Automatic packaging equipment for IWO particle target material
By using guide plates and sieves for particle sorting in the IWO particle target packaging equipment, the problem of uneven film thickness caused by uneven particle size is solved, achieving efficient particle sorting and space saving.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- JIANGSU ZHONGCHENGDA APPLIED MATERIALS CO LTD
- Filing Date
- 2025-05-29
- Publication Date
- 2026-05-01
AI Technical Summary
In the existing technology, IWO particulate targets have uneven particle size after production, resulting in uneven film thickness. This requires extending the production line for sorting, which occupies a lot of space and affects the utilization rate of factory space.
Design an automatic packaging equipment for IWO granular targets. The equipment sorts granules by setting guide plates and screen plates in the hopper. The inclined setting of the screen plates and guide plates and the screen hole design enable automatic sorting of granules and reduce the length of the production line.
It achieves efficient sorting of particulate targets, shortens the production line length, saves factory space, and improves space utilization.
Smart Images
Figure CN224184685U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of automatic packaging equipment for particulate targets, specifically to an automatic packaging equipment for IWO particulate targets. Background Technology
[0002] In modern industry, especially in high-tech industries such as electronics, semiconductors, and display technology, sputtering targets play a crucial role. They are key materials in thin film fabrication processes such as physical vapor deposition (PVD), forming various functional thin films, such as conductive and insulating films, on substrates through methods like sputtering. IWO (indium tungsten oxide, a material containing indium (In), tungsten (W), and oxygen (O)) particulate sputtering targets hold an irreplaceable position in the manufacture of certain electronic devices due to their unique physical and chemical properties.
[0003] After the production of IWO particle targets, there will be uneven particle size due to pressure distribution and other issues. In some semiconductor manufacturing processes with extremely high requirements for film thickness and uniformity, uneven particle size may lead to local thickness deviations in the film. Therefore, there are certain requirements for the uniformity of particle size. To address this issue, the production line is usually extended and a sorting device is set up on the production line to obtain two or more different particle sizes, and then each type is packaged separately.
[0004] While the above design solves the problem of sorting by size, the extended production line results in greater equipment investment and occupies a large space, leading to low utilization of factory space.
[0005] Therefore, there is an urgent need to design an automatic packaging equipment for IWO particle targets to solve the technical problem of long production line lengths occupying large spaces, resulting in low utilization of factory space.
[0006] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore may include information that does not constitute prior art. Utility Model Content
[0007] This disclosure provides at least one automatic packaging device for IWO particulate targets.
[0008] In a first aspect, embodiments of this disclosure provide an automatic packaging device for IWO particulate targets, comprising: a hopper having at least two discharge ports;
[0009] The guide plate is located at the bottom of the hopper;
[0010] Several screen plates are arranged between the feed inlet and the guide plate of the hopper, and the screen plates are arranged at intervals along the height direction.
[0011] The guide plate and the screen plate each correspond to a discharge port;
[0012] The sieve plate is provided with sieve holes, and the inner diameter of the sieve holes of the corresponding sieve plate decreases from high to low along the height direction of the silo.
[0013] The sieve plate and the guide plate are inclined, and the lower ends of the sieve plate and the guide plate face the corresponding discharge port.
[0014] Furthermore, after the granular target material enters the hopper, it falls sequentially onto the corresponding screen plate along the height direction and is discharged through the outlet corresponding to that screen plate.
[0015] In one optional embodiment, the hopper is provided with a movable box, and the guide plate and the screen plate are both installed in the movable box;
[0016] The side wall of the active box has several slots, with each slot corresponding to a discharge port.
[0017] In one optional embodiment, a vibration seat is installed at the bottom of the active box, a vibration motor is installed on the vibration seat, and an eccentric block is installed at the movable end of the vibration motor.
[0018] The gap between the movable box and the inner wall of the hopper is provided.
[0019] In one optional embodiment, sliding grooves are provided on both sides of the hopper, and limiting blocks are provided on both sides of the movable box;
[0020] Positioning blocks are installed at both ends of the sliding groove, and a guide rod is provided between the two positioning blocks. The limiting block is inserted through the guide rod.
