Chip cutting jig and cutting equipment
By setting a filter element and drainage holes on the cutting disc, the problems of high cutting tool temperature and debris contamination are solved, achieving cooling of the cutting disc and debris collection, thus improving the semiconductor cutting effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- FOREHOPE ELECTRONICS NINGBO CO LTD
- Filing Date
- 2025-04-16
- Publication Date
- 2026-04-28
AI Technical Summary
In the semiconductor dicing process, the cutting tool is hot and easily carries debris, which may lead to contamination of the circuit layer on the wafer surface.
A filter element is installed on the cutting disc, and the filter element has a drain hole for cooling water to flow and cool the cutting tool, and to collect the debris during the cutting process.
This technology enables cooling of the cutting disc, preventing debris from contaminating the wafer surface and improving the efficiency of the cutting process and product quality.
Smart Images
Figure CN224170160U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a chip-cutting fixture and a cutting device. Background Technology
[0002] With the rapid development of the semiconductor industry, the semiconductor dicing process requires the use of dicing tools to cut and separate packaged devices into individual products. During the dicing process, the temperature of the dicing tools is high, necessitating the use of cooling water to cool and lower them. Furthermore, the dicing tools easily pick up debris during wafer dicing, posing a risk of contaminating the circuitry layer on the wafer surface. Utility Model Content
[0003] The purpose of this invention is to provide a chip-cutting fixture and cutting equipment that can cool the cutting disc and collect chips during the cutting process to prevent chip contamination of the wafer.
[0004] In a first aspect, this utility model provides a chip-cutting fixture, comprising:
[0005] A cutting disc includes a first surface and a second surface disposed opposite to each other; the cutting disc is provided with a mounting hole penetrating the first surface and the second surface; the mounting hole is used to mount a drive shaft;
[0006] A filter element is disposed on the first surface and / or the second surface; the filter element is provided with a drain hole.
[0007] In an optional embodiment, one or more drainage holes are provided on the outer peripheral surface of the filter element.
[0008] In an optional embodiment, the filter element has a pentagonal cross-section, the outer peripheral surface includes five side surfaces connected end to end, and the drain hole includes a first drain hole, a second drain hole, and a third drain hole; wherein the three side surfaces are provided with the first drain hole, the second drain hole, and the third drain hole;
[0009] The first drain hole and the second drain hole are located on two adjacent side surfaces; the side surface where the third drain hole is located is spaced apart from the side surface where the first drain hole and the second drain hole are located.
[0010] In an optional embodiment, the first drain hole, the second drain hole, and the third drain hole are interconnected.
[0011] In an optional embodiment, the first drain hole, the second drain hole, and the third drain hole are connected in a Y-shape.
[0012] In an optional embodiment, the inner wall of the mounting hole is provided with a liquid inlet, which is connected to the drain hole on the filter element.
[0013] In an optional embodiment, a plurality of filter elements are provided on the first surface and / or the second surface, and the plurality of filter elements are evenly spaced along the circumferential direction.
[0014] In an optional embodiment, the filter element and the cutting disc are detachably connected.
[0015] In an optional embodiment, one of the filter element and the cutting disc is provided with a fixing hole, and the other is provided with a fixing post, with the fixing post inserted into the fixing hole.
[0016] In optional embodiments, the filter element is made of ceramic, metal, or rubber; and / or, the cutting disc is made of metal, rubber, or diamond.
[0017] Secondly, the present invention provides a cutting device, including a drive unit and a chip fixture as described in any of the foregoing embodiments, wherein the chip fixture and the drive unit are connected.
[0018] The chip-cutting fixture and cutting device provided in this embodiment of the utility model have the following advantages:
[0019] The chip-cutting fixture provided in this embodiment of the invention features a filter element on the cutting disc. The filter element has drainage holes that allow cooling water to flow, thus cooling the cutting disc. The filter element also collects and filters chips generated during the cutting process, preventing chip contamination of the wafer.
