Inner cavity structure and reaction furnace

Abstract

The utility model relates to the technical field of photovoltaics and semiconductors, in particular to an inner cavity structure and a reacting furnace, the inner cavity structure comprises an inner cavity body, the inner cavity body comprises a furnace mouth end and a tail end opposite to the furnace mouth end, and a first air inlet hole and a second air inlet hole are formed in the side wall of the furnace mouth end; the first gas path assembly comprises a first gas inlet pipe, one end of the first gas inlet pipe is communicated with the first gas inlet hole, and the other end of the first gas inlet pipe is connected with a gas source so as to convey process gas into the inner cavity; and the second air path assembly comprises an air supply pipeline which is arranged on the inner side wall of the inner cavity body, one end of the air supply pipeline is communicated with the second air inlet hole, and the other end of the air supply pipeline extends towards the tail end direction. The auxiliary gas path is arranged in the cavity, the non-end area in the cavity is supplemented with the process gas, the uniformity of the concentration of the process gas in the cavity is guaranteed, and the uniformity of silicon wafer coating can be improved.

Description

Technical Field

[0001] This application relates to the fields of photovoltaic and semiconductor technology, and in particular to an internal cavity structure and a reactor. Background Technology

[0002] Semiconductor or photovoltaic materials typically require a series of processing steps to produce the final product. One part of the process for solar cells involves feeding sheet-like materials into a reaction furnace, where they react under specific temperature and pressure conditions to deposit a film. This process requires a semiconductor device. The chamber, as part of the semiconductor device, primarily maintains the material under relatively constant temperature and pressure during the processing. For example, in some coating processes, atomic layer deposition (ALD) equipment uses stainless steel as the chamber material, while low-pressure chemical vapor deposition (LPCVD) and plasma-enhanced chemical vapor deposition (PECVD) use quartz as the chamber material. This is mainly due to temperature. The reaction temperature of LPCVD and diffusion equipment is between 600℃ and 1050℃, and the design of such chambers needs to consider the impact of high temperature on the chamber. The reaction temperature of ALD equipment is only around 250℃. Generally, the design of the chamber will not consider high temperature as the main factor. Moreover, because the reaction temperature is low, stainless steel can be chosen as the material for the chamber. The main consideration is how to design the chamber to accommodate more products for processing.

[0003] Because ALD equipment uses a stainless steel cavity with high load-bearing capacity, the carrier is longer and heavier to reduce equipment capacity and floor space, resulting in a longer and larger cavity. This increased cavity length, combined with the furnace's inlet-outlet and outlet-exit structure, leads to uneven gas concentration between the front and rear halves of the cavity, resulting in uneven film thickness on the coated products. The increased carrier weight necessitates the use of wheeled paddles for transporting the products. These paddles, with wheels at the front, directly contact the inner cavity, rolling and rubbing against its bottom surface. Repeated friction can damage the inner cavity. During heating, the thermal field is operated at full power. As the hot gas rises, the upper carrier reaches the process temperature before the lower carrier. To achieve optimal coating temperature, the upper thermal field is kept warm while the lower thermal field continues heating, extending the overall reaction time and reducing equipment capacity. Utility Model Content

[0004] In view of this, embodiments of this application provide an internal cavity structure and a reaction furnace that can reduce the difference in process gas concentration at various points within the internal cavity and improve the uniformity of the coating.

[0005] According to the inventive concept of the first aspect of this utility model, an inner cavity structure is provided, comprising: an inner cavity body, a first gas path assembly, and a second gas path assembly. The inner cavity body includes a furnace opening end and a tail end opposite to the furnace opening end. A first air inlet and a second air inlet are provided on the side wall of the furnace opening end. The first gas path assembly includes: a first air inlet pipe, one end of which communicates with the first air inlet, and the other end of which is configured to connect to a gas source to deliver process gas into the inner cavity body. The second gas path assembly includes: a gas replenishment pipe disposed on the inner side wall of the inner cavity body, one end of which communicates with the second air inlet, and the other end of which extends toward the tail end. The second air inlet is configured to connect to a gas source to replenish process gas to the non-end region of the inner cavity body.

