Novel chemical vapor deposition nozzle structure

Abstract

The utility model discloses a novel chemical vapor deposition spray head structure which comprises a spray head lower cover, a plurality of evenly distributed spray holes are formed in the middle of the bottom end of the spray head lower cover, an annular clamping groove is formed in the outer side of the bottom end of the spray head lower cover, an annular clamping seat is arranged in the annular clamping groove in a clamped mode, and two containing grooves are formed in the outer side of the annular clamping seat. The novel chemical vapor deposition nozzle structure comprises an annular clamping groove, two auxiliary pull rings are arranged in the annular clamping groove, two containing grooves are formed in the annular clamping groove, limiting elastic pieces are fixedly arranged in the two containing grooves, limiting grooves are formed in the two sides of the inner wall of the annular clamping groove, and the two limiting elastic pieces are connected with the two limiting grooves in a clamped mode respectively. The two limiting elastic pieces are separated from the two limiting grooves, then the gas uniformizing plate is driven to move downwards, the multiple sealing rods are inserted into the multiple spraying holes correspondingly, then the multiple spraying holes are dredged and sealed, and it is avoided that the spraying holes are blocked, and then follow-up normal operation of the spray head is affected.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition nozzles, specifically a novel chemical vapor deposition nozzle structure. Background Technology

[0002] In chemical vapor deposition (CVD) equipment, the nozzle is primarily used to uniformly spray the precursor solution onto the substrate surface to form a thin film. The nozzle works by ejecting the precursor solution through a nozzle, which is then dispersed by the airflow and uniformly deposited onto the substrate surface. However, existing CVD nozzle structures lack the ability to clear and seal the spray holes, leading to easy clogging and affecting the normal operation of subsequent nozzles.

[0003] To address the aforementioned issues, a novel chemical vapor deposition nozzle structure is proposed here. Utility Model Content

[0004] The purpose of this invention is to provide a novel chemical vapor deposition nozzle structure to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a novel chemical vapor deposition nozzle structure, comprising a nozzle lower cover, wherein a plurality of evenly distributed spray holes are provided in the middle of the bottom end of the nozzle lower cover, an annular groove is provided on the outer side of the bottom end of the nozzle lower cover, an annular seat is engaged inside the annular groove, two mounting grooves are provided on the outer side of the annular seat, and limiting springs are fixedly provided inside the two mounting grooves, and limiting grooves are provided on both sides of the inner wall of the annular groove, and the two limiting springs are respectively engaged with the two limiting grooves, connecting rods are fixedly provided on both sides of the top end of the annular seat, a gas equalization plate is fixedly provided at the top between the two connecting rods, a plurality of gas equalization holes are provided in the middle of the top end of the gas equalization plate, a plurality of evenly distributed sealing rods are fixedly provided in the middle of the bottom end of the gas equalization plate, a nozzle upper cover is engaged on the outer side of the top end of the nozzle lower cover, and an air inlet channel is fixedly connected to the middle of the top end of the nozzle upper cover.

[0006] By pushing the annular retainer upwards, the air distribution plate is moved upwards, causing several sealing rods to separate from several spray holes. The limiting engagement of two connecting retainers and two connecting pins facilitates the initial limiting of the air distribution plate. The limiting engagement of the annular groove and the annular retainer, and the limiting engagement of two limiting springs with two limiting grooves respectively, facilitate the further limiting of the air distribution plate, ensuring the stable operation of the jet spray. By using a large force to pull down the two auxiliary pull rings, the two limiting springs are separated from the two limiting grooves, thereby driving the air distribution plate downwards. This causes several sealing rods to be inserted into several spray holes, thereby clearing and sealing several spray holes and preventing the spray holes from becoming clogged, which would affect the subsequent normal operation of the nozzle.

[0007] Preferably, each of the two annular slots has a through hole at the top of its inner side, and the two connecting rods are respectively inserted and connected to each other. The two through holes facilitate the stable movement of the two connecting rods.

[0008] Preferably, the bottom ends of the two annular card holders are fixedly connected with auxiliary pull rings. By using a large force to pull down the two auxiliary pull rings, the two limiting spring pieces are separated from the two limiting grooves.

[0009] Preferably, connecting brackets are fixedly provided on both sides of the bottom end of the air intake channel, and connecting pins are engaged inside the two connecting brackets. The two connecting pins are fixedly connected to the air distribution plate. The air distribution plate is initially limited by the limiting engagement of the two connecting pins with the two connecting brackets.

[0010] Preferably, a mounting slot is provided at the connection between the lower nozzle cover and the upper nozzle cover, and a mounting block is engaged inside the mounting slot. The mounting block is fixedly connected to the upper nozzle cover, and the mounting slot engages with the mounting block to facilitate the initial connection between the lower nozzle cover and the upper nozzle cover.

