Turnover device

Abstract

The utility model discloses a turnover device. The turnover device comprises a supporting piece, an adjusting mechanism and a plurality of transfer pieces, the supporting piece extends in the first direction, the transfer pieces are spaced in the first direction, the transfer pieces are movably connected to the supporting piece and used for containing a turnover piece, and at least one of the adjusting mechanism and the supporting piece can move in the second direction. The distance between any two adjacent transfer pieces in the first direction is adjusted. According to the transferring device, when at least one of the adjusting mechanism and the supporting piece moves in the second direction, the distance between any two adjacent transferring pieces in the first direction can be adjusted, so that the gap between any two adjacent transferred pieces is changed, and when the transferred pieces need to be transferred between two appliances with different gaps, the transferring pieces can be conveniently transferred. According to the turnover device, the gaps between the turnover pieces are changed, batch operation of turnover in appliances with different gaps is achieved, the operation process is greatly simplified, and the turnover efficiency is remarkably improved.

Description

Technical Field

[0001] This application relates to the field of mechanical technology, and more specifically, to a turnover device. Background Technology

[0002] In related technologies, the components to be transferred (such as wafers or chips) usually need to be transferred from one device (such as a cassette) to another. However, a device usually has multiple components to be transferred. When the gaps between the two devices are different, simple transfer tools such as pick-up pens, tweezers, or robotic arms are needed to pick up and put in individual components. This method is complicated to operate, has low turnover efficiency, and requires too long a turnover time. Utility Model Content

[0003] This application aims to at least partially address one of the aforementioned technical problems in the related art. To this end, this application proposes a turnover device that improves turnover efficiency and simplifies operating procedures.

[0004] The turnover device according to an embodiment of this application includes a support member, an adjustment mechanism, and a plurality of transfer members. The support member extends along a first direction, and the plurality of transfer members are spaced apart along the first direction. The transfer members are movably connected to the support member and are used to place the turnover item. At least one of the adjustment mechanism and the support member is movable in a second direction to adjust the distance between any two adjacent transfer members in the first direction.

[0005] According to the embodiments of this application, when at least one of the adjusting mechanism and the support moves in the second direction, the distance between any two adjacent transfer components can be adjusted in the first direction, thereby realizing the change of the gap between any two adjacent transfer components. When the transfer components need to be transferred between two appliances with different gaps, the gap between the transfer components is changed by the transfer device, realizing batch operation of transfer between appliances with different gaps, greatly simplifying the operation process, significantly improving the turnover efficiency, and reducing the total turnover time.

[0006] According to some embodiments of this application, the adjustment mechanism includes an adjustment seat and a plurality of adjustment members, the adjustment members being movably mounted on the adjustment seat, wherein the plurality of transport members and the plurality of adjustment members alternately abut against each other in the first direction, the thickness of the end of the adjustment member near the adjustment seat is greater than the thickness of the end of the adjustment member away from the adjustment seat, and the thickness of the adjustment member exhibits a continuous changing trend.

[0007] According to some embodiments of this application, the adjusting seat has a groove that extends along the first direction, and one end of the adjusting member is movably mounted in the groove.

[0008] According to some embodiments of this application, the adjusting member is provided with a first hole, the first hole being constructed as an elongated hole extending along the second direction, the transferring member is provided with a second hole, and the first hole and the second hole are alternately fitted onto the supporting member in the first direction.

[0009] According to some embodiments of this application, the transfer component includes a transfer body, a connector, and a movable component. The movable component is movably connected to the support component. The transfer body is used to place the transferred component. The movable component is connected to the transfer body through the connector. In the first direction, the movable component is adapted to abut against the adjusting components on the upper and lower sides. In a plane perpendicular to the first direction, the projection of the adjusting component on the plane is located outside the projection range of the transfer body on the plane.

[0010] According to some embodiments of this application, the turnover device further includes a base, the adjustment mechanism includes an adjustment seat and a plurality of adjustment members, the adjustment members are movably mounted on the adjustment seat, at least one of the support member and the adjustment seat is disposed on the base, and at least one of the support member and the adjustment seat is movable in the second direction.

[0011] According to some embodiments of this application, the adjusting seat is fixed to the base, and the support member is movably connected to the base; or, both the support member and the adjusting seat are movably connected to the base; or, the support member is fixed to the base, and the adjusting seat is movable relative to the base along the second direction.

[0012] According to some embodiments of this application, the turnover device further includes a first limiting member and a second limiting member. The first limiting member is mounted on the support member and is located on the side of the plurality of adjusting members closest to the base. The first limiting member is adapted to abut against the adjusting member closest to the base. The second limiting member is mounted on the support member and is located on the side of the plurality of adjusting members furthest from the base. The transfer member includes a moving member movably connected to the support member. The plurality of adjusting members and the plurality of moving members are located between the first limiting member and the second limiting member. The second limiting member is adapted to abut against the adjusting member furthest from the base. In the first direction, the position of the first limiting member and / or the second limiting member on the support member is adjustable.

