Vacuum flash evaporation device and assembly line

Abstract

The embodiment of the utility model discloses a vacuum flash evaporation device and an assembly line, in the vacuum flash evaporation device, a first opening of a shell is communicated with a first cavity, a second opening of the shell is communicated with a second cavity, the first cavity is communicated with the second cavity, the first cavity is used for flash evaporation, and the second cavity is used for annealing; the control valve is arranged at the communication part of the first cavity and the second cavity and is used for controlling the connection and disconnection of the first cavity and the second cavity; a first cover plate of the cover plate assembly is rotationally connected to the first opening, and a second cover plate is rotationally connected to the second opening; a first transmission assembly of the transmission mechanism is rotationally arranged in the first cavity, and a second transmission assembly of the transmission mechanism is rotationally arranged in the second cavity; the lifting mechanism is arranged in the second cavity; the heating mechanism is connected with the lifting mechanism; the vacuum mechanism communicates with the first cavity and the second cavity. By means of the mode, integrated vacuum flash evaporation and annealing can be achieved in the preparation process of the conductive thin film, transfer is not needed, and the forming quality of the conductive thin film is improved.

Description

A vacuum flash evaporation device and production line Technical Field

[0001] This utility model relates to the field of vacuum flash evaporation technology, and in particular to a vacuum flash evaporation device and production line. Background Technology

[0002] A conductive thin film is a thin film structure with good electrical conductivity. Conductive thin films are typically formed on electronic substrates (e.g., circuit boards, touch panels, or antenna substrates). The preparation of conductive thin films usually includes a vacuum flash evaporation step and an annealing step. The purpose of the vacuum flash evaporation step is to remove solvents during the formation of the conductive film, and the purpose of the annealing step is to crystallize and sinter the conductive film during the formation process.

[0003] Currently, vacuum flash evaporation equipment can usually only remove solvents and cannot perform annealing. After the conductive film is vacuum flashed in the vacuum flash evaporation equipment, it needs to be transferred to other equipment for annealing. This process can easily introduce impurities and particulate contamination into the conductive film, affecting the forming quality of the conductive film and reducing its conductivity. Summary of the Invention

[0004] The present invention aims to provide a vacuum flash evaporation device and production line, which can reduce impurity and particulate contamination generated during the transfer of conductive films, improve the forming quality of conductive films, and enhance the conductivity of conductive films.

[0005] To solve the above-mentioned technical problems, one technical solution adopted in this utility model embodiment is: providing a vacuum flash evaporation device, including a shell, a control valve, a cover plate assembly, a transmission mechanism, a lifting mechanism, a heating mechanism, and a vacuum mechanism; the shell is provided with a first opening, a second opening, a first cavity, and a second cavity, the first opening communicating with the first cavity, the second opening communicating with the second cavity, and the first cavity and the second cavity communicating, the first cavity being used for flash evaporation of materials coated with conductive materials, and the second cavity being used for annealing of materials coated with conductive materials; the control valve is located at the connection between the first cavity and the second cavity, and the control valve is used to control the first cavity and the second cavity. The two cavities are connected and disconnected; the cover assembly includes a first cover plate and a second cover plate, the first cover plate being rotatably connected to a first opening and the second cover plate being rotatably connected to a second opening; the transmission mechanism includes a first transmission component and a second transmission component, the first transmission component being rotatably disposed in the first cavity and the second transmission component being rotatably disposed in the second cavity, both the first transmission component and the second transmission component being used to carry materials; a lifting mechanism is disposed in the second cavity; a heating mechanism is disposed in the second cavity, the heating mechanism being connected to the lifting mechanism, the lifting mechanism being used to drive the heating mechanism to rise and fall and contact the heated material; a vacuum mechanism is disposed outside the housing, the vacuum mechanism being connected to the first cavity and the second cavity respectively.

[0006] Optionally, it also includes a gas supply mechanism, which includes a first gas supply component and a second gas supply component. The first gas supply component is connected to the first cavity, and the second gas supply component is connected to the second cavity. The first gas supply component is used to supply gas to the first cavity, and the second gas supply component is used to supply gas to the second cavity.

[0007] Optionally, the first air supply assembly includes a first air compressor, a first dryer, and a first flow meter. The first air compressor, the first dryer, and the first flow meter are all located outside the housing. The first air compressor, the first dryer, and the first flow meter are connected in sequence. The end of the first flow meter away from the first dryer is connected to the first cavity.

