Voltage sampling circuit and voltage sampling device
By introducing an electrical gap into the voltage sampling circuit in the RF matching unit, electromagnetic induction technology is used to capture high-frequency high-voltage signals, solving the problem of insufficient electrical isolation in traditional sampling techniques and achieving safe and efficient voltage sampling.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN CSL VACUUM SCI & TECH CO LTD
- Filing Date
- 2025-04-01
- Publication Date
- 2026-05-05
AI Technical Summary
Traditional high-voltage sampling techniques lack electrical isolation, leading to increased equipment safety risks.
A voltage sampling circuit is used to capture high-frequency, high-voltage signals by establishing an electrical gap between the sampling probe and the radio frequency matching unit. The signals are then amplified, filtered, and converted by the voltage processing module to achieve non-contact sampling.
It achieves efficient and safe voltage sampling, avoids the safety risks of direct contact with high voltage, and improves the stability and sampling accuracy of the system.
Smart Images
Figure CN224203286U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of matching technology, and in particular to a voltage sampling circuit and a voltage sampling device. Background Technology
[0002] In radio frequency (RF) applications, matching units are crucial components for ensuring efficient power delivery, reducing reflection losses, and improving system efficiency. Accurately sampling the high voltages within the RF matching unit is a challenge, especially when monitoring and adjusting the matching state to adapt to changing load conditions is required.
[0003] Traditional high-voltage sampling techniques typically involve directly connecting a resistor or capacitor to the high-voltage point, using voltage division to reduce the voltage to a measurable level, and then converting the signal to DC voltage for reading through rectification and filtering circuits. While this method is effective enough for some applications, it has a significant drawback: a lack of electrical isolation. This direct connection exposes the sampling circuitry to a high-voltage environment, increasing safety risks to the equipment and potentially posing a threat to operators and sensitive electronic equipment. Utility Model Content
[0004] The main purpose of this utility model is to provide a voltage sampling circuit and a voltage sampling device, which aims to solve the technical problem in the prior art that the voltage sampling circuit is physically connected to the high voltage position of the radio frequency matching device without isolation, which is prone to safety accidents.
[0005] To achieve the above objectives, this utility model provides a voltage sampling circuit, which is applied to an RF matching unit. The voltage sampling circuit includes a sampling probe and a voltage processing module.
[0006] The sampling probe is spaced at a preset sampling distance from the sampling point of the radio frequency matching unit, and the sampling probe is also connected to the voltage processing module, which is connected to an external device.
[0007] The sampling probe is used to sense the high-frequency high-voltage signal output by the radio frequency matching unit through an electrical gap, and output the high-frequency high-voltage signal to the voltage processing module;
[0008] The voltage processing module is used to amplify, filter, and convert the high-frequency high-voltage signal to obtain the voltage value of the sampling point of the radio frequency matching unit, and output the voltage value to the external device.
[0009] Optionally, the number of sampling probes is multiple, and the sampling probes are distributed at preset intervals.
[0010] Optionally, the voltage sampling circuit further includes: a rectifier module;
[0011] The rectifier module is connected to both the sampling probe and the voltage processing module.
[0012] The sampling probe is also used to output the high-frequency high-voltage signal to the rectifier module;
[0013] The rectifier module is used to rectify the high-frequency high-voltage signal and output the rectified high-frequency high-voltage signal to the voltage processing module.
[0014] Optionally, the voltage sampling circuit further includes a filtering module;
[0015] The filtering module is connected to both the rectifier module and the voltage processing module.
[0016] The rectifier module is also used to output the rectified high-frequency high-voltage signal to the filter module;
[0017] The filtering module is used to filter the rectified high-frequency high-voltage signal and output the filtered high-frequency high-voltage signal to the voltage processing module.
[0018] Optionally, the voltage sampling circuit further includes: a voltage divider module;
[0019] The voltage divider module is connected to both the filter module and the voltage processing module.
[0020] The filtering module is also used to output the filtered high-frequency high-voltage signal to the voltage divider module;
[0021] The voltage divider module is used to divide the filtered high-frequency high-voltage signal and output the divided high-frequency high-voltage signal to the voltage processing module.
[0022] In addition, to achieve the above objectives, this utility model also provides a voltage sampling device, which includes the voltage sampling circuit described in any of the above claims.