[0013] According to some embodiments of this application, the turnover device further includes a pusher movably connected to the base, the pusher selectively abutting against the turnover piece to push the turnover piece to move.

[0014] According to some embodiments of this application, the transfer component includes a transfer body, a connector, and a movable component. The transfer body is used to place the transferred component. The movable component is connected to the transfer body through the connector. The transfer body has a third hole, or the connector and the transfer body together form a third hole. The pusher passes through the third hole and can move within the third hole.

[0015] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the small gap of a turnover device according to an embodiment of this application;

[0017] Figure 2 This is a schematic diagram of the large clearance of a turnover device according to an embodiment of this application;

[0018] Figure 3 This is a schematic diagram of a turnover device according to another embodiment of this application;

[0019] Figure 4 This is a top view of the adjusting member according to an embodiment of this application;

[0020] Figure 5 This is a top view schematic diagram of a transfer member and a pusher member according to an embodiment of this application;

[0021] Figure 6 This is a top view of a transfer member and a pusher member according to another embodiment of this application;

[0022] Figure 7 This is a top view schematic diagram of the transferred component, the transferring component, and the pushing component according to an embodiment of this application;

[0023] Figure 8 This is a top view of the transferred component, the transfer component, and the pusher according to another embodiment of this application.

[0024] Figure label:

[0025] 10. Turnover device, 1. Support component, 2. Transfer component, 21. Transfer body, 22. Connector, 23. Moving component, 231. Second hole, 24. Third hole, 3. Adjustment mechanism, 31. Adjustment seat, 32. First hole, 321. Base, 4. First limiting component, 5. Second limiting component, 6. Pushing component, 7. Turnover component, 8. Detailed Implementation

[0026] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0027] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0028] The following is combined with Figures 1-8 A detailed description of the turnover device 10 according to an embodiment of this application.

[0029] See Figures 1-3 As shown, the turnover device 10 according to an embodiment of this application includes a support member 1, a transfer member 2, and an adjustment mechanism 3. The support member 1 extends along a first direction F1-F2. There are multiple transfer members 2, which are spaced apart along the first direction F1-F2. The transfer members 2 are movably connected to the support member 1. The transfer members 2 are used to place the turnover item 8. At least one of the adjustment mechanism 3 and the support member 1 can move in a second direction F3-F4 to adjust the distance between any two adjacent transfer members 2 in the first direction F1-F2.

[0030] Specifically, any transfer component 2 can hold one workpiece 8. Multiple transfer components 2 are spaced apart along the first direction F1-F2. Therefore, a turnover device 10 can hold multiple workpieces 8 spaced apart along the first direction F1-F2. When at least one of the adjusting mechanism 3 and the support component 1 moves along the second direction F3-F4, it can adjust the distance between any two adjacent transfer components 2 along the first direction F1-F2, thereby changing the gap between any two adjacent workpieces 8. Thus, when a workpiece 8 needs to be rotated between two appliances with different gaps, the turnover device 10 can be used to remove the workpiece 8 from the first appliance. By adjusting the gap between any two adjacent workpieces 8 to match the gap requirement of the second appliance, the workpiece 8 can be pushed from the turnover device 10 into the second appliance. This realizes batch operation of rotating workpieces with different gaps, greatly simplifies the operation process, significantly improves turnover efficiency, and reduces the total turnover time.

[0031] Furthermore, by adjusting the distance between any two adjacent transfer pieces 2 in the first direction F1-F2, it is possible to place transfer pieces 8 of different thicknesses between the two adjacent transfer pieces 2.

[0032] The first direction F1-F2 and the second direction F3-F4 are different directions; they are not parallel or collinear. For example, the first direction F1-F2 and the second direction F3-F4 can be perpendicular to each other, or they can be intersecting directions that are not perpendicular. Optionally, in this application... Figure 1 In the embodiment shown, the first direction F1-F2 is Figure 1 The vertical direction is shown, and the second direction F3-F4 is... Figure 1 As shown in the left and right directions, the first direction F1-F2 and the second direction F3-F4 are perpendicular to each other.

[0033] In related technologies, the components to be transferred usually need to be transferred from one appliance to another. However, an appliance usually has multiple components to be transferred. When the gaps between the two appliances are different, simple transfer tools are needed to pick up and put in individual components. This method is complicated to operate, has low turnover efficiency, and requires too long a turnover time.