[0008] Optionally, the second air supply assembly includes a second air compressor, a second dryer, and a second flow meter. The second air compressor, the second dryer, and the second flow meter are all located outside the housing. The second air compressor, the second dryer, and the second flow meter are connected in sequence. The end of the second flow meter away from the second dryer is connected to the second cavity.

[0009] Optionally, the second air supply assembly also includes a third air compressor, a humidifier, and a third flow meter. The third air compressor, humidifier, and third flow meter are all located outside the housing. The third air compressor, humidifier, and third flow meter are connected in sequence, and the end of the third flow meter away from the humidifier is connected to the second cavity.

[0010] Optionally, a humidity sensor is also included, which is disposed in the second cavity and is used to detect the humidity of the second cavity.

[0011] Optionally, the system further includes a first laser positioner and a second laser positioner, which are spaced apart within the first cavity along the movement direction of the first transmission component. The distance between the first and second laser positioners is equal to the distance between the beginning and end of the material. The first and second laser positioners are used to detect whether the material has reached a preset position within the first cavity. Alternatively, the system further includes a third and a fourth laser positioner, which are spaced apart within the second cavity along the movement direction of the second transmission component. The distance between the third and fourth laser positioners is equal to the distance between the beginning and end of the material. The third and fourth laser positioners are used to detect whether the material has reached a preset position within the second cavity.

[0012] Optionally, the first transmission assembly includes a first support, a plurality of first rollers, a plurality of first transmission belts, a first drive roller, and a first motor. The first support is disposed in the first cavity, the plurality of first rollers are rotatably disposed on the first support at uniform intervals, the first drive roller is rotatably disposed on the first support, a first transmission belt is wound around a first roller and a first drive roller, and the first motor is drivenly connected to the first drive roller; and / or, the second transmission assembly includes a second support, a plurality of second rollers, a plurality of second transmission belts, a second drive roller, and a second motor. The second support is disposed in the second cavity, the plurality of second rollers are rotatably disposed on the second support at uniform intervals, the second drive roller is rotatably disposed on the second support, a second transmission belt is wound around a second roller and a second drive roller, and the second motor is drivenly connected to the second drive roller.

[0013] Optionally, the heating mechanism includes a substrate and a heating wire. The substrate is connected to a lifting mechanism, and the heating wire is disposed on the substrate. The heating wire is used to heat the substrate, and the substrate is used to contact and heat the material.

[0014] To solve the above-mentioned technical problems, another technical solution adopted in this utility model embodiment is to provide a production line including the above-mentioned vacuum flash evaporation device.

[0015] The beneficial effects of this utility model embodiment are as follows: Unlike the prior art, this utility model embodiment provides a vacuum flash evaporation device, including a shell, a control valve, a cover plate assembly, a transmission mechanism, a lifting mechanism, a heating mechanism, and a vacuum mechanism; the shell is provided with a first opening, a second opening, a first cavity, and a second cavity; the first opening communicates with the first cavity, the second opening communicates with the second cavity, and the first cavity and the second cavity communicate; the first cavity is used for flash evaporation of materials coated with conductive materials, and the second cavity is used for annealing of materials coated with conductive materials; the control valve is located at the connection between the first cavity and the second cavity, and the control valve is used to control the first cavity... The connection between the body and the second cavity is controlled; the cover assembly includes a first cover plate and a second cover plate, the first cover plate being rotatably connected to the first opening and the second cover plate being rotatably connected to the second opening; the transmission mechanism includes a first transmission component and a second transmission component, the first transmission component being rotatably disposed in the first cavity and the second transmission component being rotatably disposed in the second cavity, both the first transmission component and the second transmission component being used to carry materials; a lifting mechanism is disposed in the second cavity; a heating mechanism is disposed in the second cavity, the heating mechanism being connected to the lifting mechanism, the lifting mechanism being used to drive the heating mechanism to rise and fall and contact the heated material; a vacuum mechanism is disposed outside the housing, the vacuum mechanism being connected to the first cavity and the second cavity respectively.

[0016] Through the above methods, the present invention can achieve integrated vacuum flash evaporation and annealing in the preparation process of conductive films, without the need to transfer to other equipment for annealing, thereby reducing impurity and particulate contamination generated during the transfer process, improving the forming quality of conductive films, and enhancing the conductivity of conductive films. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the specific embodiments of this utility model or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to actual scale.

