Spray plate, coating device and solar cell manufacturing production line

Abstract

The utility model relates to a spraying plate, a coating device and a solar cell manufacturing production line. The spraying plate is provided with a spraying face, the spraying face is provided with a spraying area and an air inlet area, the spraying area comprises a plurality of spraying hole sets, each spraying hole set comprises a plurality of spraying holes, the air inlet area is provided with a first air inlet hole and a second air inlet hole, the first air inlet hole is communicated with all the spraying holes of part of the spraying hole sets, and the second air inlet hole is communicated with all the spraying holes of part of the spraying hole sets. The second air inlet hole is communicated with all the spraying holes of the other spraying hole groups; the spraying area comprises an edge area and a central area; in the length direction of the spraying plate, the distance between every two adjacent spraying hole sets in the edge area is larger than the distance between every two adjacent spraying hole sets in the center area. And / or, in the same spraying hole group, in the width direction of the spraying plate, the distance between every two adjacent spraying holes in the edge area is larger than the distance between every two adjacent spraying holes in the central area. According to the spraying plate, the coating device and the solar cell manufacturing production line, the coating uniformity can be improved.

Description

Technical Field

[0001] This application relates to the field of solar cell technology, specifically to a spray plate, a coating device, and a solar cell manufacturing production line. Background Technology

[0002] Crystalline silicon solar cells represent a significant development trend in the photovoltaic industry. To maximize the photoelectric conversion efficiency of crystalline silicon solar cells, surface passivation technology is an essential method for manufacturing high-efficiency crystalline silicon solar cells, and it is continuously being improved with advancements in solar cell production technology.

[0003] Atomic layer deposition (ALD) is a thin film deposition technique based on surface chemical vapor reaction. It involves alternately introducing gaseous precursors and reactants into a reaction chamber via pulses, allowing the precursors and reactants to undergo fully saturated surface chemical reactions on the surface of the solar cell substrate. This allows materials to be deposited onto the substrate surface as single-atom films, with precise control over the thickness and uniformity of the deposited film within the atomic layer thickness range.

[0004] In traditional technology, multiple spray holes on the spray surface of a spray plate are used to alternately introduce gaseous precursors and gaseous reactants into the reaction chamber. However, due to the limitation of the arrangement of the spray holes on the spray surface, the spray holes cannot uniformly spray the gaseous precursors and gaseous reactants into the reaction chamber, which affects the uniformity of the coating and results in poor coating effect. Utility Model Content

[0005] Therefore, it is necessary to provide a spray plate, coating device, and solar cell manufacturing production line that can improve the uniformity of coating to address the above problems.

[0006] A spray plate has a spray surface, the spray surface has a spray area and an air inlet area, the air inlet area is arranged circumferentially around the spray area, the spray area includes multiple sets of spray holes spaced apart along the length direction of the spray plate, the spray hole sets include multiple spray holes spaced apart along the width direction of the spray plate, the air inlet area has a first air inlet and a second air inlet, the first air inlet and the second air inlet are spaced apart along the width direction of the spray plate, and the first air inlet and the second air inlet are both located at two opposite ends of the spray plate along its length direction, the first air inlet communicates with all the spray holes of a portion of the spray hole sets, and the second air inlet communicates with all the spray holes of the remaining portion of the spray hole sets;

[0007] The spray zone includes an edge zone and a central zone, with the central zone located within the area formed by the edge zone; in the length direction of the spray plate, the spacing between any two adjacent sets of spray holes in the edge zone is greater than the spacing between any two adjacent sets of spray holes in the central zone; and / or, in the same set of spray holes, in the width direction of the spray plate, the spacing between any two adjacent spray holes in the edge zone is greater than the spacing between any two adjacent spray holes in the central zone.

[0008] In some embodiments, the spray zone further includes a transition zone located within the area formed by the edge zone, and the transition zone is disposed on opposite sides of the central zone along the width direction of the spray plate; in the length direction of the spray plate, the spacing between every two adjacent sets of spray holes in the edge zone is greater than the spacing between every two adjacent sets of spray holes in the transition zone; and / or, in the same set of spray holes, in the width direction of the spray plate, the spacing between every two adjacent spray holes in the transition zone is less than the spacing between every two adjacent spray holes in the edge zone, and greater than the spacing between every two adjacent spray holes in the central zone.

