Plane target hoisting device

Abstract

The utility model discloses a plane target material hoisting device which comprises a base and an end grabbing mechanism. The base is provided with a hanging beam which is arranged in the left-right direction. The two end grabbing mechanisms are arranged on the base and located below the hanging beam, the two end grabbing mechanisms are arranged in the length direction of the hanging beam, each end grabbing mechanism comprises a grabbing frame and a back plate fixing piece, the grabbing frames are provided with back plate abutting faces, the back plate abutting faces are vertically arranged, and the back plate fixing pieces are arranged on the back plate abutting faces. The back plate fixing piece is arranged on the grabbing frame and can fix or loosen one end, making contact with the back plate abutting face, of the back plate, and when the back plate is fixed to the grabbing frame through the back plate fixing piece, the plane target material is parallel to the back plate abutting face. Due to the fact that the abutting face of the back plate is vertical during hoisting, the gravity direction and the width direction of the plane target material are the same at the moment, deformation of the middle of the plane target material under the dead weight is resisted through the larger width of the plane target material, and therefore droop deformation of the plane target material during hoisting is restrained, and the cracking risk of the plane target material during hoisting is reduced.

Description

Technical Field

[0001] This utility model relates to target installation, and in particular to a planar target hoisting device. Background Technology

[0002] Planar targets are required in sputtering coating processes. Increasing the length of the planar target can effectively improve the coating uniformity of large-area substrates and reduce film thickness fluctuations. Typically, a planar target consists of a backplate and a target sheet bonded to one side of the backplate. The planar target is flat and is usually installed by hoisting. Existing planar target hoisting devices lift the target horizontally by gripping both ends of the backplate. However, due to the thinness of the planar target, when the target is long, the middle section is prone to sagging and deformation, leading to the risk of cracking and affecting coating quality. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a planar target hoisting device that can reduce the risk of cracking during planar target hoisting.

[0004] According to an embodiment of the present invention, a planar target hoisting device includes a base and end gripping mechanisms. The base is provided with a lifting beam arranged in a left-right direction; two end gripping mechanisms are disposed on the base and located below the lifting beam, arranged along the length of the lifting beam. Each end gripping mechanism includes a gripping frame and a backplate fixing member. The gripping frame is provided with a backplate abutment surface, which is vertically arranged. The backplate fixing member is disposed on the gripping frame and can fix or loosen one end of the backplate in contact with the backplate abutment surface. When the backplate fixing member fixes the backplate to the gripping frame, the planar target and the backplate abutment surface are parallel to each other.

[0005] The planar target hoisting device according to the present invention has at least the following beneficial effects: When hoisting the planar target, the two end gripping mechanisms grip the two ends of the back plate of the planar target respectively. At this time, the gripping frame contacts the back plate through the back plate abutment surface, making the planar target parallel to the back plate abutment surface. The back plate is fixed to the gripping frame by the back plate fixing member. Since the back plate abutment surface is vertical during hoisting, the gravity direction of the planar target is the same as its width direction. The larger width of the planar target resists the deformation of the middle part of the planar target under its own weight, thereby suppressing the sagging deformation of the planar target during hoisting and reducing the risk of cracking of the planar target during hoisting.

[0006] According to some embodiments of the present invention, the base further includes two adjustment mechanisms, which are arranged along the length of the lifting beam. Each adjustment mechanism includes an adjustment frame and a locking member. The adjustment frame is movably connected to the lifting beam along the length of the lifting beam. The locking member is disposed between the lifting beam and the adjustment frame and is used to lock or unlock the position of the lifting beam. The end gripping mechanism is disposed on the adjustment frame, and the two end gripping mechanisms correspond one-to-one with the two adjustment frames.

[0007] According to some embodiments of the present invention, the adjustment mechanism further includes a first suspension rope, and the adjustment frame is connected to the gripping frame via the first suspension rope.

[0008] According to some embodiments of the present invention, the end gripping mechanism further includes a hoisting connector, which is pivotally connected to the upper end of the gripping frame and has its rotation axis arranged in the left-right direction. The hoisting connector is connected to the adjustment mechanism.

[0009] According to some embodiments of the present invention, the hoisting connector is arc-shaped, and both ends of the hoisting connector are pivotally connected to the gripping frame. A hoisting rope clearance hole is formed between the hoisting connector and the gripping frame. The adjustment mechanism also includes a first hoisting rope, which passes through the hoisting rope clearance hole, and both ends of the first hoisting rope are connected to the adjustment frame.

[0010] According to some embodiments of the present invention, the base further includes a lifting ring and a second lifting rope. The lifting ring is located above the lifting beam, and the two ends of the second lifting rope are connected to the two adjusting frames one-to-one. The middle part of the second lifting rope is connected to the lifting ring.