[0034] According to the embodiment of this application, when at least one of the adjusting mechanism 3 and the support member 1 moves in the second direction F3-F4, it can adjust the distance between any two adjacent transfer members 2 in the first direction F1-F2, thereby realizing the change of the gap between any two adjacent transfer members 8. When the transfer members 8 need to be transferred between two appliances with different gaps, the gap between the transfer members 8 is changed by the turnover device 10, realizing batch operation of transfer between appliances with different gaps, greatly simplifying the operation process, significantly improving the turnover efficiency, and reducing the total turnover time.

[0035] In related technologies, when handling individual items for turnover, these items are often quite delicate and fragile, and using turnover tools such as suction pens and tweezers can easily damage them, causing scratches or collisions. However, in the turnover device 10 of this application, the item 8 is relatively stable on the transfer component 2 during the turnover process, and the operation of adjusting the gap is relatively smooth, which can effectively reduce the risk of damage to the item 8 during the turnover process and improve the yield rate of the item 8.

[0036] In some embodiments of this application, see Figures 1-3 As shown, the adjustment mechanism 3 includes an adjustment seat 31 and multiple adjustment members 32. The adjustment members 32 are movably installed on the adjustment seat 31. The multiple transfer members 2 and the multiple adjustment members 32 alternately stop each other in the first direction F1-F2. The thickness of the end of the adjustment member 32 near the adjustment seat 31 is greater than the thickness of the end of the adjustment member 32 away from the adjustment seat 31, and the thickness of the adjustment member 32 shows a continuous changing trend.

[0037] It should be noted that "multiple transfer components 2 and multiple adjustment components 32 alternately stop in the first direction F1-F2" means that in the first direction F1-F2, multiple transfer components 2 and multiple adjustment components 32 are arranged alternately in the form of adjustment component 32, transfer component 2, adjustment component 32, transfer component 2, adjustment component 32... and the transfer component 2 stops in the adjacent adjustment component 32, and the adjustment component 32 stops in the adjacent transfer component 2.

[0038] Because the thickness of the adjusting member 32 exhibits a continuous variation trend, and the thickness at the end closer to the adjusting seat 31 is greater than the thickness at the end farther from the adjusting seat 31, when the adjusting member 32 and the transfer member 2 undergo relative displacement in the second direction F3-F4, the thickness of the portion of the adjusting member 32 that abuts against the transfer member 2 will continuously change. When the adjusting mechanism 3 and the transfer member 2 are relatively close in the second direction F3-F4, the thickness of the portion of the adjusting member 32 that abuts against the transfer member 2 gradually increases, and the distance between two adjacent transfer members 2 in the first direction F1-F2 increases, thereby increasing the gap between two adjacent rotated parts 8; when the adjusting mechanism 3 and the transfer member 2 are relatively far apart in the second direction F3-F4, the thickness of the portion of the adjusting member 32 that abuts against the transfer member 2 gradually decreases, and the distance between two adjacent transfer members 2 in the first direction F1-F2 decreases, thereby reducing the gap between two adjacent rotated parts 8.

[0039] Therefore, the turnover device 10 can meet the various precise requirements of different tools for the gap of the turnover part 8, instead of only being able to adjust to a fixed position, which greatly improves the flexibility and adaptability of the turnover device 10. For example, in the turnover process of precision turnover parts 8 such as wafers, it can more accurately match the gap of different plugs.

[0040] Reference Figures 1-3 As shown, the adjusting member 32 has a non-uniform thickness structure. The adjusting member 32 has a first upper surface and a first lower surface. The first upper surface is a horizontally arranged plane, and the first lower surface is an arc-shaped surface or an inclined plane. In the direction from F3 to F4, the first lower surface gradually moves away from the first upper surface, that is, the distance between the first lower surface and the first upper surface in the first direction F1-F2 gradually increases, and the thickness of the adjusting member 32 gradually increases. The transfer member 2 includes a transfer body 21, a connecting member 22, and a moving member 23. The moving member 23 is movably connected to the support member 1. The transfer body 21 is used to place the transferred part 8. The moving member 23 is connected to the transfer body 21 through the connecting member 22. Among them, multiple moving members 23 and multiple adjusting members 32 alternately abut against each other in the first direction F1-F2. The moving member 23 has a uniform thickness structure and has a second upper surface and a second lower surface. The second upper surface is a horizontally arranged plane, and the second lower surface is also a horizontally arranged plane.

[0041] In one of the turnover devices 10, the moving part 23 and the adjusting part 32 abut against each other. Specifically, the abutting method can be that the first lower surface of the first adjusting part 32 abuts against the second upper surface of the first moving part 23, the second lower surface of the first moving part 23 abuts against the first upper surface of the second adjusting part 32, the first lower surface of the second adjusting part 32 abuts against the second upper surface of the second moving part 23, and so on.

[0042] Specifically, the abutment of the first lower surface and the second upper surface can be achieved by having one edge of the second upper surface abut against the first lower surface.