[0006] According to some embodiments of this utility model, the gas supply pipe is provided with multiple exhaust holes at intervals along the length of the inner cavity to supply process gas to different areas within the inner cavity.

[0007] According to some embodiments of the present invention, there are multiple first air inlets, which are opened on the left and right side walls of the furnace opening end of the inner cavity, wherein the first air inlets on the left side wall and the first air inlets on the right side wall are arranged opposite to each other.

[0008] According to some embodiments of the present invention, there are multiple second air inlets, which are opened on the left and right side walls of the furnace opening end of the inner cavity. The second air inlets are located in the middle region of the left or right side wall, and the first air inlets are located in the upper and lower regions of the second air inlets.

[0009] According to some embodiments of the present invention, the inner cavity structure further includes a plurality of baffles, which are disposed on the inner sidewall of the inner cavity. Each baffle is disposed opposite to one or more of the first air inlets, and the baffles are configured to change the flow direction of the process gas input into the inner cavity through the first air inlets.

[0010] According to some embodiments of the present invention, the inner cavity structure further includes a roller track, which is disposed on the inner bottom surface of the inner cavity along the length direction of the inner cavity, and the roller track is configured to support the rollers of the transport boat.

[0011] According to some embodiments of the present invention, the roller track is detachably installed on the inner bottom surface of the inner cavity.

[0012] According to some embodiments of the present invention, the roller track is detachably installed on the inner bottom surface of the inner cavity.

[0013] According to some embodiments of the present invention, the inner cavity structure further includes a plurality of foot cups, which are respectively disposed on the outer side wall of the furnace opening end of the inner cavity body. The foot cups are configured to adjust the distance between the furnace opening end of the inner cavity body and the inner side wall of the outer cavity body.

[0014] According to some embodiments of this utility model, the inner cavity structure further includes: a main heating assembly and an auxiliary heating assembly. The main heating assembly is disposed on the outer wall of the inner cavity; the auxiliary heating assembly includes multiple auxiliary heating pipes, which are disposed along the length direction of the inner cavity on the inner bottom surface of the inner cavity, and the auxiliary heating pipes are configured to assist in regulating the temperature of the lower part of the inner cavity.

[0015] According to the inventive concept of the second aspect of this utility model, a reactor is provided, comprising: an outer cavity; an inner cavity structure as described in any one of the first aspects, the inner cavity structure being disposed inside the outer cavity; and a heating assembly disposed on the outer wall of the inner cavity of the inner cavity structure, the heating assembly being adapted to heat the inner cavity.

[0016] According to the internal cavity structure and reactor of this utility model embodiment, by setting an auxiliary gas path inside the cavity to supplement the process gas in the non-end area of ​​the cavity, the uniformity of the process gas concentration in the cavity is ensured, which can improve the uniformity of silicon wafer coating. Attached Figure Description

[0017] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a schematic diagram of an existing cavity.

[0019] Figure 2 The diagram shown is a structural schematic of the equipment transport boat.

[0020] Figure 3 The image shown is a front view of the internal cavity structure provided in an embodiment of this application.

[0021] Figure 4 The image shown is another front view of the internal cavity structure provided in one embodiment of this application.

[0022] Figure 5 The image shown is another front view of the internal cavity structure provided in an embodiment of this application, intended to illustrate the second air inlet.

[0023] Figure 6 The diagram shown is a schematic structural diagram of the internal cavity structure provided in an embodiment of this application, viewed from the furnace opening end.

[0024] Figure 7 The diagram shown is a schematic diagram of the inner cavity structure of the roller track provided in an embodiment of this application.

[0025] Figure 8 The diagram shown is a schematic diagram of the auxiliary heating component of the internal cavity structure provided in an embodiment of this application.

