Powder sampling device and vapor deposition system comprising same

Abstract

The utility model discloses a powder sampling device and a chemical vapor deposition system comprising the same, and relates to the technical field of sampling devices.The powder sampling device specifically comprises a sampling pipe, a gas-solid separation assembly and a sample bin, the sampling pipe is connected to the gas-solid separation assembly through a connecting gas pipe, and the gas-solid separation assembly is connected to the sample bin through a connecting gas pipe; the sample bin is connected to the gas-solid separation assembly through a material guide pipe; at least one sampling hole is formed in the sampling pipe at equal intervals, and a two-way valve is arranged at the sampling hole; or, the sampling tube is telescopic; or the sampling pipe is provided with two or more sampling pipelines with different lengths in parallel. The powder sampling device disclosed by the utility model is suitable for sampling the running state of the high-temperature furnace, can go deep into the furnace body, realizes on-line sampling of incapable sites in the furnace body, ensures the accuracy of a sampled sample, realizes monitoring of product quality in a powder production process, greatly improves the production efficiency of a production line, and improves the quality of a produced product.

Description

A powder sampling device and a vapor deposition system containing it Technical Field

[0001] This utility model relates to the field of sampling device technology, and in particular to a powder sampling device and a vapor deposition system containing the powder. Background Technology

[0002] Reactors or vapor deposition furnaces are existing equipment used in chemical reactions and are widely used in the chemical industry. However, existing equipment typically connects directly to the discharge pipe during production, sending materials to the next process step without monitoring devices, making it impossible to monitor the reaction process and products. Nevertheless, in chemical synthesis and other processes, sampling and analyzing materials in reactors or vapor deposition furnaces is crucial. This not only allows monitoring the progress of the process and whether it is proceeding as designed, but also enables timely handling of any abnormalities in the production process to avoid waste; it also allows for monitoring of material quality.

[0003] Most existing sampling devices require the equipment to be shut down or temporarily shut down before materials are removed from the reactor or high-temperature furnace for testing, making real-time sampling impossible. This severely impacts the processing efficiency of the production line. Furthermore, after sampling, powder particles adhere to the inner surface of the sampler, which can mix into the sample during subsequent sampling, directly affecting the accuracy of the analytical data. Additionally, some high-temperature and high-pressure environments place higher demands on the structure of the sampling device.

[0004] Taking the chemical vapor deposition (CVD) process as an example, ensuring sufficient, uniform, and efficient CVD deposition is a major problem that needs to be solved during production. For instance, current methods for detecting the silicon deposition effect on porous carbon materials in a furnace require shutting down or temporarily closing the CVD furnace to remove the silicon-based material. This severely affects the processing efficiency of the silicon-based material, and the removed silicon-based material is prone to oxidation in the air, affecting the accuracy of the detection and reducing the detection efficiency.

[0005] In view of this, this utility model is proposed. Summary of the Invention

[0006] The purpose of this invention is to provide a powder sampling device that is suitable for sampling during the production and operation of large high-temperature furnaces, with good sampling accuracy; and can improve production efficiency and product quality.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] A powder sampling device includes: a sampling tube, a gas-solid separation component, and a sample chamber. The sampling tube is connected to the gas-solid separation component via a connecting gas pipe, and the sample chamber is connected to the gas-solid separation component via a feed pipe.

[0009] Preferably, at least one sampling hole is provided at equal intervals on the sampling tube, and a two-way valve is provided at the sampling hole;

[0010] Alternatively, the sampling tube may be retractable;

[0011] Alternatively, the sampling tube may be provided with two or more sampling tubes of different lengths arranged side by side.

[0012] Furthermore, the sampling tube can be made of stainless steel, such as 304 or 316 stainless steel.

[0013] Furthermore, the sampling tube is provided with 2 to 10 sampling holes at equal intervals, specifically 2, 3, 4, 5, 6, 7, 8, 9, 10 sampling holes, etc.; the number of sampling holes can be customized according to actual needs, so as to achieve the purpose of real-time sampling and detection at different furnace body locations during the process preparation.

[0014] Preferably, the multiple sampling holes can be arranged on the same horizontal plane on the sampling tube, or they can be evenly and equidistantly distributed on different horizontal curved surfaces, presenting a scattered distribution.

[0015] Furthermore, a two-way valve is installed at the sampling port to control its opening and closing as needed. Specifically, the two-way valve can be controlled pneumatically or electrically.

[0016] Preferably, when the sampling device is used in environments such as high temperature and high pressure, the bidirectional valve can be selected from an ultra-high temperature valve.

[0017] It should be noted that the material of the bidirectional valve can be selected from a metal-based high-temperature alloy containing at least one of iron, nickel, or cobalt; the valve control components and the like must be hard-sealed on the outer surface of the components inside the high-temperature furnace with high-temperature resistant materials (such as high-temperature resistant alloy materials) to ensure normal operation under high-temperature conditions. Specifically, the bidirectional valve can be an ultra-high temperature bidirectional butterfly valve, etc.

[0018] Furthermore, when sampling is required, first control the opening of the backflush gas component in the gas-solid separation assembly and open the valve so that the backflush gas is blown into the furnace body through the sampling tube to remove the sample material deposited on the surface of the sampling hole; then close the backflush gas component, keep the valve open, and use the pressure difference between the furnace body and the sampling tube or the vacuum pump to perform the sampling operation.

