High-vacuum tube furnace convenient to take and replace samples

Abstract

The utility model relates to the technical field of vacuum equipment, and particularly discloses a high-vacuum tube furnace convenient to take and change samples, which comprises a tube furnace mounted on a support table, a quartz furnace tube arranged in the tube furnace, a heating element arranged in the tube furnace, and a sample taking device arranged in the tube furnace, one end of the quartz furnace tube penetrates through the tube furnace and is connected with a vacuum system through a quartz tube connecting flange, the vacuum system comprises a six-way square cavity supporting frame, a six-way square cavity, a mechanical pump connector, a sampling dismounting head and a molecular pump, one end of the six-way square cavity is connected with the molecular pump through a vacuum pipeline, and a gas circuit module is arranged in the supporting table; the gas circuit module is connected with the quartz furnace tube; the molecular pump is provided with a series of vacuum systems, so that the operation of replacing samples without shutdown is realized, the working efficiency is obviously improved, and the start and stop times of the molecular pump are reduced, so that the abrasion of the molecular pump is reduced, and the overall service life of the equipment is prolonged.

Description

A convenient high-vacuum tube furnace for sample handling and replacement Technical Field

[0001] This utility model belongs to the field of vacuum equipment technology, specifically relating to a high vacuum tube furnace for convenient sample handling and replacement. Background Technology

[0002] Vacuum tube furnaces are one of the most commonly used equipment for physical vapor deposition and chemical vapor deposition in the preparation of nanomaterials. They are suitable for CVD processes such as carbon nanotube fabrication, crystalline silicon substrate coating, controllable growth of nano-ZnO, atmosphere sintering of ceramic capacitors (MLCCs), and diffusion bonding of metal materials.

[0003] A convenient high-vacuum tube furnace is designed to provide a controllable high-temperature environment to promote diverse physical and chemical reactions in samples. By precisely controlling the temperature, atmosphere, and heating rate, this equipment can handle and prepare various materials, and is widely used in research and industrial production in materials science, chemistry, physics, electronics, and energy science. The working principle of this tube furnace is based on resistance heating or radiation heating mechanisms, converting electrical energy into thermal energy to perform operations such as heating, annealing, and cleaning of samples. Traditional tube furnaces can only provide a positive pressure environment, limiting the possibility of physical and chemical reactions under high vacuum conditions, thus restricting their operational range and application. Summary of the Invention

[0004] The purpose of this invention is to provide a convenient high-vacuum tube furnace for sample handling and replacement, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A convenient high-vacuum tube furnace for sample handling and replacement includes:

[0007] A tube furnace is mounted on a support platform. The tube furnace contains a quartz furnace tube for placing samples. It also contains a heating element for heating, a common heating device in the prior art (details omitted here). This heating element raises the temperature of the quartz furnace tube, thus inducing a reaction in the sample. One end of the quartz furnace tube passes through the tube furnace and is connected to a vacuum system via a quartz tube flange. This vacuum system provides a vacuum environment and includes a six-way square cavity support frame, a six-way square cavity body, a mechanical pump interface, a sampling and disassembly head, and a molecular pump. The six-way square cavity body is mounted on the upper end of the support platform via the support frame. A sample is mounted on one end of the six-way square cavity body. The mechanical pump interface is connected to an external mechanical pump for evacuating the equipment. Once a rough vacuum is reached, the molecular pump is immediately activated to achieve high-vacuum extraction of the equipment. A sampling and disassembly head is also installed at one end of the six-way square cavity. After opening the sampling and disassembly head, the sample can be removed or replaced using a hook. The molecular pump is connected to one end of the six-way square cavity via a vacuum pipe to achieve high-vacuum extraction of the equipment. A gas path module is installed inside the support platform. This gas path module is connected to the quartz furnace tube for supplying gas to promote the reaction of the sample in a vacuum environment. The gas path module is a gas supply device in the prior art and will not be described in detail here.

[0008] Preferably, an ionization gauge is installed at one end of the six-way square cavity, and a resistance gauge is also installed at one end of the six-way square cavity. The ionization gauge and the resistance gauge are used together to measure the vacuum level of the vacuum system in real time, thereby determining whether the mechanical pump needs to be turned on.

[0009] Preferably, the lower end of the molecular pump is provided with a lifting platform.

[0010] Preferably, the vacuum system is connected to a right-angle valve one. When the right-angle valve two is opened, the vacuum system is used to perform rough vacuuming. After the predetermined vacuum level is reached, the right-angle valve one is reopened to allow the molecular pump to start vacuuming. This step is a vacuuming process that allows sampling without stopping the system.