[0021] In one alternative embodiment, the guide rod is fitted with a vibration spring, one end of which is connected to any limiting block, and the other end of which is connected to the limiting block.
[0022] In one alternative embodiment, the feed inlet of the silo is provided with a hopper.
[0023] In one alternative embodiment, a packaging machine is provided on one side of the hopper, and a conveyor belt is provided between the packaging machine and the hopper;
[0024] A feeding plate is installed on the outside of the discharge port, and the discharge end of the feeding plate extends above the conveyor belt.
[0025] Secondly, this disclosure also provides an automatic packaging device for IWO particulate targets, including: a hopper having an inlet and at least two outlets;
[0026] The guide plate is located at the bottom of the hopper;
[0027] Several screen plates are arranged between the feed inlet and the guide plate of the hopper, and the screen plates are arranged at intervals along the height direction.
[0028] The guide plate and the screen plate each correspond to a discharge port;
[0029] The sieve plate is provided with sieve holes, and the sieve holes of the corresponding sieve plates increase in size along the height direction.
[0030] Furthermore, after the granular target material enters the hopper from the feed inlet, it is sequentially retained on the corresponding screen plates along the height direction and discharged through the corresponding discharge outlet of the screen plate.
[0031] The sieve plate and the guide plate are inclined, and the lower ends of the sieve plate and the guide plate face the corresponding discharge port.
[0032] The hopper is equipped with a movable box, and the guide plate and screen plate are installed inside the movable box.
[0033] The side wall of the active box has several slots, with each slot corresponding to a discharge port.
[0034] In one optional embodiment, the hopper is provided with a movable box, and the guide plate and the screen plate are both installed in the movable box;
[0035] The side wall of the active box is provided with several slots, and each slot corresponds to a discharge port;
[0036] The bottom of the active box is equipped with a vibration seat, a vibration motor is installed on the vibration seat, and an eccentric block is installed on the movable end of the vibration motor.
[0037] The hopper has sliding grooves on both sides, and the movable box has limit blocks on both sides.
[0038] Positioning blocks are installed at both ends of the sliding groove, and a guide rod is provided between the two positioning blocks. The limiting block is inserted through the guide rod.
[0039] The guide rod is fitted with a vibration spring, one end of which is connected to any limiting block, and the other end is connected to the limiting block.
[0040] In one alternative embodiment, a packaging machine is provided on one side of the hopper, and a conveyor belt is provided between the packaging machine and the hopper;
[0041] A feeding plate is installed on the outside of the discharge port, and the discharge end of the feeding plate extends above the conveyor belt.
[0042] The beneficial effect of this utility model is that by setting a guide plate and a screen plate inside the silo, the material can be sorted as soon as it enters the silo, without the need to design an additional sorting production line, thereby greatly reducing the space required for sorting.
[0043] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained in the structures particularly pointed out in the description, claims, and drawings.
[0044] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0045] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0046] Figure 1 A perspective view of an automated packaging device for IWO particulate targets provided in this embodiment of the present disclosure;
[0047] Figure 2 A first cross-sectional view of a silo provided in an embodiment of this disclosure;
[0048] Figure 3 A second cross-sectional view of a silo provided in an embodiment of this disclosure;
[0049] Figure 4 for Figure 1 A magnified view of part A in the middle;
[0050] Figure 5 for Figure 2 A magnified view of part B in the middle section.
[0051] In the picture:
[0052] 1. Hopper; 11. Discharge port; 12. Sliding groove; 13. Positioning block; 14. Guide rod; 15. Hopper; 16. Feed plate;
[0053] 2. Packaging machine; 21. Conveyor belt; 3. Guide plate; 4. Screen plate; 41. Screen holes;
[0054] 5. Movable box; 51. Limiting block; 52. Vibration spring;
[0055] 6. Vibration seat; 61. Vibration motor; 62. Eccentric block. Detailed Implementation
[0056] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0057] Glossary: IWO particle target: Indium tungsten oxide, which is a particle target containing indium (In), tungsten (W), and oxygen (O).
