Grinding fluid mixing and sampling valve box

Abstract

The utility model discloses a grinding fluid mixing sampling valve box which comprises a box body, a fixing plate is arranged in the box body, a sampling valve is arranged on the front side of the fixing plate through an installation assembly, and sampling pipes are arranged on the upper side and the lower side of the sampling valve. The installation assembly comprises an installation block arranged on the front side of the fixing plate, an installation groove is formed in the front side of the installation block, an installation column is arranged on the surface of the installation groove, and the front side of the installation column is fixedly installed on the rear side of the sampling valve. The sampling valve is fixed to the front side of the fixing plate through a mounting block, a mounting groove, a mounting column and other parts by the mounting assembly, meanwhile, sampling pipes are arranged on the upper side and the lower side of the sampling valve and used for sampling operation, and meanwhile through arrangement of the mounting assembly, the extrusion assembly and the positioning assembly, workers can conveniently disassemble and overhaul the sampling valve.

Description

Technical Field

[0001] This utility model belongs to the field of polishing fluid supply technology, and in particular relates to a polishing fluid mixing and sampling valve box. Background Technology

[0002] Chemical mechanical polishing (CMP) is an essential process in chip manufacturing. It is used not only in the wafer fabrication stage but also in the wafer processing technology to achieve overall surface planarization of the wafer.

[0003] The sampling valve is securely fixed by the mounting blocks, mounting slots, and mounting columns in the mounting assembly, as well as the synergistic action of the squeezing and positioning components. This solves the problem of shaking or loosening that may occur during the installation of traditional sampling valves, ensuring the stability and reliability of the sampling valve during operation, and also facilitating subsequent disassembly and maintenance by workers. Utility Model Content

[0004] To address the problems existing in the prior art, this utility model provides a grinding fluid mixing sampling valve box, which has the advantages of facilitating worker disassembly and maintenance of the sampling valve and providing greater stability during the use of the sampling valve. Through the synergistic action of the mounting block, mounting groove, and mounting column in the mounting assembly, as well as the squeezing assembly and positioning assembly, the sampling valve is firmly fixed. This solves the problem of shaking or loosening that may occur during the installation of traditional sampling valves, ensuring the stability and reliability of the sampling valve during operation, and also facilitating subsequent disassembly and maintenance by workers.

[0005] This utility model is implemented as follows: a grinding fluid mixing sampling valve box includes a box body, a fixing plate is provided inside the box body, a sampling valve is provided on the front side of the fixing plate through an installation component, and sampling tubes are provided on both the upper and lower sides of the sampling valve.

[0006] The mounting assembly includes a mounting block disposed on the fixed front side, the mounting block having a mounting groove on its front side, a mounting post being disposed on the surface of the mounting groove, and the front side of the mounting post being fixedly mounted to the rear side of the sampling valve.

[0007] The mounting block is internally equipped with a pressing component for fixing the mounting column and two positioning components.

[0008] In a preferred embodiment of this invention, the extrusion assembly includes an extrusion rod disposed inside the mounting block. The left side of the extrusion rod extends through to the left side of the mounting block, and an extrusion plate is disposed on the right side of the extrusion rod. A first spring is disposed on the left side of the extrusion plate. The left side of the first spring is fixedly installed to the inner wall of the mounting block. The design of the extrusion assembly enables the mounting column to be firmly fixed in the mounting groove, thereby ensuring the stability and reliability of the sampling valve. The first spring also provides a certain buffering effect, which helps to reduce damage caused by external impact.

[0009] As a preferred embodiment of this utility model, the two positioning components include positioning rods disposed on the mounting block. Each positioning rod has a positioning plate fixedly installed on its top. The bottom of the positioning rod extends through the interior of the mounting column. The design of the positioning components further enhances the fixing effect of the mounting column, preventing it from loosening or falling off during operation. The positioning rod extends through the interior of the mounting column and cooperates with the positioning groove to achieve precise positioning of the mounting column.

[0010] As a preferred embodiment of this utility model, vertical rods are provided on both the upper and lower sides of the positioning plate. The upper and lower sides of the vertical rods are fixedly installed to the inner wall of the mounting block, respectively. The vertical rods are used to support the movement of the positioning plate. The setting of the vertical rods makes the positioning plate more stable during movement and prevents errors caused by shaking. At the same time, the vertical rods also provide necessary guidance for the movement of the positioning plate.

[0011] As a preferred embodiment of this utility model, a second spring is fitted on the surface of each vertical rod. The upper and lower sides of the second spring are fixedly installed to the inner wall of the mounting block and the top of the positioning plate, respectively. The second spring provides additional buffering and shock absorption, which helps to protect the positioning component from damage caused by external impact.

[0012] As a preferred embodiment of this utility model, inclined plates are fixedly installed on opposite sides of the positioning plate. One side of the inclined plate is in contact with one side of the extrusion plate. The design of the inclined plates makes it easier for the extrusion plate to push the positioning plate to move during the movement process. At the same time, the inclined plates can also disperse the extrusion force to a certain extent and reduce the wear on the positioning plate and positioning rod.