[0023] This invention discloses a voltage sampling circuit applied to an RF matching unit. The voltage sampling circuit includes a sampling probe and a voltage processing module. The sampling probe is spaced at a preset sampling distance from the sampling point of the RF matching unit. The sampling probe is also connected to the voltage processing module, which is connected to an external device. The sampling probe senses the high-frequency, high-voltage signal output by the RF matching unit through an electrical gap and outputs the high-frequency, high-voltage signal to the voltage processing module. The voltage processing module amplifies, filters, and converts the high-frequency, high-voltage signal to obtain the voltage value at the sampling point of the RF matching unit and outputs the voltage value to the external device. This invention achieves non-contact sampling of high-voltage signals by establishing an electrical gap between the sampling point and the sampling circuit. This not only solves the electrical isolation problem existing in traditional sampling technologies but also contributes to the efficient and safe operation of the RF matching unit. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the first embodiment of the voltage sampling circuit of this utility model;
[0025] Figure 2 This is a schematic diagram of the second embodiment of the voltage sampling circuit of this utility model;
[0026] Figure 3 This is a schematic diagram showing the positions of the sampling probe and the sampling point of the RF matching unit in the voltage sampling circuit of this utility model;
[0027] Figure 4 This is a 3D schematic diagram of the radio frequency matching unit in the voltage sampling circuit of this utility model;
[0028] Figure 5 These are the front view, side view, and top view of the radio frequency matching unit in the voltage sampling circuit of this utility model.
[0029] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation
[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0031] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.
[0032] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.
[0033] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application.
[0034] This utility model embodiment provides a voltage sampling circuit, referring to... Figure 1 As shown, Figure 1 This is a schematic diagram of the first embodiment of the voltage sampling circuit of this utility model. The voltage sampling circuit of this utility model is applied to an RF matching unit, and the voltage sampling circuit includes: a sampling probe and a voltage processing module;
[0035] The sampling probe is spaced at a preset sampling distance from the sampling point of the radio frequency matching unit, and the sampling probe is also connected to the voltage processing module, which is connected to an external device.
[0036] The sampling probe is used to sense the high-frequency high-voltage signal output by the radio frequency matching unit through an electrical gap, and output the high-frequency high-voltage signal to the voltage processing module;
[0037] The voltage processing module is used to process the high-frequency high-voltage signal to obtain the voltage value of the sampling point of the radio frequency matching unit, and output the voltage value to the external device.
[0038] It should be noted that the sampling probe is part of a voltage sampling circuit, specifically designed to sense the high-frequency, high-voltage signal output by the RF matching unit through an electrical gap. For example, when the RF matching unit is operating, it generates a 13.56MHz high-frequency, high-voltage source at its output. In this voltage sampling circuit design, the preset sampling distance between the sampling probe and the sampling point of the RF matching unit is achieved through a carefully designed spatial interval. This interval allows the sampling probe to capture the high-voltage signal through electromagnetic induction without directly contacting the high-voltage point. This design fully utilizes the electrical gap as a physical isolation mechanism to ensure the safety and electrical isolation of the sampling process.
[0039] It should be understood that sampling probes are typically made of materials with high electromagnetic induction sensitivity, enabling them to effectively sense high-frequency, high-voltage signals from their surrounding environment. These signals are then output to a voltage processing module, which performs necessary processing such as amplification, filtering, and conversion to ultimately obtain the voltage value at the RF matching point. The processed voltage value can be used to monitor and adjust the operating status of the RF system to optimize performance and ensure stable system operation.
[0040] It should be understood that the optimal distance between the probe and the detection point (vacuum capacitor) is 14-16 mm. This distance is designed to optimize electromagnetic induction while ensuring safety and electrical isolation. Too close a distance may cause arcing or damage to the sampling probe, while too far a distance may weaken the signal strength and affect sampling accuracy. This range of distances ensures sufficient signal strength while avoiding the risk of direct electrical contact.
[0041] Furthermore, the length of the probe affects the size and shape of its sensing area, thus impacting sampling efficiency and signal accuracy. An appropriate probe length ensures sufficient sensitivity and selectivity in various applications, capturing the desired signal while minimizing background noise; a probe length of 17-18 mm is suitable.
