Internal and external double-cooling type cold trap

Abstract

The upper end and the lower end of an outer cylinder are fixedly connected with a top plate and a bottom plate respectively, an inner cylinder is located in the outer cylinder, a first cooling cavity is formed between the outer cylinder and the inner cylinder, a cooling cylinder is inserted into the first inner cavity of the inner cylinder, and a second cooling inner cavity is formed in the cooling cylinder. A first water inlet hole and a first water outlet hole are formed in the top plate, the first water inlet hole and the first water outlet hole are respectively communicated with the first cooling cavity and the second cooling cavity, and the air inlet pipe and the air outlet pipe are respectively communicated with the first inner cavity. Cooling water is introduced into the first cooling inner cavity and the second cooling inner cavity, so that the inner wall of the inner cylinder can be cooled to adsorb dust, the adsorption area is increased, the overall temperature of the first inner cavity is reduced, and more dust in waste gas can be adsorbed; the inner wall of the inner cylinder contacts with the adsorption sheet for heat conduction, so that the temperature of the outer edge of the adsorption sheet far away from the cooling cylinder is lower, the temperature of the adsorption sheet is further reduced, and the adsorption efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of waste gas dust adsorption, and in particular to a dual-cooling cold trap. Background Technology

[0002] In the semiconductor manufacturing industry, the waste gases generated during semiconductor production need to be treated. When dry pumps transport waste gases, they need to travel through long pipelines to reach the waste gas treatment equipment. Because semiconductor waste gases contain dust, this dust accumulates in the pipelines during transport, causing blockages. To avoid these blockages, the pipelines need to be disassembled and cleaned periodically by hand, increasing costs and workload. Utility Model Content

[0003] This invention aims to solve the above problems by providing a dual-cooling cold trap, which solves the problem of dust deposition in the pipeline in exhaust gas.

[0004] A dual-cooling cold trap includes: an outer cylinder, an inner cylinder, a first inner cavity, a bottom plate, a top plate, a cooling cylinder, an air inlet pipe, and an air outlet pipe. The upper and lower ends of the outer cylinder are fixedly connected to the top plate and the bottom plate, respectively. The inner cylinder is located inside the outer cylinder. A first cooling cavity is formed between the outer cylinder and the inner cylinder. The cooling cylinder is inserted into the first inner cavity of the inner cylinder. A second cooling cavity is formed inside the cooling cylinder. The top plate has a first water inlet hole and a first water outlet hole, which are respectively connected to the first cooling cavity and the second cooling cavity. The air inlet pipe and the air outlet pipe are respectively connected to the first inner cavity.

[0005] Preferably, it further includes a fixing plate, which is located above the cooling cylinder and fixedly connected to the cooling cylinder. The fixing plate is fixedly connected to the upper end of the inner cylinder and is detachably connected. The fixing plate blocks the upper end of the first inner cavity. The fixing plate forms a second water inlet and a second water outlet. The second water inlet and the second water outlet are respectively connected to the second cooling inner cavity. The second water inlet and the second water outlet are respectively connected to the first water inlet and the first water outlet.

[0006] Preferably, a second inner cavity is formed between the top plate and the fixed plate, the second water inlet and the second water outlet are respectively connected to the second inner cavity, the second inner cavity is connected to the first water inlet and the first water outlet, and the second inner cavity is connected to the first cooling cavity.

[0007] Preferably, a partition is provided in the second inner cavity, the partition being located between the first water inlet and the first water outlet, and the partition being located between the second water inlet and the second water outlet.

[0008] Preferably, it further includes an adsorption sheet, which is located outside the cooling cylinder and fixedly connected to the cooling cylinder. The adsorption sheet is arranged in a straight line along the cooling cylinder and has a notch. The notches of two adjacent adsorption sheets do not overlap.

[0009] Preferably, the outer surface of the adsorption sheet is in contact with the inner wall of the inner cylinder.

[0010] Preferably, it further includes a hollow plate, the hollow plate having an inner cavity that is isolated from the second cooling inner cavity, the hollow plate being located inside the second cooling inner cavity, the upper part of the hollow plate being fixedly connected to a fixed plate, and the lower part of the hollow plate being connected to the inner wall of the cooling cylinder through a channel, the hollow plate dividing the second cooling inner cavity into two parts, the two parts of the second cooling inner cavity being connected only through the channel.

[0011] Preferably, the air inlet pipe and the air outlet pipe pass through the outer cylinder and the inner cylinder respectively, and the air inlet pipe and the air outlet pipe are fixedly connected to the outer cylinder and the inner cylinder respectively. The height of the air inlet pipe is lower than that of the cooling cylinder and the air outlet pipe, and the inner cylinder is connected to multiple air outlet pipes.