[0013] As a preferred embodiment of this utility model, positioning grooves are provided on both the upper and lower sides of the mounting column. The surface of the positioning groove is in contact with the surface of the positioning rod. The positioning grooves allow the positioning rod to fit more tightly against the surface of the mounting column, thereby improving the stability and reliability of the installation.

[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0015] 1. This utility model includes key components such as a housing, a fixing plate, an installation assembly, and a sampling valve. The installation assembly uses components such as mounting blocks, mounting grooves, and mounting columns to fix the sampling valve to the front side of the fixing plate. Sampling tubes are provided on both the upper and lower sides of the sampling valve for sampling operations. The installation assembly, the squeezing assembly, and the positioning assembly facilitate workers to disassemble and repair the sampling valve. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the housing and sampling valve provided in an embodiment of the present invention;

[0017] Figure 2 This is a disassembly diagram of the installation components provided in this embodiment of the utility model;

[0018] Figure 3 This is a schematic diagram of the interior of the mounting block provided in an embodiment of this utility model.

[0019] In the diagram: 1. Box body; 2. Fixing plate; 3. Mounting assembly; 31. Mounting block; 32. Mounting groove; 33. Mounting column; 4. Sampling valve; 5. Sampling tube; 6. Extrusion assembly; 61. Extrusion rod; 62. Extrusion plate; 63. First spring; 7. Positioning assembly; 71. Positioning rod; 72. Positioning plate; 8. Vertical rod; 9. Second spring; 10. Inclined plate; 11. Positioning groove. Detailed Implementation

[0020] To further understand the invention content, features and effects of this utility model, the following embodiments are provided, and detailed descriptions are given in conjunction with the accompanying drawings.

[0021] The structure of this utility model will now be described in detail with reference to the accompanying drawings.

[0022] like Figures 1 to 3 As shown, the present invention provides a grinding fluid mixing sampling valve box, including a box body 1, a fixing plate 2 is provided inside the box body 1, a sampling valve 4 is provided on the front side of the fixing plate 2 through the mounting assembly 3, and sampling tubes 5 are provided on both the upper and lower sides of the sampling valve 4.

[0023] The mounting assembly 3 includes a mounting block 31 disposed on the front side of the fixed assembly. The front side of the mounting block 31 is provided with a mounting groove 32, and the surface of the mounting groove 32 is provided with a mounting post 33. The front side of the mounting post 33 is fixedly mounted on the rear side of the sampling valve 4.

[0024] The mounting block 31 is internally provided with a pressing component 6 for fixing the mounting post 33 and two positioning components 7.

[0025] refer to Figure 3The extrusion assembly 6 includes an extrusion rod 61 disposed inside the mounting block 31. The left side of the extrusion rod 61 extends through to the left side of the mounting block 31. An extrusion plate 62 is disposed on the right side of the extrusion rod 61. A first spring 63 is disposed on the left side of the extrusion plate 62. The left side of the first spring 63 is fixedly installed to the inner wall of the mounting block 31.

[0026] The above solution is adopted: the design of the extrusion component 6 enables the mounting column 33 to be firmly fixed in the mounting groove 32, thereby ensuring the stability and reliability of the sampling valve 4. The setting of the first spring 63 also provides a certain buffering effect, which helps to reduce damage caused by external impact.

[0027] refer to Figure 3 The two positioning components 7 include positioning rods 71 ​​disposed on the mounting block 31, with positioning plates 72 fixedly installed on the top of each positioning rod 71, and the bottom of the positioning rod 71 extending through the interior of the mounting column 33.

[0028] The above solution enhances the fixing effect of the mounting post 33 by designing the positioning component 7, preventing it from loosening or falling off during operation. The positioning rod 71 extends into the interior of the mounting post 33 and cooperates with the positioning groove 11 to achieve precise positioning of the mounting post 33.

[0029] refer to Figure 3 Vertical rods 8 are inserted through both the upper and lower sides of the positioning plate 72. The upper and lower sides of the vertical rods 8 are fixedly installed to the inner wall of the mounting block 31, and the vertical rods 8 are used to support the movement of the positioning plate 72.

[0030] The above solution is adopted: the setting of the vertical rod 8 makes the positioning plate 72 more stable during movement, preventing errors caused by shaking. At the same time, the vertical rod 8 also provides the necessary guidance for the movement of the positioning plate 72.

[0031] refer to Figure 3 The surface of the vertical rod 8 is fitted with a second spring 9, and the upper and lower sides of the second spring 9 are fixedly installed to the inner wall of the mounting block 31 and the top of the positioning plate 72, respectively.

[0032] The above solution provides additional cushioning and shock absorption through the setting of the second spring 9, which helps to protect the positioning component 7 from damage caused by external impact.