[0043] In some embodiments not shown in the figure, the moving member 23 may be constructed as a non-uniform thickness structure, while the adjusting member 32 is a uniform thickness structure. The thickness of the moving member 23 at the end closer to the transfer body 21 is greater than the thickness of the moving member 23 at the end farther from the transfer body 21, and the thickness of the moving member 23 shows a continuous changing trend.

[0044] It should be understood that in this application, the cooperation relationship between the transfer body 21 and the rotated part 8 is not specifically limited. That is, the structure of the transfer body 21 is not specifically limited. As long as it is a structure that can ensure that the rotated part 8 is placed on the corresponding transfer body 21 and that the relative position of the transfer body 21 and the corresponding rotated part 8 it carries does not change during the process of changing the gap between adjacent transfer bodies 21, it is acceptable.

[0045] For example Figure 5 , Figure 7 As shown, when the transfer component 8 is a wafer, the transfer body 21 can be a hollow cylindrical structure, and the wafer can be placed on the upper surface of the hollow cylindrical structure.

[0046] In some embodiments not shown in the figure, the transfer body 21 can be a lifting rod, and the rotated part 8 has an inverted "U" shaped structure. The lifting rod can extend into the inner cavity of the inverted "U" shaped structure to realize that the transfer body 21 lifts the rotated part 8.

[0047] In some embodiments of this application, see Figures 1-3 As shown, the adjusting seat 31 has a slide groove (not shown in the figure) extending along a first direction F1-F2, and one end of the adjusting member 32 is movably mounted in the slide groove. Specifically, the slide groove extending along the first direction F1-F2 provides precise guidance for the movement of the adjusting member 32. During the adjustment of the distance between adjacent transfer members 2, the adjusting member 32 can only move along the direction of the slide groove in the first direction F1-F2, avoiding offset or shaking of the adjusting member 32 in other directions. The adjustment process is more stable and can accurately adjust the distance between the transfer members 2, ensuring the consistency and accuracy of the gap between the transferred parts 8.

[0048] In some embodiments of this application, see Figures 4-8 As shown, the adjusting member 32 has a first hole 321, which is an elongated hole extending along the second direction F3-F4. The transferring member 2 has a second hole 231. The first hole 321 and the second hole 231 are alternately fitted onto the supporting member 1 in the first direction F1-F2. Specifically, the first hole 321 is an elongated hole extending along the second direction F3-F4, so that one of the adjusting member 32 and the supporting member 1 has a certain amount of room to move relative to the other of the adjusting member 32 and the supporting member 1 in the second direction F3-F4. When at least one of the adjusting member 32 and the supporting member 1 moves in the second direction F3-F4, the supporting member 1 and the adjusting member 32 can slide relative to each other within the range of the first hole 321, thereby changing the distance between the transfer member 2 and the adjusting member 32 in the second direction F3-F4, and further changing the distance between two adjacent transfer members 2 in the first direction F1-F2. This realizes the flexible adjustment of the gap between two adjacent turnover members 8 to adapt to the gap requirements of different appliances and improves the versatility and flexibility of the turnover device 10.

[0049] In some embodiments, the diameter of the second hole 231 is the same as the outer diameter of the support member 1.

[0050] In some embodiments, an anti-rotation structure is provided between the support member 1 and the transfer member 2, which is adapted to prevent relative rotation between the support member 1 and the transfer member 2.

[0051] For example, the anti-rotation structure can be a key, with one of the support member 1 and the transfer member 2 having a keyway and the other having a key. The support member 1 and the transfer member 2 achieve the anti-rotation effect of preventing relative rotation between the support member 1 and the transfer member 2 through the keyway and key cooperation, while the transfer member 2 can still move along the first direction F1-F2.

[0052] For example, the anti-rotation structure can be an anti-rotation protrusion provided on the support member 1. The anti-rotation protrusion extends along the first direction F1-F2, and the transfer member 2 has an anti-rotation groove extending along the first direction F1-F2. The anti-rotation protrusion and the anti-rotation groove are inserted and matched, so that while preventing the support member 1 and the transfer member 2 from rotating relative to each other, the transfer member 2 can still move along the first direction F1-F2.

[0053] It should be understood that the anti-rotation structure can also be other structures that prevent the support 1 and the transfer component 2 from rotating relative to each other but do not prevent the transfer component 2 from moving along the first direction F1-F2. These will not be elaborated on here.

[0054] In some embodiments of this application, see Figures 1-3 , Figures 5-8As shown, the transfer component 2 includes a transfer body 21, a connecting component 22, and a moving component 23. The moving component 23 is movably connected to the support component 1. The transfer body 21 is used to place the transferred component 8. The moving component 23 is connected to the transfer body 21 through the connecting component 22. In the first direction F1-F2, the moving component 23 is adapted to abut against the adjusting components 32 on the upper and lower sides. In the plane perpendicular to the first direction F1-F2, the projection of the adjusting component 32 on the plane is outside the projection range of the transfer body 21 on the plane.

