Scribing saw

Abstract

The utility model belongs to the technical field of semiconductor cutting equipment, and discloses a scribing machine which comprises a working table and a cutting tool, the working table is a vacuum adsorption working table and is used for fixing materials to be cut, the top of the working table is provided with an operation groove used for placing the materials to be cut, the top of the working table is provided with scale marks which are integrally formed, and the cutting tool is arranged on the working table. The scale marks are located beside the operation groove. The top of the workbench is provided with moving parts, the moving parts are located on the two sides of the operation groove, a fixing plate is installed on the moving parts, a driving device used for driving the cutting tool to move is arranged on the fixing plate, a tool fixing clamp is installed on the driving device, and the cutting tool is detachably installed on the tool fixing clamp through a hand screwing bolt. First sliding grooves are formed in the top of the workbench and located in the two sides of the operation groove. According to the utility model, the position of the cutter can be conveniently and automatically adjusted, the adjusting precision is high, and the cutting efficiency of semiconductor cutting can be improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor cutting equipment technology, and in particular to a dicing machine. Background Technology

[0002] A dicing machine is a precision device used to cut semiconductor wafers into individual chips. It is widely used in semiconductor manufacturing, integrated circuit packaging, MEMS (microelectromechanical systems) and other fields. It cuts wafers into individual chip units using a cutting tool or a laser beam.

[0003] With the rapid development of the electronics industry, the requirements for the size and precision of electronic components are becoming increasingly stringent. As an important cutting equipment, the traditional dicing machine mainly uses manual operation to adjust the position of the cutting tool during semiconductor cutting. However, the above method has poor adjustment accuracy and slow efficiency. Therefore, we propose a new dicing machine. Utility Model Content

[0004] In order to overcome the defects of the prior art as pointed out above, this utility model was completed after a great deal of creative work.

[0005] Specifically, the technical problem to be solved by this utility model is to provide a dicing machine to solve the technical problem that the current dicing machine uses manual operation to adjust the position of the cutter during semiconductor cutting, which not only has poor adjustment accuracy but also slow efficiency.

[0006] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0007] A dicing machine includes a worktable and a cutting blade. The worktable is a vacuum adsorption worktable used to fix the material to be cut. The top of the worktable has a working groove for placing the material to be cut. The top of the worktable has an integrally formed scale mark, and the scale mark is located next to the working groove.

[0008] The top of the workbench is provided with a movable component, and the movable component is located on both sides of the working groove. A fixed plate is installed on the movable component, and a drive device for driving the cutting tool to move is provided on the fixed plate. A tool fixing clamp is installed on the drive device, and the cutting tool can be detached and installed on the tool fixing clamp by hand-tightening bolts.

[0009] As an improved technical solution, a first slide groove is provided on the top of the workbench. The first slide groove is located on both sides of the working groove and is symmetrically arranged along the width direction of the workbench.

[0010] The moving component includes a slide rod, which is fixedly installed in the first slide groove. A moving block is slidably installed through the slide rod. A fixed plate is fixedly installed on the moving block. The fixed plate is slidably installed on the worktable via the first slide groove, the slide rod, and the moving block.

[0011] As an improved technical solution, the movable block has an inverted U-shaped structure, a fixed frame is fixedly installed on the worktable, and a multi-stage electric push rod is installed between the fixed frame and the movable block, with the piston end of the multi-stage electric push rod connected to the movable block.

[0012] As an improved technical solution, a second sliding groove is provided on both sides of the worktable, and the inner side of the movable block has an integrally formed protrusion that corresponds to the second sliding groove. The protrusion and the second sliding groove are adapted to each other, and the movable block is slidably installed on the worktable through the protrusion and the second sliding groove.

[0013] As an improved technical solution, the driving device includes a drive motor mounted on the fixed plate. A threaded rod is rotatably mounted on the inner side of the fixed plate and is perpendicular to the fixed plate. One end of the threaded rod is connected to the output shaft of the drive motor. A mounting block is threadedly connected to the outer surface of the threaded rod. A limit rod is slidably mounted through the inside of the mounting block. The limit rod is parallel to the threaded rod and its two ends are fixed to the fixed plate. The tool clamp is fixedly mounted on the mounting block.