[0019] Furthermore, multiple bidirectional valves can be numbered, and valves with different numbers and combinations can be selected to be opened according to requirements, enabling sampling and detection and real-time monitoring at different times and locations.

[0020] Furthermore, the retractable sampling tube includes a screw jack and multiple sampling pipes with progressively smaller diameters; one end of the screw jack is connected to the smallest diameter sampling pipe via a linkage mechanism.

[0021] Furthermore, the other end of the screw jack is provided with a sleeve, which is fixed to the gas-solid separation component; the screw jack passes through the sleeve; the fixing method can be flange connection, welding connection, bolt connection, riveting connection, etc.

[0022] Preferably, the outer surface of the sleeve is further provided with a strip-shaped sliding groove, and a power reciprocating rod in the linkage mechanism is fixed thereon; the power reciprocating rod can slide freely back and forth in the sliding groove.

[0023] Furthermore, the strip-shaped sliding groove may also be provided with a limiting structure, which can fix the power reciprocating rod when the cover is opened during the sampling operation, thereby ensuring that the cover is in the open state; the limiting structure may be a pin structure, a limiting slide plate structure, a limiting block structure, etc.; furthermore, the power reciprocating rod is provided with a corresponding limiting hole or limiting groove, etc.

[0024] Preferably, the screw jack can be directly driven by an electric motor or other power source, or it can be manually driven. The rotation of the screw jack sequentially extends or retracts sampling pipes of different diameters, achieving the purpose of sampling and testing at different sites.

[0025] Furthermore, one end (the end) of the minimum diameter sampling pipe is provided with a flip-top cover assembly. The cover assembly includes a cover plate, and the edge of the cover plate is rotatably hinged to the minimum diameter sampling pipe via a connector. The outer hinge of the cover plate has a linkage mechanism to ensure that the cover plate can be opened or closed through the linkage mechanism.

[0026] Furthermore, the sampling pipes with progressively decreasing diameters have inner clamps on the inner wall of the starting end (near the end of the larger diameter pipe) of the first to the penultimate pipe section and the end of the connecting trachea, and outer clamps on the outer wall of the ending end (near the end of the smaller diameter pipe) of the first to the penultimate pipe section; and outer clamps on the outer wall of the starting end of the last pipe section; the outer clamps of the first to the last pipe section are respectively engaged with the inner clamps of the preceding pipe section or the connecting pipe.

[0027] Furthermore, the sampling pipes, whose diameters decrease sequentially, are of the same length.

[0028] Preferably, the number of sampling pipes with progressively decreasing diameters is 2 to 8 sections, or any desired number of natural sections; specifically, it can be 2, 3, 4, 5, 6, 7, 8 sections, etc. The number of sections can be adjusted according to actual needs and is not limited to the numbers listed in this utility model.

[0029] It should be further explained that the linkage mechanism includes a power reciprocating rod, a reciprocating rotating connecting plate, a linkage reciprocating rod, and a rotating plate reciprocating bracket. The rotating plate reciprocating bracket is fixed by a rotating plate reciprocating bracket fixing component, which is fixedly connected to the side of the sampling tube and one end of the screw jack. The reciprocating rotating connecting plate is hinged to the rotating plate reciprocating bracket in the middle, and symmetrically provided waist holes are provided at both ends. Matching limit rods are horizontally provided in the waist holes. The limit rods pass through the waist holes and are fixed to one end of the power reciprocating rod and the linkage reciprocating rod, respectively. The other end of the power reciprocating rod is fixed to the screw jack sleeve through a strip sliding groove, and the other end of the linkage reciprocating rod is hinged to the outside of the cover plate.

[0030] Furthermore, the rotating plate reciprocating bracket fixing component is set between the sampling tube and the screw jack. That is, the rotating plate reciprocating bracket fixing component is connected to the side of the end of the smallest diameter sampling pipe and one end of the screw jack respectively by welding, riveting or snap-fit ​​structure; at the same time, it can also connect the sampling tube and the screw jack, so that when the screw jack rotates, it can drive the extension and contraction of multiple sampling pipes with different diameters.

[0031] It should be noted that after the screw jack controls multiple sampling pipes of different diameters to reach the corresponding sampling points, the cover plate is opened for sampling by pulling the power reciprocating rod, which in turn drives the reciprocating rotating connecting plate and the reciprocating rod. The operation is simple and convenient, and the safety is high.

[0032] This utility model discloses another technical solution, wherein the sampling tube has two or more sampling pipes of different lengths arranged in parallel, and each sampling pipe is connected to the gas-solid separation component through a connecting gas pipe; a three-way valve is provided at the end of the connecting gas pipe (near the gas-solid separation component) of each sampling pipe.

[0033] Furthermore, the multiple sampling pipes can be arranged side by side on the same plane, or they can be arranged in a ring or a ring-like manner to reduce the space occupied by the sampling pipes.

[0034] Preferably, the number of sampling pipes can be 2 to 6, specifically 2, 3, 4, 5, 6, or any number required.

