PVD (Physical Vapor Deposition) coating environment temperature monitoring device

Abstract

The utility model discloses a PVD coating environment temperature monitoring device which comprises a heat insulation box, a furnace temperature monitor is arranged in an inner cavity of the heat insulation box, a top cover is connected to the top end of the heat insulation box in a clamped mode, a sliding groove is formed in one side of the top end of the top cover, and a temperature measuring plate is connected to an inner cavity of the sliding groove in a sliding mode. The side hole is formed in the top of one side wall of the heat insulation box and used for a temperature detection line to pass through, two hole blocking plates are arranged in an inner cavity of the side hole, a through hole is formed in one side of the front face of each hole blocking plate, and an auxiliary disassembly piece is arranged on one side of the top cover. According to the utility model, through the arrangement of the temperature measuring plate, after the device monitors the environment in the furnace, the monitoring line end of the furnace temperature monitor can be taken down from the temperature measuring plate, and then the push rod is moved, so that the ejector block moves towards one side of the temperature measuring plate in the inner cavity of the built-in groove until the temperature measuring plate is partially ejected out of the inner cavity of the chute; a worker can conveniently disassemble the temperature measuring plate, and then the normal-temperature temperature measuring plate is installed on the top cover through the sliding groove.

Description

Technical Field

[0001] This utility model relates to the field of temperature monitoring technology, and in particular to a PVD coating environment temperature monitoring device. Background Technology

[0002] A PVD coating environment temperature monitoring device is a device or system used to monitor, record, and analyze the coating environment temperature in real time during the physical vapor deposition (PVD) coating process. Temperature is a crucial parameter in PVD coating, directly affecting the quality, adhesion, and performance of the thin film. Therefore, accurate monitoring of the PVD coating environment temperature is key to ensuring coating quality. Common coating environment temperature monitoring devices include furnace temperature meters, fiber optic sensors, and infrared thermometers.

[0003] The existing utility model patent with publication number CN216012530U discloses a furnace temperature tester. "The furnace temperature tester proposed in this utility model includes a heat insulation box, a receiving box, a tester body, a positioning part, and a mating part. The heat insulation box and the receiving box form double heat insulation; the receiving box, which houses the tester body, is movable towards or away from the opening, allowing the position of the tester body within the heat insulation box to be adjusted. This allows the position of the receiving box to be adjusted according to the furnace temperature distribution, ensuring that heat is evenly transferred to all surfaces of the furnace temperature tester body, preventing damage due to uneven heating; the positioning part and the mating part allow the tester body to be stably fixed in the receiving box." The furnace temperature tester proposed in this utility model has a simple structure and strong stability. Although it solves the problem that "existing furnace temperature testers are generally fixed in a specific position inside the insulation box, which is easy to detach from the fixed position and affect their stability", when monitoring the furnace temperature, the monitoring line on the tester is connected to the cover plate with high-temperature tape, and then the tester is sent into the furnace along with the product. The furnace temperature tester senses the temperature of the cover plate through the monitoring line to realize the monitoring of the furnace environment temperature. This means that the furnace temperature tester has to wait for the temperature of the cover plate on the insulation plate to drop before it can monitor the temperature again, which requires a long waiting time and affects the efficiency of continuous monitoring. Therefore, a PVD coating environment temperature monitoring device is proposed. Utility Model Content

[0004] Therefore, it is necessary to provide a PVD coating environment temperature monitoring device to address the aforementioned technical problems.

[0005] To solve the above-mentioned technical problems, the present invention provides a solution to address the issues of long cooling waiting time and low efficiency through the following technical solution.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A PVD coating environment temperature monitoring device, comprising:

[0008] A heat insulation box, wherein a furnace temperature monitor is installed in the inner cavity of the heat insulation box, and a top cover is snapped onto the top of the heat insulation box. A sliding groove is provided on one side of the top of the top cover, and a temperature measuring plate is slidably connected to the inner cavity of the sliding groove.

