Mask repairing device

Abstract

The utility model provides a mask repairing device which comprises a moving platform, a laser system and an imaging system, and the moving platform is configured to move along a first direction and / or a second direction in a plane; the laser system comprises a laser head and an adjusting assembly, and the laser head is connected with the motion platform through the adjusting assembly and located above the motion platform. The imaging system comprises an image acquisition unit, and the image acquisition unit is connected with the laser head; the image acquisition unit is configured to acquire image information of the mask and control the motion platform to move according to the image information of the mask; and the motion platform is configured to respond to the image information of the mask plate acquired by the image acquisition unit so as to drive the laser head to synchronously move along with the motion platform to repair the mask plate. According to the device, the motion platform can drive the laser head to move according to the image information of the to-be-repaired part of the mask collected by the image collection unit, so that the laser head is adjusted to be aligned with the to-be-repaired part, user operation is facilitated, and the repair qualification rate is ensured.

Description

A mask repair device Technical Field

[0001] This utility model belongs to the field of mask repair technology, and in particular relates to a mask repair device. Background Technology

[0002] A photomask is a precision coated glass substrate containing a microscopic image of electronic circuits. As a core component in the manufacturing process of electronic products, its main function is to transfer the designer's circuit pattern to the glass substrate or semiconductor wafer used in downstream products through photolithography, and then to become a qualified final product through subsequent processes, packaging, and testing.

[0003] In its manufacturing process, a photomask is created by depositing a chromium film and coating a photoresist material on a substrate. The desired design pattern is then drawn using laser direct-write lithography. A developing process removes unwanted photoresist from the substrate, followed by an etching process to remove the chromium film not covered by the photoresist. Finally, a demolding process removes any remaining photoresist, resulting in the final pattern on the substrate. Due to factors such as the manufacturing process, materials, and environment, photomasks are prone to defects after etching, such as chromium residue, which require repair using laser resurfacing.

[0004] However, the repair device in the related technology does not smooth the burrs on the edge of the mask enough, resulting in a low product yield. Summary of the Invention

[0005] The present invention aims to provide a mask repair device to improve the repair qualification rate.

[0006] This application provides a mask repair device, comprising:

[0007] A motion platform configured to move in a plane along a first direction and / or a second direction, the first direction and the second direction being perpendicular to each other;

[0008] A laser system includes a laser head and an adjustment assembly. The laser head is connected to a motion platform via the adjustment assembly and is located above the motion platform. The laser head is configured to move synchronously with the motion platform to repair a mask. The adjustment assembly is configured to adjust the laser emitted by the laser head to be perpendicular to the motion platform.

[0009] An imaging system, comprising an image acquisition unit connected to the laser head; the image acquisition unit is configured to acquire image information from a mask and control the motion platform based on the image information from the mask.

[0010] The motion platform is configured to respond to the image information of the mask acquired by the image acquisition unit, so as to drive the laser head to move synchronously with the motion platform to repair the mask.

[0011] In some embodiments, a clamp is also included, which is disposed below the laser head and above the motion platform; the clamp is configured to hold and position the positioning mask.

[0012] In some embodiments, the imaging system further includes a display unit electrically connected to the image acquisition unit, the display unit being configured to display image information of a mask acquired by the image acquisition unit.

[0013] In some embodiments, the imaging system further includes an image magnification unit connected between the image acquisition unit and the display unit. The image magnification unit is configured to magnify the image information of the mask acquired by the image acquisition unit and provide the magnified image information to the display unit.

[0014] In some embodiments, the imaging system further includes a focus adjustment component configured to adjust the distance between the image acquisition unit and the mask.

[0015] In some embodiments, the laser system further includes a support bracket mounted on the motion platform, and the laser head is connected to the support bracket via the adjustment assembly.

[0016] In some embodiments, the adjustment assembly includes at least two adjustment members that connect the laser head to the support, the at least two adjustment members being arranged at intervals on opposite sides of the laser head, and the at least two adjustment members being capable of adjusting the height of the laser head relative to the motion platform.

[0017] In some embodiments, the motion platform includes a platform, a first drive component, and a second drive component. The platform is connected to the power output end of the first drive component, and the first drive component is connected to the power output end of the second drive component. The first drive component is configured to output motion along a first direction, and the second drive component is configured to output motion along a second direction.

[0018] In some embodiments, the motion platform further includes a damping unit disposed between the platform and the power output end of the first drive assembly, the damping unit being configured to eliminate vibrations experienced by the platform.