[0035] Furthermore, the other port of the three-way valve is connected to an inflation pipe, which can be configured to introduce inert gas as needed; the inert gas can be nitrogen, argon, etc.

[0036] It should be noted that by controlling multiple three-way valves, only one channel can be set to be in sampling mode, while the remaining channels are filled with inert gas at a pressure greater than that inside the furnace. Then, sampling is carried out alternately through different sampling channels, thereby achieving online real-time sampling at different locations and at different times.

[0037] Furthermore, the gas-solid separation component includes a separation chamber covered with an insulation layer, and a cooling annular flow channel is provided between the two. A gas-solid separation component is fixedly installed inside the separation chamber. An air outlet is provided at the top, which is vented through the cooling annular flow channel and the insulation layer via an air outlet pipe or connected to a gas separation and recovery device. A material outlet is provided at the bottom, which is connected to a sample chamber through a material guide pipe passing through the cooling annular flow channel and the insulation layer.

[0038] Furthermore, the lower part of the side of the insulation layer is provided with a cooling water inlet or an air inlet, and the upper part is provided with a cooling water outlet or an air outlet, which can form a cooling circulation system; the cooling annular flow channel can be filled with cold air, nitrogen, liquid nitrogen, cold water, etc., to achieve the purpose of rapid cooling.

[0039] Furthermore, a pneumatic mechanism is provided on one side of the gas-solid separation component. The pneumatic mechanism includes an air guide pipe that passes through the cooling annular flow channel and the outside of the insulation layer and connects to the backflush gas component or vacuum pump. The pumping or backflush gas is controlled by a valve. The backflush gas includes an inert gas.

[0040] Preferably, the inert gas can be nitrogen, argon, etc.

[0041] It should be further noted that the upper end of the gas guide tube extends to the middle of the gas-solid separation component at the same height as the connecting gas tube connected to the sampling tube; the port of the gas guide tube faces the gas-solid separation component or the sampling tube.

[0042] Furthermore, the gas-solid separation component includes a membrane separator or a filter cartridge.

[0043] Preferably, the membrane material used in the membrane separator includes ceramic or metal materials.

[0044] Preferably, the filter element material used in the filter element type filter includes a metal material; the metal material includes nickel, or a nickel alloy containing 50% or more nickel.

[0045] Furthermore, the gas-solid separation component is arranged inside the gas-solid separation assembly from top to bottom; the angle between the gas-solid separation component and the bottom of the gas-solid separation assembly can be 30~90°.

[0046] Alternatively, the gas-solid separation component can be horizontally arranged from left to right inside the gas-solid separation assembly, and its height should be higher than that of the connecting gas pipe. In this case, the gas guide pipe is located at the upper end of the gas-solid separation component, with its port facing the gas-solid separation component.

[0047] Preferably, the separation chamber is cylindrical, cubic, trapezoidal, or conical in shape.

[0048] Furthermore, the sampling device is detachably and sealed to the tail end of the sampling furnace via a fastener; the detachable connection method of the fastener can be a pin connection, a snap-fit ​​connection, a threaded connection, etc., as long as it can be easily disassembled, tightly sealed to the sampling furnace, and does not cause damage to the sampling furnace.

[0049] Another objective of this invention is to provide a chemical vapor deposition system, including a feed hopper, a rotary kiln, an air intake assembly, and a receiving hopper. The feed hopper is connected to the interior of the rotary kiln via a feed pipe, the air intake assembly is connected to the interior of the rotary kiln via an air intake pipe, and the receiving hopper is connected to the tail end of the rotary kiln via a feed pipe.

[0050] Preferably, the rotary kiln is provided with a sampling device as described above at its tail end, and the sampling tube of the sampling device is inserted into the rotary kiln along the axial direction of the kiln body.

[0051] Furthermore, the sampling tube can be either linear or spiral.

[0052] It should be noted that the spiral structure is spiral along the axis of the rotary kiln; the sampling tube of the spiral structure can spiral and extend around the lifting plate in the rotary kiln, or it can spiral around the lifting plate along the inside of the rotary kiln, or the sampling tube can be further fixedly connected to the inner wall of the rotary kiln.

[0053] Furthermore, the gas outlet pipe in the sampling device can be connected to a gas separation and recovery device;

[0054] Furthermore, a portion of the gas separated by the gas separation and recovery device is connected to the air intake assembly via a gas guide pipe for reuse.

[0055] Furthermore, the air intake assembly includes a first air intake pipe, a second air intake pipe, a gas mixer, and a third air intake pipe. The first air intake pipe and the second air intake pipe are respectively equipped with flow meters. The first air intake pipe and the second air intake pipe are directly connected to the gas mixer. The gas mixer is connected to the rotary kiln inlet through the third air intake pipe in a sealed connection and extends into the interior of the rotary kiln.

[0056] Furthermore, the rotary kiln is equipped with a material conveyor plate welded to the inner wall of the kiln body to improve the stirring effect and working efficiency of the raw materials, which is beneficial to improving the uniformity of vapor deposition; multiple material conveyor plates are provided and spaced apart along the circumferential direction of the rotary kiln body.

[0057] Preferably, the shape of the bottom surface of the strip plate is adaptively selected according to the fixed position; the two sides of the top surface opposite the bottom surface in the thickness direction can be either flat or curved.