[0026] Figure 9 As shown Figure 8 Another view of the auxiliary heating assembly shown.

[0027] Figure label:

[0028] H1, Cylindrical outer shell; H2, Inner square cavity; H3, Equipment transport boat; H4, Paddle; H5, Roller; 1-Inner cavity; 101, Furnace opening end; 102, First air inlet; 103, Second air inlet; 104, Tail end; 2, First air passage assembly; 201, First air inlet pipe; 203, Baffle; 301, Second air inlet pipe; 302, Fixed sheet metal; 303, Exhaust port; 304, Air replenishment pipe; 4, Roller track; 5, Foot cup; 6, Auxiliary heating assembly; 7, Outer cavity; 8, Main heating assembly. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] like Figure 1 The diagram shown is a schematic of the existing cavity structure. Figure 1 The cavity consists of a cylindrical outer shell H1 and an inner square cavity H2. Figure 2This is a schematic diagram of the conveyor boat used to transport the cavity. The conveyor boat H3 has a paddle H4 at its bottom. While the increased length of the inner cavity H2 improves production capacity, the process gas is input from the front and extracted from the rear of the inner cavity H2. This excessive length of the reaction chamber leads to uneven process gas concentration between the front and rear sections, resulting in uneven product coating. Furthermore, the movement of the conveyor boat causes the roller H5 at the front of the paddle H4 to wear down the inner cavity H2, potentially damaging it.

[0031] Figure 3 The image shown is a front view of an internal cavity structure provided in an embodiment of this application; Figure 4 The image shown is another front view of the internal cavity structure provided in an embodiment of this application, intended to illustrate the first air inlet. Figure 5 The image shown is another front view of the internal cavity structure provided in an embodiment of this application, intended to illustrate the second air inlet.

[0032] To solve the above-mentioned technical problems, according to the inventive concept of the first aspect of this utility model, an internal cavity structure is provided, such as... Figures 3 to 5 As shown, the internal cavity structure includes an internal cavity body 1, a first gas path assembly 2, and a second gas path assembly. The internal cavity body 1 includes a furnace opening end 101 and a tail end 104 opposite to the furnace opening end 101. A first air inlet 102 and a second air inlet 103 are provided on the side wall of the furnace opening end 101. The first gas path assembly 2 includes a first air inlet pipe 201, one end of which is connected to the first air inlet 102, and the other end of which is configured to connect to a gas source to deliver process gas into the internal cavity body 1. The second gas path assembly includes a supplementary gas pipe 304, which is disposed on the inner side wall of the internal cavity body 1. One end of the supplementary gas pipe 304 is connected to the second air inlet 103, and the other end of the second air inlet pipe 301 extends toward the tail end 104. The second air inlet 103 is configured to connect to a gas source to supplement process gas into the non-end region within the internal cavity body 1.

[0033] To facilitate the description of the internal cavity structure provided in the embodiments of this application, the following is combined with... Figure 3 To limit its direction, such as Figure 3As shown, the end of the inner cavity 1 where the process gas is input is defined as the furnace opening end 101, that is, the left end shown in the figure. The other end of the inner cavity 1 away from the furnace opening end 101 is defined as the tail end 104. The area between the furnace opening end 101 and the tail end 104 is the non-end area. Taking the cross-section perpendicular to the axis of the inner cavity 1 where the furnace opening end 101 is located (this cross-section will face the operator when in use) as an example, the upper end of this cross-section is the top surface of the inner cavity 1, the lower end is the bottom surface of the inner cavity 1, the left end is the left side of the inner cavity 1, and the right end is the right side of the inner cavity 1. Inside the inner cavity 1, the area between the middle region and the furnace opening end 101 is the first half, and the area between the middle region and the tail end 104 is the second half.