[0009] In some embodiments, along the length of the spray plate, the spacing between every two adjacent sets of spray holes in the edge area is L1, the spacing between every two adjacent sets of spray holes in the transition area is L2, and the spacing between every two adjacent sets of spray holes in the center area is L3, where 2mm≤L1≤2.5mm, 1.5mm≤L2≤2mm, and 1mm≤L3≤1.5mm;

[0010] In the same spray hole group, in the width direction of the spray plate, the distance between each two adjacent spray holes in the edge area is L4, the distance between each two adjacent spray holes in the transition area is L5, and the distance between each two adjacent spray holes in the center area is L6, where 2mm≤L4≤2.5mm, 1.5mm≤L5≤2mm, and 1mm≤L6≤1.5mm.

[0011] In some embodiments, within the same spray hole group, in the width direction of the spray plate, the distance between two spray holes adjacent to the transition zone and the center zone is smaller than the distance between two spray holes adjacent to the edge zone and the transition zone.

[0012] In some embodiments, the spacing between each pair of adjacent spray hole groups gradually decreases from the outside to the inside along the length direction of the spray plate; the spacing between each pair of adjacent spray holes in the same spray hole group gradually decreases from the outside to the inside along the width direction of the spray plate.

[0013] In some embodiments, the diameter of the spray hole is R, where 1.5mm ≤ R ≤ 3mm.

[0014] In some embodiments, all the spray hole groups include a plurality of first spray hole groups and a plurality of second spray hole groups. The spray plate has a first air inlet channel, a second air inlet channel, a plurality of first transition channels and a plurality of second transition channels. The first transition channels correspond one-to-one with the first spray hole groups, and the second transition channels correspond one-to-one with the second spray hole groups.

[0015] The first air inlet, the first air inlet channel, the first transition channel, and the spray holes of the first spray hole group corresponding to the first transition channel are connected in sequence; the second air inlet, the second air inlet channel, the second transition channel, and the spray holes of the second spray hole group corresponding to the second transition channel are connected in sequence.

[0016] In some embodiments, the first spray hole group and the second spray hole group are alternately arranged along the length direction of the spray plate, and the first transition channel and the second transition channel are alternately arranged along the length direction of the spray plate.

[0017] A coating apparatus, the coating apparatus comprising:

[0018] A coating body having a reaction chamber and an opening communicating with the reaction chamber; and

[0019] As described in any of the above embodiments, the spray plate covers the opening, and the spray surface faces the reaction chamber.

[0020] A solar cell manufacturing production line includes a coating apparatus as described in the above embodiments.

[0021] Compared with the prior art, this application has the following beneficial effects:

[0022] In the aforementioned spray plate, coating device, and solar cell manufacturing production line, the spacing between every two adjacent sets of spray holes in the edge area is designed to be greater than the spacing between every two adjacent sets of spray holes in the center area along the length of the spray plate. This means that the spray holes in the center area are more densely packed along the length of the spray plate. This increases the airflow density in the center area, allowing the gaseous precursors and reactants to be sprayed more evenly from both the edge and center areas, thus optimizing the uniformity of the coating and improving the coating effect. Similarly, within the same set of spray holes, the spacing between every two adjacent spray holes in the edge area is greater than the spacing between every two adjacent spray holes in the center area along the width of the spray plate. This means that the spray holes gradually become denser from the edge to the center area along the width of the spray plate. This also increases the airflow density in the transition and center areas, allowing the gaseous precursors and reactants to be sprayed more evenly from both the edge and center areas, further optimizing the uniformity of the coating and improving the coating effect. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the spray plate in one embodiment of this application;

[0024] Figure 2 for Figure 1 A cross-sectional view of the spray plate along the AA direction;

[0025] Figure 3 This is a schematic diagram showing the first spray hole group projected into the first transition channel and the second spray hole group projected into the second transition channel.

[0026] Icon labels:

[0027] 100. Sprayer plate;

[0028] 10. Spray surface; 20. Spray hole group; 30. First air inlet; 40. Second air inlet; 50. First air inlet channel; 60. Second air inlet channel; 70. First transition channel; 80. Second transition channel;

[0029] 11. Air intake zone; 12. Spray zone; 121. Edge zone; 122. Transition zone; 123. Central zone;

[0030] 20a, First spray nozzle group; 20b, Second spray nozzle group; 21, Spray nozzle;

[0031] X represents the length direction; Y represents the width direction. Detailed Implementation