[0058] It should be noted that an insulation chamber is formed between the outer periphery of the rotary furnace and the insulation layer. The insulation chamber is equipped with a heating element, an air inlet, and an air outlet. The air inlet is connected to an air inlet fan, or the air outlet is connected to an air outlet fan.

[0059] In summary, the beneficial technical effects of this utility model are as follows:

[0060] The powder sampling device disclosed in this utility model is suitable for sampling and testing of large high-temperature furnaces during high-temperature operation. It can achieve real-time sampling while the high-temperature furnace is operating continuously without interrupting the production equipment, significantly improving the production line efficiency. The sampling operation can be carried out outside the furnace, with simple steps, convenient operation, and guaranteed safety.

[0061] The powder sampling device of this utility model has a sampling tube that can penetrate deep into the furnace body and is equipped with multiple sampling holes, or is configured as a telescopic pipe, or is configured with multiple sampling pipes of different lengths. It can realize online sampling of inaccessible locations inside the furnace body, and ensure the accuracy of the sampled samples. It enables the monitoring of product quality during the powder production process, real-time monitoring of the process progress, significantly improves the production efficiency of the production line, and improves the quality of the produced products.

[0062] The gas-solid separation component of this utility model powder sampling device is equipped with an external cooling circulation system. When the sample is taken out of the furnace, it can prevent the high-temperature sample from being oxidized after being taken out of the furnace, and can also prevent the operator from being burned by the high-temperature sample when taking out the sample. At the same time, it can also save the time required for the high-temperature sample to cool down naturally, and also prevent the sample from changing its properties due to long-term storage, thereby improving the accuracy and precision of the sample detection.

[0063] The powder sampling device of this invention adds a backflushing component to the gas-solid separation component. Backflushing is performed before and after sampling. While ensuring the accuracy of sampling, the airflow blown into the furnace can also play a role in lifting the material, making the powder sample in the furnace more uniformly distributed, improving product quality and increasing production efficiency.

[0064] This utility model also discloses a chemical vapor deposition system containing a powder sampling device. The sampling device is inserted into the rotary kiln from the tail end along the axial direction of the rotary kiln and rotates with the rotary kiln. It can effectively realize real-time sampling and sampling at different sites during the vapor deposition process. It is easy to operate, has good sampling accuracy, high precision, and excellent detection effect, and significantly improves the efficiency of the deposition process. Attached Figure Description

[0065] Figure 1 is a schematic diagram of the overall structure of the powder sampling device in Example 1;

[0066] Figure 2 is a partial enlarged schematic diagram of the powder sampling device in Example 1;

[0067] Figure 3 is a schematic diagram of the overall structure of the powder sampling device in Example 2;

[0068] Figure 4 is an enlarged schematic diagram of the linkage mechanism in the powder sampling device of Example 2;

[0069] Figure 5 is an enlarged schematic diagram of the screw jack in the powder sampling device of Example 2;

[0070] Figure 6 is an enlarged schematic diagram of the connection parts of pipes with different diameters in the powder sampling device of Example 2;

[0071] Figure 7 is a schematic diagram of the overall structure of the powder sampling device in Example 3;

[0072] Figure 8 is a schematic diagram of the overall structure of the chemical vapor deposition system in Example 4;

[0073] Figure 9 is a schematic diagram of the sampling tube structure in the furnace of the chemical vapor deposition system in Example 5.

[0074] Figure label:

[0075] 1-Sampling tube; 11-Sampling hole; 12-Two-way valve; 13-First section of pipe; 14-Second section of pipe; 15-Third section of pipe; 16-Cover plate assembly; 161-Cover plate; 162-Connector; 163-Hinge connector; 17-Screw jack; 171-Sleeve fixing component; 172-Sleeve; 173-Strip sliding groove; 18-Linking rod mechanism; 181-Power reciprocating rod; 182-Reciprocating rotating connecting plate; 183-Linking reciprocating rod; 184-Rotating plate reciprocating bracket; 185-Rotating plate reciprocating bracket fixing component; 186-Waist hole; 187-Limiting tie rod; 191 First sampling pipe; 192 - Second sampling pipe; 193- Third sampling pipe; 2- Gas-solid separation assembly; 21- Separation chamber; 22- Gas-solid separation component; 23- Insulation layer; 24- Cooling annular flow channel; 25- Connecting gas pipe; 251- First inflation pipe; 252- Second inflation pipe; 253- Third inflation pipe; 254- First three-way valve; 255- Second three-way valve; 256- Third three-way valve; 26- Cooling water / air inlet pipe; 27- Cooling water / air outlet pipe; 28- Air outlet; 29- Vacuum pump; 291- Gas guide pipe; 292- Backflush pipe; 293- Fourth three-way valve; 3- Sample chamber; 4- Fixing component;

[0076] I-Feed hopper; I-1-Feed pipe; II-Air inlet assembly; II-1-First air inlet pipe; II-2-Second air inlet pipe; II-3-Flow meter; II-4-Gas mixer; II-5-Third air inlet pipe; III-Rotary furnace; III-1-Rotary furnace insulation layer; III-2-Strip plate; III-3-Rotary furnace fixing parts; IV-Receiving hopper; V-Sampling device;

[0077] A - External clasp; B - Internal clasp. Detailed Implementation

[0078] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0079] Example 1:

[0080] As shown in Figures 1-2, a sampling device includes a sampling tube 1, a gas-solid separation component 2, and a sample chamber 3. The sampling tube 1 is connected to the gas-solid separation component 2 via a connecting gas pipe 25. Three sampling holes 11 are evenly spaced on the sampling tube 1, and each sampling hole 11 is equipped with a high-temperature resistant bidirectional valve 12, enabling real-time sampling at different locations within a high-temperature furnace. The sampling tube is made of 316 stainless steel to ensure that the sampler does not deform, pyrolyze, or chemically react with the material during the sampling process. The sample chamber 3 is located on the bottom left side of the gas-solid separation component 2, and an air outlet 28 is located on the top right side.