[0009] The side hole is located on the top of one side wall of the heat insulation box for the temperature detection line to pass through. The inner cavity of the side hole is provided with two baffle plates. One side of the front of the baffle plate is provided with a through hole. The top cover is provided with an auxiliary disassembly component.

[0010] In a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, the surface of the temperature measuring plate is provided with a plurality of recessed holes, and both sides of the inner wall of the side holes are provided with movable grooves.

[0011] As a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, the auxiliary disassembly component includes an internal groove opened inside the top cover, a top block is slidably connected to one side of the internal cavity of the internal groove, and a connecting block is fixedly connected to the middle of the internal cavity of the internal groove.

[0012] In a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, a push rod is fixedly connected to one side wall of the top block, one end of the push rod slides through the connecting block and the inner wall of the built-in groove and extends to the outside, and is fixedly connected to a pressing block.

[0013] In a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, the portion of the push rod placed between the connecting block and the top block is fitted with a spring, and the two ends of the spring are respectively connected to the top block and the connecting block.

[0014] In a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, the two baffle plates are slidably connected to the inner cavities of the two moving slots respectively, and a fixing block is fixedly connected to the top of each of the two baffle plates.

[0015] In a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, the surfaces of the two fixing blocks are threaded with bidirectional threaded rods, one end of which is rotatably connected to one side of the inner wall of the side hole.

[0016] In a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, the other end of the bidirectional threaded rod rotates through the other side of the inner wall of the side hole and extends to the outside, and is fixedly connected with a knob.

[0017] In a preferred embodiment of the PVD coating environment temperature monitoring device provided by this utility model, a heat-absorbing plate is provided between the furnace temperature monitor and the heat insulation box.

[0018] In a preferred embodiment of the PVD coating environmental temperature monitoring device provided by this utility model, the inner wall of the chute and the baffle plate are both made of heat insulation material.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] This utility model provides a PVD coating environment temperature monitoring device. By incorporating a temperature measuring plate, after the device has completed monitoring of the furnace environment, the monitoring line of the furnace temperature monitor can be removed from the temperature measuring plate. Then, the push rod is moved so that the top block moves towards one side of the temperature measuring plate in the inner cavity of the built-in groove until part of the temperature measuring plate is pushed out of the inner cavity of the slide groove. This facilitates the disassembly of the temperature measuring plate by the operator. The room temperature temperature measuring plate is then installed on the top cover through the slide groove. Continuous monitoring can be performed without waiting for cooling, which significantly improves the furnace temperature detection efficiency and simplifies the operation process.

[0021] This utility model provides a PVD coating environment temperature monitoring device. By setting up baffle plates, after the monitoring line of the furnace temperature monitor passes through the inner cavity of the side hole and connects with the surface of the temperature measuring plate, the two baffle plates can be moved relative to each other in the inner cavity of the side hole by rotating the bidirectional threaded rod. This achieves the convergence and positioning of the monitoring line, while reducing the exposed area of ​​the side hole and preventing excessive furnace temperature from seeping into the heat insulation box and affecting the furnace temperature monitor. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A schematic diagram of the overall structure of this utility model;

[0024] Figure 2 This invention provides a structural schematic diagram of the closed state.

[0025] Figure 3This invention provides a structural diagram showing the structure when disassembled.

[0026] Figure 4 A cross-sectional view of the top cover is provided for this utility model;

[0027] Figure 5 A schematic diagram of the structure of the heat insulation box is provided for this utility model;

[0028] Figure 6 Provided for this utility model Figure 5 A schematic diagram of the partially disassembled structure.