[0019] In some embodiments,

[0020] The first drive assembly includes a first transmission unit and a first drive unit. The platform is connected to the first transmission unit, and the first transmission unit is connected to the power output end of the first drive unit. The first drive unit is configured to drive the first transmission unit to output motion along a first direction.

[0021] The second drive assembly includes a second transmission unit and a second drive unit. The second transmission unit is connected to the first drive unit, and the second drive unit is configured to drive the second transmission unit to output motion along a second direction.

[0022] This invention provides a mask repair device. The motion platform can output movement along a first direction and / or a second direction based on the image information of the part of the mask to be repaired acquired by the image acquisition unit, so as to adjust the laser head to be aligned with the part to be repaired. At the same time, the adjustment component can adjust the position of the laser head to facilitate user operation and ensure that the laser head can be aligned with the part of the mask to be repaired, thereby improving the repair qualification rate. Attached Figure Description

[0023] Figure 1 is a schematic diagram of the mask repair device provided in this application;

[0024] Figure 2 is a right view of the mask repair device provided in this application;

[0025] Figure 3 is a schematic diagram of the structure of the mask repair device provided in this application, which includes a display unit;

[0026] Figure 4 is a schematic diagram of the laser system in the mask repair device provided in this application;

[0027] Figure 5 is a top view of the motion platform in the mask repair device provided in this application;

[0028] Figure 6 is a schematic diagram of the imaging component in the mask repair device provided in this application. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described below in conjunction with the accompanying drawings and embodiments.

[0030] In related technologies, mask repair devices can be repaired using focused ion beam repair, electron beam induced deposition, or nanomaterials, but these repair methods are costly and not suitable for large-scale application.

[0031] As shown in Figures 1-6, the mask repair device provided in this application includes a motion platform 10, a laser system 20, and an imaging system 30.

[0032] The motion platform 10 is configured to move in a plane along a first direction and / or a second direction, wherein the first direction and the second direction are perpendicular to each other. The plane in which the motion platform 10 moves is a plane at least parallel to the surface of the motion platform 10, and this plane is a horizontal plane.

[0033] Combining the XY coordinate system shown in Figures 1 and 6, the first direction is the direction of the X-axis, and the second direction is the direction of the Y-axis. The motion platform 10 can output reciprocating motion in the horizontal plane along the positive and negative X-axis, and also output reciprocating motion in the horizontal plane along the positive and negative Y-axis, thereby realizing the adjustment of the laser system 20 installed on the motion platform 10 at different positions.

[0034] The laser system 20 includes a laser head 21 and an adjustment component 22. The laser head 21 is connected to the motion platform 10 through the adjustment component 22 and is located above the motion platform 10. The laser head 21 can be positioned between the laser head 21 and the motion platform 10 to locate the mask to be repaired. Please refer to the following embodiments for details.

[0035] The laser head 21 is configured to move synchronously with the motion platform 10 to repair the mask. The motion platform 10 moves along a first direction and / or a second direction based on the position of the area to be repaired on the mask. The laser head 21 emits a laser to repair the area on the mask, specifically by removing residual chromium from the area. The adjustment component 22 is configured to adjust the laser emitted by the laser head 21 to be perpendicular to the motion platform 10, specifically by adjusting the laser emitted by the laser head 21 to be perpendicular to the water surface, thereby improving repair accuracy.

[0036] In some embodiments, the laser head 21 is also connected to a laser 211, which provides laser light to the laser head 21, so that the laser head 21 can emit the laser light provided by the laser head 21.

[0037] The imaging system 30 includes an image acquisition unit 31, which is connected to the laser head 21 and can move synchronously with the motion platform 10 via the laser head 21.

[0038] The image acquisition unit 31 is configured to acquire image information of the mask and control the motion platform 10 to move based on the image information of the mask. The motion platform 10 is configured to respond to the image information of the mask acquired by the image acquisition unit 31 to drive the laser head 21 to move synchronously with the motion platform 10 to repair the mask.

[0039] In a specific embodiment, the image acquisition unit 31 acquires image information of the part to be repaired on the mask, thereby determining the position of the part to be repaired on the mask. The position information is used to control the motion platform 10 to move so as to drive the laser head 21 to align with the part to be repaired.