[0020] The cutting equipment provided in this embodiment of the present invention includes the above-mentioned chip fixture, which can cool down the cutting disc and prevent the chips generated during the cutting process from contaminating the wafer surface. Attached Figure Description
[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0022] Figure 1 A first-view structural schematic diagram of the chip-cutting fixture provided in an embodiment of this utility model;
[0023] Figure 2 A second-view structural schematic diagram of the chip-cutting fixture provided in an embodiment of this utility model;
[0024] Figure 3 A first-view structural schematic diagram of a portion of the filter element and cutting disc of the chip-cutting fixture provided in an embodiment of this utility model, in a disassembled state.
[0025] Figure 4 This is a second-view structural diagram of the partially separated filter element and cutting disc of the chip-cutting fixture provided in an embodiment of the present invention.
[0026] Icons: 100 - Chip fixture; 110 - Cutting disc; 111 - First surface; 112 - Second surface; 113 - Mounting hole; 114 - Liquid inlet; 115 - Fixing post; 120 - Filter element; 121 - Fixing hole; 130 - Drain hole; 131 - First drain hole; 132 - Second drain hole; 133 - Third drain hole. Detailed Implementation
[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0029] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0030] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0031] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," not that the structure must be completely horizontal, but can be slightly tilted.
[0032] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0033] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0034] This utility model provides a chip-cutting fixture 100 and a cutting device for cutting and separating packaged devices into individual products. The chip-cutting fixture 100 can cool down the cutting disc 110 and prevent debris generated during the cutting process from contaminating the wafer surface.
[0035] Combination Figure 1 and Figure 2 The chip-cutting fixture 100 includes a cutting disc 110 and a filter element 120. The cutting disc 110 includes a first surface 111 and a second surface 112 disposed opposite to each other; the cutting disc 110 has a mounting hole 113 penetrating through the first surface 111 and the second surface 112; the mounting hole 113 is used to mount a drive shaft. The filter element 120 is disposed on the first surface 111 and / or the second surface 112; the filter element 120 has a drain hole 130. The drain hole 130 of the chip-cutting fixture 100 allows cooling water to flow, achieving cooling and temperature reduction of the cutting disc 110, and the filter element 120 can collect and filter chips generated during the cutting process, preventing chip contamination of the wafer.
[0036] It is understood that the filter element 120 may be provided only on the first surface 111 of the cutting disc 110, or only on the second surface 112 of the cutting disc 110, or the first surface 111 and the second surface 112 of the cutting disc 110 may each be provided with a filter element 120.
[0037] In this embodiment, filter elements 120 are respectively provided on the first surface 111 and the second surface 112 of the cutting disc 110. The filter elements 120 are evenly distributed along the outer periphery of the mounting hole 113. In other words, multiple filter elements 120 are evenly spaced in the circumferential direction. It should be understood that the number of filter elements 120 is not limited and can be one or more, such as two, three, four, five, six, seven, eight or more filter elements 120 designed on each side of the cutting disc 110, which is not specifically limited here. In this embodiment, six filter elements 120 are designed on each side of the cutting disc 110.
[0038] Optionally, the outer peripheral surface of the filter element 120 is provided with one or more drain holes 130. The drain holes 130 allow coolant to flow. During cutting, coolant flows out from the drain holes 130 to cool and lower the temperature of the cutting disc 110. Designing multiple drain holes 130 ensures sufficient coolant and guarantees effective cooling. The design of multiple drain holes 130 also results in more uniform cooling of the cutting disc 110. The coolant in the multiple drain holes 130 flows out from different directions, cooling different directions and different parts of the cutting disc 110, leading to higher cooling efficiency and better cooling effect. The coolant can be cooling oil, cooling water, or other cooling liquids.
[0039] Of course, in some other embodiments, the cooling medium may also be a cooling gas, i.e., the cooling gas is ejected from the drain hole 130 on the filter element 120.
[0040] Combination Figure 3 and Figure 4 Optionally, the filter element 120 has a pentagonal cross-section, with its outer periphery comprising five connected sides. The drain hole 130 includes a first drain hole 131, a second drain hole 132, and a third drain hole 133; wherein the first drain hole 131, the second drain hole 132, and the third drain hole 133 are provided on three sides. The first drain hole 131 and the second drain hole 132 are located on two adjacent sides; the side where the third drain hole 133 is located is spaced apart from the side where the first drain hole 131 and the second drain hole 132 are located.