[0012] Preferably, the top plate is detachably connected to the outer cylinder, and the inner cylinder is fixed to the bottom plate and detachably connected.

[0013] Preferably, it also includes a support foot, casters, a connecting cylinder, and a screw. The bottom of the base plate is fixedly connected to multiple casters, the bottom of the base plate is fixedly connected to the connecting cylinder, the upper end of the screw is inserted into the connecting cylinder and threadedly connected to the connecting cylinder, and the lower end of the screw is fixedly connected to the support foot.

[0014] The present invention has the following advantages: cooling water is introduced into the first cooling chamber and the second cooling chamber, so that the inner wall of the inner cylinder can also be cooled and adsorbed, increasing the adsorption area and reducing the overall temperature of the first inner chamber, which is conducive to adsorbing more dust in the exhaust gas; the inner wall of the inner cylinder contacts the adsorption plate for heat conduction, so that the temperature of the outer edge of the adsorption plate away from the cooling cylinder is lower, further reducing the temperature of the adsorption plate and improving the adsorption efficiency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0016] Figure 1 : A three-dimensional structural schematic diagram of this utility model;

[0017] Figure 2: A top view of the structure of this utility model;

[0018] Figure 3 :exist Figure 2 Schematic diagram of the cross-sectional structure at point AA;

[0019] Figure 4 :exist Figure 2 Schematic diagram of the cross-sectional structure at point BB;

[0020] Figure 5 :exist Figure 3 A magnified schematic diagram of the structure at point C in the middle;

[0021] Figure 6 :exist Figure 4 A magnified schematic diagram of the local structure at point D;

[0022] Figure 7 : Schematic diagram of the three-dimensional structure of the cooling cylinder and the adsorption plate. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and examples:

[0024] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] like Figures 1 to 7As shown, a dual-cooling cold trap includes: an outer cylinder 1, an inner cylinder 2, a first inner cavity 20, a bottom plate 3, a top plate 4, a cooling cylinder 5, an air inlet pipe 11, and an air outlet pipe 12. The upper and lower ends of the outer cylinder 1 are fixedly connected to the top plate 4 and the bottom plate 3, respectively. The inner cylinder 2 is located inside the outer cylinder 1. A first cooling cavity 10 is formed between the outer cylinder 1 and the inner cylinder 2. The cooling cylinder 5 is inserted into the first inner cavity 20 of the inner cylinder 2. A second cooling inner cavity 50 is formed inside the cooling cylinder 5. The top plate 4 has a first water inlet hole 41 and a first water outlet hole 42. The first water inlet hole 41 and the first water outlet hole 42 are respectively connected to the first cooling cavity 10 and the second cooling inner cavity 50. The air inlet pipe 11 and the air outlet pipe 12 are respectively connected to the first inner cavity 20.

[0028] Preferably, it also includes a fixing plate 53, which is located above the cooling cylinder 5 and fixedly connected to the cooling cylinder 5. The fixing plate 53 is fixedly connected to the upper end of the inner cylinder 2 and is detachably connected. The fixing plate 53 blocks the upper end of the first inner cavity 20. The fixing plate 53 forms a second water inlet hole 51 and a second water outlet hole 52. The second water inlet hole 51 and the second water outlet hole 52 are respectively connected to the second cooling inner cavity 50. The second water inlet hole 51 and the second water outlet hole 52 are respectively connected to the first water inlet hole 41 and the first water outlet hole 42.

[0029] Preferably, a second inner cavity 40 is formed between the top plate 4 and the fixed plate 53, the second water inlet 51 and the second water outlet 52 are respectively connected to the second inner cavity 40, the second inner cavity 40 is connected to the first water inlet 41 and the first water outlet 42, and the second inner cavity 40 is connected to the first cooling cavity 10.

[0030] Preferably, a partition is provided inside the second inner cavity 40. The partition is located between the first water inlet 41 and the first water outlet 42, and between the second water inlet 51 and the second water outlet 52. The partition is used to block the shortest flow path from the first water inlet 41 to the first water outlet 42 and the shortest flow path from the second water inlet 51 to the second water outlet 52, so that the cooling water passes through the first cooling cavity 10 and the second cooling inner cavity 50 respectively, thereby increasing the contact area between the cooling water and the inner cylinder 2 and the cooling cylinder 5, improving the heat exchange efficiency, and reducing the temperature of the inner cylinder 2 and the cooling cylinder 5.