[0011] Preferably, both sides of the lower nozzle cover are threaded with fixing bolts, and both sides of the mounting block are threaded with holes. The two fixing bolts are threadedly connected to the two threaded holes respectively. By fixing the two fixing bolts to the threads of the two threaded holes respectively, it is convenient to further fix the lower nozzle cover and the upper nozzle cover.

[0012] Preferably, a sealing ring is fixedly provided at the connection between the nozzle top cover and the nozzle bottom cover, which can improve the sealing performance.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: by pushing the annular card seat upward, the air distribution plate is moved upward, causing several sealing rods to separate from several spray holes. The limiting engagement of the two connecting card seats and the two connecting card posts facilitates the initial limiting of the air distribution plate. The limiting engagement of the annular card groove and the annular card seat, and the limiting engagement of the two limiting spring pieces with the two limiting grooves respectively, facilitates the further limiting of the air distribution plate, ensuring the stable operation of the jetting. By using a large force to pull down the two auxiliary pull rings, the two limiting spring pieces are separated from the two limiting grooves, thereby driving the air distribution plate downward, causing several sealing rods to be inserted into several spray holes respectively, thereby clearing and sealing several spray holes, preventing the spray holes from being blocked and affecting the subsequent normal operation of the nozzle. Attached Figure Description

[0014] Figure 1 This is a perspective view of the present utility model;

[0015] Figure 2 This is a front sectional view of the present invention;

[0016] Figure 3 This is an enlarged view of part A of this utility model;

[0017] Figure 4 This is an enlarged view of part B of the present invention.

[0018] In the diagram: 1. Lower nozzle cover; 2. Upper nozzle cover; 3. Air inlet channel; 4. Connecting bracket; 5. Connecting pin; 6. Air distribution plate; 7. Air distribution hole; 8. Sealing rod; 9. Spray hole; 10. Connecting rod; 11. Through hole; 12. Annular groove; 13. Annular bracket; 14. Auxiliary pull ring; 15. Installation groove; 16. Limiting spring; 17. Limiting groove; 18. Installation groove; 19. Installation block; 20. Sealing ring; 21. Fixing bolt; 22. Threaded hole. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0020] Please see Figure 1-4This utility model provides a novel chemical vapor deposition nozzle structure, including a nozzle lower cover 1. A plurality of evenly distributed spray holes 9 are formed in the center of the bottom end of the nozzle lower cover 1. An annular groove 12 is formed on the outer side of the bottom end of the nozzle lower cover 1. An annular seat 13 is engaged inside the annular groove 12. Two mounting grooves 15 are formed on the outer side of the annular seat 13. Limiting springs 16 are fixedly installed inside each of the two mounting grooves 15. Limiting grooves 17 are formed on both sides of the inner wall of the annular groove 12. The two limiting springs 16 are engaged with the two limiting grooves 17 respectively. Connecting rods 10 are fixedly installed on both sides of the top end of the annular seat 13. A gas equalization plate 6 is fixedly installed at the top between the two connecting rods 10. A plurality of gas equalization holes 7 are formed in the center of the top end of the gas equalization plate 6. A plurality of evenly distributed sealing rods 8 are fixedly installed in the center of the bottom end of the gas equalization plate 6. A spray hole 9 is formed on the outer side of the top end of the nozzle lower cover 1. The top cover 2 has an air intake channel 3 fixedly connected to the middle of its top. By pushing the annular retainer 13 upward, the air distribution plate 6 is moved upward, causing several sealing rods 8 to separate from several spray holes 9. The air distribution plate 6 is initially limited by the limiting engagement of two connecting retainers 4 and two connecting pins 5. The air distribution plate 6 is further limited by the limiting engagement of the annular groove 12 and the annular retainer 13, and by the limiting engagement of two limiting springs 16 and two limiting grooves 17, respectively, ensuring the stable operation of the jet spray. By using a large force to pull down the two auxiliary pull rings 14, the two limiting springs 16 are separated from the two limiting grooves 17, thereby moving the air distribution plate 6 downward, causing several sealing rods 8 to be inserted into several spray holes 9, thereby clearing and sealing several spray holes 9, preventing the spray holes 9 from being blocked and affecting the subsequent normal operation of the nozzle.

[0021] Two annular slots 12 are provided with through holes 11 at the top of their inner sides. Two connecting rods 10 are inserted and connected to each other. Two annular slots 13 are fixedly connected with auxiliary pull rings 14 at their bottom ends. Connecting slots 4 are fixedly provided on both sides of the bottom end of the air intake channel 3. Connecting pins 5 are engaged inside the two connecting slots 4. The two connecting pins 5 are fixedly connected to the air distribution plate 6.