[0042] Furthermore, in this embodiment, the number of sampling probes can be multiple, and the sampling probes are distributed at preset intervals. In this embodiment, the number of sampling probes is three.
[0043] It should be noted that the arrangement of multiple sampling probes at preset intervals increases the system's flexibility and coverage, enabling more precise monitoring of the high-frequency, high-voltage signal output by the RF matching unit. This layout strategy allows for simultaneous monitoring of multiple points within the RF system, thereby improving data accuracy and system reliability. Furthermore, sampling signals acquired using multiple sampling probes are more stable than those acquired using a single point.
[0044] Secondly, a suitable preset interval between probes can reduce mutual interference and improve the overall sampling quality and accuracy of the system. Too close a distance may cause signal crosstalk, while too far a distance may fail to effectively cover the monitoring area or reduce the system's sensitivity. Therefore, the preset interval between probes can be 12-13 mm.
[0045] This invention discloses a voltage sampling circuit applied to an RF matching unit. The voltage sampling circuit includes a sampling probe and a voltage processing module. A preset sampling distance is maintained between the sampling probe and the sampling point of the RF matching unit. The sampling probe is also connected to the voltage processing module, which is connected to an external device. The sampling probe senses the high-frequency, high-voltage signal output by the RF matching unit through an electrical gap and outputs the high-frequency, high-voltage signal to the voltage processing module. The voltage processing module processes the high-frequency, high-voltage signal to obtain the voltage value at the sampling point of the RF matching unit and outputs the voltage value to the external device. This invention achieves non-contact sampling of high-voltage signals by establishing an electrical gap between the sampling point and the sampling circuit. This not only solves the electrical isolation problem existing in traditional sampling technologies but also contributes to the efficient and safe operation of the RF matching unit.
[0046] Reference Figure 2 This is a schematic diagram of the second embodiment of the voltage sampling circuit of this utility model; based on the first embodiment described above, a second embodiment of the voltage sampling circuit of this utility model is proposed.
[0047] In this embodiment, the voltage sampling circuit further includes a rectifier module;
[0048] The rectifier module is connected to both the sampling probe and the voltage processing module.
[0049] The sampling probe is also used to output the high-frequency high-voltage signal to the rectifier module;
[0050] The rectifier module is used to rectify the high-frequency high-voltage signal and output the rectified high-frequency high-voltage signal to the voltage processing module.
[0051] It should be noted that the main function of the rectifier module is to convert the high-frequency, high-voltage alternating current (AC) signal captured by the sampling probe into a direct current (DC) signal. This process is essential for subsequent signal processing and analysis, as many electronic devices and signal processing algorithms require a stable DC signal to ensure accuracy and efficiency.
[0052] Furthermore, in this embodiment, the voltage sampling circuit further includes a filtering module;
[0053] The filtering module is connected to both the rectifier module and the voltage processing module.
[0054] The rectifier module is also used to output the rectified high-frequency high-voltage signal to the filter module;
[0055] The filtering module is used to filter the rectified high-frequency high-voltage signal and output the filtered high-frequency high-voltage signal to the voltage processing module.
[0056] It should be noted that the addition of a filtering module further improves the voltage sampling circuit, making the entire system more efficient and accurate in processing high-frequency, high-voltage signals. The main function of the filtering module is to remove noise and unnecessary frequency components from the rectified signal, ensuring that the signal output to the voltage processing module is clear and usable.
[0057] It should be understood that although rectifier modules can convert AC signals to DC signals, some noise may be introduced or retained during the conversion process. Filtering modules can effectively remove this noise, ensuring signal quality. For specific monitoring and processing needs, only a specific frequency range of the signal may be required. Filtering modules can selectively retain or remove specific frequency components according to the design.
[0058] Furthermore, in this embodiment, the voltage sampling circuit further includes a voltage divider module;
[0059] The voltage divider module is connected to both the filter module and the voltage processing module.
[0060] The filtering module is also used to output the filtered high-frequency high-voltage signal to the voltage divider module;
[0061] The voltage divider module is used to divide the filtered high-frequency high-voltage signal and output the divided high-frequency high-voltage signal to the voltage processing module.