[0081] Inside the gas-solid separation assembly 2, a gas-solid separation component 22 is arranged from top to bottom. The fixing point of the gas-solid separation component 22 at the top of the gas-solid separation assembly 2 is located to the left of the gas outlet 28, and the fixing point at the bottom of the gas-solid separation assembly 2 is located to the right of the sample chamber 3. The gas-solid separation component 22 is arranged vertically. At the same time, the gas-solid separation component 22 is also equipped with a pneumatic mechanism. Specifically, a gas guide pipe 291 is arranged at the same horizontal level as the connecting gas pipe 25 near the right side of the gas-solid separation component 22, with the pipe opening facing the gas-solid separation component 22. The pipe body passes vertically through the bottom of the gas-solid separation assembly 2 and connects to the vacuum pump 29. A fourth three-way valve 293 is provided in the gas guide pipe 291 between the vacuum pump 29 and the bottom of the gas-solid separation assembly 2. A backflush gas pipe 292 is arranged horizontally, and the backflush gas is inert gas nitrogen.

[0082] The gas-solid separation component 2 also includes a separation chamber 21 and an insulation layer 23, as well as a cooling annular flow channel 24 formed between the two. A cooling water inlet pipe 26 is provided at the bottom of the right side of the insulation layer 23, and a cooling water outlet pipe 27 is provided at the top of the right side. Cold water is introduced through the cooling water inlet pipe 26, flows in the cooling annular flow channel 24, and flows out from the cooling water outlet pipe 27 to form a cooling circulation system, which is used to quickly cool down high-temperature samples during the sampling process.

[0083] Working status description:

[0084] The sampling device is axially inserted into the furnace body from the tail end and fixed by the fixing component 4, rotating with the furnace body. During real-time sampling in the high-temperature furnace, the control system of the two-way valve 12 allows for sequential or intermittent sampling from three sampling holes 11 at different locations. Taking sampling from the sampling hole 11 at the end of the sampling tube 1 as an example, the two-way valve 12 at the end is set to be in the working state, while the remaining two-way valves 12 are in the closed state. First, inert gas is blown in through the backflush pipe 292 and blown out along the sampling tube 1 from the two-way valve 12 at the sampling hole 11, preventing powder generated during the high-temperature furnace operation from accumulating near the sampling hole 11 and causing blockage, as well as inaccurate sampling. Then, the fourth three-way valve 293 is adjusted to close the backflush pipe 292, and simultaneously the vacuum pump 29 is started to evacuate the furnace body, ensuring proper ventilation. The powder enters the sampling tube 1 through the bidirectional valve 12 and sampling port 11 with the airflow; at the same time, the cooling circulation system is turned on, and when the high-temperature powder enters the separation chamber 21 with the airflow through the connecting air pipe 25, it can be cooled quickly to avoid oxidation of the high-temperature powder and to prevent burns during the powder sample collection operation; after the gas containing the powder enters the separation chamber 21, it passes through the gas-solid separation component 22, the powder is intercepted and falls into the sample chamber 3 by gravity, and thus the test sample is obtained; the gas passes through the gas-solid separation component 22 and is discharged into the air from the gas outlet 28.

[0085] After sampling is completed, adjust the fourth three-way valve 293, turn off the vacuum pump 29, and at the same time open the backflush pipe 292 to backflush, shake off the residual powder on the gas-solid separation component 22 into the sample chamber 3, and backflush the powder accumulated in the sampling tube 1 into the high-temperature furnace body, so as to prevent the residue of this sample from being mixed into the next sample and causing the problem of low sampling accuracy.

[0086] Furthermore, the remaining two bidirectional valves 12 can be used to sample powder at corresponding locations according to the above operation, thereby enabling separate real-time sampling at different locations and at different times during the operation of the high-temperature furnace. This can effectively improve the accuracy of sampling, monitor the quality of products prepared by the high-temperature furnace in real time, and improve work efficiency.