[0034] In this embodiment, as Figure 3 As shown, the inner cavity 1 is generally rectangular in shape. At least one set of first gas path components 2 is installed on the left and / or right side walls of the furnace opening end 101 of the inner cavity 1, and at least one set of second gas path components is installed on the left and / or right side walls of the inner cavity 1. Process gases are sequentially delivered to the furnace opening end 101, the non-end area, and the tail end 104 via the first inlet pipe 201 and the second inlet pipe 301, respectively. Figure 4 As shown, the first air inlet 102 is located at the corresponding position at the end of the first air inlet pipe 201 at the furnace opening end 101 of the inner cavity 1; as Figure 3 and Figure 5 As shown, the second air inlet 103 is located at the end of the second air inlet pipe 301 at the furnace opening end 101 of the inner cavity 1. This allows process gas to enter the inner cavity 1 from the furnace opening end 101 via the first air inlet 102, and also to enter the non-end area of ​​the inner cavity 1 via the supplementary gas pipe 304. Compared to only having the first air inlet pipe 201, this embodiment adds at least one set of supplementary gas pipes 304 as auxiliary gas paths to replenish process gas in the non-end area of ​​the inner cavity 1, ensuring the uniformity of process gas concentration within the inner cavity 1 and improving coating yield.

[0035] According to some embodiments of the present invention, the air supply pipe 304 is fixed to the inner wall of the inner cavity 1 by a fixing sheet metal 302.

[0036] like Figure 5 As shown, according to some embodiments of the present invention, the gas supply pipe 304 is provided with a plurality of exhaust holes 303 at intervals along the length of the inner cavity 1 to supply process gas to different areas within the inner cavity 1.

[0037] In this embodiment, optionally, two gas supply pipes 304 are provided on each side wall, one on the top and one on the bottom, or one or more. Each gas supply pipe 304 has multiple exhaust holes 303 along its length (or axial direction). In this way, the process gas input from the second air inlet pipe 301 is directly transported into the inner cavity 1 through the gas supply pipes 304 and the multiple exhaust holes 303. The provision of multiple gas supply pipes 304 and the corresponding provision of multiple exhaust holes 303 can provide gas supply from multiple non-end regions, ensuring the uniformity of the process gas concentration in the inner cavity 1.

[0038] Similarly, according to some embodiments of the present invention, there are multiple first air inlets 102, and multiple first air inlets 102 are opened on the left and right side walls of the furnace opening end 101 of the inner cavity 1, wherein the first air inlets 102 on the left side wall and the first air inlets 102 on the right side wall are arranged opposite to each other.

[0039] In this embodiment, as Figure 4 As shown, the first air inlet 102 is located at the furnace opening end 101 of the inner cavity 1. Optionally, depending on the structure of the first air passage assembly 2, four first air inlets 102, or other numbers of first air inlets 102, can be configured on the left or right side wall of the inner cavity 1. By setting multiple first air inlets 102, the uniformity of air intake at the furnace opening end 101 of the inner cavity 1 is ensured.

[0040] According to some embodiments of this utility model, such as Figure 4 As shown, there are multiple second air inlets 103, which are opened on the left and right side walls of the furnace opening end 101 of the inner cavity 1. The second air inlets 103 are located in the middle region of the left or right side wall, and the first air inlets 102 are located in the upper and lower regions of the second air inlets 103.

[0041] In this embodiment, two sets of first gas path components 2 are provided. The first gas path component 2 on the left delivers process gas to the inner cavity 1 through the first air inlet 102 on the left, and the first gas path component 2 on the right delivers process gas to the inner cavity 1 through the first air inlet 102 on the right. In this way, gas is introduced from multiple angles, which can ensure the uniformity of process gas entering from the furnace mouth end 101.

[0042] According to some embodiments of this utility model, such as Figure 1 and Figure 5 As shown, the inner cavity structure also includes multiple baffles 203, which are disposed on the inner sidewall of the inner cavity 1. Each baffle 203 is disposed opposite to one or more first air inlets 102, and the baffle 203 is isolated from the inner sidewall of the inner cavity 1. The baffle 203 is configured to change the flow direction of the process gas input into the inner cavity 1 through the first air inlets 102.