[0062] It should be noted that the addition of the voltage divider module further enhances the functionality of the voltage sampling circuit, enabling it to handle a wider voltage range and ensuring that the signal received by the voltage processing module is within its safe and optimal operating range. The introduction of the voltage divider module not only increases the circuit's adaptability and flexibility but also improves the overall system's safety and accuracy.
[0063] It should be understood that the voltage divider module can reduce the filtered high-frequency, high-voltage signal to a voltage level more suitable for the voltage processing module. This is crucial for preventing overload of the voltage processing module and ensuring its high-precision operation. By adjusting the voltage range of the output signal, the voltage divider module enables the voltage sampling circuit to be compatible with a wider range of voltage processing modules, increasing the system's versatility and flexibility. Finally, the voltage processing module obtains a proportionally reduced DC voltage signal, which is supplied to the customer device (external device) via a BNC connector for voltage display purposes. Furthermore, refer to... Figure 4 , Figure 4 This is a 3D schematic diagram of the RF matching unit in the voltage sampling circuit of this utility model. The VPK module shown refers to the voltage peak detection module, which includes a sampling probe, rectification, filtering, voltage division, and voltage processing module. (Refer to...) Figure 5 , Figure 5 These are the front view, side view, and top view of the radio frequency matching unit in the voltage sampling circuit of this utility model.
[0064] It should be noted that the high-frequency, high-voltage signal output by the RF matching unit can be acquired using a sampling probe. This sampling probe is specifically designed to sense the high-frequency, high-voltage signal output by the RF matching unit through an electrical gap. For example, when the RF matching unit is operating, it generates a 13.56MHz high-frequency, high-voltage source at its output. In this voltage sampling circuit design, the preset sampling distance between the sampling probe and the sampling point of the RF matching unit is achieved through a carefully designed spatial interval. This interval allows the sampling probe to capture the high-voltage signal through electromagnetic induction without directly contacting the high-voltage point. This design fully utilizes the electrical gap as a physical isolation method to ensure the safety and electrical isolation of the sampling process.
[0065] It should be understood that sampling probes are typically made of materials with high electromagnetic induction sensitivity, enabling them to effectively sense high-frequency, high-voltage signals from their surrounding environment. These signals are then output to a voltage processing module, which performs necessary processing such as amplification, filtering, and conversion to ultimately obtain the voltage value at the RF matching point. The processed voltage value can be used to monitor and adjust the operating status of the RF system to optimize performance and ensure stable system operation.
[0066] like Figure 3 As shown, it should be understood that the optimal electrical clearance between the probe and the detection point (vacuum capacitor) is 14-16 mm. This distance is designed to optimize electromagnetic induction while ensuring safety and electrical isolation. Too close may cause arcing or damage to the sampling probe, while too far may weaken the signal strength and affect sampling accuracy. This range of distance ensures sufficient signal strength while avoiding the risk of direct electrical contact.
[0067] Furthermore, the length of the probe affects the size and shape of its sensing area, thus impacting sampling efficiency and signal accuracy. An appropriate probe length ensures sufficient sensitivity and selectivity in various applications, capturing the desired signal while minimizing background noise; a probe length of 17-18 mm is suitable.
[0068] Furthermore, in this embodiment, the number of sampling probes can be multiple, and the sampling probes are distributed at preset intervals.
[0069] It should be noted that the arrangement of multiple sampling probes at preset intervals increases the system's flexibility and coverage, enabling more precise monitoring of the high-frequency, high-voltage signal output by the RF matching unit. This layout strategy allows for simultaneous monitoring of multiple points within the RF system, thereby improving data accuracy and system reliability. Furthermore, sampling signals acquired using multiple sampling probes are more stable than those acquired using a single point.
[0070] Secondly, a suitable preset interval between probes can reduce mutual interference and improve the overall sampling quality and accuracy of the system. Too close a distance may cause signal crosstalk, while too far a distance may fail to effectively cover the monitoring area or reduce the system's sensitivity. Therefore, the preset interval between probes can be 12-13 mm.
[0071] It should be noted that the main purpose of rectifying the high-frequency, high-voltage signal is to convert the high-frequency, high-voltage alternating current (AC) signal captured by the sampling probe into a direct current (DC) signal. This process is essential for subsequent signal processing and analysis, as many electronic devices and signal processing algorithms require a stable DC signal to ensure accuracy and efficiency.