[0058] Research has found that after the production of IWO particle targets, there will be uneven particle size due to issues such as pressure distribution. In some semiconductor manufacturing processes with extremely high requirements for film thickness and uniformity, uneven particle size may lead to local thickness deviations in the film. Therefore, there are certain requirements for the uniformity of particle size. To address this issue, the production line is usually extended and a sorting device is installed on the production line to obtain two or more different particle sizes, and then each type is packaged separately.
[0059] While the above design solved the problem of uneven size, the extended production line resulted in greater equipment investment and occupied a large space, leading to low utilization of factory space and hindering the expansion of production efficiency.
[0060] The shortcomings of the above solutions are the result of the designer's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure below should be considered as the designer's contribution to this disclosure.
[0061] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the embodiments and features described below can be combined with each other. Furthermore, in the accompanying drawings, the thickness of components may be exaggerated or reduced for the purpose of effectively describing the technical content.
[0062] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0063] Based on the above research, and referring to Figure 1 This disclosure provides an automatic packaging device for IWO particulate targets, including: a hopper 1, two conveyor belts 21, and two packaging machines 2. The hopper 1 has a feed inlet at its top and two discharge outlets 11 on its sides, each discharge outlet 11 corresponding to a conveyor belt 21 and a packaging machine 2. That is, with... Figure 1For example, material discharged from the left outlet 11 is conveyed to the left packaging machine 2 via the left conveyor belt 21. Similarly, material discharged from the right outlet 11 is conveyed to the right packaging machine 2 via the right conveyor belt 21, and then packaged by the corresponding packaging machine 2. Therefore, it is possible to package two different sizes of IWO particle targets separately.
[0064] Reference Figure 2 In at least one embodiment, the top of the hopper 1 has a hopper 15 for receiving the particle target and guiding the particle target through the feed port.
[0065] Reference Figure 2 In at least one embodiment, in order to complete the sorting of particle targets inside the hopper 1, thereby saving space in the production line, a movable box 5 is movably installed inside the hopper 1. The top opening of the movable box 5 completely covers the feed inlet of the hopper 1. The gap between the movable box 5 and the inner wall of the hopper 1 is set, that is, the size of the movable box 5 is slightly smaller than the size of the inner wall of the hopper 1, so that the movable box 5 can vibrate within a small range inside the hopper 1. A sieve plate 4 and a guide plate 3 are installed inside the movable box 5. The guide plate 3 is located at the bottom of the movable box 5, and the sieve plate 4 is located between the feed inlet of the hopper 1 and the guide plate 3. At the same time, the sieve plate 4 has an array of screen holes 41, and the inner diameter of the screen holes 41 of the sieve plate 4 decreases from high to low along the height direction of the hopper 1. According to the above configuration, after the granular target material enters the hopper 1 through the feed inlet, it falls directly downwards into the movable box 5 and onto the screen plate 4. Smaller granular target materials can pass through the screen holes 41 and fall onto the guide plate 3, while the remaining granular target materials remain on the screen plate 4. The movable box 5 and the discharge port 11 are both provided with slots, and the ends of the screen plate 4 and the guide plate 3 rest on these slots to connect them to the discharge port 11. The granular target materials on the screen plate 4 and the guide plate 3 are discharged through their respective discharge ports 11, thus achieving sorting.
[0066] Reference Figure 2 In at least one embodiment, the sieve plate 4 and the guide plate 3 are inclined, with the lower ends of the sieve plate 4 and the guide plate 3 facing the corresponding discharge port 11. This allows the particle target material to roll down the inclined surface of the corresponding discharge port 11 after falling onto the sieve plate 4 or the guide plate 3.
[0067] Reference Figure 2 In at least one embodiment, the sieve plate 4 and the guide plate 3 are inclined in opposite directions, that is, the discharge port 11 is located on the same side of the hopper 1. This arrangement requires a conveyor belt 21 and a packaging machine 2 to be installed on both sides of the hopper 1 respectively.
