Shell surface treatment device for vacuum valve machining

Abstract

The utility model relates to the technical field of vacuum valve machining, in particular to a shell surface treatment device for vacuum valve machining, which comprises an operation table, four cleaning rollers and four polishing rollers, the four cleaning rollers and the four polishing rollers are respectively arranged at two ends above the operation table, and the top of the operation table is rotatably connected with a rotating disc with a pentagonal structure. Five rotating plates are rotationally connected into the rotating disc, outer supporting mechanisms are arranged at the tops of the rotating plates, first gears are fixedly connected to center shafts of the rotating plates, a gear ring is fixedly connected to the top of the operation table, and the first gears are in engaged connection with the gear ring. The device has the beneficial effects that the deviation of the surface roughness Ra of each shell can be controlled within + / -0.01 mu m and the batch consistency reaches more than 99% by accurately controlling processing parameters and uniformly rotating, so that the requirement of an ultrahigh vacuum valve on the planeness of a sealing surface is met, and compared with the traditional device, the operation quality and the use efficiency are greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum valve processing technology, and in particular to a surface treatment device for vacuum valve housing processing. Background Technology

[0002] A vacuum valve is a key component used to control, regulate, or cut off gas flow in a vacuum system. It is widely used in semiconductor manufacturing, aerospace, medical equipment, scientific research experiments, and other fields.

[0003] In the manufacturing process of vacuum valves, the surface treatment of the housing is of utmost importance. Good surface treatment can enhance the corrosion resistance, sealing performance and aesthetics of the housing, thereby improving the overall performance and service life of the vacuum valve.

[0004] However, traditional vacuum valve housing surface treatment methods have many shortcomings. For example, manual grinding is inefficient, and the grinding quality is greatly affected by the worker's skill level and fatigue level, making it difficult to guarantee the consistency and precision of the surface treatment. This results in slow speed and inability to operate continuously, which seriously restricts the production cycle. Secondly, the quality stability is poor. Differences in worker skills can lead to fluctuations in key parameters such as surface roughness and contour accuracy. The Ra value of the same batch of products may vary by more than 0.2μm.

[0005] To address the above issues, we have developed a surface treatment device for vacuum valve housings. Utility Model Content

[0006] This utility model discloses a surface treatment device for the housing of a vacuum valve, which aims to solve the technical problems in the background art.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A surface treatment device for vacuum valve housing includes an operating table, four cleaning rollers, and four polishing rollers. The four cleaning rollers and polishing rollers are respectively arranged at both ends above the operating table. A pentagonal rotating disk is rotatably connected to the top of the operating table. Five rotating plates are rotatably connected inside the rotating disk. Each rotating plate is provided with an external support mechanism on its top. A first gear is fixedly connected to the central axis of each rotating plate. A gear ring is fixedly connected to the top of the operating table. The first gear meshes with the gear ring.

[0009] First, the worker places the vacuum valve housing on the outer support mechanism on top of the rotating plate. As the rotating plate rotates, the first gear on the rotating plate meshes with the gear ring, causing the rotating plate to rotate around its own central axis while following the rotation of the rotating plate. The first rotating plate carries the vacuum valve housing to the bottom of the cleaning roller, where the cleaning roller cleans the housing. As the rotating plate continues to rotate, the housing on the second rotating plate moves to the position of the cleaning roller, while the housing that has been cleaned on the first rotating plate moves to the bottom of the polishing roller for polishing. This cycle is repeated to achieve continuous surface treatment of multiple vacuum valve housings.

[0010] In a preferred embodiment, the external support mechanism includes a support rod, two first connecting rings, three external support plates, a second connecting ring, nine connecting rods, and a fastening nut. The support rod is fixedly connected to the top of the rotating plate. Both first connecting rings are fixedly connected to the outside of the support rod. The second connecting rings are slidably connected to the outside of the support rod. Three connecting rods are rotatably connected to the outer sides of both the first and second connecting rings. The three external support plates are symmetrically arranged on the outer side of the support rod. The end of each connecting rod away from the first and second connecting rings is rotatably connected to one side of the corresponding external support plate. A fastening nut is threadedly connected to the upper part of the outside of the support rod. The bottom of the fastening nut is rotatably connected to the top of the second connecting ring.

