Anti-deformation wafer cleaning flower basket

Abstract

The utility model belongs to the field of semiconductor manufacturing, and discloses an anti-deformation wafer cleaning flower basket, which comprises a front plate and a rear plate, the front plate and the rear plate are oppositely arranged front and back, a plurality of groups of support columns are arranged between the front plate and the rear plate, and the plurality of groups of support columns form a U-shaped structure. A continuous concave-convex positioning structure is arranged on the surface of the supporting column in the extending direction of the supporting column. The two ends of the supporting column are fixedly installed between the front plate and the rear plate respectively, an auxiliary hole is formed in the supporting column, the extending direction of the auxiliary hole is consistent with the extending direction of the supporting column, and a reinforcing column is installed in the auxiliary hole in a pressing mode and made of Hastelloy C276. According to the scheme, the reinforcing columns made of hastelloy are additionally arranged in the supporting columns, so that the bending strength of the supporting columns is improved, the shape stability can still be kept after long-term use, the problem of wafer damage or uneven cleaning caused by deformation is reduced, and the service life of the flower basket is prolonged.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a deformation-resistant wafer cleaning basket. Background Technology

[0002] In semiconductor manufacturing, wafer cleaning is a crucial process that directly affects the cleanliness of the wafer surface, defect rate, and yield of subsequent processes. As a key tool for carrying and securing wafers, the wafer cleaning basket must operate stably for extended periods in harsh environments, including high temperatures, highly corrosive chemical solutions (such as a mixture of hydrofluoric acid (HF) and nitric acid (HNO3), and mechanical impact.

[0003] However, the support pillars of traditional wafer cleaning baskets lack reinforcement, resulting in low mechanical strength. In high-temperature (e.g., 140°C) corrosive environments, the material is prone to creep or stress relaxation. After long-term use, the support pillars may bend, twist, or even break, failing to guarantee precise wafer positioning. Deformed baskets can lead to uneven wafer spacing, affecting cleaning uniformity and even causing wafer collisions or fragmentation, resulting in high wafer scrap losses. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a deformation-resistant wafer cleaning basket to solve the problems in the background technology.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A deformation-resistant wafer cleaning basket includes a front plate and a rear plate, the front plate and the rear plate are arranged opposite each other, and multiple sets of support columns are arranged between the front plate and the rear plate. The multiple sets of support columns form a U-shaped structure, and the surface of the support columns is provided with a continuous concave and convex positioning structure along its extension direction.

[0007] The two ends of the support column are fixedly installed between the front plate and the rear plate, respectively. An auxiliary hole with the same extension direction is opened in the support column. A reinforcing column is press-fitted into the auxiliary hole. The reinforcing column is made of Hastelloy C276.

[0008] As a further description of the above technical solution: the diameter of the reinforcing column is 3mm and the length is 47.5mm.

[0009] As a further description of the above technical solution: the auxiliary hole is filled with Teflon liquid, and the auxiliary hole and the reinforcing column are sealed by Teflon liquid.

[0010] As a further description of the above technical solution: the front side of the rear plate is provided with an M8*0.75 threaded hole, and the rear end of the support column is provided with an M8*0.75 external thread head. The rear end of the support column is fixedly connected to the rear plate through the external thread head and the threaded hole.

[0011] The front plate has a 6mm diameter mounting hole on its rear side, and the support column has a 6mm diameter mounting head at its front end. The support column is inserted into the front plate through the mounting head and the mounting hole. The front plate has a pin hole on its side corresponding to the support column, which communicates with the mounting hole. A pin is provided in the pin hole, and the pin extends into the mounting hole and is inserted into the mounting head.

[0012] As a further description of the above technical solution: both the mounting hole and the threaded hole have a chamfer of 0.2mm × 45° at their openings.

[0013] Compared with existing technologies, the advantages of this utility model are:

[0014] I. This solution improves the bending strength of the support column by adding a reinforcing column made of Hastelloy inside the support column. It can maintain shape stability after long-term use, reduce the problem of crystal breakage or uneven cleaning caused by deformation, and extend the service life of the flower basket.

[0015] Second, this solution uses Teflon liquid to effectively fill the microscopic gaps between the auxiliary holes and the reinforcing column, forming a flexible sealing layer. Even when subjected to thermal expansion or mechanical vibration, it can still maintain the integrity of the seal, prevent acid penetration, and ensure that the reinforcing column will not be corroded by acid. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the front panel of this utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the rear plate of this utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the support column of this utility model;

[0020] Figure 5 This is a schematic diagram of the structure of the reinforcing column of this utility model.

[0021] Explanation of the labels in the diagram:

[0022] 1. Front plate; 11. Mounting hole; 2. Rear plate; 21. Threaded hole; 3. Support column; 31. External thread head; 32. Mounting head; 33. Positioning structure; 4. Auxiliary hole; 5. Reinforcing column; 6. Pin hole; 7. Pin. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0024] Please see Figure 1-5 A deformation-resistant wafer cleaning basket includes a front plate 1 and a rear plate 2, which are arranged opposite each other. Multiple sets of support columns 3 are arranged between the front plate 1 and the rear plate 2, forming a U-shaped structure. The surface of the support column 3 is provided with a continuous concave-convex positioning structure 33 along its extension direction. The positioning structure 33 is used for wafer positioning to prevent displacement or collision during cleaning. The concave-convex design increases liquid flow turbulence and improves cleaning uniformity.