[0031] Preferably, it also includes an adsorption sheet 6, which is located outside the cooling cylinder 5 and fixedly connected to the cooling cylinder 5. The cooling cylinder 5 reduces the temperature of the adsorption sheet 6 through heat conduction. The adsorption sheet 6 is arranged in a straight line along the cooling cylinder 5. The adsorption sheet 6 has a notch 60. The notches 60 of two adjacent adsorption sheets 6 do not overlap when viewed from above, thereby blocking the exhaust gas and preventing the exhaust gas from moving upward in a straight line, so as to increase the flow distance of the exhaust gas in the inner cylinder 2 and increase the amount of dust adsorbed.

[0032] Preferably, the outer side of the adsorption sheet 6 is attached to the inner wall of the inner cylinder 2, so that the side of the adsorption sheet 6 away from the cooling cylinder 5 is cooled by heat conduction, and the temperature of the outer edge of the adsorption sheet 6 can also be kept at a low level.

[0033] Preferably, it also includes a hollow plate 54, the hollow plate 54 having an inner cavity that is isolated from the second cooling inner cavity 50. The hollow cavity occupies part of the volume of the center of the second cooling inner cavity 50, thereby reducing the volume of cooling water far from the cooling cylinder 5 in the second cooling inner cavity 50, so that the cooling water can contact the inner wall of the cooling cylinder 5 more fully and exchange heat more effectively. The hollow plate 54 is located inside the second cooling inner cavity 50. The upper part of the hollow plate 54 is fixedly connected to the fixing plate 53, and a channel is formed between the lower part of the hollow plate 54 and the inner wall of the cooling cylinder 5. The hollow plate 54 divides the second cooling inner cavity 50 into two parts. The two parts of the second cooling inner cavity 50 are connected only through the channel, preventing the cooling water entering through the second water inlet 51 from flowing directly out of the second cooling inner cavity 50 from the second water outlet 52 without moving downwards.

[0034] Preferably, the air inlet pipe 11 and the air outlet pipe 12 pass through the outer cylinder 1 and the inner cylinder 2 respectively, and the air inlet pipe 11 and the air outlet pipe 12 are fixedly connected to the outer cylinder 1 and the inner cylinder 2 respectively. The height of the air inlet pipe 11 is lower than that of the cooling cylinder 5 and the air outlet pipe 12. The inner cylinder 2 is connected to multiple air outlet pipes 12, and the multiple air outlet pipes 12 allow one cold trap to be connected to multiple dry pumps.

[0035] Preferably, the top plate 4 is detachably connected to the outer cylinder 1, and the inner cylinder 2 is fixedly and detachably connected to the bottom plate 3. After adsorbing a large amount of dust, the top plate 4 needs to be removed from the outer cylinder 1, and the fixing plate 53 needs to be taken out of the inner cylinder 2; then the inside of the inner cylinder 2, the outer wall of the cooling cylinder 5, and the adsorption sheet 6 need to be cleaned.

[0036] More preferably, the bottom plate 3 has a plurality of positioning protrusions 32, and the bottom surface of the inner cylinder 2 has through holes or blind holes that are adapted to the positioning protrusions 32, thereby positioning the inner cylinder 2.

[0037] Preferably, the system further includes a support foot 7, casters 8, a connecting cylinder 31, and a screw 71. The base plate 3 is fixedly connected to the lower part of the casters 8, and the lower part of the base plate 3 is fixedly connected to the connecting cylinder 31. The upper end of the screw 71 is inserted into the connecting cylinder 31 and threadedly connected to it. The lower end of the screw 71 is fixedly connected to the support foot 7. When moving the outer cylinder 1, the screw 71 is first rotated to raise the support foot 7 and disengage it from the ground or chassis. Then, the casters 8 push the outer cylinder 1 to move. When fixing the outer cylinder 1, the screw 71 is rotated to move the support foot 7 downwards to contact the ground or chassis foundation. The friction of the support foot 7 restricts the movement of the outer cylinder 1.

[0038] More preferably, the support foot 7 is made of an elastic material such as rubber.

[0039] During operation, exhaust gas enters the first inner cavity 20 through the inlet pipe 11 and moves upward within the first inner cavity 20. As the exhaust gas passes through the multi-layer adsorption plates 6, the dust in the exhaust gas is adsorbed by the cooled cooling cylinder 5, the inner cylinder 2, and the adsorption plates 6. The exhaust gas, after adsorbing the dust, leaves the first inner cavity 20 through the outlet pipe 12.