[0043] In this embodiment, the direction of gas flow from the first air inlet 102 into the inner cavity 1 is changed from being perpendicular to the axis of the inner cavity 1 to being parallel (approximately parallel) to the first air inlet 102, thereby ensuring the uniformity of the process gas at the furnace mouth end 101 of the inner cavity 1. Combined with the suction at the tail end of the inner cavity 1, this ensures that the process gas flows uniformly from the inner cavity 1 to the tail end of the inner cavity 1.

[0044] Figure 7 The diagram shown is a schematic diagram of the inner cavity structure of the roller track provided in an embodiment of this application.

[0045] According to some embodiments of this utility model, such as Figure 7 As shown, the inner cavity structure also includes a roller track 4, which is arranged on the inner bottom surface of the inner cavity 1 along the length direction of the inner cavity 1. The roller track 4 is constructed to support the rollers H5 of the transport boat.

[0046] In this embodiment, by adding a roller track 4 between the inner cavity 1 and the equipment transport boat H3, the rollers H5 of the equipment transport boat H3 no longer directly wear down the inner cavity 1, thus preventing damage to the inner cavity 1. Optionally, the roller track 4 can be made of a high-strength, high-wear-resistant material to extend the service life of the equipment.

[0047] According to some embodiments of this utility model, the roller track 4 is detachably installed on the inner bottom surface of the inner cavity 1. For example, the roller track 4 can be connected to the inner cavity 1 by bolts, or the roller track 4 and the inner cavity 1 can be engaged by a snap-fit ​​mechanism, or other forms of detachable connection, which will not be described in detail here.

[0048] In this embodiment, by detachably setting the roller track 4, the worn roller track 4 can be removed and replaced with a new roller track 4 after it becomes worn.

[0049] Figure 6 The diagram shown is a schematic structural diagram of the furnace opening end 101 of the internal cavity structure provided in an embodiment of this application.

[0050] According to some embodiments of the present invention, the inner cavity structure also includes foot cups 5, and multiple foot cups 5 are respectively disposed on the outer side wall of the furnace opening end 101 of the inner cavity 1. The foot cups 5 are configured to adjust the distance between the furnace opening end 101 of the inner cavity 1 and the inner side wall of the outer cavity.

[0051] According to some optional embodiments of this utility model, two foot cups 5 are respectively provided at intervals on the four side walls of the inner cavity 1. By adjusting the foot cups 5 on the four side walls, the distance between the outer side wall of the inner cavity 1 and the outer cavity can be adjusted, that is, adjusted so that the inner cavity 1 and the outer cavity are coaxial. The main heating component is disposed on the side wall of the outer cavity. Therefore, the distance between the outer side wall of the inner cavity 1 and the outer cavity can affect the heating effect of the main heating component on the inner cavity 1. Thus, by adjusting the foot cups 5 on the four sides of the inner cavity 1, the distance between the four outer side walls of the inner cavity 1 and the outer cavity is made consistent, achieving a consistent heating effect of the main heating component on the inner cavity 1, thereby ensuring a consistent temperature throughout the inner cavity 1 and improving the uniformity of the coating.

[0052] Figure 8 The diagram shown is a schematic representation of the auxiliary heating assembly 6 with an internal cavity structure provided in an embodiment of this application. Figure 9 As shown Figure 8 Another view of the auxiliary heating assembly shown.

[0053] According to some embodiments of this utility model, such as Figure 8 and Figure 9 As shown, the inner cavity structure also includes a main heating assembly 8 and an auxiliary heating assembly 6. The auxiliary heating assembly 6 is disposed on the inner bottom surface of the inner cavity 1 along the length direction of the inner cavity 1, and is configured to assist in regulating the temperature of the lower space inside the inner cavity 1. The main heating assembly 8 is disposed on the outer side wall of the inner cavity 1. Preferably, the main heating assembly 8 is disposed on all four outer side walls of the inner cavity 1.