[0025] The two ends of the support column 3 are fixedly installed between the front plate 1 and the rear plate 2 respectively. An auxiliary hole 4 is opened in the support column 3 in the same direction as its extension. A reinforcing column 5 is press-fitted into the auxiliary hole 4. The reinforcing column 5 is made of Hastelloy C276.

[0026] This embodiment improves the bending strength of the support column 3 by adding a reinforcing column 5 made of Hastelloy within the support column 3. This ensures the support column 3 maintains its shape stability even after long-term use, reducing issues such as wafer breakage or uneven cleaning caused by deformation, and extending the service life of the basket. Hastelloy C276 is resistant to strong acid corrosion (especially to mixtures of hydrofluoric acid and nitric acid) and has good high-temperature stability (its performance remains unchanged at 140℃). Furthermore, the multiple support columns 3 form a U-shaped layout to distribute stress and prevent excessive localized stress that could lead to deformation.

[0027] The reinforcing column 5 has a diameter of 3 mm and a length of 47.5 mm. The auxiliary hole 4 is filled with Teflon liquid, and the auxiliary hole 4 and the reinforcing column 5 are sealed together by the Teflon liquid. Teflon (PTFE) has extremely low surface energy and excellent chemical inertness, effectively filling the microscopic gaps between the auxiliary hole and the reinforcing column to form a flexible sealing layer. Even under thermal expansion or mechanical vibration, it can maintain the integrity of the seal, preventing acid penetration and thus protecting the internal structure of the Hastelloy reinforcing column 5 and the support column 3, avoiding corrosion failure caused by acid intrusion.

[0028] like Figure 2 , 3As shown in Figure 4, the front side of the rear plate 2 has an M8*0.75 threaded hole 21, and the rear end of the support column 3 has an M8*0.75 external thread head 31. The rear end of the support column 3 is fixedly connected to the rear plate 2 through the external thread head 31 and the threaded hole 21. The rear side of the front plate 1 has a mounting hole 11 with a diameter of 6mm, and the front end of the support column 3 has a mounting head 32 with a diameter of 6mm. The support column 3 is inserted into the front plate 1 through the mounting head 32 and the mounting hole 11. The side of the front plate 1 has a pin hole 6 corresponding to the support column 3, which communicates with the mounting hole 11. A pin 7 is provided in the pin hole 6, and the pin 7 extends into the mounting hole 11 and is inserted into the mounting head 32.

[0029] The mounting hole 11 and the threaded hole 21 are both provided with a 0.2mm × 45° chamfer at the opening. The chamfer design facilitates assembly, reduces interference or jamming caused by sharp edges, and can also improve strength and avoid stress concentration that could lead to cracking.

[0030] The above description is merely a preferred embodiment of this utility model; however, the protection scope of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and its improved concept, should be included within the protection scope of this utility model.

Claims

1. A deformation-resistant wafer cleaning basket, comprising a front plate (1) and a rear plate (2), wherein the front plate (1) and the rear plate (2) are arranged opposite each other, characterized in that: Multiple sets of support columns (3) are provided between the front plate (1) and the rear plate (2). The multiple sets of support columns (3) form a U-shaped structure. The surface of the support column (3) is provided with a continuous concave-convex positioning structure (33) along its extension direction. The two ends of the support column (3) are fixedly installed between the front plate (1) and the rear plate (2). An auxiliary hole (4) with the same extension direction is opened in the support column (3). A reinforcing column (5) is press-fitted in the auxiliary hole (4). The reinforcing column (5) is made of Hastelloy C276.

2. The deformation-resistant wafer cleaning basket according to claim 1, characterized in that: The reinforcing column (5) has a diameter of 3 mm and a length of 47.5 mm.

3. The deformation-resistant wafer cleaning basket according to claim 1, characterized in that: The auxiliary hole (4) is filled with Teflon liquid, and the auxiliary hole (4) and the reinforcing column (5) are sealed by Teflon liquid.

4. The deformation-resistant wafer cleaning basket according to claim 1, characterized in that: The front side of the rear plate (2) is provided with an M8*0.75 threaded hole (21), and the rear end of the support column (3) is provided with an M8*0.75 external thread head (31). The rear end of the support column (3) is fixedly connected to the rear plate (2) through the external thread head (31) and the threaded hole (21). The front plate (1) has a mounting hole (11) with a diameter of 6 mm on its rear side. The support column (3) has a mounting head (32) with a diameter of 6 mm at its front end. The support column (3) is inserted into the front plate (1) through the mounting head (32) and the mounting hole (11). The side of the front plate (1) has a pin hole (6) corresponding to the support column (3) that communicates with the mounting hole (11). A pin (7) is provided in the pin hole (6). The pin (7) extends into the mounting hole (11) and is inserted into the mounting head (32).

5. The deformation-resistant wafer cleaning basket according to claim 4, characterized in that: The mounting hole (11) and the threaded hole (21) are both provided with a chamfer of 0.2mm × 45° at the opening.

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