[0041] Optionally, the first drain hole 131, the second drain hole 132, and the third drain hole 133 are interconnected, forming a Y-shape. This arrangement allows the coolant to flow out from different directions, resulting in better and more uniform cooling of the cutting disc 110.
[0042] Of course, in other embodiments, the first drain hole 131, the second drain hole 132, and the third drain hole 133 can be provided on adjacent sides, or on any side. That is, the drain holes 130 are provided on at least one or more of the five sides. The number of drain holes 130 provided on each side can be one or more, and is not specifically limited here.
[0043] Optionally, the cross-section of the filter element 120 can also be circular, triangular, quadrilateral, hexagonal, crescent-shaped, elliptical, or any other arbitrary shape. The cross-sectional shape of each drain hole 130 can be circular, triangular, quadrilateral, pentagonal, hexagonal, crescent-shaped, elliptical, or any other arbitrary shape. Multiple drain holes 130 on the same filter element 120, when connected, can form any shape such as V-shaped, W-shaped, cross-shaped, or star-shaped. The number of drain holes 130 on each filter element 120 can be equal or unequal. The shape of the drain holes 130 on each filter element 120 can be the same or different.
[0044] Optionally, the filter element 120 and the cutting disc 110 can be detachably connected. For example, this may include, but is not limited to, snap-fit, adhesive, magnetic adsorption, plug-in, riveting, or other connection methods.
[0045] Optionally, of the filter element 120 and the cutting disc 110, one has a fixing hole 121, and the other has a fixing post 115, with the fixing post 115 inserted into the fixing hole 121. The filter element 120 and the cutting disc 110 are fixedly connected through the cooperation of the fixing post 115 and the fixing hole 121. The cross-sectional shape of the fixing post 115 is adapted to the cross-sectional shape of the fixing hole 121. The number of fixing posts 115 is equal to the number of fixing holes 121. The positions of the fixing posts 115 and the positions of the fixing holes 121 are set in a one-to-one correspondence.
[0046] It is understood that a fixing post 115 can be provided on the filter element 120, and a matching fixing hole 121 can be provided on the cutting disc 110. Alternatively, a fixing hole 121 can be provided on the filter element 120, and a matching fixing post 115 can be provided on the cutting disc 110. Alternatively, both a fixing post 115 and a fixing hole 121 can be provided on the filter element 120, and both a fixing post 115 and a fixing hole 121 can be provided on the cutting disc 110. In this case, the fixing post 115 on the filter element 120 and the fixing hole 121 on the cutting disc 110 are compatible, and vice versa. No specific limitations are made here.
[0047] Optionally, the filter element 120 can be made of ceramic, metal, or rubber, and can be designed as a solid structure or a mesh structure, such as using a metal mesh filter element 120. The cutting disc 110 can be made of metal, rubber, or diamond, etc. The material of the cutting disc 110 can be selected according to the material of the object being cut.
[0048] Optionally, the inner wall of the mounting hole 113 is provided with a liquid inlet 114, which communicates with the drain hole 130 on the filter element 120. Coolant enters through the liquid inlet 114, flows through the internal channels of the cutting disc 110, and communicates with the drain hole 130 on the filter element 120. It is easy to understand that the mounting hole 113 is used for assembly with the drive shaft, which has a coolant outlet that communicates with the liquid inlet 114 on the inner wall of the mounting hole 113. One or more liquid inlets 114 can be designed according to actual needs.
[0049] This utility model embodiment also provides a cutting device, including a drive unit and a chip fixture 100 as described in any of the foregoing embodiments, the chip fixture being connected to the drive unit. The drive unit includes a drive shaft and a power unit, one end of the drive shaft being connected to the power unit, and the other end being connected to the cutting disc 110 for transmission. The power unit may be an electric motor or a motor, etc.