[0011] Adjust the outer support mechanism according to the inner diameter of the housing. For vacuum valve housings with larger inner diameters, the worker rotates the fastening nut to move it upward, causing the second connecting ring to slide upward on the support rod. This pushes the outer support plate outward through the connecting rod, thereby tightening the inner wall of the vacuum valve housing. After adjustment, the vacuum valve housing is placed on the outer support plate, and the fastening nut is rotated again to ensure that the outer support plate firmly supports the housing, ensuring that the housing will not shake during the surface treatment process.

[0012] In a preferred embodiment, a second gear is fixedly connected to the outside of the central shaft of the rotating disk, a first motor is fixedly connected to the bottom of the operating table, the output shaft of the first motor passes through the operating table and is fixedly connected to a third gear, and the third gear meshes with the second gear.

[0013] The output shaft of the first motor drives the third gear to rotate. The third gear meshes with the second gear, driving the rotating disk to rotate around its central axis.

[0014] In a preferred embodiment, sliding grooves are provided on both sides of the top of the operating table. A lead screw is rotatably connected inside each sliding groove. A support frame is threaded to the outside of each lead screw. Four second motors are fixedly connected to the bottom of each support frame. The top of each second motor passes through the support frame and is fixedly connected to the bottom of the corresponding cleaning roller and polishing roller. A third motor is fixedly connected to both sides of the operating table. The output shaft of each third motor extends into the interior of the corresponding sliding groove and meshes with the lead screw.

[0015] When performing surface treatment on the vacuum valve housing, the polishing roller needs to be adjusted after cleaning. The worker starts the third motor through the control console. The output shaft of the third motor drives the lead screw to rotate. Since the support frame is threadedly connected to the lead screw, the support frame moves laterally along the sliding groove when the lead screw rotates, thereby switching the treatment of the vacuum valve housing by the cleaning roller and the polishing roller.

[0016] In a preferred embodiment, a fixing plate is fixedly connected to one side of the top of the operating table, and three liquid outlet nozzles are fixedly connected at equal intervals inside the fixing plate. A connecting pipe is fixedly connected between the input ends of the three liquid outlet nozzles, and the end of the connecting pipe away from the liquid outlet nozzle is connected to an external cleaning fluid supply device.

[0017] During the cleaning process of the vacuum valve housing, the external cleaning fluid supply equipment delivers the cleaning fluid to the outlet nozzle through the connecting pipe. When the vacuum valve housing moves to the side of the outlet nozzle, the cleaning fluid is sprayed out from the outlet nozzle and sprinkled on the surface of the vacuum valve housing.

[0018] In a preferred embodiment, anti-slip pads are fixedly connected to the sides of the three outer support plates that are far apart from each other.

[0019] The anti-slip rubber pads increase the friction between the outer support plate and the inner wall of the vacuum valve housing, preventing the housing from sliding during the surface treatment process.

[0020] In a preferred embodiment, limit rods are fixedly connected inside the sliding groove and on both sides of the lead screw, and the support frame is slidably connected to the corresponding limit rod.

[0021] As the third motor drives the lead screw to rotate, causing the support frame to move laterally, the limit rod ensures the smooth movement of the support frame.

[0022] In a preferred embodiment, a control console is fixedly connected to the top of the operating platform, and the first motor, the second motor, and the third motor are all electrically connected to the control console.

[0023] Workers can start or stop the first, second, and third motors and adjust their operating parameters on the control panel.

[0024] The surface treatment device for vacuum valve housing processing provided by this utility model has the following advantages:

[0025] In this utility model, the first gear on the rotating plate meshes with the gear ring. While the rotating plate revolves with the rotating disk, it also rotates around its own central axis. The first rotating plate moves the vacuum valve housing under the cleaning roller. At this time, the cleaning roller cleans the housing. As the rotating disk continues to rotate, the housing on the second rotating plate moves to the position of the cleaning roller. At the same time, the housing that has been cleaned on the first rotating plate moves under the polishing roller for polishing.

[0026] 1. By precisely controlling the processing parameters and ensuring even rotation, the surface roughness Ra deviation of each housing can be controlled within ±0.01μm, and the batch consistency reaches more than 99%, meeting the flatness requirements of the sealing surface for ultra-high vacuum valves;

[0027] 2. With adjustable external support fixtures, it can be adapted to the processing of shells from Φ20mm to Φ500mm, eliminating the need for frequent tooling changes, significantly reducing equipment adjustment time, and greatly improving work quality and efficiency compared to traditional devices. Attached Figure Description

[0028] Figure 1 This is a first-view perspective three-dimensional schematic diagram of a surface treatment device for vacuum valve processing proposed in this utility model.

