Probe cold conduction structure for probe station

Abstract

The utility model relates to the technical field of semiconductor detection, in particular to a probe cold conduction structure for a probe station, which comprises a vacuum cavity body, a workpiece supporting seat which is fixedly arranged on the bottom wall of the vacuum cavity body in a penetrating manner to support a workpiece, and a probe arm which is inserted on the peripheral wall of the vacuum cavity body in a sliding manner along the radial direction, the other end of the cold conduction belt is connected to the inner wall of the bottom of the vacuum cavity body or the outer wall of the workpiece supporting base. The probe arm is connected with the cold conduction belt, and the other end of the cold conduction belt is connected to the inner wall of the bottom of the vacuum cavity body or the outer wall of the workpiece supporting seat, so that cold in the vacuum cavity is conducted to the probe arm. According to the structure, the probe arm can be pre-cooled, so that the temperature of a sample is effectively prevented from rising due to temperature difference in the test process of the probe arm, and the test precision is further improved.

Description

A probe cooling structure for a probe station Technical Field

[0001] This application relates to the field of semiconductor detection technology, and in particular to a probe cooling structure for a probe station. Background Technology

[0002] A probe station is a device used to test electronic products such as semiconductor devices, integrated circuits, and optoelectronic components. It can measure electrical performance parameters such as voltage, current, and signal transmission by having a precisely positioned probe contact the test point.

[0003] Probe stages typically perform electrical tests on samples at corresponding temperatures under vacuum conditions. These tests require a DC probe to contact the sample. Existing probe stages use a closed-loop refrigerator to cool a workpiece support embedded in the vacuum chamber's bottom wall, resulting in a low internal temperature. However, especially when the probe arm contacts the workpiece, the probe arm's high temperature can easily cause temperature changes in the workpiece through heat conduction, affecting the accuracy of the test results. Therefore, further improvements are needed. Summary of the Invention

[0004] To improve testing accuracy, this application provides a probe cooling structure for a probe station.

[0005] The probe cooling structure for a probe station provided in this application adopts the following technical solution:

[0006] A probe cooling structure for a probe station is characterized by comprising a vacuum chamber body, a workpiece support seat fixedly inserted through the bottom wall of the vacuum chamber body to support the workpiece, and a probe arm that slides radially and is inserted into the peripheral wall of the vacuum chamber body. The probe arm is connected to a cooling strip, and the other end of the cooling strip is connected to the inner wall of the bottom of the vacuum chamber body or the outer wall of the workpiece support seat.

[0007] By adopting the above technical solution, the probe arm is connected to a cooling conductor, the other end of which is connected to the inner wall of the bottom of the vacuum chamber or the outer wall of the workpiece support, thereby transferring the cold energy inside the vacuum chamber to the probe arm. This structure can pre-cool the probe arm, effectively preventing the sample temperature from rising due to temperature differences during testing, thus improving testing accuracy.

[0008] Preferably, the cooling strip is a copper strip.

[0009] By adopting the above technical solution, the cooling strip is made of copper. Utilizing the high thermal conductivity of copper, the cooling capacity of the inner wall at the bottom of the vacuum chamber or the workpiece support can be transferred to the probe arm more efficiently, further improving the pre-cooling effect of the probe arm.

[0010] Preferably, one end of the cooling strip is fixedly connected to a cooling head, which is locked to the bottom inner wall of the vacuum chamber body by screws.

[0011] By adopting the above technical solution, one end of the cooling strip is fixedly connected to the cooling head, and the cooling head is locked to the bottom inner wall of the vacuum chamber body by screws, so that the cooling strip can stably and effectively conduct the cold energy of the bottom inner wall of the vacuum chamber body to the probe arm.

[0012] Preferably, one end of the cooling guide strip is fixedly connected to a cooling head, which is locked to the side wall of the workpiece support by screws.

[0013] By adopting the above technical solution, one end of the cooling strip is fixedly connected to the cooling head, and the cooling head is locked to the side wall of the workpiece support by screws, so that the cooling strip can stably transfer the cooling energy of the workpiece support to the probe arm.

[0014] Preferably, a groove is formed on the bottom inner wall of the vacuum chamber body, the length direction of the groove is parallel to the radial direction of the vacuum chamber body, one end of the cooling guide strip is fixedly connected to a cooling head, the cooling head is provided with a slider that is slidably connected to the groove, and the cooling head is threadedly locked with a set screw that abuts against the bottom wall of the vacuum chamber body.

