Automatic door device of vacuum chamber

Abstract

The utility model discloses an automatic door device of a vacuum chamber, which belongs to the technical field of automatic doors and comprises a vacuum chamber shell, a through opening communicated with an internal chamber is arranged on one side of the vacuum chamber shell, an automatic door is arranged on one side of the vacuum chamber shell, the automatic door is arranged at the position of the through opening, and the size of the automatic door is larger than that of the through opening. And a driving device is arranged on the vacuum chamber shell, is connected with the automatic door and is used for driving the automatic door to seal the through opening. According to the utility model, the automatic door is opened or closed in a full-automatic telescopic manner, manual intervention on the automatic door is avoided, the cleanliness of the wafer is improved, and the risk that the wafer is polluted is reduced.

Description

Technical Field

[0001] This utility model relates to the field of automatic door technology, and in particular to a vacuum chamber automatic door device. Background Technology

[0002] Currently, in traditional wafer transport systems, the doors of the loading devices are mostly operated manually or semi-automatically, controlling the opening and closing of the loading device doors in a manual or semi-automatic manner.

[0003] Regarding the aforementioned technologies, the applicant found that manual or semi-automatic loading doors have insufficient sealing performance, allowing particles or gases to easily penetrate into the cavity. Furthermore, manual or semi-automatic loading doors require manual intervention, which may lead to a decrease in wafer cleanliness. During the manual intervention process, the wafer is also prone to dust accumulation, thereby increasing the risk of wafer contamination. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing an automatic door device for a vacuum chamber. The device opens and closes automatically through a fully automatic telescopic mechanism, eliminating manual intervention and improving wafer cleanliness, thereby reducing the risk of wafer contamination.

[0005] The technical solution of this utility model to solve the above-mentioned technical problems is as follows:

[0006] An automatic door device for a vacuum chamber includes a vacuum chamber shell, one side of which has an opening communicating with an internal chamber, and an automatic door located at the opening. The size of the automatic door is larger than the size of the opening. A drive device is provided on the vacuum chamber shell and connected to the automatic door for driving the automatic door to close the opening.

[0007] Furthermore, a sealing ring is provided at the edge of the opening, and when the automatic door is closed, the automatic door and the sealing ring abut against each other.

[0008] Furthermore, the driving device includes a rodless cylinder, and the end of the rodless cylinder is provided with a cylinder connecting plate. The cylinder connecting plate slides on the rodless cylinder and is connected to the automatic door.

[0009] Furthermore, the automatic door includes an inner door panel and an outer door panel. The inner door panel is located on the side closer to the opening, and the outer door panel is located on the side farther from the opening. The inner door panel is provided with a plurality of telescopic cylinders, which are located between the inner door panel and the outer door panel, and the inner door panel and the outer door panel are connected by the telescopic cylinders.

[0010] Furthermore, the inner door panel is provided with a plurality of springs, which are connected between the inner door panel and the outer door panel.

[0011] Furthermore, the air circuits of the rodless cylinder and the telescopic cylinder are interconnected, and solenoid valves are provided in the air circuits of the rodless cylinder and the telescopic cylinder.

[0012] Furthermore, a throttle valve is provided in the air circuit of the rodless cylinder and the telescopic cylinder.

[0013] Furthermore, the solenoid valve is equipped with a silencer.

[0014] In summary, compared with the prior art, the beneficial effects of the above technical solution are:

[0015] (1) The automatic door is opened or closed by a fully automatic telescopic mechanism, eliminating human intervention in the automatic door, improving the cleanliness of the wafer, and thus reducing the risk of wafer contamination.

[0016] (2) By connecting the air passages of the rodless cylinder and the telescopic cylinder, the response speed of the door opening and closing is improved, thereby improving the efficiency of the wafer production line.

[0017] (3) By setting the sealing ring, the sealing performance is improved, and the occurrence of particles or gas infiltration into the vacuum cavity is reduced. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure in the open state in an embodiment of this utility model;

[0019] Figure 2 This is a schematic diagram of the closed state of the overall structure in an embodiment of this utility model;

[0020] Figure 3 This is a schematic diagram of the retracted state of the telescopic cylinder in an embodiment of this utility model;

[0021] Figure 4 This is a schematic diagram of the telescopic cylinder in the extended state in an embodiment of this utility model;

[0022] Figure 5 This is a schematic diagram of the air path in an embodiment of this utility model.