[0011] Preferably, the vacuum system is also connected to a manual butterfly valve. After adjusting the manual butterfly valve to achieve a predetermined vacuum level, the heating element begins to heat the quartz furnace tube. The design of the quartz furnace tube ensures that the sample is heated evenly. The vacuum system is also connected to an electromagnetic venting valve, which is used to exhaust gas after the reaction is completed.

[0012] Preferably, the upper end of the support platform is also provided with an electrical control box touch screen, which is connected to the gas circuit module, heating element and vacuum system respectively, and is used to control the operation of the equipment.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. Wide temperature range: capable of operating from room temperature to the high temperatures required for the reaction;

[0015] 2. Controllable atmosphere: Supports various atmospheres such as inert, oxidizing, and reducing.

[0016] 3. Uniform heating: The tube furnace design ensures uniform heating of the samples;

[0017] 4. Flexible operation: suitable for various material handling and experimental needs;

[0018] 5. High safety: Equipped with over-temperature protection, leakage protection and other safety measures;

[0019] 6. The equipment is equipped with a series of vacuum systems, which enables sample replacement without stopping the machine, significantly improving work efficiency. This design reduces the number of times the molecular pump is started and stopped, thereby reducing the wear of the molecular pump and extending the overall service life of the equipment. Attached Figure Description

[0020] Figure 1 is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 is a top view of this utility model;

[0022] In the diagram: 1. Support platform; 2. Gas circuit module; 3. Electrical control box touch screen; 4. Quartz furnace tube; 5. Tube furnace; 6. Quartz tube connecting flange; 7. Six-way square cavity support frame; 10. Ionization gauge; 11. Six-way square cavity body; 12. Sampling and disassembly head; 13. Manual butterfly valve; 14. Mechanical pump interface;

[0023] 15. Right-angle valve 1; 16. Molecular pump; 18. Electromagnetic vent valve; 19. Resistance gauge. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example:

[0026] Please refer to Figures 1 and 2. A convenient high-vacuum tube furnace for sample exchange includes:

[0027] A tube furnace 5 is mounted on a support platform 1. The tube furnace 5 contains a quartz furnace tube 4 for placing samples. A heating element is also installed inside the tube furnace 5 to heat the quartz furnace tube 4, a heating device already in use and not described in detail here. This raises the temperature of the quartz furnace tube 4, thus promoting a sample reaction. One end of the quartz furnace tube 4 passes through the tube furnace 5 and is connected to a vacuum system via a quartz tube connecting flange 6 to provide a vacuum environment. The vacuum system includes a six-way square cavity support frame 7, a six-way square cavity body 11, a mechanical pump interface 14, a sampling and disassembly head 12, and a molecular pump 16. The six-way square cavity body 11 is mounted on the upper end of the support platform 1 via the six-way square cavity support frame 7. A mechanical pump interface 14 is installed at one end of the six-way square cavity body 11. The mechanical pump interface 14 is connected to an external mechanical pump for evacuating the equipment. After reaching a rough vacuum, the molecular pump 16 is immediately put into operation to achieve high vacuum extraction of the equipment. A sampling and disassembly head 12 is also installed at one end of the six-way square cavity 11. After opening the sampling and disassembly head 12, the sample can be replaced by using a hook, so that the sample can be replaced without stopping the machine. The molecular pump 16 is connected to one end of the six-way square cavity 11 through a vacuum pipe to achieve high vacuum extraction of the equipment. A gas path module 2 is set inside the support platform 1. The gas path module 2 is connected to the quartz furnace tube 4 for supplying gas to promote the reaction of the sample in a vacuum environment. The gas path module 2 is a gas supply device in the prior art and will not be described in detail here.

[0028] Referring to Figures 1 and 2, an ionization gauge 10 is installed at one end of the six-way square cavity 11, and a resistance gauge 19 is also installed at the other end of the six-way square cavity 11. The ionization gauge 10 and the resistance gauge 19 are used together to measure the vacuum level of the vacuum system in real time, thereby determining whether the mechanical pump needs to be turned on.

[0029] Referring to Figures 1 and 2, a lifting platform is provided at the lower end of the molecular pump 16, which can adjust the height of the vacuum system according to the height of the tubular furnace 5, making the system more flexible.

[0030] Referring to Figures 1 and 2, the vacuum system is connected to right-angle valve 15. Opening right-angle valve 15 allows for rough vacuuming of the vacuum system. Once the predetermined vacuum level is reached, right-angle valve 15 is reopened to allow the molecular pump 16 to start vacuuming. This step is a vacuuming process that allows sampling without stopping the system.