[0033] refer to Figure 3 An inclined plate 10 is fixedly installed on one side of the positioning plate 72, and one side of the inclined plate 10 is in contact with one side of the extrusion plate 62.

[0034] The above solution is adopted: the design of the inclined plate 10 makes it easier for the extrusion plate 62 to push the positioning plate 72 to move during the movement. At the same time, the inclined plate 10 can also disperse the extrusion force to a certain extent and reduce the wear on the positioning plate 72 and the positioning rod 71.

[0035] refer to Figure 2 , 3 The mounting column 33 has positioning grooves 11 on both the upper and lower sides, and the surface of the positioning grooves 11 is in contact with the surface of the positioning rod 71.

[0036] By adopting the above solution, the positioning groove 11 allows the positioning rod 71 to fit more tightly against the surface of the mounting column 33, thereby improving the stability and reliability of the installation.

[0037] The working principle of this utility model:

[0038] When in use, first fix the sampling valve 4, push the extrusion rod 61, and then drive the extrusion plate 62 to move towards the mounting column 33. The extrusion plate 62 generates extrusion force on the inclined plate 10. After the inclined plate 10 is subjected to extrusion force, it can drive the positioning plate 72 to move in the opposite direction. The movement of the positioning plate 72 simultaneously drives the positioning rod 71 to move out of the positioning groove 11.

[0039] Then, the sampling valve 4 is initially fixed to the front side of the fixing plate 2 by the mounting assembly 3. The mounting block 31 and mounting groove 32 in the mounting assembly 3 provide the necessary support and positioning for the installation of the sampling valve 4. The mounting column 33, as the component connecting the sampling valve 4 and the mounting block 31, is fixedly installed on the front side with the rear side of the sampling valve 4 to ensure the stability of the sampling valve 4. Then, the worker loosens the squeezing rod 61, so that its positioning is more tightly fitted into the mounting groove 32 by the rebound force of the second spring 9, thereby fixing the mounting column 33.

[0040] In summary, this grinding fluid mixing sampling valve box achieves a stable fixation of the sampling valve through the coordinated action of the mounting block, mounting groove, and mounting column in the mounting assembly, as well as the squeezing assembly and positioning assembly. This solves the problem of shaking or loosening that may occur during the installation of traditional sampling valves, ensuring the stability and reliability of the sampling valve during operation, and also facilitating subsequent disassembly and maintenance by workers.

[0041] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0042] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A grinding fluid mixing and sampling valve box, comprising a box body (1), characterized in that: The box (1) is provided with a fixing plate (2) inside. A sampling valve (4) is provided on the front side of the fixing plate (2) through the mounting assembly (3). Sampling tubes (5) are provided on both the upper and lower sides of the sampling valve (4). The mounting assembly (3) includes a mounting block (31) disposed on the front side of the fixed assembly. The front side of the mounting block (31) is provided with a mounting groove (32). The surface of the mounting groove (32) is provided with a mounting post (33). The front side of the mounting post (33) is fixedly installed on the rear side of the sampling valve (4). The mounting block (31) is provided with a pressing component (6) for fixing the mounting column (33) and two positioning components (7).

2. The grinding fluid mixing and sampling valve box as described in claim 1, characterized in that: The extrusion assembly (6) includes an extrusion rod (61) disposed inside the mounting block (31). The left side of the extrusion rod (61) extends through to the left side of the mounting block (31). An extrusion plate (62) is disposed on the right side of the extrusion rod (61). A first spring (63) is disposed on the left side of the extrusion plate (62). The left side of the first spring (63) is fixedly installed to the inner wall of the mounting block (31).

3. The grinding fluid mixing and sampling valve box as described in claim 2, characterized in that: The two positioning components (7) include positioning rods (71) disposed on the mounting block (31), each positioning rod (71) having a positioning plate (72) fixedly mounted on its top, and the bottom of the positioning rod (71) extending into the interior of the mounting column (33).

4. The grinding fluid mixing and sampling valve box as described in claim 3, characterized in that: Vertical rods (8) are inserted through the upper and lower sides of the positioning plate (72). The upper and lower sides of the vertical rods (8) are fixedly installed to the inner wall of the mounting block (31). The vertical rods (8) are used to support the movement of the positioning plate (72).

5. The grinding fluid mixing and sampling valve box as described in claim 4, characterized in that: The surface of each vertical rod (8) is fitted with a second spring (9), and the upper and lower sides of the second spring (9) are fixedly installed to the inner wall of the mounting block (31) and the top of the positioning plate (72), respectively.

6. The grinding fluid mixing and sampling valve box as described in claim 5, characterized in that: An inclined plate (10) is fixedly installed on one side of the positioning plate (72), and one side of the inclined plate (10) is in contact with one side of the extrusion plate (62).

7. The grinding fluid mixing and sampling valve box as described in claim 6, characterized in that: The mounting post (33) has positioning grooves (11) on both the upper and lower sides, and the surface of the positioning grooves (11) is in contact with the surface of the positioning rod (71).

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