[0055] It should be understood that in this application, "upper" in "upper and lower sides" refers to... Figure 1 The movable part 23 shown is oriented towards the F1 direction on the side; "down" refers to... Figure 1 The movable part 23 shown is oriented towards the F2 direction.

[0056] Specifically, the movable part 23 is movably connected to the support part 1 and is adapted to abut against the adjusting parts 32 on both sides in the first direction F1-F2. When either the adjusting part 32 or the support part 1 moves in the second direction F3-F4, since the adjusting part 32 abuts against the movable part 23, the adjusting part 32 can directly push the movable part 23 to move in the first direction F1-F2. In turn, the movable part 23 drives the transfer body 21 to move in the first direction F1-F2, thereby realizing the adjustment of the distance between two adjacent transfer bodies 21 in the first direction F1-F2. This ensures that the adjustment action of the adjusting mechanism 3 can be accurately transmitted to the transfer part 2, guaranteeing the effectiveness and accuracy of the gap adjustment between the transferred parts 8, and can accurately match the gap requirements of different appliances.

[0057] Meanwhile, in the plane perpendicular to the first direction F1-F2, the projection of the adjusting member 32 on the plane is outside the projection range of the transfer body 21 on the plane, that is, in the second direction F3-F4, the adjusting member 32 is far away from the transfer body 21. When the transfer body 21 carries the transferred part 8, it effectively avoids interference and collision between the adjusting member 32 and the transferred part 8 in the second direction F3-F4, reduces the risk of damage to the transferred part 8 due to mutual interference between components, and improves the stability and reliability of the turnover device 10.

[0058] In some embodiments, see Figures 1-3As shown, the thickness of the moving part 23 in the first direction F1-F2 is greater than the thickness of the transfer body 21 and the connecting part 22 in the first direction F1-F2. Therefore, designing the moving part 23 as a thicker structure provides higher structural strength, allowing it to better abut against the two adjacent adjusting parts 32, preventing damage from insufficient structural strength. Simultaneously, while ensuring relative movement between the moving part 23 and the adjusting part 32 to change the gap between adjacent transfer bodies 21, the thickness of the transfer body 21 and the connecting part 22 is reduced, thereby reducing material loss and waste, and lowering the overall weight of the turnover device 10.

[0059] In some embodiments of this application, see Figures 1-3 As shown, the turnover device 10 also includes a base 4, with at least one of the support member 1 and the adjusting seat 31 disposed on the base 4. At least one of the support member 1 and the adjusting seat 31 is movable in the second direction F3-F4. Specifically, the base 4 provides a stable support platform for the entire turnover device 10, capable of bearing the weight of the support member 1, the adjusting seat 31, the transfer member 2, and the turnover piece 8, ensuring the stability of the turnover device 10 during operation. Especially when the support member 1 or the adjusting seat 31 moves in the second direction F3-F4 to adjust the spacing of the transfer member 2, the base 4 effectively prevents the turnover device 10 from shaking or tilting, ensuring the safety of the turnover piece 8 and avoiding damage caused by instability.

[0060] In some embodiments, see Figure 3 As shown, the adjusting seat 31 is separated from the base 4, the support frame is fixed to the base 4, and the adjusting seat 31 can move in the second direction F3-F4.

[0061] In some embodiments not shown in the figure, the adjusting seat 31 is separated from the base 4, the support 1 is movably connected to the base 4, and both the support 1 and the adjusting seat 31 can move in the second direction F3-F4.

[0062] In some embodiments of this application, see Figure 1 , Figure 2 As shown, the adjusting seat 31 is fixed to the base 4, and the support member 1 is movably connected to the base 4. The support member 1 can move in the second direction F3-F4.

[0063] In some embodiments not shown in the figure, both the support member 1 and the adjusting seat 31 are movably connected to the base 4, and both the support member 1 and the adjusting seat 31 are movable in the second direction F3-F4.

[0064] In some embodiments, the support member 1 is fixed to the base 4, the adjusting seat 31 is movably connected to the base 4, and the adjusting seat 31 can move relative to the base 4 along the second direction F3-F4.

[0065] Specifically, the various connection methods between the support 1, the adjusting seat 31, and the base 4 provide diverse adjustment strategies for the transfer component 2. Multiple combinations can meet the needs of different sizes of the transferred components 8, different tool gaps, and diverse production scenarios, significantly enhancing the versatility of the transfer device 10.