[0022] In use, the two through holes 11 facilitate the stable movement of the two connecting rods 10. By using a large force to pull down the two auxiliary pull rings 14, the two limiting springs 16 are separated from the two limiting grooves 17. The two connecting pins 5 are respectively engaged with the limiting of the two connecting pin seats 4 to facilitate the initial limiting of the air equalization plate 6.

[0023] A mounting slot 18 is provided at the connection between the lower cover 1 and the upper cover 2 of the nozzle. A mounting block 19 is engaged inside the mounting slot 18. The mounting block 19 is fixedly connected to the upper cover 2 of the nozzle. Fixing bolts 21 are threaded on both sides of the lower cover 1. Threaded holes 22 are provided on both sides of the mounting block 19. The two fixing bolts 21 are threadedly connected to the two threaded holes 22 respectively. A sealing ring 20 is fixedly provided at the connection between the upper cover 2 and the lower cover 1 of the nozzle.

[0024] In use, the mounting slot 18 engages with the mounting block 19 to facilitate the initial connection between the lower cover 1 and the upper cover 2 of the nozzle. The two fixing bolts 21 are fixed to the threads of the two threaded holes 22 to facilitate the further fixed connection between the lower cover 1 and the upper cover 2 of the nozzle. The sealing ring 20 can improve the sealing performance.

[0025] In this embodiment, the following steps are taken during use: Pushing the annular retainer 13 upwards moves the air distribution plate 6 upwards, separating the sealing rods 8 from the spray holes 9. The two connecting retainers 4 and two connecting posts 5 engage to initially limit the air distribution plate 6. Further limiting of the air distribution plate 6 is achieved through the engagement of the annular groove 12 with the annular retainer 13 and the engagement of the two limiting springs 16 with the two limiting grooves 17, ensuring stable jet operation. After operation, a large force is applied to pull down the two auxiliary pull rings 14, separating the two limiting springs 16 from the two limiting grooves 17, causing the air distribution plate 6 to move downwards. This allows the sealing rods 8 to insert into the spray holes 9, thus unblocking and sealing the spray holes 9, preventing blockage and ensuring normal operation of the nozzle.

[0026] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A novel chemical vapor deposition nozzle structure, comprising a nozzle lower cover (1), characterized in that: The nozzle lower cover (1) has several evenly distributed spray holes (9) in the middle of its bottom end. An annular groove (12) is provided on the outer side of the bottom end of the nozzle lower cover (1). An annular seat (13) is engaged inside the annular groove (12). Two mounting slots (15) are provided on the outer side of the annular seat (13). Limiting spring pieces (16) are fixedly installed inside the two mounting slots (15). Limiting grooves (17) are provided on both sides of the inner wall of the annular groove (12). The two limiting spring pieces (16) are respectively engaged with the two... A limiting groove (17) is engaged and connected. Connecting rods (10) are fixedly provided on both sides of the top of the annular card seat (13). A uniform air plate (6) is fixedly provided at the top between the two connecting rods (10). Several uniform air holes (7) are opened in the middle of the top of the uniform air plate (6). Several evenly distributed sealing rods (8) are fixedly provided in the middle of the bottom of the uniform air plate (6). A nozzle top cover (2) is engaged and provided on the outer side of the top of the nozzle bottom cover (1). An air inlet channel (3) is fixedly connected in the middle of the top of the nozzle top cover (2).

2. The novel chemical vapor deposition nozzle structure according to claim 1, characterized in that: The top of the inner side of each of the two annular slots (12) is provided with a through hole (11), and the two connecting rods (10) are respectively inserted and connected to each other.

3. The novel chemical vapor deposition nozzle structure according to claim 1, characterized in that: Both of the two annular card holders (13) are fixedly connected to the bottom end with an auxiliary pull ring (14).

4. The novel chemical vapor deposition nozzle structure according to claim 1, characterized in that: Both sides of the bottom end of the air intake channel (3) are fixedly provided with connecting brackets (4), and both connecting brackets (4) are fitted with connecting pins (5), and both connecting pins (5) are fixedly connected to the air distribution plate (6).

5. The novel chemical vapor deposition nozzle structure according to claim 1, characterized in that: The nozzle lower cover (1) and the nozzle upper cover (2) are connected by a mounting slot (18), and a mounting block (19) is engaged inside the mounting slot (18). The mounting block (19) is fixedly connected to the nozzle upper cover (2).

6. The novel chemical vapor deposition nozzle structure according to claim 5, characterized in that: Both sides of the nozzle lower cover (1) are threaded with fixing bolts (21), and both sides of the mounting block (19) are threaded with holes (22). The two fixing bolts (21) are threadedly connected to the two threaded holes (22) respectively.

7. The novel chemical vapor deposition nozzle structure according to claim 1, characterized in that: A sealing ring (20) is fixedly provided at the connection between the nozzle top cover (2) and the nozzle bottom cover (1).

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