[0018] Figure 1 is a partial structural schematic diagram of the vacuum flash evaporation device provided in an embodiment of the present invention;

[0019] Figure 2 is a schematic diagram of the overall structure of the vacuum flash evaporation device provided in an embodiment of the present invention;

[0020] Figure 3 is a schematic diagram of the structure of the first transmission component of the vacuum flash evaporation device provided in an embodiment of the present invention.

[0021] Figure 4 is a schematic diagram of the structure of the second transmission component of the vacuum flash evaporation device provided in this embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. Shell, 11. First opening, 12. Second opening, 13. First cavity, 14. Second cavity;

[0024] 2. Control valve;

[0025] 3. Cover plate assembly; 31. First cover plate; 32. Second cover plate;

[0026] 4. Transmission mechanism, 41. First transmission assembly, 411. First support, 412. First roller, 413. First transmission belt, 414. First drive roller, 415. First motor, 42. Second transmission assembly, 421. Second support, 422. Second roller, 423. Second transmission belt, 424. Second drive roller, 425. Second motor;

[0027] 5 Lifting mechanism, 51 Electric push rod, 52 First screw connector, 53 Second screw connector;

[0028] 6. Heating mechanism;

[0029] 7 Vacuum mechanism, 71 Vacuum pump, 72 First vacuum valve, 73 Second vacuum valve;

[0030] 81 First air supply assembly, 811 First air compressor, 812 First dryer and 813 First flow meter, 82 Second air supply assembly, 821 Second air compressor, 822 Second dryer, 823 Second flow meter, 824 Third air compressor, 825 Humidifier, 826 Third flow meter;

[0031] 90 Humidity sensor, 91 First laser locator, 92 Second laser locator, 93 Third laser locator, 94 Fourth laser locator;

[0032] 100 Vacuum flash evaporation unit. Detailed Implementation

[0033] To facilitate understanding of this utility model, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or one or more intermediate elements may exist between them. When an element is described as "connected" to another element, it can be directly connected to the other element, or one or more intermediate elements may exist between them. The terms "upper," "lower," "inner," "outer," "vertical," "horizontal," etc., used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0034] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0035] A conductive thin film is a thin film structure with good electrical conductivity. Conductive thin films are typically formed on electronic substrates (e.g., circuit boards, touch panels, or antenna substrates). The preparation of conductive thin films usually includes a vacuum flash evaporation step and an annealing step. The purpose of the vacuum flash evaporation step is to remove solvents during the formation of the conductive film, and the purpose of the annealing step is to crystallize and sinter the conductive film during the formation process.

[0036] Currently, vacuum flash evaporation equipment can usually only remove solvents and cannot perform annealing. After the conductive film is vacuum flashed in the vacuum flash evaporation equipment, it needs to be transferred to other equipment for annealing. This process can easily introduce impurities and particulate contamination into the conductive film, affecting the forming quality of the conductive film and reducing its conductivity.

[0037] In view of this, the present invention provides an embodiment of a vacuum flash evaporation device 100, which can reduce impurity and particulate contamination generated during the transfer of conductive films, improve the forming quality of conductive films, and improve the conductivity of conductive films.

[0038] To facilitate the reader's understanding of the concept of this utility model embodiment, the specific structure of the vacuum flash evaporation device 100 is described below:

[0039] Please refer to Figures 1 and 2. The vacuum flash evaporation device 100 includes a housing 1, a control valve 2, a cover plate assembly 3, a transmission mechanism 4, a lifting mechanism 5, a heating mechanism 6, and a vacuum mechanism 7. The housing 1 is provided with a first opening 11, a second opening 12, a first cavity 13, and a second cavity 14. The first opening 11 communicates with the first cavity 13, the second opening 12 communicates with the second cavity 14, and the first cavity 13 and the second cavity 14 communicate with each other. The first cavity 13 is used for flash evaporation of materials coated with conductive materials, and the second cavity 14 is used for annealing of materials coated with conductive materials. The control valve 2 is located at the connection between the first cavity 13 and the second cavity 14, and the control valve 2 is used to control the opening and closing of the first cavity 13 and the second cavity 14. The cover plate assembly 3 includes... The housing includes a first cover plate 31 and a second cover plate 32. The first cover plate 31 is rotatably connected to the first opening 11, and the second cover plate 32 is rotatably connected to the second opening 12. The transmission mechanism 4 includes a first transmission component 41 and a second transmission component 42. The first transmission component 41 is rotatably disposed in the first cavity 13, and the second transmission component 42 is rotatably disposed in the second cavity 14. Both the first transmission component 41 and the second transmission component 42 are used to carry materials. The lifting mechanism 5 is disposed in the second cavity 14. The heating mechanism 6 is disposed in the second cavity 14 and is connected to the lifting mechanism 5. The lifting mechanism 5 is used to drive the heating mechanism 6 to rise and fall and contact the heated material. The vacuum mechanism 7 is disposed outside the housing 1 and is connected to the first cavity 13 and the second cavity 14 respectively.