[0011] According to some embodiments of the present invention, the end gripping mechanism is provided with at least two of the back plate fixing members arranged in the vertical direction.

[0012] According to some embodiments of the present invention, the gripping frame is strip-shaped and extends in the vertical direction, and the back plate abutment surface is located on the front side of the gripping frame.

[0013] According to some embodiments of this utility model, the back plate fixing member is a threaded fastener, the gripping frame is provided with a mounting through hole along the front-back direction, and the threaded fastener passes through the mounting through hole.

[0014] According to some embodiments of the present invention, a recess is provided on the front side of the gripping frame, and the recess forms the back plate abutment surface.

[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0017] Figure 1 This is a three-dimensional schematic diagram of the planar target hoisting device according to an embodiment of the present invention when hoisting a planar target.

[0018] Figure 2 This is a three-dimensional schematic diagram of the end gripping mechanism according to an embodiment of the present utility model;

[0019] Figure 3 This is an embodiment of the present utility model. Figure 1 A magnified view of a portion of point A.

[0020] Figure label:

[0021] Base 100, lifting beam 110, adjusting mechanism 120, adjusting frame 121, first lifting rope 122, lifting ring 130, second lifting rope 140;

[0022] End gripping mechanism 200, gripping frame 210, back plate abutment surface 211, recess 212, back plate fixing member 220, lifting connector 230, and lifting rope clearance hole 231.

[0023] Planar target material 300, back plate 310, target sheet 320. Detailed Implementation

[0024] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0025] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0027] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0028] Reference Figures 1 to 3 This utility model discloses a planar target hoisting device, comprising a base 100 and two end gripping mechanisms 200. The base 100 is provided with a lifting beam 110, which is arranged in a left-right direction. The two end gripping mechanisms 200 are disposed on the base 100 and located below the lifting beam 110, arranged along the length of the lifting beam 110. Each end gripping mechanism 200 includes a gripping frame 210 and a backplate fixing member 220. The gripping frame 210 is provided with a backplate abutment surface 211, which is vertically arranged. The backplate fixing member 220 is disposed on the gripping frame 210 and can fix or release one end of the backplate in contact with the backplate abutment surface 211. When the backplate fixing member 220 fixes the backplate to the gripping frame 210, the planar target and the backplate abutment surface 211 are parallel to each other.

[0029] When the planar target is hoisted by the planar target hoisting device, the two end gripping mechanisms 200 grip the two ends of the back plate of the planar target respectively. At this time, the gripping frame 210 contacts the back plate through the back plate abutment surface 211, so that the planar target is parallel to the back plate abutment surface 211, and the back plate is fixed on the gripping frame 210 by the back plate fixing member 220. Since the back plate abutment surface 211 is vertical during hoisting, the gravity direction of the planar target is the same as its width direction. The larger width of the planar target resists the deformation of the middle part of the planar target under its own weight, thereby suppressing the sagging deformation of the planar target during hoisting and reducing the risk of cracking of the planar target during hoisting.

[0030] In one embodiment, the base 100 further includes two adjustment mechanisms 120, which are arranged along the length of the lifting beam 110. Each adjustment mechanism 120 includes an adjustment frame 121 and a locking member. The adjustment frame 121 is movably connected to the lifting beam 110 along the length of the lifting beam 110. The locking member is disposed between the lifting beam 110 and the adjustment frame 121 and is used to lock or unlock the position of the lifting beam 110. The end gripping mechanism 200 is disposed on the adjustment frame 121, and the two end gripping mechanisms 200 correspond one-to-one with the two adjustment frames 121.

[0031] The end gripping mechanism 200 is installed at the corresponding adjustment mechanism 120. Since the adjustment frame 121 can move along the length of the lifting beam 110 and the position of the adjustment frame 121 relative to the lifting beam 110 can be locked by the locking member, the distance between the two adjustment frames 121 is adjustable, that is, the distance between the two end gripping mechanisms 200 is adjustable. Thus, the distance between the two end gripping mechanisms 200 can be reasonably adjusted according to the length of the planar target material to be transported, so as to grip the two ends of the planar target material respectively, which has good versatility.

[0032] Specifically, the adjusting frame 121 can be slidably connected to the lifting beam 110 via a slide rail slider structure or a guide post guide sleeve structure. The locking element can be a screw. A threaded through hole is provided in the adjusting frame 121, and the screw is threaded into the threaded through hole. When the screw is tightened, it can abut against the lifting beam 110, thereby locking the position of the adjusting frame 121. When the screw is loosened, the adjusting frame 121 can be allowed to slide. Alternatively, the lifting beam 110 can be provided with multiple pin holes arranged along its length. The adjusting frame 121 is provided with pin holes. A pin is inserted into the pin hole of the adjusting frame 121 and one of the pin holes of the lifting beam 110 to lock the position of the adjusting frame 121 relative to the lifting beam 110.