[0029] Figure 2 This is a second-view perspective three-dimensional schematic diagram of a surface treatment device for vacuum valve processing proposed in this utility model.

[0030] Figure 3 This is a schematic diagram of the rotating disk structure of a vacuum valve housing surface treatment device proposed in this utility model.

[0031] Figure 4 This is a schematic diagram showing the meshing connection between the second and third gears of a surface treatment device for vacuum valve processing according to this utility model.

[0032] Figure 5 This is a schematic diagram of the external support mechanism of a vacuum valve housing surface treatment device proposed in this utility model.

[0033] Figure 6 This is a schematic diagram of the support frame structure of a vacuum valve housing surface treatment device proposed in this utility model.

[0034] Figure 7 This is a schematic diagram of the fixing plate structure of a vacuum valve housing surface treatment device proposed in this utility model.

[0035] In the attached diagram: 1. Operating table; 2. Cleaning roller; 3. Polishing roller; 4. Rotary disk; 5. Rotating plate; 6. Control console; 7. First gear; 8. Gear ring; 9. Support rod; 10. First connecting ring; 11. Outer support plate; 12. Second connecting ring; 13. Connecting rod; 14. Fastening nut; 15. Second gear; 16. First motor; 17. Third gear; 18. Sliding groove; 19. Lead screw; 20. Support frame; 21. Second motor; 22. Third motor; 23. Fixing plate; 24. Liquid outlet nozzle; 25. Connecting pipe; 26. Anti-slip pad; 27. Limiting rod. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and marked in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0037] The surface treatment device for the housing of vacuum valve processing disclosed in this utility model is mainly used in vacuum valve processing scenarios.

[0038] Reference Figures 1-7 A surface treatment device for vacuum valve housing processing includes an operating table 1, four cleaning rollers 2 and four polishing rollers 3. The four cleaning rollers 2 and polishing rollers 3 are respectively arranged at both ends above the operating table 1. A pentagonal rotating disk 4 is rotatably connected to the top of the operating table 1. Five rotating plates 5 are rotatably connected inside the rotating disk 4. Each rotating plate 5 is provided with an external support mechanism on its top. A first gear 7 is fixedly connected to the central shaft of each rotating plate 5. A gear ring 8 is fixedly connected to the top of the operating table 1. The first gear 7 is meshed with the gear ring 8.

[0039] In this embodiment: First, the worker places the vacuum valve housing on the outer support mechanism on the top of the rotating plate 5. During the rotation of the rotating disk 4, the first gear 7 on the rotating plate 5 meshes with the gear ring 8. While the rotating plate 5 revolves with the rotating disk 4, it also rotates around its own central axis. The first rotating plate 5 carries the vacuum valve housing to the bottom of the cleaning roller 2. At this time, the cleaning roller 2 cleans the housing. As the rotating disk 4 continues to rotate, the housing on the second rotating plate 5 moves to the position of the cleaning roller 2. At the same time, the housing that has been cleaned on the first rotating plate 5 moves to the bottom of the polishing roller 3 for polishing. This cycle is repeated to achieve continuous surface treatment of multiple vacuum valve housings.

[0040] In a preferred embodiment, the external support mechanism includes a support rod 9, two first connecting rings 10, three external support plates 11, a second connecting ring 12, nine connecting rods 13, and a fastening nut 14. The support rod 9 is fixedly connected to the top of the rotating plate 5. The two first connecting rings 10 are fixedly connected to the outside of the support rod 9. The second connecting rings 12 are slidably connected to the outside of the support rod 9. Three connecting rods 13 are rotatably connected to the outside of the first connecting rings 10 and the second connecting rings 12. The three external support plates 11 are symmetrically arranged on the outside of the support rod 9. The end of the connecting rod 13 away from the first connecting rings 10 and the second connecting rings 12 is rotatably connected to the side of the corresponding external support plate 11. A fastening nut 14 is threadedly connected to the upper part of the outside of the support rod 9. The bottom of the fastening nut 14 is rotatably connected to the top of the second connecting ring 12.

[0041] In this embodiment: the outer support mechanism is adjusted according to the inner diameter of the housing. For a vacuum valve housing with a large inner diameter, the worker rotates the fastening nut 14 to move the fastening nut 14 upward, causing the second connecting ring 12 to slide upward on the support rod 9. The connecting rod 13 pushes the outer support plate 11 to open outward, thereby tightening the inner wall of the vacuum valve housing. After adjustment, the vacuum valve housing is placed on the outer support plate 11, and the fastening nut 14 is rotated again to make the outer support plate 11 firmly support the housing, ensuring that the housing will not shake during the surface treatment process.