[0068] Reference Figure 3In at least one embodiment, the sieve plate 4 and the guide plate 3 are inclined in the same direction, that is, the discharge port 11 is located on the same side of the hopper 1. This arrangement is compared to Figure 2 The setup shown allows the conveyor belt 21 to be designed as a three-dimensional multi-layer structure, thereby further reducing the footprint.
[0069] In other embodiments, according to the above design, multiple sieve plates 4 can be designed, that is, multiple discharge ports 11 can be designed accordingly, thereby enabling the sorting of more particle targets of different sizes. Furthermore, in this arrangement, each sieve plate 4 is arranged at intervals along the height direction. On the other hand, the sieve holes 41 of the corresponding sieve plates 4 are progressively larger along the height direction, so that the particle targets are sorted sequentially from high to low and from large to small.
[0070] Reference Figure 1 In at least one embodiment, a guide plate 16 is installed on the outside of the discharge port 11, and the discharge end of the guide plate 16 extends above the conveyor belt 21 to guide the particle target material to fall correctly onto the conveyor belt 21.
[0071] Reference Figure 5 In at least one embodiment, a vibrating seat 6 is installed at the bottom of the movable box 5, a vibrating motor 61 is installed on the vibrating seat 6, and an eccentric block 62 is installed at the movable end of the vibrating motor 61. By starting the vibrating motor 61, the eccentric block 62 is driven to swing periodically, thereby generating an unbalanced force, which in turn causes the movable box 5 to shake periodically and rapidly, thereby causing the material on the screen plate 4 and the guide plate 3 to fall and separate quickly.
[0072] Reference Figure 4 In at least one embodiment, to control the degree and direction of vibration of the movable box 5, sliding grooves 12 are respectively provided on both sides of the hopper 1, and limiting blocks 51 are respectively provided on both sides of the movable box 5. The limiting blocks 51 are slidably disposed in the sliding grooves 12. Positioning blocks 13 are respectively installed at both ends of the sliding grooves 12, and a guide rod 14 is provided between the two positioning blocks 13. The limiting blocks 51 are inserted through the guide rod 14 so that the guide rod 14 controls the vibration direction of the limiting blocks 51 and the movable box 5. On the other hand, a vibration spring 52 is sleeved on the guide rod 14. One end of the vibration spring 52 is connected to either limiting block 51, and the other end is connected to the limiting block 51. The vibration spring 52 counteracts the vibration generated by the vibration motor 61 to control the degree of vibration of the movable box 5 and ensure that the movable box 5 is maintained in a position where the groove opening is near the discharge port 11, thus ensuring the stability of the particle target material feeding.
[0073] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Based on the above-described ideal embodiments according to this utility model, and through the above description, those skilled in the art can make various changes and modifications without departing from the technical spirit of the disclosed embodiments. The technical scope of the embodiments of this disclosure is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. An automatic packaging equipment for IWO particulate targets, characterized in that, include: The hopper (1) has at least two discharge ports (11); The guide plate (3) is located at the bottom of the hopper (1); Several sieve plates (4) are arranged between the feed inlet of the silo (1) and the guide plate (3), and the sieve plates (4) are arranged at intervals along the height direction; The guide plate (3) and the sieve plate (4) each correspond to a discharge port (11). The sieve plate (4) is provided with sieve holes (41), and the inner diameter of the sieve holes (41) of the sieve plate (4) decreases from high to low along the height direction of the silo (1); The sieve plate (4) and the guide plate (3) are inclined, and the lower ends of the sieve plate (4) and the guide plate (3) face the corresponding discharge port (11). In addition, after the granular target material enters the hopper (1), it falls sequentially onto the corresponding screen plate (4) along the height direction and is discharged through the outlet (11) corresponding to the screen plate (4).
2. The automatic packaging equipment for IWO particulate targets as described in claim 1, characterized in that, The hopper (1) is equipped with a movable box (5), and the guide plate (3) and the sieve plate (4) are installed inside the movable box (5); The side wall of the active box (5) is provided with several slots, and each slot corresponds to a discharge port (11).