[0040] Through the above methods, the present invention can achieve integrated vacuum flash evaporation and annealing in the preparation process of conductive films, without the need to transfer them to other equipment for annealing. This reduces impurity and particulate contamination generated during the transfer process, improves the forming quality of conductive films, and enhances the conductivity of conductive films.

[0041] To facilitate user understanding of the process of material transfer from the first cavity 13 to the second cavity 14, an example of material transfer from the first cavity 13 to the second cavity 14 is provided: the first transmission component 41 and the second transmission component 42 are flush in the height direction, and the distance between the first transmission component 41 and the second transmission component 42 is less than half the length of the material. When the material is carried on the first transmission component 41, the first transmission component 41 drives the material forward. When the material has moved forward at least partially beyond the first transmission component 41, the control valve 2 connects the first cavity 13 and the second cavity 14. The part of the material that exceeds the first transmission component 41 passes through the connection between the first cavity 13 and the second cavity 14 and is carried on the second transmission component 42. The first transmission component 41 and the second transmission component 42 synchronously drive the material to continue moving forward. When the material is completely carried on the second transmission component 42, the control valve 2 separates the first cavity 13 and the second cavity 14, thereby realizing the transfer of material from the first cavity 13 to the second cavity 14.

[0042] Referring to Figures 1 and 2, the vacuum flash evaporation device 100 also includes a gas supply mechanism, which includes a first gas supply component 81 and a second gas supply component 82. The first gas supply component 81 is connected to the first chamber 13, and the second gas supply component 82 is connected to the second chamber 14. The first gas supply component 81 is used to supply gas to the first chamber 13, and the second gas supply component 82 is used to supply gas to the second chamber 14. In this way, the first gas supply component 81 and the vacuum mechanism 7 can cooperate to control the gas pressure of the first chamber 13, and the second gas supply component 82 and the vacuum mechanism 7 can cooperate to control the gas pressure of the second chamber 14. For example, after the flash evaporation in the first chamber 13 is completed, gas can be supplied to the first chamber 13 through the first gas supply component 81 to restore the first chamber 13 from a vacuum state to a normal pressure state. This not only makes it convenient for the user to open the first cover under normal pressure, saving effort, but also allows the film of the material to recover from the contracted state under vacuum to the expanded state under normal pressure, reducing the impact on the forming quality of the film.

[0043] In some embodiments, referring to Figures 1 and 2, the first air supply assembly 81 includes a first air compressor 811, a first dryer 812, and a first flow meter 813. The first air compressor 811, the first dryer 812, and the first flow meter 813 are all disposed outside the housing 1. The first air compressor 811, the first dryer 812, and the first flow meter 813 are sequentially connected via pipes. The end of the first flow meter 813 furthest from the first dryer 812 is connected to the first cavity 13. In this manner, the first air compressor 811, the first dryer 812, and the first flow meter 813 cooperate to provide a quantitative amount of dry air to the first cavity 13, thereby controlling the air pressure in the first cavity 13 and preventing moisture from affecting the formation of the conductive film on the material.

[0044] In some embodiments, referring to Figures 1 and 2, the second air supply assembly 82 includes a second air compressor 821, a second dryer 822, and a second flow meter 823. The second air compressor 821, the second dryer 822, and the second flow meter 823 are all disposed outside the housing 1. The second air compressor 821, the second dryer 822, and the second flow meter 823 are sequentially connected. The end of the second flow meter 823 away from the second dryer 822 is connected to the second cavity 14. In this manner, the second air compressor 821, the second dryer 822, and the second flow meter 823 cooperate to provide a quantitative amount of dry air to the second cavity 14, thereby controlling the air pressure in the second cavity 14.

