Magnetron sputtering coating device with auxiliary target

Abstract

The utility model discloses a magnetron sputtering coating device with an auxiliary target, which relates to the field of magnetron sputtering coating, and comprises a vacuum chamber, a plurality of material changing mechanisms are arranged on the vacuum chamber, each material changing mechanism comprises a fixed support component, a translation linkage component slides on the fixed support component, the translation linkage component comprises a translation bracket, and the translation bracket is provided with an auxiliary target. A lifting rotating assembly is slidably connected to the translation linkage assembly and comprises a lifting plate, a second rack is fixed to the bottom of the lifting plate, a rotating support is rotatably connected to the top of the lifting plate, a plurality of cylindrical target materials are fixed to the front portion and the rear portion of the rotating support, and a guide assembly is fixedly connected to the translation support. The device has the beneficial effects that the translation support moves outwards, the linkage part drives the second rack to rise to drive the cylindrical target to be separated from the magnetic roller, the rotating support continues to rise, the guide assembly drives the cylindrical target to rotate by 180 degrees to the position above the magnetic roller, and the translation support resets to drive the cylindrical target to be matched with the magnetic roller, so that the replacement work is rapidly completed.

Description

A magnetron sputtering coating apparatus with an auxiliary target Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating, and in particular to a magnetron sputtering coating device with an auxiliary target. Background Technology

[0002] A coating machine is a fully automatic heating wire evaporation coating device. It is used to coat the surface of injection-molded materials such as PC, PBT, ABS, and BMC with a metal film under vacuum, and then coat the surface of this metal film with an oxide protective film, such as a silica or silicone film. The coating machine can automatically and continuously perform processes such as low-vacuum degassing, arc ion bombardment pretreatment, high-vacuum degassing, aluminum evaporation, and anti-oxidation film coating within a vacuum. The station for mounting the product to be coated can rotate on its own axis and revolve around a central axis, and the rotation speed is adjustable.

[0003] For example, patent document CN218146912U discloses a magnetron sputtering coating apparatus with an auxiliary target, including a vacuum chamber, a magnetron sputtering target, a magnetron auxiliary target, a chamber door, and a tooling assembly. The magnetron sputtering target is longitudinally disposed on the side wall of the vacuum chamber. The magnetron auxiliary target is transversely disposed on the upper and / or lower wall of the vacuum chamber. The chamber door is rotatably mounted at the opening of the vacuum chamber. The tooling assembly includes a drive assembly, a rotating shaft, and a bracket. The rotating shaft is disposed on the chamber door. The bracket is disposed on the rotating shaft and is used to mount the product to be coated. The drive assembly is used to drive the rotating shaft to rotate the bracket during the coating process, and to sputter target atoms toward the product to be coated by the magnetron sputtering target and the magnetron auxiliary target, so that the target atoms are deposited on the product to be coated to form a film layer of uniform thickness. By setting up magnetron sputtering auxiliary targets, this device improves the uniformity and consistency of coating on products with arc-shaped structures. It has a simple structure and can improve the yield of coated products to a certain extent. In the aforementioned device, auxiliary targets are set on both the upper and lower sides of the main sputtering target to achieve better coating results. However, since the target material is consumable, it must be replaced after a period of use. In existing technologies, replacing the target requires personnel to stop the device and then open the maintenance door to replace the target, which is cumbersome. The aforementioned device increases the number of targets, resulting in longer target replacement times. Prolonged downtime can impact production. Summary of the Invention

[0004] The purpose of this invention is to provide a magnetron sputtering coating device with an auxiliary target in order to solve the above-mentioned problems.

[0005] This utility model achieves the above objectives through the following technical solutions:

[0006] A magnetron sputtering coating apparatus with an auxiliary target includes a vacuum chamber, a tilting door rotatably connected to the front of the vacuum chamber, a rotating clamping mechanism on the tilting door, and several material changing mechanisms on the vacuum chamber. Each material changing mechanism includes a fixed support assembly fixedly connected to the vacuum chamber, a translation linkage assembly slidingly connected to the fixed support assembly, a translation linkage assembly including a translation bracket, a controller mounted at the bottom of the translation bracket, a magnetic roller fixedly connected to the top rear end of the controller, a lifting and rotating assembly slidably connected to the translation linkage assembly, the lifting and rotating assembly including a lifting plate, two symmetrically arranged second racks fixedly connected to the bottom of the lifting plate, the second racks slidingly connected to the translation bracket, two linkage components for driving the second racks to lift and lower mounted on the translation bracket, a rotating bracket rotatably connected to the top of the lifting plate, several symmetrically arranged target holders fixedly connected to the front and rear of the rotating bracket, cylindrical targets fixedly connected to the target holders, a reversing rod fixedly connected to the bottom of the rotating bracket, and a guide assembly for driving the reversing rod to rotate fixedly connected to the translation bracket.