[0014] As an improved technical solution, the cutting tool includes an operating lever and a cutting head disposed at the end of the operating lever. The cutting head is a diamond cutting head, and the tool fixing clamp has an assembly groove for assembling the operating lever.

[0015] As an improved technical solution, a threaded hole corresponding to the hand-tightening bolt is provided on one side of the assembly groove, and the threaded hole is threadedly connected to the hand-tightening bolt. The operating rod is installed on the tool fixing clamp through the assembly groove, the threaded hole and the hand-tightening bolt.

[0016] After adopting the above technical solution, the beneficial effects of this utility model are:

[0017] 1. This utility model involves placing the material to be cut in a working groove and fixing it using vacuum adsorption. Then, the drive motor is started, and the output shaft of the drive motor drives the threaded rod to rotate. The threaded rod drives the mounting block to move along the outer surface of the threaded rod, and the mounting block drives the tool fixing clamp to move. The tool fixing clamp drives the cutting tool, which is fixed by a hand-tightened bolt, to move until the cutting tool is moved to the designated position. At this time, the scale marks provide the operator with accurate reference and positioning basis, making the adjustment process more intuitive, accurate, and efficient. During this period, the mounting block moves along the outer surface of the limiting rod and plays a limiting and guiding role. Then, the multi-stage electric push rod is started and shortened. At this time, the operating rod drives the cutting head to cut the material to be cut, and at the same time, it drives the moving block to move along the inner cavity of the first slide groove and the outer surface of the slide rod. The convex plate on the moving block moves along the inner cavity of the second slide groove, making the cutting head more stable. This facilitates automatic adjustment of the cutting tool position with high adjustment accuracy, thereby improving the cutting efficiency of semiconductor cutting.

[0018] 2. This utility model uses a vacuum adsorption worktable to fix the material to be cut.

[0019] 3. In this utility model, a spiral hand-tightening bolt is used. At this time, the hand-tightening bolt moves along the threaded hole and moves away from the operating rod until the cutting tool can be removed from the assembly slot. Then, the new cutting tool can be assembled and fixed on the tool fixing clamp by the hand-tightening bolt, which makes it convenient to replace the cutting tool and the operation is simple and quick. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0022] Figure 2 This is a schematic diagram of the workbench structure of this utility model.

[0023] Figure 3 For the present utility model Figure 2 Enlarged structural diagram at point A in the middle.

[0024] Figure 4 This is a schematic diagram of the fixed state structure of the cutting tool of this utility model.

[0025] Figure 5This is a schematic diagram of the explosive state structure of the cutting tool of this utility model.

[0026] Figure 6 For the present utility model Figure 5 Enlarged structural diagram at point B.

[0027] Explanation of reference numerals in the attached figures:

[0028] In the diagram: 1. Workbench; 101. Working groove; 102. Scale markings; 103. First slide groove; 104. Second slide groove; 2. Slide rod; 3. Moving block; 301. Protruding plate; 4. Fixing plate; 5. Drive motor; 6. Threaded rod; 7. Mounting block; 8. Tool holder; 801. Assembly groove; 802. Threaded hole; 9. Operating lever; 10. Tool head; 11. Hand-tightening bolt; 12. Limiting rod; 13. Fixing frame; 14. Multi-stage electric push rod. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0031] Meanwhile, the meaning of "and / or" or "and / or" appearing throughout the text is that it includes three options. Taking "A and / or B" as an example, it includes option A, option B, or an option that satisfies both A and B.

[0032] Furthermore, in this utility model, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0033] Reference Figures 1-6A dicing machine is provided, which includes a worktable 1 and a cutting blade. The worktable 1 is a vacuum adsorption worktable used to fix the material to be cut. The top of the worktable 1 is provided with a working groove 101 for placing the material to be cut. The top of the worktable 1 has an integrally formed scale mark 102, and the scale mark 102 is located next to the working groove 101. During the adjustment of the position, the scale mark 102 provides the operator with a precise reference and positioning basis, making the adjustment process more intuitive, accurate and efficient.

[0034] The top of the workbench 1 is provided with a moving part, and the moving part is located on both sides of the working groove 101. A fixed plate 4 is installed on the moving part, and a drive device for driving the cutting tool to move is provided on the fixed plate 4. A tool fixing clamp 8 is installed on the drive device, and the cutting tool can be detached and installed on the tool fixing clamp 8 by hand-tightening bolts 11.