[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0033] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0036] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0037] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0038] Please see Figure 1 and Figure 3 This application provides a spray plate 100, which has a spray surface 10, a spray area 12, and an air inlet area 11. The air inlet area 11 is arranged circumferentially around the spray area 12. The spray area 12 includes multiple sets of spray hole groups 20 spaced apart along the length direction X of the spray plate 100. Each spray hole group 20 includes multiple spray holes 21 spaced apart along the width direction Y of the spray plate 100. The air inlet area 11 has a first air inlet 30 and a second air inlet 40, which are spaced apart along the width direction Y of the spray plate 100. The first air inlet 30 and the second air inlet 40 are both located at opposite ends of the spray plate 100 along its length direction X. The first air inlet 30 communicates with all the spray holes 21 of a portion of the spray hole group 20, and the second air inlet 40 communicates with all the spray holes 21 of the remaining portion of the spray hole group 20. The spray zone 12 includes an edge zone 121 and a central zone 123, with the central zone 123 located within the area formed by the edge zone 121. In the longitudinal direction X of the spray plate 100, the spacing between any two adjacent sets of spray hole groups 20 in the edge zone 121 is greater than the spacing between any two adjacent sets of spray hole groups 20 in the central zone 123. And / or, in the same set of spray hole groups 20, in the width direction Y of the spray plate 100, the spacing between any two adjacent spray holes 21 in the edge zone 121 is greater than the spacing between any two adjacent spray holes 21 in the central zone 123.

[0039] In the length direction X of the spray plate 100, the distance between every two adjacent sets of spray hole groups 20 in the edge region 121 is the distance between the two tangents of two adjacent spray holes 21 within every two adjacent sets of spray hole groups 20 in the edge region 121 that are close to each other, as shown in the figure below. Figure 3 As shown in L1. Along the length X of the spray plate 100, the distance between any two adjacent sets of spray hole groups 20 in the central area 123 is the distance between the two tangents of adjacent spray holes 21 within each adjacent set of spray hole groups 20 in the central area 123, specifically as follows: Figure 3 As shown in L3.

[0040] In the same spray hole group 20, along the width direction Y of the spray plate 100, the distance between any two adjacent spray holes 21 in the edge region 121 is the distance between the two tangent lines of any two adjacent spray holes 21 in the edge region 121 that approach each other, specifically as follows: Figure 3 As shown in L4. In the same spray hole group 20, in the width direction Y of the spray plate 100, the distance between any two adjacent spray holes 21 in the central area 123 is the distance between the two tangents of any two adjacent spray holes 21 in the central area 123 that are close to each other, as shown in the figure. Figure 3 As shown in L6.

[0041] Specifically, the first air inlet 30 is used to introduce either the gaseous precursor or the gaseous reactant, and the second air inlet 40 is used to introduce the other gaseous precursor or the gaseous reactant. For ease of explanation, the following embodiments will be described using the first air inlet 30 for introducing the gaseous precursor and the second air inlet 40 for introducing the gaseous reactant as examples.

[0042] Specifically, there are two first air inlets 30 and two second air inlets 40. The two first air inlets 30 are located on one side of the spray plate 100 along its width direction Y, and the two first air inlets 30 are located at opposite ends of the spray plate 100 along its length direction X. The two second air inlets 40 are located on the other side of the spray plate 100 along its width direction Y, and the two second air inlets 40 are located at opposite ends of the spray plate 100 along its length direction X.

[0043] All spray hole groups 20 include multiple first spray hole groups 20a and multiple second spray hole groups 20b. The first spray hole group 20a refers to a spray hole group 20 in which the spray holes 21 are connected to the first air inlet 30. The second spray hole group 20b refers to a spray hole group 20 in which the spray holes 21 are connected to the second air inlet 40. The gaseous precursor flows into the spray plate 100 through each of the first air inlets 30, and then is introduced into the reaction chamber through each spray hole 21 of each of the first spray hole groups 20a. The gaseous reactants flow into the spray plate 100 through each of the second air inlets 40, and then are introduced into the reaction chamber through each spray hole 21 of each of the second spray hole groups 20b.

[0044] It is worth mentioning that, in actual operation, the gaseous precursor and gaseous reactants are introduced into the reaction chamber in alternating pulses.

[0045] The edge region 121 and the central region 123 are each provided with a first spray hole group 20a and a second spray hole group 20b to ensure that the gaseous precursor and gaseous reactant can be sprayed out from the edge region 121 and the central region 123, so that the gaseous precursor and gaseous reactant can be uniformly introduced into the reaction chamber.

[0046] Based on the positions of the first air inlet 30 and the second air inlet 40, it can be seen that the first air inlet 30 and the second air inlet 40 are closer to the edge area 121 and farther from the center area 123.