[0007] Preferably, the fixed support assembly includes a fixed bracket fixedly connected to the vacuum chamber, a plurality of guide rail plates fixedly connected to the front side of the fixed bracket, a first rack fixedly connected inside the guide rail plates, and a driving component for driving the translation bracket to translate fixedly connected to the bottom of the fixed bracket.

[0008] Preferably, the driving component includes a driving bracket fixedly connected to the bottom of the fixed bracket, the driving bracket being slidably connected to the translation bracket, a screw being rotatably connected to the driving bracket, a motor being fixedly connected to the front end of the driving bracket, the output end of the motor being fixedly connected to the screw, and the screw being threadedly connected to the bottom of the translation bracket.

[0009] Preferably, the linkage component includes a connecting box fixedly connected to the translation bracket, the connecting box being slidably connected to the guide rail plate, a drive gear being rotatably connected inside the connecting box, the drive gear meshing with a first rack, a drive pulley being fixedly connected to one side of the drive gear, a driven gear being rotatably connected inside the connecting box, the driven gear meshing with a second rack, a driven pulley being fixedly connected to one side of the driven gear, and the drive pulley and the driven pulley being fixedly connected by a synchronous belt, the diameter of the drive pulley being larger than the diameter of the driven pulley.

[0010] Preferably, the bottom of the reversing rod is fixedly connected to two symmetrically arranged guide pins.

[0011] Preferably, the guide assembly includes a fixed tube fixedly connected to the translation bracket. The fixed tube has two symmetrically arranged first sliding grooves and two symmetrically arranged second sliding grooves. The second sliding grooves are spiral-shaped and can connect the two first sliding grooves. A baffle is provided at the intersection of the first and second sliding grooves. The baffle is rotatably connected to the fixed tube by a torsion spring. The guide pin can slide with the first and second sliding grooves and can move along the direction of the first and second sliding grooves.

[0012] The beneficial effects are as follows: through the setting of the material changing mechanism, the translation bracket drives the cylindrical target to move outward. During the movement of the translation bracket, the linkage component drives the second rack to rise. After the cylindrical target disengages from the magnetic roller, the rotating bracket continues to rise. At this time, the guide component drives the rotating bracket to rotate 180 degrees through the reversing rod, transferring the new cylindrical target on the other side of the rotating bracket to the top of the magnetic roller. The translation bracket resets and drives the new cylindrical target to engage with the magnetic roller. In this way, the replacement of the cylindrical target is completed quickly, greatly reducing downtime.

[0013] The additional technical features and advantages of this utility model will become more apparent from the following description, or may be learned through specific practice of this utility model. Attached Figure Description

[0014] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the following detailed description to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0015] Figure 1 is a perspective view of a magnetron sputtering coating device with an auxiliary target according to the present invention;

[0016] Figure 2 is a perspective view of the material changing mechanism of the magnetron sputtering coating device with an auxiliary target described in this utility model in a closed state.

[0017] Figure 3 is a perspective view of the material changing mechanism of the magnetron sputtering coating device with an auxiliary target according to the present invention, showing the changing state.

[0018] Figure 4 is a perspective view of the fixed support assembly of a magnetron sputtering coating device with an auxiliary target according to the present invention.

[0019] Figure 5 is a perspective view of the translation linkage component of a magnetron sputtering coating device with an auxiliary target according to the present invention;

[0020] Figure 6 is an enlarged view of point A in Figure 5;

[0021] Figure 7 is a top view of the guide assembly of a magnetron sputtering coating device with an auxiliary target according to the present invention;

[0022] Figure 8 is a cross-sectional view along direction A of the guide assembly of the magnetron sputtering coating device with an auxiliary target according to the present invention;

[0023] Figure 9 shows the lifting and rotating assembly of a magnetron sputtering coating device with an auxiliary target according to the present invention;

[0024] Figure 10 is an enlarged view of point B in Figure 9;

[0025] Figure 11 is a perspective view of the relative positions of the lifting plate and the second rack of the magnetron sputtering coating device with an auxiliary target according to the present invention.