[0035] Reference Figure 2 and Figure 3 The top of the workbench 1 is provided with a first slide groove 103, which is located on both sides of the working groove 101 and is symmetrically arranged along the width direction of the workbench 1.

[0036] The moving part includes a slide bar 2, which is fixedly installed in the first slide groove 103. A moving block 3 is slidably installed through the slide bar 2. A fixed plate 4 is fixedly installed on the moving block 3. The fixed plate 4 is slidably installed on the worktable 1 through the first slide groove 103, the slide bar 2 and the moving block 3.

[0037] Reference Figure 2 and Figure 3 The movable block 3 has an inverted U-shaped structure. A fixed frame 13 is fixedly installed on the worktable 1. A multi-stage electric push rod 14 is installed between the fixed frame 13 and the movable block 3, and the piston end of the multi-stage electric push rod 14 is connected to the movable block 3.

[0038] Reference Figure 1 , Figure 2 as well as Figure 3 The workbench 1 has a second slide groove 104 on both sides. The inner side of the moving block 3 has an integrally formed protrusion 301 that corresponds to the second slide groove 104. The protrusion 301 and the second slide groove 104 are adapted to each other. The moving block 3 is slidably installed on the workbench 1 through the protrusion 301 and the second slide groove 104.

[0039] Reference Figure 1 , Figure 4 as well as Figure 5The driving device includes a drive motor 5, which is mounted on a fixed plate 4. A threaded rod 6 is rotatably mounted on the inner side of the fixed plate 4 and is perpendicular to the fixed plate 4. One end of the threaded rod 6 is connected to the output shaft of the drive motor 5. A mounting block 7 is threadedly connected to the outer surface of the threaded rod 6. A limit rod 12 is slidably mounted through the inside of the mounting block 7. The limit rod 12 is parallel to the threaded rod 6 and both ends of the limit rod 12 are fixed to the fixed plate 4. A tool clamp 8 is fixedly mounted on the mounting block 7 to facilitate adjustment and movement of the tool clamp 8.

[0040] Reference Figure 5 and Figure 6 The cutting tool includes an operating lever 9 and a cutting head 10 located at the end of the operating lever 9. The cutting head 10 is a diamond cutting head. The tool retainer 8 has an assembly groove 801 for assembling the operating lever 9, so as to assemble the cutting tool onto the tool retainer 8.

[0041] Reference Figure 5 and Figure 6 The assembly slot 801 has a threaded hole 802 on one side corresponding to the hand-tightening bolt 11, and the threaded hole 802 is threadedly connected to the hand-tightening bolt 11. The operating rod 9 is installed on the tool fixing clamp 8 through the assembly slot 801, the threaded hole 802 and the hand-tightening bolt 11, so that the cutting tool can be installed on the tool fixing clamp 8 by the hand-tightening bolt 11.

[0042] In actual use, the material to be cut is placed in the working groove 101 and fixed by vacuum adsorption. Then, the drive motor 5 fixed on the fixing plate 4 is started. At this time, the output shaft of the drive motor 5 drives the threaded rod 6 to rotate. The threaded rod 6 drives the mounting block 7 to move along the outer surface of the threaded rod 6. The mounting block 7 drives the tool fixing clamp 8 to move. The tool fixing clamp 8 drives the cutting tool fixed by the hand-tightening bolt 11 to move until the cutting tool is moved to the designated position. At this time, the scale mark 102 provides the operator with a precise reference and positioning basis, making the adjustment process more intuitive and accurate. And high efficiency. During this period, the mounting block 7 moves along the outer surface of the limiting rod 12 and plays a limiting and guiding role. Then, the multi-stage electric push rod 14 fixed on the fixed frame 13 is activated and shortened. At this time, the operating rod 9 drives the cutter head 10 to cut the material to be cut. At the same time, it drives the moving block 3 to move along the inner cavity of the first slide groove 103 and the outer surface of the slide rod 2. The protrusion 301 on the moving block 3 moves along the inner cavity of the second slide groove 104, making the cutting head 10 move more stably. This facilitates automatic adjustment of the cutting tool position and has high adjustment accuracy, thereby improving the cutting efficiency of semiconductor cutting.