[0054] In this embodiment, when the main heating component is working, the internal hot air will rise, and the temperature of the upper carrier will reach the process temperature before that of the lower carrier. Furthermore, due to the structure of the paddle H4 and the cassette, the silicon wafer is encased in the cassette, resulting in a relatively thick bottom plate, which makes heating more difficult. To solve the above technical problems, when the main heating component is working, the auxiliary heating component 6 is activated to perform thermal compensation on the bottom of the inner cavity 1, thereby increasing the rate at which the temperature of the bottom of the inner cavity 1 rises, reducing the heating time, and improving efficiency.

[0055] According to the inventive concept of the second aspect of this utility model, a reactor is provided, comprising: an outer cavity and an inner cavity structure as provided in the foregoing embodiments, wherein the inner cavity structure is disposed within the outer cavity.

[0056] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0057] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0058] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0059] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0060] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0061] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. An internal cavity structure, characterized by, include: The inner cavity includes a furnace opening end and a tail end opposite to the furnace opening end. A first air inlet and a second air inlet are provided on the side wall of the furnace opening end. The first air passage assembly includes: The first air inlet pipe has one end connected to the first air inlet hole and the other end configured to connect to an air source to deliver process gas into the inner cavity. The second air passage assembly includes: An air supply pipe is provided on the inner wall of the inner cavity. One end of the air supply pipe is connected to the second air inlet, and the other end extends toward the tail end. The second air inlet is configured to connect to an air source to supply process gas to the non-end regions within the inner cavity.

2. The lumen structure of claim 1, wherein, The gas supply pipe is provided with multiple exhaust holes spaced apart along the length of the inner cavity to supply process gas to different areas within the inner cavity.

3. The internal cavity structure according to claim 1, characterized in that, The number of first air inlets is multiple, and the multiple first air inlets are opened on the left and right side walls of the furnace opening end of the inner cavity, wherein the first air inlets on the left side wall and the first air inlets on the right side wall are arranged opposite to each other.

4. The lumen structure of claim 3, wherein, The number of second air inlets is multiple, and the multiple second air inlets are opened on the left and right side walls of the furnace opening end of the inner cavity. The second air inlets are located in the middle region of the left or right side wall, and the first air inlets are located in the upper and lower regions of the second air inlets.

5. The lumen structure of any one of claims 1 to 4, wherein, The internal cavity structure also includes multiple baffles, which are disposed on the inner sidewall of the internal cavity. Each baffle is disposed opposite to one or more of the first air inlets, and the baffles are configured to change the flow direction of the process gas input into the internal cavity through the first air inlets.

6. The lumen structure of claim 1, wherein, The internal cavity structure also includes: A roller track is provided on the inner bottom surface of the inner cavity along the length of the inner cavity, and the roller track is configured to support the rollers of the transport boat.

7. The internal cavity structure according to claim 6, characterized in that, The roller track is detachably installed on the inner bottom surface of the inner cavity.

8. The lumen structure of claim 1, wherein, The internal cavity structure also includes: Multiple foot cups are respectively disposed on the outer side wall of the furnace opening end of the inner cavity, and the foot cups are configured to adjust the distance between the furnace opening end of the inner cavity and the inner side wall of the outer cavity.

9. The lumen structure of claim 1, wherein, The internal cavity structure also includes: The main heating assembly is disposed on the outer wall of the inner cavity. The auxiliary heating assembly includes multiple auxiliary heating pipes, which are arranged along the length of the inner cavity on the inner bottom surface of the inner cavity. The auxiliary heating pipes are configured to assist in regulating the temperature of the lower part of the inner cavity.

10. A reactor furnace characterized by, include: External cavity; The inner cavity structure as described in any one of claims 1 to 9, wherein the inner cavity structure is disposed inside the outer cavity; A heating assembly is disposed on the outer wall of the inner cavity of the inner cavity structure, and the heating assembly is suitable for heating the inner cavity.

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