[0066] In some embodiments of this application, see Figures 1-3 As shown, the turnover device 10 also includes a first limiting member 5 and a second limiting member 6. The first limiting member 5 is installed on the support member 1 and is located on the side of the plurality of adjusting members 32 closest to the base 4. The first limiting member 5 is adapted to stop against the adjusting member 32 closest to the base 4. The second limiting member 6 is installed on the support member 1 and is located on the side of the plurality of adjusting members 32 away from the base 4. The plurality of adjusting members 32 and the plurality of moving members 23 are located between the first limiting member 5 and the second limiting member 6. The second limiting member 6 is adapted to stop against the adjusting member 32 farthest from the base 4. In the first direction F1-F2, the position of the first limiting member 5 and / or the second limiting member 6 on the support member 1 is adjustable.

[0067] Specifically, the first limiting member 5 and the second limiting member 6 are located at both ends of the plurality of adjusting members 32, which can precisely limit the movement range of the adjusting members 32 in the first direction F1-F2. When the turnover device 10 adjusts the gap, the first limiting member 5 and the second limiting member 6 stop the adjusting members 32 from both ends of the adjusting mechanism 3, preventing the adjusting members 32 from moving excessively and causing the spacing of the transfer members 2 to become out of control, and avoiding the turnover members 8 from falling due to excessive spacing. This is especially suitable for the turnover of fragile turnover members 8 such as wafers and precision electronic components, providing a safety boundary for the adjustment process.

[0068] In some embodiments not shown in the figure, the position of the first limiting member 5 on the support member 1 is adjustable, and the second limiting member 6 is fixed on the support member 1.

[0069] In some embodiments not shown in the figure, the first limiting member 5 is fixed on the support member 1, and the position of the second limiting member 6 on the support member 1 is adjustable.

[0070] In some embodiments, see Figure 1-3 As shown, the position of the first limiting member 5 on the support member 1 is adjustable, and the position of the second limiting member 6 on the support member 1 is adjustable.

[0071] In this application, the limiting elements (including the first limiting element 5 and the second limiting element 6) can be constructed in any suitable form, and this application does not impose any specific restrictions on them.

[0072] For example, the limiting member can be a nut, and the support member 1 has a thread corresponding to the nut. The limiting member and the support member 1 are connected by the thread. The nut and the support member 1 have locating pin holes. When the limiting member moves to a certain position on the support member 1, the limiting member can be fixed on the support member 1 by the cooperation of the locating pin and the locating pin hole.

[0073] For example, the limiting member can be a limiting protrusion on the support member 1. Taking the above example of "the first limiting member 5 is fixed on the support member 1 and the position of the second limiting member 6 on the support member 1 is adjustable", the first limiting member 5 and the support member 1 are an integral structure. The first limiting member 5 is a limiting protrusion with a fixed position on the support member 1. The support member 1 has a sliding groove that extends along the first direction. The second limiting member 6 is movably installed in the sliding groove. When the second limiting member 6 slides to a certain position in the sliding groove, the second limiting member 6 can be fixed to the certain position in the sliding groove by a limiting pin.

[0074] For example, the connection between the limiting component and the support component 1 can also be a snap-fit ​​connection, which will not be elaborated here.

[0075] In some embodiments of this application, see Figures 1-3 As shown, the turnover device 10 also includes a pusher 7, which is movably connected to the base 4. The pusher 7 can selectively abut against the turnover item 8 to push the turnover item 8 to move. Specifically, the pusher 7 can directly abut against the turnover item 8 and push it to move, without the need for additional turnover tools (such as tweezers, suction pens, etc.), simplifying the turnover process and significantly improving turnover efficiency.

[0076] In related technologies, additional handling tools will leave marks (such as tweezer marks, pen marks, etc.) on the contact surface between the handling tool and the handled part 8 during use. However, the handling device 10 of this application can directly stop and push the handled part 8 through the pusher 7, avoiding local stress concentration and direct surface friction, eliminating marks from the source, and ensuring the surface integrity of the handled part 8. It is especially suitable for handled parts 8 (such as wafers) with extremely high surface quality requirements, and can significantly improve product yield.

[0077] In some embodiments of this application, see Figures 5-8 As shown, the transfer component 2 includes a transfer body 21, a connector 22, and a moving component 23. The transfer body 21 is used to place the transferable component 8. The moving component 23 is connected to the transfer body 21 through the connector 22. The transfer body 21 has a third hole 24, or the connector 22 and the transfer body 21 together form a third hole 24. The pushing component 7 passes through the third hole 24 and can move within the third hole 24.

[0078] In some embodiments, see Figure 5 , Figure 7 As shown, the connector 22 and the transfer body 21 together form a third hole 24.

[0079] In some embodiments, see Figure 6 , Figure 8 As shown, the transfer body 21 has a third hole 24.