[0043] When the cutting tool needs to be replaced, the screw bolt 11 is tightened. The screw bolt 11 moves along the threaded hole 802 and away from the operating lever 9 until the cutting tool can be removed from the assembly slot 801. Then, the new cutting tool is assembled and fixed on the tool fixing clamp 8 by the screw bolt 11. This makes it easy to replace the cutting tool and the operation is simple and quick. This device not only facilitates automatic adjustment of the tool position and has high adjustment accuracy, but also improves the cutting efficiency of semiconductors.

[0044] It should be understood that these embodiments are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. Furthermore, it should be understood that after reading the technical description of this utility model, those skilled in the art can make various alterations, modifications, and / or variations to this utility model, and all such equivalent forms also fall within the scope of protection defined by the appended claims.

Claims

1. A dicing machine, characterized in that: Includes a workbench (1) and a cutting tool. The workbench (1) is a vacuum adsorption workbench used to fix the material to be cut. The top of the workbench (1) is provided with a working groove (101) for placing the material to be cut. The top of the workbench (1) has an integrally formed scale mark (102), and the scale mark (102) is located next to the working groove (101). The top of the workbench (1) is provided with a moving part, and the moving part is located on both sides of the working groove (101). A fixed plate (4) is installed on the moving part. A driving device for driving the cutting tool to move is provided on the fixed plate (4). A tool fixing clamp (8) is installed on the driving device. The cutting tool can be detached and installed on the tool fixing clamp (8) by hand-tightening bolts (11).

2. The dicing machine according to claim 1, characterized in that: The top of the workbench (1) is provided with a first slide groove (103), the first slide groove (103) is located on both sides of the working groove (101), and the first slide groove (103) is symmetrically arranged along the width direction of the workbench (1). The moving component includes a slide rod (2), which is fixedly installed in the first slide groove (103). A moving block (3) is slidably installed through the slide rod (2). A fixing plate (4) is fixedly installed on the moving block (3). The fixing plate (4) is slidably installed on the worktable (1) through the first slide groove (103), the slide rod (2), and the moving block (3).

3. The dicing machine according to claim 2, characterized in that: The movable block (3) has an inverted U-shaped structure. A fixed frame (13) is fixedly installed on the worktable (1). A multi-stage electric push rod (14) is installed between the fixed frame (13) and the movable block (3), and the piston end of the multi-stage electric push rod (14) is connected to the movable block (3).

4. The dicing machine according to claim 3, characterized in that: The workbench (1) has a second slide groove (104) on both sides. The inner side of the moving block (3) has an integrally formed protrusion (301) that corresponds to the second slide groove (104). The protrusion (301) and the second slide groove (104) are adapted to each other. The moving block (3) is slidably installed on the workbench (1) through the protrusion (301) and the second slide groove (104).

5. The dicing machine according to claim 1, characterized in that: The driving device includes a drive motor (5), which is mounted on the fixed plate (4). A threaded rod (6) is rotatably mounted on the inner side of the fixed plate (4), and the threaded rod (6) is perpendicular to the fixed plate (4). One end of the threaded rod (6) is connected to the output shaft of the drive motor (5). A mounting block (7) is threadedly connected to the outer surface of the threaded rod (6). A limit rod (12) is slidably mounted inside the mounting block (7). The limit rod (12) is parallel to the threaded rod (6), and both ends of the limit rod (12) are fixed to the fixed plate (4). The tool clamp (8) is fixedly mounted on the mounting block (7).

6. The dicing machine according to claim 1, characterized in that: The cutting tool includes an operating lever (9) and a cutting head (10) located at the end of the operating lever (9). The cutting head (10) is a diamond cutting head. The tool fixing clamp (8) has an assembly groove (801) for assembling the operating lever (9).

7. The dicing machine according to claim 6, characterized in that: The assembly slot (801) has a threaded hole (802) on one side corresponding to the hand-tightening bolt (11), and the threaded hole (802) is threadedly connected to the hand-tightening bolt (11). The operating rod (9) is installed on the tool holder (8) through the assembly slot (801), the threaded hole (802) and the hand-tightening bolt (11).

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