[0045] In some embodiments, referring to Figures 1 and 2, the second air supply assembly 82 further includes a third air compressor 824, a humidifier 825, and a third flow meter 826. The third air compressor 824, humidifier 825, and third flow meter 826 are all disposed outside the housing 1, and are sequentially connected. The end of the third flow meter 826 away from the humidifier 825 is connected to the second cavity 14. In this manner, the second air compressor 821, second dryer 822, second flow meter 823, third air compressor 824, humidifier 825, and third flow meter 826 cooperate to quantitatively supply air with a preset dry-to-humidity ratio to the second cavity 14, meeting the temperature and humidity requirements during the annealing process.

[0046] In some embodiments, referring to Figures 1 and 2, the vacuum flash evaporation device 100 further includes a humidity sensor 90, which is disposed in the second cavity 14 and is used to detect the humidity of the second cavity 14. This method helps to monitor the humidity of the second cavity 14 in real time, avoiding exceeding the preset dry-wet ratio when quantitatively supplying air with a dry-wet ratio to the second cavity 14.

[0047] Referring to Figures 1 and 2, the vacuum flash evaporation device 100 also includes a first laser positioner 91 and a second laser positioner 92. Along the movement direction of the first transmission assembly 41, the first laser positioner 91 and the second laser positioner 92 are spaced apart within the first cavity 13. The distance between the first laser positioner 91 and the second laser positioner 92 is equal to the distance between the beginning and end of the material. The first laser positioner 91 and the second laser positioner 92 are used to detect whether the material has reached a preset position within the first cavity 13. In this manner, precise positioning of the material during its movement within the first cavity 13 can be achieved, ensuring that the material moves to the vacuum flash evaporation area, which helps improve the vacuum flash evaporation quality of the conductive film of the material.

[0048] And / or, referring to Figures 1 and 2, the vacuum device also includes a third laser positioner 93 and a fourth laser positioner 94. Along the movement direction of the second transmission assembly 42, the third laser positioner 93 and the fourth laser positioner 94 are spaced apart within the second cavity 14. The distance between the third laser positioner 93 and the fourth laser positioner 94 is equal to the distance between the beginning and end of the material. The third laser positioner 93 and the fourth laser positioner 94 are used to detect whether the material has reached a preset position within the second cavity 14. In this way, precise positioning of the material during its movement within the second cavity 14 can be achieved, ensuring that the material moves to the annealing area, which helps improve the annealing quality of the conductive film of the material.

[0049] Referring to Figures 1 and 2, the vacuum flash evaporation device 100 also includes a first sealing element, which is disposed around the periphery of the first cover plate 31. The first sealing element is used to seal the gap between the first cover plate 31 and the first opening 11 when the first cover plate 31 covers the first opening 11. In this way, the sealing performance of the first opening 11 when closed can be improved, thereby improving the sealing performance of the first cavity 13.

[0050] And / or, referring to Figures 1 and 2, the vacuum flash evaporation apparatus 100 further includes a first seal and a second seal surrounding the periphery of the second cover plate 32. The second seal is used to seal the gap between the second cover plate 32 and the second opening 12 when the second cover plate 32 covers the second opening 12. In this manner, the sealing performance of the second opening 12 when closed can be improved, thereby improving the sealing performance of the second cavity 14.

[0051] In some embodiments of the transmission mechanism 4 described above, please refer to Figures 2 and 3. The first transmission assembly 41 includes a first support 411, a plurality of first rollers 412, a plurality of first transmissions 413, a first drive roller 414, and a first motor 415. The first support 411 is disposed in the first cavity 13. The plurality of first rollers 412 are rotatably disposed on the first support 411 at intervals. The first drive roller 414 is rotatably disposed on the first support 411. A first transmission 413 is wound around a first roller 412 and a first drive roller 414. The first motor 415 is drivenly connected to the first drive roller 414.

[0052] And / or, for the transmission mechanism 4 described above, in some embodiments, please refer to Figures 2 and 4, the second transmission assembly 42 includes a second support 421, a plurality of second rollers 422, a plurality of second transmission belts 423, a second drive roller 424, and a second motor 425. The second support 421 is disposed in the second cavity 14. The plurality of second rollers 422 are rotatably disposed on the second support 421 at intervals. The second drive roller 424 is rotatably disposed on the second support 421. A second transmission belt 423 is wound around a second roller 422 and a second drive roller 424. The second motor 425 is drivenly connected to the second drive roller 424.