[0087] Example 2:

[0088] As shown in Figures 3-6, the difference between the powder sampling device provided in this embodiment and that in Embodiment 1 is that the sampling tube 1 is a telescopic tube. Specifically:

[0089] The retractable sampling tube 1 includes a screw jack 17, a first section of pipe 13, a second section of pipe 14, and a third section of pipe 15. The starting ends (i.e., near the large-diameter pipe end) of the first section of pipe 13 and the second section of pipe 14, as well as the tail end of the connecting air tube 25, are provided with inner clamps B along their inner walls. The ending ends (i.e., near the small-diameter pipe end) of the first section of pipe 13 and the second section of pipe 14, as well as the outer walls, are provided with outer clamps A. The starting end of the third section of pipe 15 is also provided with an outer clamp A along its outer wall. The outer clamps A of the first section of pipe 13, the second section of pipe 14, and the third section of pipe 15 are respectively engaged with the inner clamps B of the preceding pipe section or the connecting air tube 25. The first section of pipe 13, the second section of pipe 14, and the third section of pipe 15 have the same length, but are shorter than the length of the connecting air tube 25.

[0090] The other end of the third section of pipe 15 is provided with a flip-open cover assembly 16. The cover assembly 16 includes a cover plate 161. The edge of the cover plate 161 is connected by a connector 162, and the third section of pipe 15 is rotatable hinge. A hinge connector 163 is provided on the outside of the cover plate 161, and a rotatable hinge linkage mechanism 18 is provided.

[0091] One end of the screw jack 17 is provided with a sleeve 172, which is fixed to the outer surface of the insulation layer 23 of the gas-solid separation component 2 by a sleeve fixing member 171; one end of the screw jack 17 passes through the sleeve 172; the surface of the sleeve 172 is provided with a strip sliding groove 173, which is fixedly connected to the linkage mechanism 18.

[0092] The linkage mechanism 18 includes a power reciprocating rod 181, a reciprocating rotating connecting plate 182, a connecting reciprocating rod 183, and a rotating plate reciprocating bracket 184. The rotating plate reciprocating bracket 184 is fixed by rotating plate reciprocating bracket fixing parts 185. The rotating plate reciprocating bracket fixing parts 185 are welded and fixed to the side of the third section of pipe 15 and the other end of the screw jack 17, respectively. The reciprocating rotating connecting plate 182 is hinged to the rotating plate reciprocating bracket 184 in the middle. The two ends are symmetrically provided with waist holes 186. The waist holes 186 are respectively horizontally provided with matching limiting rods 187. The limiting rod 187 passes through the waist hole 186 and is fixed to one end of the power reciprocating rod 181 and the connecting reciprocating rod 183 respectively; the other end of the power reciprocating rod 181 is fixed to the sleeve 172 of the screw jack 17 through the strip sliding groove 173. The power reciprocating rod 181 can slide freely back and forth in the strip sliding groove 173, and the strip sliding groove 173 is also provided with a buckle structure for fixing the power reciprocating rod 181 in a specific state during the operation of the connecting rod mechanism 18; the other end of the connecting reciprocating rod 183 is hinged to the outside of the cover plate 161.

[0093] Working status description:

[0094] Similar to Example 1, before the sampling device enters the high-temperature furnace, the screw jack 17 is rotated to retract the first section of pipe 13, the second section of pipe 14, and the third section of pipe 15 into the connecting gas pipe 25, and the power reciprocating rod 181 also slides accordingly.

[0095] The sampling device is fixed to the tail of the high-temperature furnace by the fixing member 4, ensuring that the sampling tube 1 can be axially inserted into the furnace body and rotate with the high-temperature furnace body. The screw jack 17 is rotated to drive the third section of pipe 15 into the furnace, and then sequentially drive the second section of pipe 14 and the first section of pipe 13 into the furnace to reach the corresponding sampling point. Then, the power reciprocating rod 181 in the linkage mechanism 18 is pulled, which in turn drives the reciprocating rotating connecting plate 182 and the reciprocating rod 183, thereby opening the cover plate 161. Sampling is carried out at the corresponding point under the lifting state in the high-temperature furnace. The operation of the powder entering the gas-solid separation component with the airflow is the same as in Example 1.

[0096] After sampling is completed, adjust the fourth three-way valve 293 to turn off the vacuum pump 29, and at the same time open the backflush pipe 292 to backflush, shake off the residual powder on the gas-solid separation component 22 into the sample chamber 3, and backflush the powder accumulated in multiple pipes of different diameters into the high-temperature furnace body to prevent the residue of this sample from being mixed into the next sample and causing the problem of low sampling accuracy; then pull the linkage mechanism 18 to close the cover plate 161, and at the same time close the backflush pipe 292 to complete one sampling.

[0097] Similarly, by adjusting the sampling point using the screw jack 17, powder samples can be taken from different points. The operation is simple, convenient, and highly safe.

[0098] Example 3:

[0099] As shown in Figure 7, the difference between the powder sampling device provided in this embodiment and that in Embodiment 1 is that the sampling tube 1 can include multiple sampling pipes of different lengths. In this embodiment, three sampling pipes of different lengths are provided. Specifically:

[0100] The retractable sampling tube 1 includes a first sampling pipe 191, a second sampling pipe 192, and a third sampling pipe 193, which are respectively connected to the gas-solid separation component 2 via connecting pipes 25. A first three-way valve 254 is flanged at one end of the connecting pipe 25 near the gas-solid separation component 2, and a first inflation pipe 251 is connected to the other end of the first three-way valve 254. A second three-way valve 255 is flanged at one end of the connecting pipe 25 near the gas-solid separation component 2, and a second inflation pipe 252 is connected to the other end of the second three-way valve 255. A third three-way valve 256 is flanged at one end of the connecting pipe 25 near the gas-solid separation component 2, and a third inflation pipe 253 is connected to the other end of the third three-way valve 256. The gas used to fill the first inflation pipe 251, the second inflation pipe 252, and the third inflation pipe 253 is inert gas, specifically nitrogen.