[0023] Explanation of reference numerals in the attached drawings: 1. Vacuum chamber shell; 11. Port; 2. Automatic door; 21. Outer door panel; 22. Inner door panel; 23. Telescopic cylinder; 24. Spring; 3. Drive device; 31. Rodless cylinder; 32. Cylinder connecting plate; 4. Air passage; 41. Solenoid valve; 42. Throttle valve; 43. Silencer; 5. Sealing ring. Detailed Implementation

[0024] The principles and features of this utility model are described below with reference to all the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0025] This utility model discloses an automatic door device for a vacuum chamber.

[0026] Reference Figures 1-5 An automatic door device for a vacuum chamber includes a vacuum chamber shell 1. One side of the vacuum chamber shell 1 has an opening 11 connecting to the internal chamber. An automatic door 2 is located on one side of the vacuum chamber shell 1, positioned at the opening 11. The size of the automatic door 2 is larger than the opening 11. The automatic door 2 blocks the opening 11, thus achieving the opening and closing of the automatic door 2.

[0027] Reference Figure 1 A sealing ring 5 is provided at the edge of the opening 11. When the automatic door 2 is closed, the automatic door 2 and the sealing ring 5 abut against each other. The sealing ring 5 improves the sealing performance and reduces the possibility of particles or gas infiltrating into the vacuum chamber.

[0028] Reference Figures 1-4 The automatic door 2 includes an inner door panel 22 and an outer door panel 21. The inner door panel 22 is located on the side closer to the opening 11, and the outer door panel 21 is located on the side farther from the opening 11. The inner door panel 22 is equipped with several telescopic cylinders 23, which are positioned between the inner door panel 22 and the outer door panel 21, connecting them. In this embodiment, the multiple telescopic cylinders 23 are evenly connected between the inner door panel 22 and the outer door panel 21. The telescopic movement of the cylinders 23 drives the inner door panel 22 to move closer to or further away from the outer door panel 21. In this embodiment, the telescopic cylinders 23 are preferably thin-type telescopic cylinders.

[0029] Reference Figures 1-4 The inner door panel 22 is provided with several springs 24, which are placed between the inner door panel 22 and the outer door panel 21, connecting the inner door panel 22 and the outer door panel 21. In this embodiment, the multiple springs 24 are evenly connected around the edges of the inner door panel 22 and the outer door panel 21, and the springs 24 play a shock-absorbing role when the inner door panel 22 and the outer door panel 21 move back and forth.

[0030] Reference Figure 1A drive device 3 is provided on the outer shell 1 of the vacuum chamber, and the drive device 3 is connected to the automatic door 2. In this embodiment, the drive device 3 is preferably a rodless cylinder 31. It should be noted that any other structure that can connect to and drive the automatic door 2 to perform telescopic movement is acceptable. In this embodiment, the drive device 3 includes a rodless cylinder 31, and a cylinder connecting plate 32 is provided at the end of the rodless cylinder 31. The cylinder connecting plate 32 slides on the rodless cylinder 31 and is connected to the automatic door 2. The rodless cylinder 31 drives the automatic door 2 to telescopically move at the opening 11. The automatic door 2 is opened or closed through a fully automatic telescopic movement, eliminating manual intervention of the automatic door 2, improving the cleanliness of the wafer, and thus reducing the risk of wafer contamination.

[0031] Reference Figure 5 The rodless cylinder 31 and the telescopic cylinder 23 are connected by air passage 4. A solenoid valve 41 is provided on the air passage 4 of both cylinders, preferably a two-position five-way solenoid valve. This interconnected air passage 4 between the rodless cylinder 31 and the telescopic cylinder 23 improves the response speed of the door opening and closing, thereby increasing the efficiency of the wafer production line.

[0032] Reference Figure 5 A throttle valve 42 is provided on the air passage 4 of the rodless cylinder 31 and the telescopic cylinder 23, and a muffler 43 is provided on the solenoid valve 41 to further improve the response speed and quietness of the air passage 4.

[0033] The automatic control of the automatic door 2 is achieved through the air passage 4, ensuring a vacuum seal after the door is closed. To achieve a vacuum seal, a sealing ring 5 is provided at the opening 11 of the chamber. The outer door panel 21 and the inner door panel 22 are connected and mounted on the rodless cylinder 31 through the cylinder connecting plate 32, and are driven by the rodless cylinder 31 to perform lifting and lowering movements.