[0040] Referring to Figure 6, after the mask is placed or positioned between the laser head 21 and the motion platform 10, the part to be repaired on the mask is located slightly to the upper left relative to the laser head 21. The image acquisition unit 31 acquires the position information of the part to be repaired relative to the laser head 21 as slightly to the upper left, and then outputs a rightward and downward motion control signal to the motion platform 10, so that the motion platform 10 outputs a movement along the first positive direction and then outputs a movement along the second negative direction, so that the laser head 21 is aligned with the part to be repaired on the mask.

[0041] Referring to Figure 6, the upper left direction represents the negative X-axis and positive Y-axis positions. The motion platform 10 outputs movement along the positive first direction and then along the negative second direction. The motion control signal output by the image acquisition unit 31 precisely measures the movement distance to ensure the laser head 21 is aligned with the area to be repaired. Simultaneously, the motion platform 10 outputs movement along the second direction while simultaneously outputting movement along the first direction, significantly improving the efficiency of the replacement repair.

[0042] To facilitate the positioning of the photomask, the photomask repair apparatus provided in this application also includes a clamp (not shown in the figure), which is disposed below the laser head 21 and above the motion platform 10. The clamp is configured to hold and position the photomask.

[0043] The location of the mask is not limited. However, the location of the part to be repaired on the mask is not in the X-axis direction or the Y-axis direction. Therefore, the image acquisition unit 31 acquires the image of the part to be repaired, and the motion platform 10 can be controlled to accurately output the movement along the first and second directions, which is convenient for the user to operate.

[0044] To facilitate the judgment of the image information acquired by the image acquisition unit 31, as shown in Figures 3 and 6, the imaging system 30 provided in this embodiment also includes a display unit 32. The display unit 32 is electrically connected to the image acquisition unit 31 and is configured to display the image information of the mask acquired by the image acquisition unit 31, so as to facilitate the user's observation and judgment.

[0045] To ensure the image signal acquired by the image acquisition unit 31, as shown in Figure 6, the imaging system 30 also includes an image magnification unit 33. The image magnification unit 33 is connected between the image acquisition unit 31 and the display unit 32. The image magnification unit 33 is configured to magnify the image information of the mask acquired by the image acquisition unit 31 and provide the magnified image information to the display unit 33 to ensure that clear image information is obtained.

[0046] To improve the clarity of the images acquired by the image acquisition unit 31, the imaging system provided in this application also includes a focus adjustment component 34, wherein the image acquisition unit 31 is an objective lens group, and the focus adjustment component 34 is configured to adjust the distance between the image acquisition unit 31 and the mask, that is, to adjust the focus of the image acquisition unit 31 relative to the mask.

[0047] As shown in Figure 2, the laser system 20 also includes a baking head 23, which is used to bake the mask to improve the repair efficiency.

[0048] Referring to Figure 1, the laser system 20 also includes a bracket 24, which is mounted on the motion platform 10. The laser head 21 is connected to the bracket 24 via an adjustment component 22 to ensure that the laser head 21 is above the motion platform 10.

[0049] Referring to Figure 4, the adjustment assembly 22 includes at least two adjustment members 221. The at least two adjustment members 221 connect the laser head 21 to the bracket 24. The at least two adjustment members 221 are arranged at intervals on opposite sides of the laser head 21. The at least two adjustment members 221 can adjust the height of the laser head 21 relative to the motion platform 10, thereby adjusting the horizontal position of the laser head 21 so that the laser emitted by the laser head 21 is in a state perpendicular to the motion platform 10.

[0050] Referring to Figure 5, the motion platform 10 includes a platform 11, a first drive assembly 12, and a second drive assembly 13. The platform 11 is connected to the power output end of the first drive assembly 12, and the first drive assembly 12 is connected to the power output end of the second drive assembly 13. The first drive assembly 12 is configured to output motion along a first direction, and the second drive assembly 13 is configured to output motion along a second direction, thereby driving the platform 11 to output motion along the first and / or second directions.

[0051] In some embodiments, the motion platform 10 further includes a shock absorption unit (not shown in the figure), which is disposed between the platform 11 and the power output end of the first drive assembly 12. The shock absorption unit is configured to eliminate the vibrations experienced by the platform 11 in order to improve the accuracy of the laser emitted by the laser head 21, thereby improving the repair accuracy.