[0042] In a preferred embodiment, a second gear 15 is fixedly connected to the outside of the central shaft of the rotating disk 4, and a first motor 16 is fixedly connected to the bottom of the operating table 1. The output shaft of the first motor 16 passes through the operating table 1 and is fixedly connected to a third gear 17, which meshes with the second gear 15.

[0043] In this embodiment: the output shaft of the first motor 16 drives the third gear 17 to rotate, and the third gear 17 meshes with the second gear 15, driving the rotating disk 4 to rotate around its central axis.

[0044] In a preferred embodiment, sliding grooves 18 are provided on both sides of the top of the operating table 1. A lead screw 19 is rotatably connected inside the sliding groove 18. A support frame 20 is threadedly connected to the outside of the lead screw 19. Four second motors 21 are fixedly connected to the bottom of the support frame 20. The top of the second motors 21 passes through the support frame 20 and is fixedly connected to the bottom of the corresponding cleaning roller 2 and polishing roller 3. A third motor 22 is fixedly connected to both sides of the operating table 1. The output shaft of the third motor 22 extends into the interior of the corresponding sliding groove 18 and meshes with the lead screw 19.

[0045] In this embodiment: When performing surface treatment on the vacuum valve housing, the polishing roller 3 needs to be adjusted after cleaning. The worker starts the third motor 22 through the control console 6. The output shaft of the third motor 22 drives the lead screw 19 to rotate. Since the support frame 20 is threadedly connected to the lead screw 19, when the lead screw 19 rotates, the support frame 20 moves laterally along the sliding groove 18, thereby switching the treatment of the vacuum valve housing by the cleaning roller 2 and the polishing roller 3.

[0046] In a preferred embodiment, a fixing plate 23 is fixedly connected to one side of the top of the operating table 1. Three liquid outlet nozzles 24 are fixedly connected at equal intervals inside the fixing plate 23. A connecting pipe 25 is fixedly connected between the input ends of the three liquid outlet nozzles 24. The end of the connecting pipe 25 away from the liquid outlet nozzles 24 is connected to an external cleaning fluid supply device.

[0047] In this embodiment: During the cleaning process of the vacuum valve housing, the external cleaning fluid supply equipment delivers the cleaning fluid to the liquid outlet nozzle 24 through the connecting pipe 25. When the vacuum valve housing moves to the side of the liquid outlet nozzle 24, the cleaning fluid is sprayed out from the liquid outlet nozzle 24 and sprinkled on the surface of the vacuum valve housing.

[0048] In a preferred embodiment, anti-slip pads 26 are fixedly connected to the sides of the three outer support plates 11 that are far apart from each other.

[0049] In this embodiment, the anti-slip pad 26 increases the friction between the outer support plate 11 and the inner wall of the vacuum valve housing, preventing the housing from sliding during the surface treatment process.

[0050] In a preferred embodiment, limit rods 27 are fixedly connected inside the sliding groove 18 and on both sides of the lead screw 19, and the support frame 20 is slidably connected to the corresponding limit rod 27.

[0051] In this embodiment: during the process of the third motor 22 driving the lead screw 19 to rotate and causing the support frame 20 to move laterally, the limiting rod 27 ensures the smooth movement of the support frame 20.

[0052] In a preferred embodiment, a control console 6 is fixedly connected to the top of the control panel 1, and the first motor 16, the second motor 21 and the third motor 22 are all electrically connected to the control console 6.

[0053] In this embodiment, the worker can start or stop the first motor 16, the second motor 21, and the third motor 22 on the control console 6, and adjust their operating parameters.

[0054] Working principle: When in use, first place the vacuum valve housing on the outer support mechanism, and push the second connecting ring 12 to move by rotating the fastening nut 14, so that the connecting rod 13 drives the three outer support plates 11 to expand outward, and the anti-slip rubber pad 26 achieves stable fixation of the housing;

[0055] The control console 6 starts the first motor 16, which drives the second gear 15 through the third gear 17 to rotate the rotating disk 4. At the same time, the first gear 7 of the rotating plate 5 meshes with the gear ring 8 to generate rotation, realizing the compound motion of the shell's revolution and rotation.

[0056] The third motor 22 drives the lead screw 19 to rotate, causing the support frame 20 to move along the limit rod 27, thereby adjusting the positions of the cleaning roller 2 and the polishing roller 3.