[0053] In some embodiments of the above-mentioned lifting mechanism 5, please refer to Figure 2. The lifting mechanism 5 includes an electric push rod 51, a first screw connector 52 and a second screw connector 53. The first screw connector 52 passes through the bottom of the electric push rod 51 and is screwed to the housing 1. The second screw connector 53 passes through the top of the electric push rod 51 and is screwed to the heating mechanism 6.

[0054] In some embodiments of the heating mechanism 6 described above, the heating mechanism 6 includes a substrate and a heating wire. The substrate is connected to the lifting mechanism 5, and the heating wire is disposed on the substrate. The heating wire is used to heat the substrate, and the substrate is used to contact and heat the material.

[0055] To facilitate understanding of the heating mechanism 6's heating of the material, an example of the heating mechanism 6 heating the material is provided: when the material is carried on the second transmission component 42, the lifting mechanism 5 drives the substrate to rise, and the substrate passes through at least part of the gap between any two second rollers and contacts the bottom of the material. The heating wire heats the substrate to transfer heat to the material, thereby achieving the heating of the material.

[0056] In some embodiments of the vacuum mechanism 7 described above, as shown in Figure 2, the vacuum mechanism 7 includes a vacuum pump 71, a first vacuum valve 72, and a second vacuum valve 73. The vacuum pump 71, the first vacuum valve 72, and the second vacuum valve 73 are all located outside the housing 1. One end of the first vacuum valve 72 is connected to the vacuum pump 71, and the other end is connected to the first cavity 13. One end of the second vacuum valve 73 is connected to the vacuum pump 71, and the other end is connected to the second cavity 14. Through this method, independent control of the vacuum state of the first cavity 13 and the vacuum state of the second cavity 14 can be achieved.

[0057] This utility model provides a vacuum flash evaporation device 100, including a housing 1, a control valve 2, a cover plate assembly 3, a transmission mechanism 4, a lifting mechanism 5, a heating mechanism 6, and a vacuum mechanism 7. The housing 1 has a first opening 11, a second opening 12, a first cavity 13, and a second cavity 14. The first opening 11 communicates with the first cavity 13, the second opening 12 communicates with the second cavity 14, and the first cavity 13 and the second cavity 14 are also connected. The first cavity 13 is used for flash evaporation of materials coated with conductive materials, and the second cavity 14 is used for annealing materials coated with conductive materials. The control valve 2 is located at the connection between the first cavity 13 and the second cavity 14, and is used to control the opening and closing of the first cavity 13 and the second cavity 14. The cover plate assembly... The housing 1 includes a first cover plate 31 and a second cover plate 32. The first cover plate 31 is rotatably connected to the first opening 11, and the second cover plate 32 is rotatably connected to the second opening 12. The transmission mechanism 4 includes a first transmission component 41 and a second transmission component 42. The first transmission component 41 is rotatably disposed in the first cavity 13, and the second transmission component 42 is rotatably disposed in the second cavity 14. Both the first transmission component 41 and the second transmission component 42 are used to carry materials. The lifting mechanism 5 is disposed in the second cavity 14. The heating mechanism 6 is disposed in the second cavity 14 and is connected to the lifting mechanism 5. The lifting mechanism 5 is used to drive the heating mechanism 6 to rise and fall and contact the heated material. The vacuum mechanism 7 is disposed outside the housing 1 and is connected to the first cavity 13 and the second cavity 14 respectively. Through the above method, the present invention can achieve integrated vacuum flash evaporation and annealing in the preparation process of conductive films, without the need to transfer to other equipment for annealing, reducing impurity and particulate contamination generated during the transfer process, improving the forming quality of conductive films, and improving the conductivity of conductive films.

[0058] This utility model also provides an embodiment of a production line, which includes the above-mentioned vacuum flash evaporation device 100. For the specific structure and function of the above-mentioned vacuum flash evaporation device 100, please refer to the above embodiments, which will not be repeated here.