[0031] Referring to Figures 1 and 2, the vacuum system is also connected to a manual butterfly valve 13. After adjusting the manual butterfly valve 13 to achieve the predetermined vacuum level, the heating element begins to heat the quartz furnace tube 4. The design of the quartz furnace tube 4 ensures that the sample is heated evenly. The vacuum system is also connected to an electromagnetic venting valve 18, which is used to exhaust gas after the reaction is completed.

[0032] Referring to Figures 1 and 2, the upper end of the support platform 1 is also equipped with an electrical control box touch screen 3. The electrical control box touch screen 3 is connected to the air circuit module 2, the heating element, and the vacuum system respectively, and is used to control the operation of the equipment.

[0033] Furthermore, it also includes a right-angle valve.

[0034] This equipment not only provides positive vacuum conditions but also enables operation under negative vacuum conditions, allowing samples to react in a high vacuum environment. In addition, the equipment is equipped with a series of vacuum systems, enabling sample changes without stopping the machine, which significantly improves work efficiency. This design reduces the number of times the molecular pump is started and stopped, thereby reducing wear on the molecular pump and extending the overall service life of the equipment.

[0035] In operation, the sample is first placed inside the quartz furnace tube 4 and connected to the vacuum system on the right side via the tubular furnace connecting flange 8. After pressing the start button on the touchscreen 3 of the control box, the equipment will automatically run according to the predetermined program. Right-angle valve 2 is currently closed. The mechanical pump begins evacuating the equipment through the mechanical pump interface 14. Once a rough vacuum is reached, the molecular pump is activated to achieve high-vacuum extraction. After adjusting the manual butterfly valve 13 to achieve the predetermined vacuum level, the heating element begins heating the quartz furnace tube 4. The design of the quartz furnace tube ensures uniform heating of the sample. Simultaneously, the gas path module 2 supplies gas to the quartz furnace tube 4 to promote the sample reaction. After the sample reaction is complete and cooled, the butterfly valve 13 is manually closed. Then, venting is performed on the left side of the quartz furnace tube 4, followed by opening the sampling and removal head 12 on the right side. The sample is then removed and replaced using the hook. After the sample replacement operation is completed, close the sampling and disassembly head 12 on the right side and close the right angle valve 15. Open the right angle valve 2 and perform rough vacuuming on the vacuum system. After reaching the predetermined vacuum level, reopen the right angle valve 15 to start the molecular pump 16 to perform vacuuming. After reaching the predetermined vacuum level, the sample reacts. After it cools down, the above continuous operation can be performed to achieve a sample replacement workflow without stopping the machine.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A portable sampling and high vacuum tube furnace, characterized in that, include: A tube furnace (5) is installed on a support platform (1). The tube furnace (5) contains a quartz furnace tube (4) and a heating element. One end of the quartz furnace tube (4) passes through the tube furnace (5) and is connected to a vacuum system via a quartz tube connecting flange (6) to provide a vacuum environment. The vacuum system includes a six-way square cavity support frame (7), a six-way square cavity body (11), a mechanical pump interface (14), a sampling and disassembly head (12), and a molecular pump (16). The upper end of the support platform (1) is equipped with the six-way square cavity body (11) through the six-way square cavity support frame (7). The mechanical pump interface (14) is installed at one end of the six-way square cavity body (11). The sampling disassembly head (12) is also installed at one end of the six-way square cavity body (11). The molecular pump (16) is connected to one end of the six-way square cavity body (11) through a vacuum pipe. A gas path module (2) is provided inside the support platform (1). The gas path module (2) is connected to the quartz furnace tube (4).

2. The portable sampling and high vacuum tube furnace according to claim 1, characterized in that: An ionization gauge (10) is also installed at one end of the six-way square cavity (11), and a resistance gauge (19) is also installed at one end of the six-way square cavity (11).

3. The high-vacuum tube furnace for convenient sample handling and replacement according to claim 2, characterized in that: The lower end of the molecular pump (16) is provided with a lifting platform.

4. The portable sampling and high vacuum tube furnace according to claim 3, characterized in that: The vacuum system is connected to a right-angle valve (15).

5. The portable sampling and high vacuum tube furnace according to claim 4, characterized in that: The vacuum system is also connected to a manual butterfly valve (13) and an electromagnetic vent valve (18).

6. The portable sampling and high vacuum tube furnace according to claim 1, characterized in that: The upper end of the support platform (1) is also equipped with an electrical control box touch screen (3).

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