected to the second fastener. The second adjusting member is movable relative to the first pressure plate to drive the second pressure plate to move.

3. The pressure regulating device according to claim 2, characterized in that, The second pressure plate has a plurality of connecting grooves on the side of the first pressure plate away from the second pressure plate. The plurality of connecting grooves correspond one-to-one with the plurality of connecting parts and are used to accommodate the second fastener.

4. The pressure regulating device according to claim 2, characterized in that, Also includes: A plurality of first fasteners, wherein the portions of the first fasteners and the first adjusting member located on the side of the first pressure plate away from the second pressure plate are threadedly connected and adapted to abut against the first pressure plate.

5. The pressure regulating device according to claim 1, characterized in that, Also includes: A third adjusting member is disposed on the second pressure plate, and a portion of the third adjusting member is adapted to pass through the second pressure plate and be threadedly connected to the first pressure plate. The third adjusting member is movable relative to the first pressure plate to deform the second pressure plate.

6. The pressure regulating device according to claim 1, characterized in that, The adjustment assembly further includes: a plurality of elastic elements, the elastic elements being located between the first pressure plate and the second pressure plate, and the two ends of the elastic elements being in contact with the first pressure plate and the second pressure plate, respectively.

7. The pressure regulating device according to claim 6, characterized in that, The first pressure plate has a first receiving groove on the side near the second pressure plate, and the second pressure plate has a second receiving groove on the side near the second pressure plate. The two ends of the elastic member extend into the first receiving groove and the second receiving groove, respectively.

8. The pressure regulating device according to claim 6, characterized in that, The elastic element is a spring sleeved on the first adjusting element, and the multiple elastic elements correspond one-to-one with the multiple first adjusting elements.

9. The pressure regulating device according to claim 1, characterized in that, Also includes: The second pressure plate has a mounting groove defined on the side of the second pressure plate opposite to the first pressure plate. The mounting plate is installed in the mounting groove. The adsorption pad is located on the side of the mounting plate away from the first pressure plate. The adsorption pad has at least one adsorption hole for adsorbing the workpiece to be processed.

10. A surface treatment apparatus, characterized in that, The pressure regulating device includes any one of claims 1-9.

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