[0029] The markings in the diagram are explained as follows:

[0030] 1. Insulation box; 2. Furnace temperature monitor; 3. Top cover; 4. Slide groove; 5. Temperature measuring plate; 6. Side hole; 7. Baffle plate; 8. Through hole; 9. Auxiliary disassembly parts; 91. Internal groove; 92. Top block; 93. Connecting block; 94. Push rod; 95. Press block; 96. Spring; 10. Concave hole; 11. Moving groove; 12. Fixing block; 13. Two-way threaded rod; 14. Knob; 15. Heat absorption plate. Detailed Implementation

[0031] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention. Example

[0032] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6 A PVD coating environment temperature monitoring device includes a heat insulation box 1, which provides heat insulation protection to prevent the high temperature inside the furnace from affecting the furnace temperature monitoring instrument 2. The furnace temperature monitoring instrument 2 is installed in the inner cavity of the heat insulation box 1 to monitor the furnace temperature in real time. A top cover 3 is snapped to the top of the heat insulation box 1. A sliding groove 4 is opened on one side of the top of the top cover 3 to provide a sliding installation path for the temperature measuring plate 5. The temperature measuring plate 5 is slidably connected to the inner cavity of the sliding groove 4 to sense the furnace environment and transmit the temperature to the monitoring line.

[0033] Side hole 6, for the passage of the monitoring line, connects the temperature measuring plate 5 and the furnace temperature monitor 2. Side hole 6 is opened at the top of one side wall of the heat insulation box 1 for the temperature detection line to pass through. The inner cavity of side hole 6 is provided with two baffle plates 7, which are adjusted by bidirectional threaded rod 13 to gather the monitoring line and reduce the exposed area of ​​side hole 6. A through hole 8 is opened on one side of the front of baffle plate 7 for the monitoring line to pass through baffle plate 7. An auxiliary disassembly part 9 is provided on one side of the top cover 3. Several concave holes 10 are opened on the surface of temperature measuring plate 5 to increase the heat dissipation area of ​​temperature measuring plate 5 and accelerate heat dissipation. Moving grooves 11 are opened on both sides of the inner wall of side hole 6 to guide the sliding trajectory of baffle plate 7.

[0034] Preferably, the auxiliary disassembly component 9 includes an internal groove 91 opened inside the top cover 3. A top block 92 is slidably connected to one side of the internal cavity of the internal groove 91 to push part of the temperature measuring plate 5 out of the sliding groove 4, so as to facilitate the disassembly of the temperature measuring plate 5. A connecting block 93 is fixedly connected to the middle of the internal cavity of the internal groove 91. A push rod 94 is fixedly connected to one side wall of the top block 92. One end of the push rod 94 slides through the connecting block 93 and the inner wall of the internal groove 91 and extends to the outside, and is fixedly connected to a pressing block 95. A spring 96 is sleeved on the part of the push rod 94 placed between the connecting block 93 and the top block 92 for resetting the top block 92. The two ends of the spring 96 are respectively connected to the top block 92 and the connecting block 93.

[0035] Preferably, the two baffle plates 7 are slidably connected to the inner cavities of the two moving grooves 11 respectively. The top of each of the two baffle plates 7 is fixedly connected to a fixing block 12, which connects the baffle plate 7 to the bidirectional threaded rod 13. The surface threads of the two fixing blocks 12 are threaded through the bidirectional threaded rod 13. The two fixing blocks 12 are distributed on two opposite threads on the bidirectional threaded rod 13. One end of the bidirectional threaded rod 13 is rotatably connected to one side of the inner wall of the side hole 6. The other end of the bidirectional threaded rod 13 rotatably passes through the other side of the inner wall of the side hole 6 and extends to the outside, and is fixedly connected to a knob 14. A heat-absorbing plate 15 is provided between the furnace temperature monitor 2 and the heat insulation box 1 to absorb the heat in the heat insulation box 1 and reduce the working temperature of the furnace temperature monitor 2. The inner wall of the slide 4 and the baffle plates 7 are both heat-insulating materials.