[0080] Specifically, whether the transfer body 21 has a separate third hole 24 or the connecting piece 22 and the transfer body 21 together form the third hole 24, it can flexibly adapt to the design of transfer pieces 2 of different shapes and sizes, and be compatible with the load-bearing requirements of various turnover pieces 8. At the same time, the way the third hole 24 cooperates with the pushing piece 7 can be adjusted according to actual needs to optimize the pushing effect and improve the versatility of the turnover device 10.

[0081] In some embodiments, the turnover device 10 further includes a housing, a base 4 mounted on the bottom surface of the housing, and the housing covering the base 4. A working cavity is formed inside the housing, and the support member 1, the transfer member 2, the adjustment mechanism 3, the base 4, the first limiting member 5, the second limiting member 6, and the pushing member 7 are all disposed inside the working cavity. This reduces the amount of impurities (such as dust, moisture, etc.) from the external environment entering the turnover device 10.

[0082] In some embodiments, the housing may be a transparent glass or plastic structure with a side opening. When the turnover device 10 needs to pick up or put down the turnover piece 8, the side opening on the housing can enable the transfer piece 2 to interact with external appliances and also enable the gap adjustment of the transfer piece 2.

[0083] In some embodiments, a cover plate may be provided at the side opening. When the side opening does not need to be opened, the cover plate covers the side opening; when the side opening needs to be opened, the cover plate opens to expose the side opening.

[0084] The following is a specific example of using a wafer as the transferable component 8 and applying the transfer device 10 to the wafer:

[0085] In related technologies, the semiconductor industry is developing rapidly. Crystals (silicon, silicon carbide, gallium nitride, etc.) produced in factories are sliced ​​into wafers, and then manufactured into chips through multiple processes. Chips are widely used in industries such as 5G communications, computers, consumer electronics, network communications, automotive electronics, and the Internet of Things, leading to a continuously increasing demand for wafers. Current conventional wafer production methods mainly utilize methods such as vapor-phase or liquid-phase precipitation to obtain ingots, which then undergo steps such as wire cutting, chamfering, grinding, polishing, cleaning, and testing to produce the required wafer substrates or new seed crystals. In all these processes, wafer jamming is indispensable. Furthermore, due to wafer jamming, the design of wafer cleaning, turnover, and loading / unloading positions on testing equipment is also necessary. Turnover between different processes and equipment requires transfer tools or devices to transfer the wafers to suitable carriers.

[0086] Common simple handling tools include vacuum chucks, suction pens, and tweezers. Some processes, due to the need for flexibility, may even involve direct hand handling. These tools are simple to operate, inexpensive, allow for single-wafer transfer, and are convenient and quick to use, unaffected by the material, height, or gap of the chuck. However, they also involve direct contact between the tool and the wafer surface, requiring skilled operators. During use, suction ball marks, suction pen marks, and tweezer marks may appear on the contact surface between the tool and the wafer. Improper handling may also cause the wafer to fall off or be scratched.

[0087] For general-purpose cartridges such as 100, 150, and 200 cartridges, parameters such as cartridge spacing and height have reached an industry consensus. Even with different brands and manufacturers, different materials (such as polypropylene, perfluoroalkoxy resin, and polyetheretherketone), and different equipment, there is good universality. This has led to the development of manual wafer pushers, inductive wafer pushers, and wafer handling and turnover devices that can complete wafer turnover tasks without direct contact with the wafer. These devices can handle wafer turnover between cartridges of the same size and spacing very well. However, there is currently no corresponding tooling available for the conversion between customized cartridges with different spacings and general-purpose cartridges.

[0088] Another type of sorting equipment uses robotic arms to pick up and place wafers. It can not only pick up and place single wafers, but also classify and place wafers according to their grade. This can reduce particle introduction and avoid problems such as pen marks. However, the machine occupies a large space, is expensive, and has strict requirements for the operating environment. Sometimes, problems such as suction cup marks from the robotic arm may occur. For turnover of different gaps, it is necessary to use programs and modify the equipment and upgrade the program according to the customized card, which is expensive. It is more suitable for the final cleaning stage or shipping stage of wafers where product quality requirements are strict.

[0089] In summary, the turnover device 10 of this application adjusts the gap between any two adjacent transfer pieces 2 to A by the relative movement of the support member 1 and the adjusting member 32 in the second direction F3-F4. After removing the wafer from the chuck with gap A and placing it on the transfer body 21, the gap between any two adjacent transfer pieces 2 is adjusted from A to B by the relative movement of the support member 1 and the adjusting member 32 in the second direction F3-F4 (where A>B or A<B). Then, the pushing member 7 pushes the wafer from the turnover device 10 into the chuck with gap B. The large-gap chuck and the small-gap chuck are rotated through the turnover device 10, allowing for whole-wafer turnover (i.e., multiple wafers are rotated together). It does not grip the wafer surface, thus avoiding pen marks, suction cup marks, tweezer marks, etc. The cost is lower than that of a robotic arm, and it also has the function of pushing wafers. It can perform turnover between the same gap or different gaps, and has a wider range of applications, from wire cutting to shipping processes.