[0057] The second motor 21 drives the cleaning roller 2 and polishing roller 3 to rotate, and the cleaning liquid sprayed from the liquid nozzle 24 performs surface cleaning and polishing on the rotating shell.

[0058] Throughout the process, console 6 adjusts the speed of each motor and the cleaning and polishing parameters in real time to ensure the surface treatment quality and achieve efficient and uniform surface treatment of the vacuum valve body.

[0059] The above description is merely a preferred embodiment of this utility model, but the protection scope of this utility model is not limited thereto. The substitutions may be replacements of some structures, devices, or method steps, or they may be complete technical solutions. Equivalent substitutions or modifications made based on the technical solution and inventive concept of this utility model should all be covered within the protection scope of this utility model.

Claims

1. A surface treatment device for a vacuum valve housing, comprising an operating table (1), four cleaning rollers (2) and four polishing rollers (3), characterized in that, The four cleaning rollers (2) and polishing rollers (3) are respectively set at both ends above the operating table (1). The top of the operating table (1) is rotatably connected to a pentagonal rotating disk (4). The inside of the rotating disk (4) is rotatably connected to five rotating plates (5). The top of each rotating plate (5) is provided with an external support mechanism. The central axis of each rotating plate (5) is fixedly connected to a first gear (7). The top of the operating table (1) is fixedly connected to a gear ring (8). The first gear (7) meshes with the gear ring (8).

2. The surface treatment device for a vacuum valve housing according to claim 1, characterized in that, The external support mechanism includes a support rod (9), two first connecting rings (10), three external support plates (11), a second connecting ring (12), nine connecting rods (13), and a fastening nut (14). The support rod (9) is fixedly connected to the top of the rotating plate (5). The two first connecting rings (10) are fixedly connected to the outside of the support rod (9). The second connecting ring (12) is slidably connected to the outside of the support rod (9). Three connecting rods (13) are rotatably connected to the outside of the first connecting ring (10) and the second connecting ring (12). The three outer support plates (11) are symmetrically arranged on the outside of the support rod (9). The end of the connecting rod (13) away from the first connecting ring (10) and the second connecting ring (12) is rotatably connected to one side of the corresponding outer support plate (11). A fastening nut (14) is threadedly connected to the top of the outside of the support rod (9). The bottom of the fastening nut (14) is rotatably connected to the top of the second connecting ring (12).

3. The surface treatment device for a vacuum valve housing according to claim 1, characterized in that, The rotating disk (4) has a second gear (15) fixedly connected to the outside of its central shaft. The operating table (1) has a first motor (16) fixedly connected to its bottom. The output shaft of the first motor (16) passes through the operating table (1) and is fixedly connected to a third gear (17). The third gear (17) meshes with the second gear (15).

4. The surface treatment device for a vacuum valve housing according to claim 3, characterized in that, The top of the operating table (1) is provided with sliding grooves (18) on both sides. The sliding grooves (18) are rotatably connected with lead screws (19). The lead screws (19) are threadedly connected with support frames (20). The bottom of the support frames (20) is fixedly connected with four second motors (21). The top of the second motors (21) passes through the support frames (20) and is fixedly connected to the bottom of the corresponding cleaning rollers (2) and polishing rollers (3). The operating table (1) is fixedly connected with third motors (22) on both sides. The output shafts of the third motors (22) extend into the interior of the corresponding sliding grooves (18) and are engaged with the lead screws (19).

5. The surface treatment device for a vacuum valve housing according to claim 1, characterized in that, A fixing plate (23) is fixedly connected to one side of the top of the operating table (1). Three liquid nozzles (24) are fixedly connected at equal intervals inside the fixing plate (23). A connecting pipe (25) is fixedly connected between the input ends of the three liquid nozzles (24). The end of the connecting pipe (25) away from the liquid nozzles (24) is connected to an external cleaning fluid supply device.

6. The surface treatment device for a vacuum valve housing according to claim 2, characterized in that, Anti-slip pads (26) are fixedly connected to the sides of the three outer support plates (11) that are far apart.

7. The surface treatment device for a vacuum valve housing according to claim 4, characterized in that, Limiting rods (27) are fixedly connected inside the sliding groove (18) and on both sides of the lead screw (19), and the support frame (20) is slidably connected to the corresponding limiting rod (27).

8. The surface treatment device for a vacuum valve housing according to claim 4, characterized in that, The top of the control panel (1) is fixedly connected to the control console (6), and the first motor (16), the second motor (21) and the third motor (22) are all electrically connected to the control console (6).

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