[0036] The usage process of the PVD coating environment temperature monitoring device provided by this utility model is as follows: During use, the furnace temperature monitor 2 is placed inside the heat insulation box 1. The monitoring wire connected to it is then placed through the inner cavity of the side hole 6 at the temperature measuring plate 5. The wire end is fixed to the temperature measuring plate 5 using high-temperature tape. Then, the knob 14 is manually turned to rotate the bidirectional threaded rod 13. Through the fixing block 12 and the moving groove 11, the two baffle plates 7 move relative to each other, converging the monitoring wire to the center of the side hole 6. The baffle plates 7 partially block the side hole 6, reducing its exposed area. The top cover 3 is then placed on the heat insulation box 1. Finally, the heat insulation box 1 and the workpiece are transported together to the coating equipment via a conveyor belt. Inside, data on the furnace ambient temperature is collected. After completion, the staff wears heat-resistant gloves, removes the high-temperature tape, and removes the top cover 3 from the heat insulation box 1. The furnace temperature monitor 2 is taken out from the heat insulation box 1 to obtain the temperature monitoring data. When temperature monitoring is required again, the staff pushes the push block 95 by hand, and through the push rod 94, the top block 92 moves to one side of the inner cavity of the built-in groove 91, pushing part of the temperature measuring plate 5 out of the inner cavity of the slide groove 4. The staff uses the part of the temperature measuring plate 5 that has been pushed out to pull it out, and then inserts the room temperature temperature measuring plate 5 from one side of the top cover 3 into the slide groove 4 to complete the replacement of the temperature measuring plate 5. Then the next round of coating environment monitoring can be carried out.

[0037] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A PVD coating environmental temperature monitoring device, characterized in that, It includes: A heat insulation box (1) is provided with a furnace temperature monitor (2) in its inner cavity. A top cover (3) is snapped onto the top of the heat insulation box (1). A sliding groove (4) is provided on one side of the top of the top cover (3). A temperature measuring plate (5) is slidably connected to the inner cavity of the sliding groove (4). Side hole (6), the side hole (6) is opened on the top of one side wall of the heat insulation box (1) for the temperature detection line to pass through. The inner cavity of the side hole (6) is provided with two baffle plates (7). A through hole (8) is opened on one side of the front of the baffle plate (7). An auxiliary disassembly part (9) is provided on one side of the top cover (3).

2. The PVD coating ambient temperature monitoring device according to claim 1, characterized in that, The surface of the temperature measuring plate (5) is provided with several recessed holes (10), and the inner walls of the side holes (6) are provided with moving grooves (11) on both sides.

3. The PVD coating environment temperature monitoring device according to claim 1, characterized in that, The auxiliary disassembly component (9) includes an internal groove (91) opened inside the top cover (3), a top block (92) is slidably connected to one side of the internal cavity of the internal groove (91), and a connecting block (93) is fixedly connected to the middle of the internal cavity of the internal groove (91).

4. The PVD coating environmental temperature monitoring device according to claim 3, characterized in that, A push rod (94) is fixedly connected to one side wall of the top block (92). One end of the push rod (94) slides through the inner wall of the connecting block (93) and the built-in groove (91) and extends to the outside, and is fixedly connected to a pressing block (95).

5. The PVD coating ambient temperature monitoring device according to claim 3, characterized in that, The push rod (94) is fitted with a spring (96) between the connecting block (93) and the top block (92), and the two ends of the spring (96) are connected to the top block (92) and the connecting block (93) respectively.

6. The PVD coating ambient temperature monitoring device according to claim 1, characterized in that, The two baffle plates (7) are slidably connected to the inner cavities of the two moving slots (11), and the top ends of the two baffle plates (7) are fixedly connected to the fixing blocks (12).

7. The PVD coating ambient temperature monitoring device according to claim 6, characterized in that, The two fixing blocks (12) have a double-threaded rod (13) threaded through their surfaces, and one end of the double-threaded rod (13) is rotatably connected to one side of the inner wall of the side hole (6).

8. The PVD coating ambient temperature monitoring device according to claim 7, characterized in that, The other end of the bidirectional threaded rod (13) rotates through the other side of the inner wall of the side hole (6) and extends to the outside, and is fixedly connected to a knob (14).

9. The PVD coating environment temperature monitoring device according to claim 1, characterized in that, A heat-absorbing plate (15) is provided between the furnace temperature monitoring instrument (2) and the heat insulation box (1).

10. The PVD coating environment temperature monitoring device according to claim 1, characterized in that, The inner wall of the chute (4) and the baffle plate (7) are both made of heat-insulating material.

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