[0090] Furthermore, the turnover device 10 of this application can also be used for turnover between two appliances with the same gap, which will not be described in detail here.

[0091] In the description of this application, it should be understood that the terms "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0092] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0093] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0094] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A turnover device (10), characterized in that, include: Support member (1), the support member (1) extending along a first direction; Multiple transfer components (2) are spaced apart along the first direction. The transfer components (2) are movably connected to the support (1). The transfer components (2) are used to place the transferred item (8). An adjustment mechanism (3) is provided, at least one of which, along with the support member (1), is movable in a second direction to adjust the distance between any two adjacent transfer members (2) in the first direction.

2. The turnover device (10) according to claim 1, characterized in that, The adjustment mechanism (3) includes: Adjustment seat (31); and Multiple adjusting members (32) are movably mounted on the adjusting base (31); In this process, multiple transfer components (2) and multiple adjustment components (32) alternately abut against each other in the first direction. The thickness of the end of the adjustment component (32) near the adjustment seat (31) is greater than the thickness of the end of the adjustment component (32) away from the adjustment seat (31), and the thickness of the adjustment component (32) shows a continuous changing trend.

3. The turnover device (10) according to claim 2, characterized in that, The adjusting seat (31) has a groove that extends along the first direction, and one end of the adjusting member (32) is movably mounted in the groove.

4. The turnover device (10) according to claim 2, characterized in that, The adjusting member (32) is provided with a first hole (321), which is constructed as an elongated hole extending along the second direction. The transfer member (2) is provided with a second hole (231), and the first hole (321) and the second hole (231) are alternately fitted on the support member (1) in the first direction.

5. The turnover device (10) according to claim 2, characterized in that, The transfer component (2) includes a transfer body (21), a connector (22) and a movable component (23). The movable component (23) is movably connected to the support component (1). The transfer body (21) is used to place the transferred component (8). The movable component (23) is connected to the transfer body (21) through the connector (22). In the first direction, the movable component (23) is adapted to abut against the adjusting components (32) on the upper and lower sides. In a plane perpendicular to the first direction, the projection of the adjusting member (32) on the plane is outside the projection range of the transfer body (21) on the plane.

6. The turnover device (10) according to any one of claims 1-5, characterized in that, The turnover device (10) further includes a base (4), and the adjustment mechanism (3) includes an adjustment seat (31) and a plurality of adjustment members (32). The adjustment members (32) are movably mounted on the adjustment seat (31). At least one of the support member (1) and the adjustment seat (31) is disposed on the base (4), and at least one of the support member (1) and the adjustment seat (31) is capable of moving in the second direction.

7. The turnover device (10) according to claim 6, characterized in that, The adjusting seat (31) is fixed to the base (4), and the support member (1) is movably connected to the base (4); or, Both the support member (1) and the adjusting seat (31) are movably connected to the base (4); or, The support member (1) is fixed to the base (4), and the adjusting seat (31) is movable relative to the base (4) in the second direction.

8. The turnover device (10) according to claim 7, characterized in that, The turnover device (10) also includes: A first limiting member (5) is installed on the support member (1). The first limiting member (5) is located on the side of the plurality of adjusting members (32) near the base (4). The first limiting member (5) is adapted to stop against the adjusting member (32) closest to the base (4). The second limiting member (6) is mounted on the support member (1) and is located on the side of the plurality of adjusting members (32) away from the base (4). The transfer member (2) includes a moving member (23) which is movably connected to the support member (1). The plurality of adjusting members (32) and the plurality of moving members (23) are located between the first limiting member (5) and the second limiting member (6). The second limiting member (6) is adapted to stop against the adjusting member (32) furthest from the base (4). In the first direction, the positions of the first limiting member (5) and / or the second limiting member (6) on the support member (1) are adjustable.

9. The turnover device (10) according to claim 6, characterized in that, The turnover device (10) further includes a pusher (7), which is movably connected to the base (4) and can selectively abut against the turnover piece (8) to push the turnover piece (8) to move.

10. The turnover device (10) according to claim 9, characterized in that, The transfer component (2) includes a transfer body (21), a connector (22), and a movable component (23). The transfer body (21) is used to place the transferred component (8). The movable component (23) is connected to the transfer body (21) through the connector (22). The transfer body (21) has a third hole (24), or the connector (22) and the transfer body (21) together form a third hole (24). The pusher (7) passes through the third hole (24) and can move within the third hole (24).

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