[0052] Referring again to Figure 5, the first drive assembly 12 includes a first transmission unit 121 and a first drive unit 122. The platform 11 is connected to the first transmission unit 121, and the first transmission unit 121 is connected to the power output end of the first drive unit 122. The first drive unit 122 is configured to drive the first transmission unit 121 to output movement along a first direction. The second drive assembly 13 includes a second transmission unit 131 and a second drive unit 132. The second transmission unit 131 is connected to the first drive unit 122, and the second drive unit 132 is configured to drive the second transmission unit 131 to output movement along a second direction. The first transmission unit 121 and the second transmission unit 131 can be a lead screw drive assembly or a rack and pinion drive assembly, and the first drive unit 122 and the second drive unit 132 can be drive motors to precisely output movement along the first and / or second directions, thereby adjusting the position of the laser head 21 relative to the area to be repaired on the mask.

[0053] In summary, the mask repair device provided by this utility model allows the motion platform to move along a first direction and / or a second direction based on the image information of the mask to be repaired acquired by the image acquisition unit, thereby adjusting the laser head to align with the area to be repaired. Simultaneously, the adjustment of the laser head position via the adjustment component facilitates user operation, ensuring that the laser head is aligned with the area to be repaired on the mask and improving the repair success rate.

[0054] The above description, in conjunction with specific embodiments, provides a further detailed explanation of this application and should not be construed as limiting the specific implementation of this application to these descriptions. For those skilled in the art, several simple deductions or substitutions can be made without departing from the inventive concept of this application.

Claims

1. A mask repair device, characterized in that, include: A motion platform configured to move in a plane along a first direction and / or a second direction, the first direction and the second direction being perpendicular to each other; a laser system including a laser head and an adjustment assembly, the laser head being connected to the motion platform via the adjustment assembly and located above the motion platform; the laser head being configured to move synchronously with the motion platform to repair a mask; the adjustment assembly being configured to adjust the laser emitted by the laser head to be perpendicular to the motion platform; an imaging system including an image acquisition unit connected to the laser head; the image acquisition unit being configured to acquire image information of the mask and control the motion platform to move based on the image information of the mask; The motion platform is configured to respond to the image information of the mask acquired by the image acquisition unit, so as to drive the laser head to move synchronously with the motion platform to repair the mask.

2. The mask repair device as described in claim 1, characterized in that, It also includes a clamp disposed below the laser head and above the motion platform; the clamp is configured to hold and position the positioning mask.

3. The mask repair device as described in claim 1, characterized in that, The imaging system further includes a display unit electrically connected to the image acquisition unit, and the display unit is configured to display image information of the mask acquired by the image acquisition unit.

4. The mask repair device as described in claim 3, characterized in that, The imaging system further includes an image magnification unit connected between the image acquisition unit and the display unit. The image magnification unit is configured to magnify the image information of the mask acquired by the image acquisition unit and provide the magnified image information to the display unit.

5. The mask repair device as described in claim 1, characterized in that, The imaging system also includes a focus adjustment component configured to adjust the distance between the image acquisition unit and the mask.

6. The mask repair device as described in claim 1, characterized in that, The laser system also includes a support frame, which is mounted on the motion platform, and the laser head is connected to the support frame via the adjustment assembly.

7. The mask repair device as described in claim 6, characterized in that, The adjustment assembly includes at least two adjustment members, which connect the laser head to the bracket. The at least two adjustment members are arranged at intervals on opposite sides of the laser head, and each of the at least two adjustment members can adjust the height of the laser head relative to the motion platform.

8. The mask repair device as described in claim 1, characterized in that, The motion platform includes a platform, a first drive component, and a second drive component. The platform is connected to the power output end of the first drive component, and the first drive component is connected to the power output end of the second drive component. The first drive component is configured to output motion along a first direction, and the second drive component is configured to output motion along a second direction.

9. The mask repair device as described in claim 8, characterized in that, The motion platform also includes a shock absorption unit disposed between the platform and the power output end of the first drive component, the shock absorption unit being configured to eliminate vibrations experienced by the platform.

10. The mask repair apparatus as described in claim 8, characterized in that, The first drive assembly includes a first transmission unit and a first drive unit, the platform is connected to the first transmission unit, and the first transmission unit is connected to the power output end of the first drive unit; the first drive unit is configured to drive the first transmission unit to output motion along a first direction; the second drive assembly includes a second transmission unit and a second drive unit, the second transmission unit is connected to the first drive unit, and the second drive unit is configured to drive the second transmission unit to output motion along a second direction.

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