[0015] By adopting the above technical solution, one end of the cooling guide strip is connected to the inner wall of the bottom of the vacuum chamber body through a cooling guide head. The cooling guide head is equipped with a slider to slide along a groove, the direction of which is parallel to the radial direction of the vacuum chamber body, thereby ensuring that the cooling guide head can be flexibly adjusted according to actual needs. At the same time, the cooling guide head is pressed against the bottom wall of the vacuum chamber body by a set screw to ensure the stability of the connection.

[0016] Preferably, one end of the cooling strip is fixedly connected to a cooling clip, and one side of the cooling clip has a notch for the probe arm shaft to be inserted.

[0017] By adopting the above technical solution, a cooling conductor clip is fixedly connected to one end of the cooling conductor strip. One side of the clip has a notch for the probe arm to engage. This structure increases the contact area between the cooling conductor strip and the probe arm, ensuring a stable connection and enabling efficient transfer of cooling energy to the probe arm. Simultaneously, the clip design facilitates installation and disassembly, improving operational convenience.

[0018] Preferably, the probe arm has a limiting groove circumferentially formed around its shaft, and the end face of the cooling clamp abuts against the inner wall of the limiting groove.

[0019] By adopting the above technical solution, the setting of the limiting slot provides a precise positioning structure for the cooling guide clip, which enables the cooling guide clip to be firmly fixed on the probe arm, avoiding loosening caused by vibration or force during the test.

[0020] In summary, this utility model has the following beneficial effects:

[0021] 1. The probe arm is connected to a cooling conductor, the other end of which is connected to the inner wall of the bottom of the vacuum chamber or the outer wall of the workpiece support, thereby transferring the cold air inside the vacuum chamber to the probe arm. This structure allows for pre-cooling of the probe arm, effectively preventing the sample temperature from rising due to temperature differences during testing, thus improving testing accuracy.

[0022] 2. One end of the cooling guide strip is connected to the bottom inner wall of the vacuum chamber body through the cooling guide head. The cooling guide head is equipped with a slider to slide along the slide groove. The direction of the slide groove is parallel to the radial direction of the vacuum chamber body, thereby ensuring that the cooling guide head can be flexibly adjusted according to actual needs. The cooling guide head is pressed against the bottom wall of the vacuum chamber body by a set screw to ensure the stability of the connection.

[0023] 3. One end of the cooling strip is fixedly connected to a cooling clip. One side of the cooling clip has a notch for the probe arm to be inserted. This structure can increase the contact area between the cooling strip and the probe arm, ensuring a stable connection between the cooling strip and the probe arm, so that the cold energy is efficiently transferred to the probe arm. The clip design is easy to install and disassemble, improving the convenience of operation. Attached Figure Description

[0024] Figure 1 is a schematic diagram of the overall structure of a probe cooling structure for a probe station in Embodiment 1;

[0025] Figure 2 is a schematic diagram of the internal structure of the vacuum cavity body in Example 1;

[0026] Figure 3 is a schematic diagram of the cooling strip structure in Example 1;

[0027] Figure 4 is a schematic diagram of the internal structure of the vacuum cavity body in Example 2;

[0028] Figure 5 is a schematic diagram of the connection structure between the cooling strip and the probe arm in Example 3;

[0029] Figure 6 is a schematic diagram of the connection structure of the cooling clip in Embodiment 3.

[0030] In the figure, 1 is the worktable; 2 is the vacuum chamber body; 21 is the slide; 3 is the workpiece support; 4 is the probe arm; 41 is the probe body; 42 is the limiting slot; 5 is the cooling belt; 51 is the cooling head; 52 is the set screw; 53 is the cooling clip; and 54 is the notch. Detailed Implementation

[0031] The present application will be further described in detail below with reference to Figures 1-6.

[0032] Example 1:

[0033] This application discloses a probe cooling structure for a probe station. Referring to Figures 1 and 2, it includes a worktable 1, a vacuum chamber body 2 fixedly inserted through the worktable 1, a workpiece support seat 3 fixedly inserted through the bottom wall of the vacuum chamber body 2 to support the workpiece, and a probe arm 4 disposed on the worktable 1 and radially slidably inserted into the peripheral wall of the vacuum chamber body 2. The connection structure between the vacuum chamber body 2 and the worktable 1, the connection structure between the workpiece support seat 3 and the vacuum chamber body 2, and the connection structure between the probe arm 4 and the worktable 1 are all prior art and will not be described in detail here.