[0033] It is conceivable that in other embodiments, the adjustment frame 121 may also be tactilely connected to the lifting beam 110 via rollers or balls, thereby achieving mobility relative to the lifting beam 110.

[0034] It should be understood that the adjusting frame 121 and the corresponding gripping frame 210 should be vertically aligned to reduce the lateral force on the adjusting frame 121 and reduce the risk of damage to the locking components.

[0035] In one embodiment, the adjustment mechanism 120 further includes a first suspension rope 122, and the adjustment frame 121 is connected to the gripping frame 210 via the first suspension rope 122. The connection between the adjustment frame 121 and the gripping frame 210 via the first suspension rope 122 improves the lifting effect on the planar target material.

[0036] In this embodiment, the end gripping mechanism 200 further includes a lifting connector 230, which is pivotally connected to the upper end of the gripping frame 210 and has its rotation axis set in the left-right direction. The lifting connector 230 is connected to the adjustment mechanism 120. The lifting connector 230 allows the gripping frame 210 to swing at a certain angle relative to the lifting connector 230 and the adjustment mechanism 120, facilitating stable contact between the backplate abutment surface 211 and the backplate. This simplifies the alignment process between the gripping frame 210 and the backplate of the planar target. Furthermore, when the base 100 is lifted and moved by a crane, the pivot connection between the lifting connector 230 and the gripping frame 210 prevents the planar target and the gripping frame 210 from swinging, improving the structural stability of the planar target during transportation. This effectively solves the problem of stress concentration cracking caused by impact loads resulting from excessively fast lifting speeds, sudden stops, and swaying.

[0037] Optionally, the planar target is initially laid flat. At this time, the gripping frame 210 rotates relative to the lifting connector 230, so that the gripping frame 210 contacts and fixes the planar target. Then the lifting device rises. During the lifting process, the planar target and the gripping frame 210 swing to a side-standing state under the action of gravity, so that the self-weight direction of the planar target is the same as the width direction.

[0038] Optionally, the planar target can also be initially in a side-standing state, with the gripping frame 210 directly contacting and fixing the planar target. At this time, the back plate contact surface 211 of the gripping frame 210 remains vertical, maintaining the planar target in a side-standing state for hoisting and movement.

[0039] In this embodiment, the lifting connector 230 is arc-shaped, and its two ends are pivotally connected to the gripping frame 210. A rope clearance hole 231 is formed between the lifting connector 230 and the gripping frame 210. The adjusting mechanism 120 also includes a first lifting rope 122, which passes through the rope clearance hole 231 and is connected to the adjusting frame 121 at both ends. The middle part of the first lifting rope 122 passes through the rope clearance hole 231, and both ends of the first lifting rope 122 are connected to the adjusting frame 121. This allows the first lifting rope 122 to lift the lifting connector 230 and the gripping frame 210 without being fixedly connected to the lifting connector 230. The assembly method is relatively simple and easy to implement, and it reduces the structural strength requirements of the first lifting rope 122.

[0040] It is conceivable that in other embodiments, one end of the first hoisting rope 122 may be fixedly connected to the adjusting frame 121, and the other end of the first hoisting rope 122 may be fixedly connected to the hoisting connector 230. Those skilled in the art can make specific choices according to actual needs.

[0041] In this embodiment, the base 100 further includes a lifting ring 130 and a second lifting rope 140. The lifting ring 130 is located above the lifting beam 110. The two ends of the second lifting rope 140 are connected to the two adjusting frames 121 one-to-one, and the middle part of the second lifting rope 140 is connected to the lifting ring 130. The lifting ring 130 and the two adjusting frames 121 form an approximately triangular structure through the second lifting rope 140, making it easier to maintain the balance of the base 100 during hoisting, resulting in better performance.

[0042] In this embodiment, the end gripping mechanism 200 has two backplate fixing members 220 arranged in a vertical direction. The presence of multiple backplate fixing members 220 allows for better connection and fixation of the backplate, making the backplate more securely fixed to the gripping frame 210 and improving lifting safety.

[0043] It is conceivable that in other implementations, the end gripping mechanism 200 may also be provided with three, four or more backplate fasteners 220, which can be selected by those skilled in the art according to actual needs.

[0044] In this embodiment, the gripping frame 210 is strip-shaped and extends vertically, with the backplate abutment surface 211 located on the front side of the gripping frame 210. The gripping frame 210 described above has a simple structure and is relatively reliable in use.