[0072] It should be noted that filtering the rectified high-frequency high-voltage signal makes the entire system more efficient and accurate in processing such signals. The main purpose of filtering the rectified high-frequency high-voltage signal is to remove noise and unnecessary frequency components from the signal, ensuring that the signal output to the voltage processing module is clear and usable.
[0073] It should be understood that although rectifying the high-frequency, high-voltage signal can convert AC to DC, some noise may be introduced or retained during the conversion process. Filtering the rectified high-frequency, high-voltage signal can effectively remove this noise and ensure signal quality. For specific monitoring and processing needs, only a specific frequency range of the signal may be required. The filtering module can selectively retain or remove specific frequency components according to the design.
[0074] It should be noted that voltage division of the filtered high-frequency high-voltage signal enables the RF matching unit's voltage detection to handle a wider voltage range and ensures that the signal received by the voltage processing module is within its safe and optimal operating range. Voltage division of the filtered high-frequency high-voltage signal not only increases the circuit's adaptability and flexibility but also improves the overall system's safety and accuracy.
[0075] It should be understood that voltage division of the filtered high-frequency, high-voltage signal can reduce it to a voltage level more suitable for the voltage processing module. This is crucial for preventing overload of the voltage processing module and ensuring its high-precision operation. By adjusting the voltage range of the output signal, voltage division of the filtered high-frequency, high-voltage signal allows the voltage sampling circuit to be compatible with a wider range of voltage processing modules, increasing the system's versatility and flexibility. Finally, the voltage processing module obtains a proportionally reduced DC voltage signal, which is supplied to the customer device (external device) via a BNC connector for voltage display purposes.
[0076] In addition, to achieve the above objectives, the present invention also provides a voltage sampling device, which includes a voltage sampling circuit as described in any of the above claims.
[0077] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or system. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or system that includes that element.
[0078] The sequence numbers of the above embodiments of the present invention are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.
[0079] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. A voltage sampling circuit, characterized in that, The circuit is applied to an RF matching unit, and the voltage sampling circuit includes: a sampling probe and a voltage processing module; The sampling probe is spaced at a preset sampling distance from the sampling point of the radio frequency matching unit, and the sampling probe is also connected to the voltage processing module, which is connected to an external device. The sampling probe is used to sense the high-frequency high-voltage signal output by the radio frequency matching unit through an electrical gap, and output the high-frequency high-voltage signal to the voltage processing module; The voltage processing module is used to amplify, filter, and convert the high-frequency high-voltage signal to obtain the voltage value of the sampling point of the radio frequency matching unit, and output the voltage value to the external device.
2. The voltage sampling circuit as described in claim 1, characterized in that, The number of sampling probes is multiple, and the sampling probes are distributed at preset intervals.
3. The voltage sampling circuit as described in claim 1, characterized in that, The voltage sampling circuit further includes: a rectifier module; The rectifier module is connected to both the sampling probe and the voltage processing module. The sampling probe is also used to output the high-frequency high-voltage signal to the rectifier module; The rectifier module is used to rectify the high-frequency high-voltage signal and output the rectified high-frequency high-voltage signal to the voltage processing module.
4. The voltage sampling circuit as described in claim 3, characterized in that, The voltage sampling circuit further includes: a filtering module; The filtering module is connected to both the rectifier module and the voltage processing module. The rectifier module is also used to output the rectified high-frequency high-voltage signal to the filter module; The filtering module is used to filter the rectified high-frequency high-voltage signal and output the filtered high-frequency high-voltage signal to the voltage processing module.
5. The voltage sampling circuit as described in claim 4, characterized in that, The voltage sampling circuit further includes: a voltage divider module; The voltage divider module is connected to both the filter module and the voltage processing module. The filtering module is also used to output the filtered high-frequency high-voltage signal to the voltage divider module; The voltage divider module is used to divide the filtered high-frequency high-voltage signal and output the divided high-frequency high-voltage signal to the voltage processing module.
6. A voltage sampling device, characterized in that, The voltage sampling device includes the voltage sampling circuit according to any one of claims 1 to 5.