[0050] The chip-cutting fixture 100 provided in this embodiment of the present invention works on the following principle:
[0051] During installation, a bushing is provided on the drive shaft, and the cutting disc 110 is fixed to the bushing by bolts.
[0052] During dicing, the dicing disc 110 can quickly cut the central area of the wafer. Filter elements 120 are installed on both sides of the dicing disc 110 to collect silicon debris generated during dicing. The filter element 120 is designed with a drain hole 130 to allow coolant to pass through, thereby achieving rapid cooling of the dicing disc 110. The coolant can enter from the drive shaft, reach the inner wall of the mounting hole 113, enter the filter element 120 through the inlet 114 on the inner wall of the mounting hole 113, flow through the internal channels of the dicing disc 110, and exit through the drain hole 130. As the dicing process continues, debris generated during dicing will be mixed in with the coolant. When the coolant re-enters the circulation system through the inlet 114 and the filter element 120, the filter element 120 filters the coolant, and the filtered coolant exits through the drain hole 130, cooling the dicing disc 110. After prolonged use, filter cartridge 120 will accumulate a large amount of debris. It needs to be cleaned and replaced regularly or irregularly to ensure smooth drainage.
[0053] The chip-cutting fixture 100 and cutting device provided in this embodiment of the utility model have the following beneficial effects, including:
[0054] The chip-cutting fixture 100 provided in this embodiment of the invention has a filter element 120 on the cutting disc 110. The filter element 120 has a drain hole 130, which allows cooling water to flow, thereby cooling and reducing the temperature of the cutting disc 110. The filter element 120 also collects and filters the chips generated during the cutting process, preventing chip contamination of the wafer.
[0055] The cutting equipment provided in this embodiment of the present invention includes the above-mentioned chip fixture 100, which can cool down the cutting disc 110 and prevent the chips generated during the cutting process from contaminating the wafer surface.
[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. Any modifications, equivalent substitutions, improvements, etc., should be included within the protection scope of this utility model.
Claims
1. A chip removal tool, characterized in that, include: A cutting disc includes a first surface and a second surface disposed opposite to each other; the cutting disc is provided with a mounting hole penetrating the first surface and the second surface; the mounting hole is used to mount a drive shaft; A filter element is disposed on the first surface and / or the second surface; the filter element is provided with a drain hole.
2. The swarf jig defined in claim 1, characterized in that One or more drainage holes are provided on the outer peripheral surface of the filter element.
3. The swarf jig defined in claim 2, characterised in that, The filter element has a pentagonal cross-section, and the outer peripheral surface includes five side surfaces connected end to end. The drain hole includes a first drain hole, a second drain hole, and a third drain hole; three of the side surfaces are provided with the first drain hole, the second drain hole, and the third drain hole. The first drain hole and the second drain hole are located on two adjacent side surfaces; the side surface where the third drain hole is located is spaced apart from the side surface where the first drain hole and the second drain hole are located.
4. The swarf jig defined in claim 3, characterised in that, The first drain hole, the second drain hole, and the third drain hole are interconnected.
5. The chip-cutting fixture according to claim 1, characterized in that, The inner wall of the mounting hole is provided with a liquid inlet, which is connected to the drain hole on the filter element.
6. The chip-cutting fixture according to claim 1, characterized in that, A plurality of filter elements are provided on the first surface and / or the second surface, and the plurality of filter elements are evenly spaced along the circumferential direction.
7. The chip-cutting fixture according to claim 1, characterized in that, The filter element and the cutting disc are detachably connected.
8. The chip-cutting fixture according to claim 7, characterized in that, Of the filter element and the cutting disc, one has a fixing hole and the other has a fixing post, with the fixing post inserted into the fixing hole.
9. The cutting fixture according to any one of claims 1 to 8, characterized in that, The filter element is made of ceramic, metal or rubber; and / or the cutting disc is made of metal, rubber or diamond.
10. A cutting device, characterized in that, It includes a drive unit and a chip-cutting fixture as described in any one of claims 1 to 9, wherein the chip-cutting fixture and the drive unit are connected.