[0034] When the thin telescopic cylinder in the inner door panel 22 is in the retracted state, there is a certain gap between the inner door panel 22 and the sealing ring 5, so no friction is generated during the lifting and lowering movement of the automatic door 2. When the rodless cylinder 31 rises to the top, after the inner door panel 22 completely blocks the opening 11 of the vacuum chamber outer shell 1, the thin telescopic cylinder becomes extended, causing the inner door panel 22 to press against the sealing ring 5, thereby sealing the vacuum chamber.

[0035] When the automatic door 2 needs to be opened, the air supply to the thin telescopic cylinder 4 is shut off, the thin telescopic cylinder is pulled back by the spring 24, the inner door panel 22 is disengaged from the sealing ring 5, and the rodless cylinder 31 moves up and down again, reducing the frictional resistance between the automatic door 2 and the sealing ring 5.

[0036] The implementation principle of the automatic door device for a vacuum chamber according to this utility model embodiment is as follows:

[0037] The automatic control of the automatic door 2 is achieved through the air passage 4, ensuring a vacuum seal after the door is closed. To achieve a vacuum seal, a sealing ring 5 is provided at the opening 11 of the chamber. The outer door panel 21 and the inner door panel 22 are connected and mounted on the rodless cylinder 31 through the cylinder connecting plate 32, and are driven by the rodless cylinder 31 to perform lifting and lowering movements.

[0038] When the thin telescopic cylinder in the inner door panel 22 is in the retracted state, there is a certain gap between the inner door panel 22 and the sealing ring 5, so no friction is generated during the lifting and lowering movement of the automatic door 2. When the rodless cylinder 31 rises to the top, after the inner door panel 22 completely blocks the opening 11 of the vacuum chamber outer shell 1, the thin telescopic cylinder becomes extended, causing the inner door panel 22 to press against the sealing ring 5, thereby sealing the vacuum chamber.

[0039] When the automatic door 2 needs to be opened, the air supply to the thin telescopic cylinder 4 is shut off, the thin telescopic cylinder is pulled back by the spring 24, the inner door panel 22 is disengaged from the sealing ring 5, and the rodless cylinder 31 moves up and down again, reducing the frictional resistance between the automatic door 2 and the sealing ring 5.

[0040] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An automatic door device for a vacuum chamber, characterized in that: The system includes a vacuum chamber shell (1), one side of which has an opening (11) for communicating with the internal chamber. The other side of the vacuum chamber shell (1) has an automatic door (2) located at the opening (11). The size of the automatic door (2) is larger than the size of the opening (11). The vacuum chamber shell (1) has a drive device (3) connected to the automatic door (2) for driving the automatic door (2) to close the opening (11).

2. The automatic door device for a vacuum chamber according to claim 1, characterized in that: A sealing ring (5) is provided at the edge of the opening (11). When the automatic door (2) is closed, the automatic door (2) and the sealing ring (5) abut against each other.

3. The automatic door device for a vacuum chamber according to claim 1, characterized in that: The drive device (3) includes a rodless cylinder (31), and the end of the rodless cylinder (31) is provided with a cylinder connecting plate (32). The cylinder connecting plate (32) slides on the rodless cylinder (31) and is connected to the automatic door (2).

4. The automatic door device for a vacuum chamber according to claim 3, characterized in that: The automatic door (2) includes an inner door panel (22) and an outer door panel (21). The inner door panel (22) is located on the side close to the opening (11), and the outer door panel (21) is located on the side away from the opening (11). The inner door panel (22) is provided with a plurality of telescopic cylinders (23). The telescopic cylinders (23) are located between the inner door panel (22) and the outer door panel (21), and the inner door panel (22) and the outer door panel (21) are connected by the telescopic cylinders (23).

5. The automatic door device for a vacuum chamber according to claim 4, characterized in that: The inner door panel (22) is provided with a plurality of springs (24), which are connected between the inner door panel (22) and the outer door panel (21).

6. The automatic door device for a vacuum chamber according to claim 4, characterized in that: The rodless cylinder (31) and the telescopic cylinder (23) are connected to each other through the air passage (4), and the air passage (4) of the rodless cylinder (31) and the telescopic cylinder (23) is equipped with a solenoid valve (41).

7. The automatic door device for a vacuum chamber according to claim 4, characterized in that: A throttle valve (42) is provided on the air passage (4) of the rodless cylinder (31) and the telescopic cylinder (23).

8. The automatic door device for a vacuum chamber according to claim 6, characterized in that: The solenoid valve (41) is equipped with a silencer (43).

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