[0101] Working status description:

[0102] Similar to Example 1, before the sampling device enters the high-temperature furnace, the first three-way valve 254, the second three-way valve 255, and the third three-way valve 256 are adjusted to connect the gas filling pipe and the sampling pipe. The sampling device is then fixed to the tail of the high-temperature furnace using the fixing member 4, ensuring that the sampling tube 1 can be axially inserted into the furnace body and rotate with the high-temperature furnace body. While the high-temperature furnace body is running, the first gas filling pipe 251, the second gas filling pipe 252, and the third gas filling pipe 253 are opened, and the gas pressure entering each gas filling pipe must be greater than the furnace pressure. When sampling is required, different sampling pipes are selected sequentially according to the needs. Taking the first sampling pipe as an example, the first three-way valve 254 is controlled to connect the first sampling pipe 191 to the gas-solid separation component 2, while the first gas filling pipe 251 is closed, and sampling is performed through the first sampling pipe 191. The specific sampling process is the same as the operation in Example 1 where the gas flow containing the powder sample enters the gas-solid separation component 2.

[0103] After sampling is completed, adjust the fourth three-way valve 293 to turn off the vacuum pump 29, and at the same time open the backflush pipe 292 to backflush, shake off the residual powder on the gas-solid separation component 22 into the sample chamber 3, and backflush the powder accumulated in multiple pipes of different diameters into the high-temperature furnace body; then adjust the first three-way valve 254 to connect the first gas filling pipe 251 and the first sampling pipe 191, and open the first gas filling pipe 251 so that the gas filling air pressure is greater than the furnace pressure; at the same time, close the backflush pipe 292 to complete one sampling.

[0104] Similarly, the sampling operation of other sampling pipelines is the same, thereby realizing real-time online sampling of powder at different sites. The operation is simple and convenient, and the safety is high.

[0105] Example 4:

[0106] As shown in Figure 8, this embodiment provides a chemical vapor deposition system, including a feed bin I, an air intake assembly II, a rotary kiln III, and a receiving bin V. The feed bin I is connected to the rotary kiln III through a feed pipe I-1, and the air intake assembly II is connected to the inside of the rotary kiln III through a third air intake pipe II-5. The receiving bin V is connected to the tail end of the rotary kiln III through a feed pipe. Furthermore, the tail end of the rotary kiln III is also provided with a powder sampling device as described in Embodiment 1 (the only difference is that five sampling holes 11 are equally spaced on the sampling pipe 1).

[0107] The air intake assembly II includes a first air intake pipe II-1, a second air intake pipe II-2, a flow meter II-3, a gas mixer II-4, and a third air intake pipe II-5. The first air intake pipe II-1 and the second air intake pipe II-2 are respectively connected to the gas mixer II-4 through the flow meter II-3. One end of the third air intake pipe II-5 is sealed to the gas mixer II-4, and the other end is fixedly connected to the inlet of the rotary kiln III and extends into the interior of the rotary kiln III.

[0108] The rotary kiln III is equipped with a rotary kiln insulation layer III-1 on the outside; the internal furnace body and the insulation layer III-1 are fixed by rotary kiln fasteners III-3; the rotary kiln III is equipped with multiple material-carrying plates III-2, which are welded to the inner wall of the furnace body to improve the stirring effect of raw materials and work efficiency, and to improve the uniformity of vapor deposition.

[0109] In another embodiment, the gas outlet pipe of the sampling device can be connected to a gas separation and recovery device to recover and reuse the separated gas; for example, part of the gas separated by the gas separation and recovery device is connected to the gas inlet assembly through a gas guide pipe for reuse.

[0110] Example 5:

[0111] This embodiment provides a chemical vapor deposition system, which differs from Embodiment 4 in that the sampling tube 1 of the sampling device has a spiral structure and is fixed circumferentially along the inner wall of the furnace, as shown in Figure 9.

[0112] The embodiments described above are preferred embodiments of this utility model and are not intended to limit the scope of protection of this utility model. Therefore, all equivalent changes made to the structure, shape, and principle of this utility model should be included within the scope of protection of this utility model. The above-disclosed embodiments are preferred embodiments, but the scope of protection of this utility model is not limited thereto. Those skilled in the art can easily understand the spirit of this utility model based on the above embodiments and make different extensions and variations. However, as long as they do not depart from the spirit of this utility model, they are all within the scope of protection of this utility model.

[0113] It should be noted that the terminology used in this document is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0114] It should be noted that, unless otherwise explicitly specified and limited, terms such as "installation," "connection," "joining," "fixing," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0115] Furthermore, it should be noted that in the description of this utility model, the use of terms such as "first" and "second" to define the components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this application. In the description of this utility model, unless otherwise stated, "multiple" means two or more.

