Reduction system
By setting up multiple material units and regulating valves in the reduction system, precise control of the dichlorosilane content was achieved, solving the problem of fixed dichlorosilane content in existing technologies and improving the efficiency of the reduction reaction and product quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- YUNNAN TONGWEI HIGH PURITY CRYSTALLINE SILICON CO LTD
- Filing Date
- 2025-03-31
- Publication Date
- 2026-04-28
AI Technical Summary
In the existing reduction production process, the content of dichlorosilane is fixed and cannot be controlled in stages during the reduction process, which increases product quality and operational difficulty, and requires high operational skills from employees.
By setting up a first material unit, a second material unit, and a third material unit in the reduction system, and by adjusting the pipelines and interlocking control valves and mass flow meters, the content of dichlorosilane can be precisely controlled, and the reaction conditions can be optimized by combining a static mixer.
This technology enables flexible control of the dichlorosilane content in a single reduction furnace during the reduction reaction process, thereby improving the deposition rate, reducing reduction power consumption, and ensuring product quality.
Smart Images
Figure CN224172463U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of polycrystalline silicon production technology, specifically to a reduction system. Background Technology
[0002] In existing technologies, the reduction production process involves mixing hydrogen with high-purity trichlorosilane (containing 3-4% by mass of dichlorosilane) and feeding it into a reduction furnace. A vapor-phase deposition reaction then occurs on the surface of an electrically powered silicon core. Dichlorosilane has high reactivity, which helps to increase the initial reaction rate, improve unit production capacity, and reduce unit electricity costs. The 3-4% dichlorosilane is separately refined by a distillation system and then mixed with refined trichlorosilane at a specific mass ratio. In other words, the refined material sent from the distillation system to the reduction system is already mixed in a certain proportion.
[0003] However, the current system control method is that the content of dichlorosilane in the front section is fixed. Regardless of the stage of reduction growth, the content is fixed. There is no way to control it in stages during the reduction reaction (there is a system where all reduction furnaces in the system grow and cool at the tail end to ensure continuous production. Starting and stopping the reduction furnace is a sequential process, and the growth time of each furnace has a different reduction furnace cycle). Only the dichlorosilane content of the large system can be adjusted as a whole. It is not possible to adjust the dichlorosilane content of a single furnace. The impact is that the control of the reduction process is more difficult, which will have a certain impact on product quality and require higher operating skills from employees. Utility Model Content
[0004] The purpose of this invention is to develop a reduction system that can control the content of dichlorosilane during the reduction reaction.
[0005] This utility model is achieved through the following technical solution:
[0006] A restoration system, comprising:
[0007] The reduction furnace, the recovery system, and the first material unit, the second material unit, and the third material unit;
[0008] The reduction furnace is connected to the recovery system, the first material unit is connected to the second material unit by pipelines, the second material unit is connected to the reduction furnace by a mixing pipeline, and the third material unit is connected to the reduction furnace.
[0009] The material in the first material unit is dichlorosilane, the material in the second material unit is trichlorosilane, and the material in the third material unit is hydrogen.
[0010] The first material unit is connected to the mixing pipeline by a regulating pipeline, and the regulating pipeline is equipped with a second regulating valve and a mass flow meter with interlocking control.
[0011] Optionally, the reduction system further includes a distillation system connected to the first material unit and the second material unit.
[0012] Optionally, the reduction system further includes a static mixer connected to the reduction furnace, and the mixing pipeline and the third material unit are connected to the static mixer.
[0013] Optionally, a first regulating valve is provided on the mixing pipeline, and the regulating pipeline is connected to the mixing pipeline after the first regulating valve.
[0014] The beneficial effects of this utility model are:
[0015] During the reduction reaction, the content of dichlorosilane in a single reduction furnace can be controlled at different times by adjusting the pipeline. This ensures product quality while maximizing the deposition rate (yield) and minimizing the reduction power consumption (cost). Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0017] Figure 1 This is a structural diagram of the present utility model. Detailed Implementation
[0018] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.
[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.
[0020] In this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0021] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.
[0022] like Figure 1 As shown, this utility model discloses a reduction system, including a static mixer, a reduction furnace and a recovery system connected in sequence, and also includes a distillation system, a first material unit, a second material unit and a third material unit.
[0023] The first material unit is connected to the second material unit via pipelines. The second material unit is connected to the static mixer via a mixing pipeline, which is equipped with a first regulating valve. Both the first and second material units are connected to a distillation system. The materials from both units are collected by the distillation system. The material in the first material unit is dichlorosilane, and the material in the second material unit is trichlorosilane.
[0024] The third material unit is connected to the static mixer, and the material in the third material unit is hydrogen.
[0025] A regulating pipeline is provided between the first material unit and the mixing pipeline after the first regulating valve. The regulating pipeline is equipped with a second regulating valve and a mass flow meter with interlocking control.
[0026] During the reduction process, the distillation system distills out qualified high-purity dichlorosilane, which is then separately introduced into the mixing pipeline through the second regulating valve interlocking mass flow meter on the regulating pipeline. It is then mixed with high-purity hydrogen in a certain ratio and enters the reduction furnace to participate in the reaction. This achieves control over the dichlorosilane content at different reaction stages during the reduction process, improves the initial reaction rate, reduces reduction power consumption, controls atomization in the middle stage, and ensures the quality of the final product.
[0027] During the reduction reaction, the content of dichlorosilane in a single reduction furnace can be controlled at different times by adjusting the pipeline. This ensures product quality while maximizing the deposition rate (yield) and minimizing the reduction power consumption (cost).
[0028] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the technical solutions of this utility model. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of this utility model patent.
Claims
1. A restoration system, characterized in that, include: The reduction furnace, the recovery system, and the first material unit, the second material unit, and the third material unit; The reduction furnace is connected to the recovery system, the first material unit is connected to the second material unit by pipelines, the second material unit is connected to the reduction furnace by a mixing pipeline, and the third material unit is connected to the reduction furnace. The material in the first material unit is dichlorosilane, the material in the second material unit is trichlorosilane, and the material in the third material unit is hydrogen. The first material unit is connected to the mixing pipeline by a regulating pipeline, and the regulating pipeline is equipped with a second regulating valve and a mass flow meter with interlocking control.
2. The restoration system according to claim 1, characterized in that, The reduction system also includes a distillation system, which is connected to the first material unit and the second material unit.
3. The restoration system according to claim 1, characterized in that, The reduction system also includes a static mixer connected to the reduction furnace, and the mixing pipeline and the third material unit are connected to the static mixer.
4. The restoration system according to claim 1, characterized in that, The mixing pipeline is equipped with a first regulating valve, and the regulating pipeline is connected to the mixing pipeline after the first regulating valve.