[0026] The annotations in the attached figures are explained as follows:

[0027] 101. Vacuum chamber; 102. Tilting door; 103. Rotating clamping mechanism; 201. Fixed bracket; 202. Guide rail plate; 203. First rack; 204. Drive bracket; 205. Screw; 206. Motor; 301. Rotating bracket; 302. Target holder; 303. Cylindrical target; 304. Reversing rod; 305. Lifting plate; 306. Second rack; 307. Guide pin; 401. Translation bracket; 402. Connecting box; 403. Controller; 404. Magnetic roller; 405. Drive gear; 406. Driving pulley; 407. Driven pulley; 408. Driven gear; 501. Fixed tube; 502. First slide groove; 503. Second slide groove; 504. Baffle. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0029] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] The present invention will be further described below with reference to the accompanying drawings:

[0031] As shown in Figures 1-11, a magnetron sputtering coating apparatus with an auxiliary target includes a vacuum chamber 101. A tilting door 102 is rotatably connected to the front of the vacuum chamber 101. A rotating clamping mechanism 103 is provided on the tilting door 102. Several material changing mechanisms are provided on the vacuum chamber 101. Each material changing mechanism includes a fixed support assembly that is sealed and fixedly connected to the vacuum chamber 101. A translation linkage assembly is slidably connected to the fixed support assembly. The translation linkage assembly includes a translation bracket 401. A controller 403 is installed at the bottom of the translation bracket 401. A magnetic roller 404 is fixedly connected to the top rear end of the controller 403. A lifting and rotating mechanism is slidably connected to the translation linkage assembly. The lifting and rotating assembly includes a lifting plate 305. Two symmetrically arranged second racks 306 are fixedly connected to the bottom of the lifting plate 305. The second racks 306 are slidably connected to a translation bracket 401. Two linkage components for driving the second racks 306 to lift are mounted on the translation bracket 401. A rotating bracket 301 is rotatably connected to the top of the lifting plate 305. Several symmetrically arranged target holders 302 are fixedly connected to the front and rear of the rotating bracket 301. A cylindrical target 303 is fixedly connected to each target holder 302. A reversing rod 304 is fixedly connected to the bottom of the rotating bracket 301. A reversing rod for driving the reversing is fixedly connected to the translation bracket 401. Before target replacement, the guide assembly for rotating rod 304 allows operators to replace the old cylindrical target 303 located outside vacuum chamber 101 with a new cylindrical target 303 without shutting down the machine. The target holder 302 clamps and secures the cylindrical target 303 to prevent it from shifting. During target replacement, the device stops, and the fixed support assembly drives the translation bracket 401 to move. After the translation bracket 401 moves to a certain position, the linkage component drives the second rack 306 to rise. The second rack 306 then drives the lifting plate 305 to rise, which in turn drives the rotating bracket 301 to rise. The moving bracket 301 drives the cylindrical target 303 to rise, and the cylindrical target 303 begins to disengage from the magnetic roller 404. The rotating bracket 301 rises until the cylindrical target 303 is completely disengaged from the magnetic roller 404. At this time, the rotating bracket 301 continues to rise, driving the reversing rod 304 to rise. The reversing rod 304, in conjunction with the guide assembly, drives the rotating bracket 301 to rotate 180 degrees, rotating the new cylindrical target 303 above the magnetic roller 404. Then, the translation bracket 401 returns to its original position, driving the new cylindrical target 303 to descend and re-engage with the magnetic roller 404. In this way, the rapid replacement of the cylindrical target 303 is completed, greatly reducing downtime and improving production efficiency.

[0032] The fixed support assembly includes a fixed bracket 201 that is sealed and fixedly connected to the vacuum chamber 101. Several guide rails 202 are fixedly connected to the front side of the fixed bracket 201. A first rack 203 is fixedly connected inside the guide rails 202. A driving component for driving the translation bracket 401 to move is fixedly connected to the bottom of the fixed bracket 201. The driving component includes a driving bracket 204 fixedly connected to the bottom of the fixed bracket 201. The driving bracket 204 is slidably connected to the translation bracket 401. A screw 205 is rotatably connected to the driving bracket 204. A motor 206 is fixedly connected to the front end of the driving bracket 204. The output end of the motor 206 is fixedly connected to the screw 205. The screw 205 is threadedly connected to the bottom of the translation bracket 401. The motor 206 drives the screw 205 to rotate. The screw 205 drives the translation bracket 401 to move through the threaded connection. A sealing ring is provided on the contact surface between the translation bracket 401 and the fixed bracket 201 to ensure the airtightness of the vacuum chamber 101.