Claims

1. A powder sampling device, comprising: The sampling tube, the gas-solid separation component, and the sample chamber are provided. The sampling tube is connected to the gas-solid separation component via a connecting gas pipe, and the sample chamber is connected to the gas-solid separation component via a guide pipe. The sampling tube is characterized in that at least one sampling hole is provided at equal intervals on the sampling tube, and a two-way valve is provided at the sampling hole; or, the sampling tube is telescopic; or, the sampling tube has two or more sampling pipes of different lengths arranged side by side.

2. The powder sampling device according to claim 1, characterized in that: The sampling tube has 2 to 10 sampling holes spaced at equal intervals.

3. The powder sampling device according to claim 1, characterized in that: The sampling tube includes a screw jack and multiple sampling pipes with progressively smaller diameters; one end of the screw jack is connected to the smallest diameter sampling pipe via a linkage mechanism.

4. The powder sampling device according to claim 3, characterized in that: One end of the minimum diameter sampling pipe is provided with a flip-top cover assembly, the cover assembly including a cover plate, the edge of which is rotatably hinged to the sampling pipe via a connector; the outer hinge of the cover plate has a linkage mechanism; and / or, the sampling pipe sections with progressively decreasing diameters have inner clamps along the inner wall at the starting end of the first to penultimate sections and at the tail of the connecting pipe, and outer clamps along the outer wall at the ending end of the first to penultimate sections; and outer clamps along the outer wall at the starting end of the last section; the outer clamps of the first to last sections are respectively engaged with the inner clamps of the preceding sampling pipe section or the connecting pipe; and / or, the sampling pipe sections with progressively decreasing diameters have the same length; and / or, the other end of the screw jack is provided with a sleeve fixed to the gas-solid separation assembly; and / or, the linkage mechanism includes a power reciprocating rod, The system comprises a reciprocating rotating connecting plate, a connecting reciprocating rod, and a rotating plate reciprocating bracket. The rotating plate reciprocating bracket is fixed by a rotating plate reciprocating bracket fixing component, which is fixedly connected to the side of the sampling tube and one end of the screw jack. The reciprocating rotating connecting plate is hinged to the rotating plate reciprocating bracket in the middle. Symmetrical waist holes are provided at both ends of the reciprocating plate. Matching limit rods are horizontally provided in the waist holes. The limit rods pass through the waist holes and are fixed to one end of the power reciprocating rod and the connecting reciprocating rod, respectively. The other end of the power reciprocating rod is fixed to the screw jack sleeve through a strip sliding groove. The other end of the connecting reciprocating rod is hinged to the outside of the cover plate. And / or, the sampling tube has two or more sampling pipes of different lengths arranged side by side. The sampling pipes are connected to the gas-solid separation component through connecting air pipes. A three-way valve is provided at the end of the connecting air pipe. One port of the three-way valve is connected to an inflation pipe.

5. The powder sampling device according to claim 1, characterized in that: The gas-solid separation assembly includes a separation chamber covered with an insulation layer, and a cooling annular flow channel is provided between the two. A gas-solid separation component is fixedly installed inside the separation chamber. An air outlet is provided at the top of the separation chamber, and an air outlet pipe is provided through the cooling annular flow channel and the insulation layer. A material outlet is provided at the bottom, and a material guide pipe is provided through the cooling annular flow channel and the insulation layer to connect to the sample chamber.

6. The powder sampling device according to claim 5, characterized in that: The lower part of the side of the insulation layer is provided with a cooling water inlet or an air inlet, and the upper part is provided with a cooling water outlet or an air outlet; and / or, a pneumatic mechanism is provided on one side of the gas-solid separation component, the pneumatic mechanism including an air guide pipe, which passes through the cooling annular flow channel and the outside of the insulation layer and connects to the backflush air component or a vacuum pump, and the air extraction or backflush air is controlled by a valve; and / or, the upper end of the air guide pipe extends to the height of the middle of the gas-solid separation component, or the same height as the connecting air pipe connected to the sampling tube; the port of the air guide pipe faces the direction of the gas-solid separation component or the sampling tube; and / or, the gas-solid separation component includes a membrane separator or a filter cartridge.

7. A chemical vapor deposition system, comprising a feed hopper, a rotary kiln, an inlet gas assembly, and a receiving hopper, wherein the feed hopper is connected to the interior of the rotary kiln via a feed pipe, the inlet gas assembly is connected to the interior of the rotary kiln via an inlet gas assembly, and the receiving hopper is connected to the tail end of the rotary kiln via a feed pipe, characterized in that: The rotary kiln is provided with a powder sampling device as described in any one of claims 1-6 at its tail end, and the sampling tube of the powder sampling device is inserted into the rotary kiln along the axial direction of the kiln body.

8. The chemical vapor deposition system according to claim 7, characterized in that: The sampling tube can be either linear or spiral.

9. The chemical vapor deposition system according to claim 7, characterized in that: The bidirectional valve on the sampling tube of the powder sampling device is selected from ultra-high temperature valves; and / or, the material of the bidirectional valve is selected from metal-based high-temperature alloys containing at least one of iron, nickel, and cobalt.

10. The chemical vapor deposition system according to claim 7, 8, or 9, characterized in that: The outlet pipe of the gas-solid separation component in the sampling device can be connected to the gas separation and recovery device; and / or, a portion of the gas separated by the gas separation and recovery device is introduced into the inlet component through the gas guide pipe for reuse.

Images