3. The automatic packaging equipment for IWO particulate targets as described in claim 2, characterized in that, The bottom of the active box (5) is equipped with a vibration seat (6), a vibration motor (61) is installed on the vibration seat (6), and an eccentric block (62) is installed on the movable end of the vibration motor (61). The gap between the active box (5) and the inner wall of the hopper (1) is provided.
4. The automatic packaging equipment for IWO particulate targets as described in claim 2, characterized in that, The hopper (1) has sliding grooves (12) on both sides, and the movable box (5) has limiting blocks (51) on both sides. Positioning blocks (13) are installed at both ends of the sliding groove (12), and a guide rod (14) is provided between the two positioning blocks (13). The limiting block (51) is inserted on the guide rod (14).
5. The automatic packaging equipment for IWO particulate targets as described in claim 4, characterized in that, The guide rod (14) is covered with a vibration spring (52), one end of which is connected to any limiting block (51), and the other end is connected to the limiting block (51).
6. The automatic packaging equipment for IWO particulate targets as described in claim 1, characterized in that, The feed inlet of the silo (1) is equipped with a hopper (15).
7. The automatic packaging equipment for IWO particulate targets as described in claim 1, characterized in that, A packaging machine (2) is provided on one side of the silo (1), and a conveyor belt (21) is provided between the packaging machine (2) and the silo (1). A feeding plate is installed on the outside of the discharge port (11), and the discharge end of the feeding plate extends above the conveyor belt (21).
8. An automatic packaging equipment for IWO particulate targets, characterized in that, include: The hopper (1) has an inlet and at least two outlets (11); The guide plate (3) is located at the bottom of the hopper (1); Several sieve plates (4) are arranged between the feed inlet of the silo (1) and the guide plate (3), and the sieve plates (4) are arranged at intervals along the height direction; The guide plate (3) and the sieve plate (4) each correspond to a discharge port (11). The sieve plate (4) is provided with sieve holes (41), and the sieve holes (41) of the corresponding sieve plate (4) increase in size along the height direction. In addition, after the granular target material enters the hopper (1) from the feed inlet, it is sequentially retained on the corresponding screen plate (4) along the height direction and discharged through the discharge port (11) corresponding to the screen plate (4); The sieve plate (4) and the guide plate (3) are inclined, and the lower ends of the sieve plate (4) and the guide plate (3) face the corresponding discharge port (11). The hopper (1) is equipped with a movable box (5), and the guide plate (3) and the sieve plate (4) are installed inside the movable box (5); The side wall of the active box (5) is provided with several slots, and each slot corresponds to a discharge port (11).
9. The automatic packaging equipment for IWO particulate targets as described in claim 8, characterized in that, The hopper (1) is equipped with a movable box (5), and the guide plate (3) and the sieve plate (4) are installed inside the movable box (5); The side wall of the active box (5) is provided with several slots, and each slot corresponds to a discharge port (11); The bottom of the active box (5) is equipped with a vibration seat (6), a vibration motor (61) is installed on the vibration seat (6), and an eccentric block (62) is installed on the movable end of the vibration motor (61). The hopper (1) has sliding grooves (12) on both sides, and the movable box (5) has limiting blocks (51) on both sides. Positioning blocks (13) are installed at both ends of the sliding groove (12), and a guide rod (14) is provided between the two positioning blocks (13). The limiting block (51) is inserted on the guide rod (14). The guide rod (14) is covered with a vibration spring (52), one end of which is connected to any limiting block (51), and the other end is connected to the limiting block (51).
10. The automatic packaging equipment for IWO particulate targets as described in claim 8, characterized in that, A packaging machine (2) is provided on one side of the silo (1), and a conveyor belt (21) is provided between the packaging machine (2) and the silo (1). A feeding plate is installed on the outside of the discharge port (11), and the discharge end of the feeding plate extends above the conveyor belt (21).