[0045] In this embodiment, the backplate fixing member 220 is a threaded fastener, and the gripping frame 210 has a mounting through hole along the front-to-back direction. The threaded fastener passes through the mounting through hole. Using a threaded fastener as the backplate fixing member 220, a threaded hole is opened on the backplate of the planar target, and the threaded fastener can be threaded into the threaded hole, thereby locking and fixing the planar target onto the gripping frame 210. The structure is simple and easy to implement. Specifically, the threaded fastener can be a screw or a bolt-nut pair.

[0046] It is conceivable that in other embodiments, the backplate fixing member 220 may also be other structures. For example, when the backplate is made of iron, the backplate fixing member 220 may be an electromagnet, which uses magnetic attraction to grip the backplate of the planar target; or the backplate fixing member 220 may be a suction cup, which uses vacuum adsorption to grip the backplate.

[0047] In this embodiment, a recess 212 is provided on the front side of the gripper 210, and the recess 212 forms the back plate abutment surface 211. By forming the back plate abutment surface 211 in a recessed manner, the gripper 210 structure can be made more compact and the weight of the gripper 210 can be reduced.

[0048] The hoisting device in this embodiment only requires two end gripping mechanisms 200 to grip both ends of the planar target material along its length, which can then be used to hoist and move the planar target material, resulting in significantly higher hoisting efficiency.

[0049] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0050] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A planar target hoisting device, characterized in that, include: The base (100) is provided with a lifting beam (110), which is arranged in the left-right direction; Two end gripping mechanisms (200) are disposed on the base (100) and located below the lifting beam (110). The two end gripping mechanisms (200) are arranged along the length of the lifting beam (110). Each end gripping mechanism (200) includes a gripping frame (210) and a back plate fixing member (220). The gripping frame (210) is provided with a back plate abutment surface (211), which is vertically arranged. The back plate fixing member (220) is disposed on the gripping frame (210) and can fix or loosen one end of the back plate that is in contact with the back plate abutment surface (211). When the back plate fixing member (220) fixes the back plate to the gripping frame (210), the planar target material and the back plate abutment surface (211) are parallel to each other.

2. The planar target hoisting device according to claim 1, characterized in that: The base (100) further includes two adjustment mechanisms (120), which are arranged along the length of the lifting beam (110). Each adjustment mechanism (120) includes an adjustment frame (121) and a locking member. The adjustment frame (121) is movably connected to the lifting beam (110) along the length of the lifting beam (110). The locking member is disposed between the lifting beam (110) and the adjustment frame (121) and is used to lock or unlock the position of the lifting beam (110). The end gripping mechanism (200) is disposed on the adjustment frame (121), and the two end gripping mechanisms (200) correspond one-to-one with the two adjustment frames (121).

3. The planar target hoisting device according to claim 2, characterized in that: The adjustment mechanism (120) further includes a first suspension rope (122), and the adjustment frame (121) is connected to the gripping frame (210) through the first suspension rope (122).

4. The planar target hoisting device according to claim 2, characterized in that: The end gripping mechanism (200) further includes a hoisting connector (230), which is pivotally connected to the upper end of the gripping frame (210) and has its rotation axis set in the left-right direction. The hoisting connector (230) is connected to the adjustment mechanism (120).

5. The planar target hoisting device according to claim 4, characterized in that: The hoisting connector (230) is arc-shaped, and its two ends are pivotally connected to the gripping frame (210). A hoisting rope clearance hole (231) is formed between the hoisting connector (230) and the gripping frame (210). The adjusting mechanism (120) also includes a first hoisting rope (122), which passes through the hoisting rope clearance hole (231). Both ends of the first hoisting rope (122) are connected to the adjusting frame (121).

6. The planar target hoisting device according to claim 2, characterized in that: The base (100) also includes a lifting ring (130) and a second lifting rope (140). The lifting ring (130) is located above the lifting beam (110). The two ends of the second lifting rope (140) are connected to the two adjusting frames (121) one by one, and the middle part of the second lifting rope (140) is connected to the lifting ring (130).

7. The planar target hoisting device according to claim 1, characterized in that: The end gripping mechanism (200) is provided with at least two back plate fixing members (220) arranged in the vertical direction.

8. The planar target hoisting device according to claim 7, characterized in that: The gripper (210) is strip-shaped and extends in the vertical direction, and the back plate contact surface (211) is located on the front side of the gripper (210).

9. The planar target hoisting device according to claim 7, characterized in that: The backplate fastener (220) is a threaded fastener, and the gripping frame (210) is provided with a mounting through hole in the front-to-back direction, through which the threaded fastener passes.

10. The planar target hoisting device according to claim 1, characterized in that: The front side of the gripper (210) is provided with a recess (212), which forms the back plate contact surface (211).

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