[0033] The linkage components include a connecting box 402 fixedly connected to the translation bracket 401, a connecting box 402 slidably connected to the guide rail plate 202, a drive gear 405 rotatably connected inside the connecting box 402, the drive gear 405 meshing with the first rack 203, a drive pulley 406 fixedly connected to one side of the drive gear 405, a driven gear 408 rotatably connected inside the connecting box 402, the driven gear 408 meshing with the second rack 306, a driven pulley 407 fixedly connected to one side of the driven gear 408, and a synchronous belt fixing the drive pulley 406 and the driven pulley 407 together. The diameter of the drive pulley 406 is larger than the diameter of the driven pulley 407, and the larger pulley drives the smaller pulley to lift... A large transmission ratio is provided, which ensures that the second rack 306 can rise to the predetermined position during the short stroke of the translation bracket 401. Two symmetrically arranged guide pins 307 are fixedly connected to the bottom of the reversing rod 304. During the outward movement of the translation bracket 401, after moving to a certain position, the drive gear 405 begins to mesh with the first rack 203. Thus, the drive gear 405 rotates during the movement of the translation bracket 401, which drives the drive pulley 406 to rotate. The drive pulley 406 drives the driven pulley 407 to rotate through the synchronous belt. The driven pulley 407 drives the driven gear 408 to rotate, and the driven gear 408 drives the second rack 306 to rise.

[0034] The guiding assembly includes a fixed tube 501 fixedly connected to the translation bracket 401. Two symmetrically arranged first sliding grooves 502 and two symmetrically arranged second sliding grooves 503 are formed within the fixed tube 501. The second sliding grooves 503 are spiral-shaped and connect the two first sliding grooves 502. A baffle 504 is provided at the intersection of the first and second sliding grooves 502 and 503. The baffle 504 is rotatably connected to the fixed tube 501 via a torsion spring. The upper baffle 504 is vertical when there is no external force interference, and the lower baffle 504 is inclined when there is no external force interference. A guide pin 307 can slide with the first and second sliding grooves 502 and 503, and can move along the directions of the first and second sliding grooves 502 and 503. After the cylindrical target 303 disengages from the magnetic roller 404... The rotating bracket 301 drives the reversing rod 304 to continue rising. At this time, the guide pin 307, under the action of the baffle 504, enters the second slide groove 503 from the first slide groove 502. Thus, the guide pin 307 drives the reversing rod 304 to rotate 180 degrees. Subsequently, the guide pin 307 enters another first slide groove 502, and the reversing rod 304 drives the rotating bracket 301 to rotate 180 degrees. Thus, the rotating bracket 301 drives the new cylindrical target 303 to above the magnetic roller 404. Then, the translation bracket 401 resets and drives the reversing rod 304 to descend. The reversing rod 304 drives the guide pin 307 to descend. Under the action of the baffle 504, the reversing rod 304 is always in the first slide groove 502. Thus, the reversing rod 304 is limited during the descent, so that the cylindrical target 303 will not be displaced, ensuring the accurate installation position of the new cylindrical target 303.

[0035] Working principle: Before changing the target, the operator can replace the old cylindrical target 303 located outside the vacuum chamber 101 with a new cylindrical target 303 without shutting down the machine. The target holder 302 can clamp and fix the cylindrical target 303 to prevent it from shifting. When changing the cylindrical target 303, the device stops, the motor 206 drives the screw 205 to rotate, and the screw 205 drives the translation bracket 401 to translate through a threaded connection. After the translation bracket 401 moves to a certain position, ... The drive gear 405 begins to mesh with the first rack 203, causing it to rotate during the movement of the translation bracket 401. The drive gear 405 drives the drive pulley 406 to rotate, which in turn drives the driven pulley 407 to rotate via a synchronous belt. The driven pulley 407 then drives the driven gear 408 to rotate, which in turn drives the second rack 306 to rise. The second rack 306 then drives the lifting plate 305 to rise, which in turn drives the rotating bracket 301 to rise. The rotating bracket 301 then drives the cylindrical target 303 to rise. As the cylindrical target 303 begins to disengage from the magnetic roller 404, the rotating bracket 301 rises until the cylindrical target 303 disengages from the magnetic roller 404. The rotating bracket 301 then drives the reversing rod 304 to continue rising. At this time, the guide pin 307, under the action of the baffle 504, enters the second slide groove 503 from the first slide groove 502. Thus, the guide pin 307 drives the reversing rod 304 to rotate 180 degrees. Subsequently, the guide pin 307 enters another first slide groove 502, and the reversing rod 304 drives the rotating bracket 301 to rotate 180 degrees. This process continues. 01. The new cylindrical target 303 is moved above the magnetic roller 404. Then, the translation bracket 401 resets and drives the reversing rod 304 to descend. The reversing rod 304 drives the guide pin 307 to descend. Under the action of the baffle 504, the reversing rod 304 is always in the first slide groove 502. In this way, the reversing rod 304 is limited during the descent, so that the cylindrical target 303 will not be displaced, ensuring the accurate installation position of the new cylindrical target 303. This completes the rapid replacement of the cylindrical target 303, greatly reducing downtime and improving production efficiency.