[0040] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A dual-cooling cold trap, characterized in that, include: The outer cylinder (1), inner cylinder (2), first inner cavity (20), bottom plate (3), top plate (4), cooling cylinder (5), air inlet pipe (11) and air outlet pipe (12) are fixedly connected to the top plate (4) and bottom plate (3) at the upper and lower ends of the outer cylinder (1), respectively. The inner cylinder (2) is located inside the outer cylinder (1). A first cooling cavity (10) is formed between the outer cylinder (1) and the inner cylinder (2). The cooling cylinder (5) is inserted into the first inner cavity (20) of the inner cylinder (2). A second cooling inner cavity (50) is formed inside the cooling cylinder (5). The top plate (4) has a first water inlet hole (41) and a first water outlet hole (42). The first water inlet hole (41) and the first water outlet hole (42) are respectively connected to the first cooling cavity (10) and the second cooling inner cavity (50). The air inlet pipe (11) and the air outlet pipe (12) are respectively connected to the first inner cavity (20).

2. The internal and external dual-cooling cold trap according to claim 1, characterized in that: It also includes a fixing plate (53), which is located above the cooling cylinder (5) and fixedly connected to the cooling cylinder (5). The fixing plate (53) is fixedly connected to the upper end of the inner cylinder (2) and is detachably connected. The fixing plate (53) blocks the upper end of the first inner cavity (20). The fixing plate (53) forms a second water inlet hole (51) and a second water outlet hole (52). The second water inlet hole (51) and the second water outlet hole (52) are respectively connected to the second cooling inner cavity (50). The second water inlet hole (51) and the second water outlet hole (52) are respectively connected to the first water inlet hole (41) and the first water outlet hole (42).

3. A dual-cooling cold trap according to claim 2, characterized in that: A second inner cavity (40) is formed between the top plate (4) and the fixed plate (53). The second water inlet (51) and the second water outlet (52) are respectively connected to the second inner cavity (40). The second inner cavity (40) is connected to the first water inlet (41) and the first water outlet (42). The second inner cavity (40) is connected to the first cooling cavity (10).

4. A dual-cooling cold trap according to claim 3, characterized in that: The second inner cavity (40) is provided with a partition, which is located between the first water inlet (41) and the first water outlet (42), and between the second water inlet (51) and the second water outlet (52).

5. A dual-cooling cold trap according to claim 1, characterized in that: It also includes an adsorption sheet (6), which is located outside the cooling cylinder (5) and fixedly connected to the cooling cylinder (5). The adsorption sheet (6) is arranged in a straight line along the cooling cylinder (5). The adsorption sheet (6) has a notch (60), and the notches (60) of two adjacent adsorption sheets (6) do not overlap.

6. A dual-cooling cold trap according to claim 5, characterized in that: The outer side of the adsorption sheet (6) is attached to the inner wall of the inner cylinder (2).

7. A dual-cooling cold trap according to claim 1, characterized in that: It also includes a hollow plate (54), which has an inner cavity that is isolated from the second cooling inner cavity (50). The hollow plate (54) is located inside the second cooling inner cavity (50). The upper part of the hollow plate (54) is fixedly connected to the fixed plate (53). The lower part of the hollow plate (54) is connected to the inner wall of the cooling cylinder (5). The hollow plate (54) divides the second cooling inner cavity (50) into two parts. The two parts of the second cooling inner cavity (50) are connected only through the channel.

8. A dual-cooling cold trap according to claim 1, characterized in that: The air inlet pipe (11) and the air outlet pipe (12) pass through the outer cylinder (1) and the inner cylinder (2) respectively. The air inlet pipe (11) and the air outlet pipe (12) are fixedly connected to the outer cylinder (1) and the inner cylinder (2) respectively. The height of the air inlet pipe (11) is lower than that of the cooling cylinder (5) and the air outlet pipe (12). The inner cylinder (2) is connected to multiple air outlet pipes (12).

9. A dual-cooling cold trap according to claim 1, characterized in that: The top plate (4) is detachably connected to the outer cylinder (1), and the inner cylinder (2) is fixed to the bottom plate (3) and detachably connected.

10. A dual-cooling cold trap according to claim 1, characterized in that: It also includes a support foot (7), casters (8), a connecting cylinder (31) and a screw (71). The bottom of the base plate (3) is fixedly connected to multiple casters (8), the bottom of the base plate (3) is fixedly connected to the connecting cylinder (31), the upper end of the screw (71) is inserted into the connecting cylinder (31) and threadedly connected to the connecting cylinder (31), and the lower end of the screw (71) is fixedly connected to the support foot (7).

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