[0034] Referring to Figures 2 and 3, each probe arm 4 is connected to two cooling strips 5. The other end of the cooling strip 5 is connected to the inner wall of the bottom of the vacuum chamber body 2 or the outer wall of the workpiece support 3. The probe body 41 is installed at the head of the probe arm 4. Specifically, the cooling strip 5 is a copper strip. One end of the cooling strip 5 is welded and fixedly connected to the outer wall of the probe arm 4, and the other end of the cooling strip 5 is fixedly connected to a cooling head 51. The cooling head 51 is a copper block. In this embodiment, the cooling head 51 is locked to the inner wall of the bottom of the vacuum chamber body 2 by screws. In other embodiments, the cooling head 51 is locked to the side wall of the workpiece support 3 by screws.

[0035] The implementation principle of the probe cooling structure for a probe station in this application embodiment is as follows: the probe arm 4 is connected to the cooling strip 5, and the other end of the cooling strip 5 is connected to the inner wall of the bottom of the vacuum chamber body 2 or the outer wall of the workpiece support 3, thereby conducting the cold energy inside the vacuum chamber to the probe body 41 on the probe arm 4, thereby pre-cooling the probe body 41, effectively avoiding the sample temperature rise caused by temperature difference during the test, and thus improving the test accuracy.

[0036] Example 2:

[0037] The difference from Embodiment 1 is that, referring to Figure 4, a groove 21 is formed on the inner bottom wall of the vacuum chamber body 2. The groove 21 is a T-shaped groove, and its length is parallel to the radial direction of the vacuum chamber body 2. The cooling head 51 is provided with a slider that is slidably connected to the groove 21. The slider is a T-shaped block, and the cooling head 51 is threadedly fitted with a set screw 52 that abuts against the bottom wall of the vacuum chamber body 2. The cooling head 51 can be flexibly adjusted in position according to actual needs. The cooling head 51 is abutted against the bottom wall of the vacuum chamber body 2 by the set screw 52 to ensure the stability of the connection.

[0038] Example 3:

[0039] The difference from Embodiment 1 is that, referring to Figures 5 and 6, a limiting groove 42 is formed around the probe arm 4, and a cooling guide clip 53 is fixedly connected to one end of the cooling guide strip 5. The cooling guide clip 53 is a copper sleeve, and one side of the cooling guide clip 53 has a notch 54 for the probe arm 4 to be inserted into. The end face of the cooling guide clip 53 abuts against the inner wall of the limiting groove 42. The cooling guide clip 53 is engaged with the probe arm 4, which increases the contact area between the cooling guide strip 5 and the probe arm 4, ensuring a stable connection between the cooling guide strip 5 and the probe arm 4.

[0040] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A probe cooling structure for a probe station, characterized in that: It includes a vacuum chamber body (2), a workpiece support seat (3) fixedly inserted through the bottom wall of the vacuum chamber body (2) to support the workpiece, and a probe arm (4) that slides radially into the periphery of the vacuum chamber body (2). The probe arm (4) is connected to a cooling belt (5), and the other end of the cooling belt (5) is connected to the inner wall of the bottom of the vacuum chamber body (2) or the outer wall of the workpiece support seat (3).

2. The probe cooling structure for a probe station according to claim 1, characterized in that: The cooling strip (5) is a copper strip.

3. The probe guide cooling structure for a probe station according to claim 1, wherein: One end of the cooling strip (5) is fixedly connected to a cooling head (51), which is locked to the bottom inner wall of the vacuum chamber body (2) by screws.

4. The probe guide cooling structure for a probe station according to claim 1, wherein: One end of the cooling strip (5) is fixedly connected to a cooling head (51), which is locked to the side wall of the workpiece support (3) by screws.

5. The probe cooling structure for a probe station according to claim 1, characterized in that: The bottom inner wall of the vacuum chamber body (2) is provided with a sliding groove (21). The length direction of the sliding groove (21) is parallel to the radial direction of the vacuum chamber body (2). One end of the cooling strip (5) is fixedly connected to a cooling head (51). The cooling head (51) is provided with a slider that is slidably connected to the sliding groove (21). The cooling head (51) is threaded with a set screw (52) that abuts against the bottom wall of the vacuum chamber body (2).

6. The probe guide cooling structure for a probe station according to claim 1, wherein: One end of the cooling strip (5) is fixedly connected to a cooling clip (53), and one side of the cooling clip (53) has a notch (54) for the probe arm (4) to be inserted.

7. The probe guide cooling structure for a probe station according to claim 6, wherein: The probe arm (4) has a limiting slot (42) around its shaft, and the end face of the cooling clip (53) abuts against the inner wall of the limiting slot (42).

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