[0036] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A magnetron sputtering coating apparatus with an auxiliary target, comprising a vacuum chamber (101), wherein a tilting door (102) is rotatably connected to the front side of the vacuum chamber (101), and a rotating clamping mechanism (103) is provided on the tilting door (102), characterized in that: The vacuum chamber (101) is provided with several material changing mechanisms. Each material changing mechanism includes a fixed support assembly fixedly connected to the vacuum chamber (101). A translation linkage assembly slides on the fixed support assembly. The translation linkage assembly includes a translation bracket (401). A controller (403) is installed at the bottom of the translation bracket (401). A magnetic roller (404) is fixedly connected to the top rear end of the controller (403). A lifting and rotating assembly slides on the translation linkage assembly. The lifting and rotating assembly includes a lifting plate (305). Two symmetrically arranged second racks (306) are fixedly connected to the bottom of the lifting plate (305). The rack (306) is slidably connected to the translation bracket (401). Two linkage components for driving the second rack (306) to rise and fall are installed on the translation bracket (401). The top of the lifting plate (305) is rotatably connected to the rotating bracket (301). Several symmetrically arranged target holders (302) are fixedly connected to the front and rear of the rotating bracket (301). A cylindrical target (303) is fixedly connected to the target holder (302). A reversing rod (304) is fixedly connected to the bottom of the rotating bracket (301). A guide component for driving the reversing rod (304) to rotate is fixedly connected to the translation bracket (401).

2. The magnetron sputter coating device with auxiliary target according to claim 1, characterized in that: The fixed support assembly includes a fixed bracket (201) fixedly connected to the vacuum chamber (101), a plurality of guide rail plates (202) fixedly connected to the front side of the fixed bracket (201), a first rack (203) fixedly connected inside the guide rail plate (202), and a driving component for driving the translation bracket (401) to translate fixedly connected to the bottom of the fixed bracket (201).

3. A magnetron sputter coating device with an auxiliary target according to claim 2, characterized in that: The driving component includes a driving bracket (204) fixedly connected to the bottom of the fixed bracket (201). The driving bracket (204) is slidably connected to the translation bracket (401). A screw (205) is rotatably connected to the driving bracket (204). A motor (206) is fixedly connected to the front end of the driving bracket (204). The output end of the motor (206) is fixedly connected to the screw (205). The screw (205) is threadedly connected to the bottom of the translation bracket (401).

4. The magnetron sputter coating device with auxiliary target according to claim 2, characterized in that: The linkage component includes a connecting box (402) fixedly connected to the translation bracket (401), the connecting box (402) being slidably connected to the guide rail plate (202), a drive gear (405) being rotatably connected inside the connecting box (402), the drive gear (405) meshing with the first rack (203), a drive pulley (406) being fixedly connected to one side of the drive gear (405), a driven gear (408) being rotatably connected inside the connecting box (402), the driven gear (408) meshing with the second rack (306), a driven pulley (407) being fixedly connected to one side of the driven gear (408), the drive pulley (406) and the driven pulley (407) being fixedly connected by a synchronous belt, and the diameter of the drive pulley (406) being larger than the diameter of the driven pulley (407).

5. The magnetron sputter coating device with auxiliary target according to claim 1, characterized in that: The bottom of the reversing rod (304) is fixedly connected to two symmetrically arranged guide pins (307).

6. A magnetron sputtering coating apparatus with an auxiliary target according to claim 5, characterized in that: The guiding assembly includes a fixed tube (501) fixedly connected to the translation bracket (401). The fixed tube (501) has two symmetrically arranged first sliding grooves (502) and two symmetrically arranged second sliding grooves (503). The second sliding grooves (503) are spiral-shaped and can connect the two first sliding grooves (502). A baffle (504) is provided at the intersection of the first sliding grooves (502) and the second sliding grooves (503). The baffle (504) is rotatably connected to the fixed tube (501) by a torsion spring. The guide pin (307) can slide with the first sliding grooves (502) and the second sliding grooves (503). The guide pin (307) can move along the direction of the first sliding grooves (502) and the second sliding grooves (503).

Images