[0059] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A vacuum flash evaporation apparatus, characterized in that, include: The housing has a first opening, a second opening, a first cavity, and a second cavity. The first opening communicates with the first cavity, the second opening communicates with the second cavity, and the first cavity communicates with the second cavity. The first cavity is used for flash evaporation of material coated with conductive material, and the second cavity is used for annealing of material coated with conductive material. A control valve is located at the connection between the first cavity and the second cavity, and the control valve is used to control the opening and closing of the first cavity and the second cavity. A cover plate assembly includes a first cover plate and a second cover plate, the first cover plate being rotatably connected to the first opening and the second cover plate being rotatably connected to the second opening; a transmission mechanism includes a first transmission component and a second transmission component, the first transmission component being rotatably disposed in the first cavity and the second transmission component being rotatably disposed in the second cavity, both the first transmission component and the second transmission component being used to carry materials; a lifting mechanism is disposed in the second cavity; a heating mechanism is disposed in the second cavity, the heating mechanism being connected to the lifting mechanism, the lifting mechanism being used to drive the heating mechanism to rise and fall and contact the heated material; a vacuum mechanism is disposed outside the housing, the vacuum mechanism being in communication with the first cavity and the second cavity respectively.

2. The vacuum flash evaporation apparatus according to claim 1, characterized in that, It also includes a gas supply mechanism, which includes a first gas supply component and a second gas supply component. The first gas supply component is connected to the first cavity, and the second gas supply component is connected to the second cavity. The first gas supply component is used to supply gas to the first cavity, and the second gas supply component is used to supply gas to the second cavity.

3. The vacuum flash evaporation apparatus according to claim 2, characterized in that, The first air supply assembly includes a first air compressor, a first dryer, and a first flow meter. The first air compressor, the first dryer, and the first flow meter are all disposed outside the housing. The first air compressor, the first dryer, and the first flow meter are connected in sequence. The end of the first flow meter away from the first dryer is connected to the first cavity.

4. The vacuum flash evaporation apparatus according to claim 3, characterized in that, The second air supply assembly includes a second air compressor, a second dryer, and a second flow meter. The second air compressor, the second dryer, and the second flow meter are all located outside the housing. The second air compressor, the second dryer, and the second flow meter are connected in sequence. The end of the second flow meter away from the second dryer is connected to the second cavity.

5. The vacuum flash evaporation apparatus according to claim 4, characterized in that, The second air supply assembly also includes a third air compressor, a humidifier, and a third flow meter. The third air compressor, humidifier, and third flow meter are all located outside the housing. The third air compressor, humidifier, and third flow meter are connected in sequence. The end of the third flow meter away from the humidifier is connected to the second cavity.

6. The vacuum flash evaporation apparatus according to claim 5, characterized in that, It also includes a humidity sensor, which is disposed in the second cavity and is used to detect the humidity of the second cavity.

7. The vacuum flash evaporation apparatus according to claim 1, characterized in that, It also includes a first laser positioner and a second laser positioner, which are spaced apart within the first cavity along the movement direction of the first transmission component. The distance between the first and second laser positioners is equal to the distance between the beginning and end of the material. The first and second laser positioners are used to detect whether the material has reached a preset position within the first cavity. And / or, it also includes a third laser positioner and a fourth laser positioner, which are spaced apart within the second cavity along the movement direction of the second transmission component. The distance between the third and fourth laser positioners is equal to the distance between the beginning and end of the material. The third and fourth laser positioners are used to detect whether the material has reached a preset position within the second cavity.

8. The vacuum flash evaporation apparatus according to claim 1, characterized in that, The first transmission assembly includes a first support, a plurality of first rollers, a plurality of first transmission belts, a first drive roller, and a first motor. The first support is disposed in the first cavity. The plurality of first rollers are rotatably disposed on the first support at uniform intervals. The first drive roller is rotatably disposed on the first support. A first transmission belt is wound around a first roller and the first drive roller. The first motor is droopingly connected to the first drive roller. And / or, the second transmission assembly includes a second support, a plurality of second rollers, a plurality of second transmission belts, a second drive roller, and a second motor. The second support is disposed in the second cavity. The plurality of second rollers are rotatably disposed on the second support at uniform intervals. The second drive roller is rotatably disposed on the second support. A second transmission belt is wound around a second roller and the second drive roller. The second motor is droopingly connected to the second drive roller.

9. The vacuum flash evaporation apparatus according to claim 1, characterized in that, The heating mechanism includes a substrate and a heating wire. The substrate is connected to the lifting mechanism. The heating wire is disposed on the substrate and is used to heat the substrate. The substrate is used to contact and heat the material.

10. An assembly line, characterized in that, Includes the vacuum flash evaporation apparatus as described in any one of claims 1-9.

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