[0047] In the conventional spray plate 100, the spacing between any two adjacent sets of spray holes 21 is equal along the length X direction, and the spacing between any two adjacent spray holes 21 in the same spray hole group 20 is also equal along the width Y direction. However, the flow rate and flow resistance of the gaseous precursor and gaseous reactants decrease along their flow path, resulting in a decrease in the flow rate of the gaseous precursor and gaseous reactants ejected from the spray holes 21 in the edge region 121 and center region 123 of the spray plate 100 in the conventional technology. This causes the gaseous precursor and gaseous reactants to be unable to be sprayed evenly into the reaction chamber, thereby affecting the uniformity of the coating and resulting in poor coating effect.

[0048] In this application, along the length X of the spray plate 100, the spacing between each pair of adjacent spray hole groups 20 in the edge region 121 is designed to be greater than the spacing between each pair of adjacent spray hole groups 20 in the central region 123. In other words, along the length X of the spray plate 100, the spray holes 21 in the central region 123 are more densely packed. This increases the airflow density in the central region 123, allowing the gaseous precursors and gaseous reactants to be sprayed out more evenly from both the edge region 121 and the central region 123. This is beneficial for optimizing the uniformity of the coating and improving the coating effect. Similarly, in the same spray hole group 20, in the width direction Y of the spray plate 100, the distance between each two adjacent spray holes 21 in the edge region 121 is greater than the distance between each two adjacent spray holes 21 in the center region 123. That is, in the width direction Y of the spray plate 100, the spray holes 21 gradually become denser from the edge region 121 to the center region 123. This can also increase the airflow density in the transition region 122 and the center region 123, so that the gas phase precursor and gas phase reactants can be sprayed out more evenly from the edge region 121 and the center region 123, further optimizing the uniformity of the coating and improving the coating effect.

[0049] It is worth mentioning that, in order to avoid the excessive airflow in the central region 123 causing turbulence superposition and affecting the uniformity of the introduction of gaseous precursors and gaseous reactants into the reaction chamber, the porosity K of the central region 123 should be set to satisfy the relationship K=nπ(D / 2). 2 / A, where n is the number of spray holes 21, D is the hole diameter, and A is the area of ​​the central area 123 where the spray holes 21 are located.

[0050] In some embodiments, the spray zone 12 further includes a transition zone 122, which is located within the area formed by the edge zone 121 and is disposed on opposite sides of the central zone 123 along the width direction Y of the spray plate 100; in the length direction X of the spray plate 100, the spacing between every two adjacent sets of spray hole groups 20 in the edge zone 121 is greater than the spacing between every two adjacent sets of spray hole groups 20 in the transition zone 122; and / or, in the same spray hole group 20, in the width direction Y of the spray plate 100, the spacing between every two adjacent spray holes 21 in the transition zone 122 is less than the spacing between every two adjacent spray holes 21 in the edge zone 121 and greater than the spacing between every two adjacent spray holes 21 in the central zone 123.

[0051] Along the length X of the spray plate 100, the distance between every two adjacent sets of spray hole groups 20 in the transition zone 122 is the distance between the two tangents of two adjacent spray holes 21 within every two adjacent sets of spray hole groups 20 in the transition zone 122, specifically as follows: Figure 3 As shown in L2.

[0052] In the same spray hole group 20, along the width direction Y of the spray plate 100, the distance between any two adjacent spray holes 21 in the transition zone 122 is the distance between the two tangents of any two adjacent spray holes 21 in the transition zone 122 that approach each other, specifically as follows: Figure 3 As shown in L5.

[0053] The distances of the first air inlet 30 and the second air inlet 40 from the transition zone 122 are between the distances of the first air inlet 30 and the second air inlet 40 from the edge zone 121 and the distances of the first air inlet 30 and the second air inlet 40 from the center zone 123.

[0054] In this embodiment, along the length X of the spray plate 100, the spacing between each pair of adjacent spray hole groups 20 in the edge region 121 is designed to be greater than the spacing between each pair of adjacent spray hole groups 20 in the transition region 122. That is, along the length X of the spray plate 100, the spray holes 21 in the transition region 122 are relatively denser than those in the edge region 121. This design can increase the airflow density in the transition region 122, so that the gaseous precursor and gaseous reactants can be sprayed out more evenly from the edge region 121, the transition region 122 and the central region 123, which is beneficial to optimizing the uniformity of the coating and improving the coating effect. Similarly, in the same group of spray holes 20, in the width direction Y of the spray plate 100, the distance between each two adjacent spray holes 21 in the transition zone 122 is smaller than the distance between each two adjacent spray holes 21 in the edge zone 121, and larger than the distance between each two adjacent spray holes 21 in the center zone 123. That is, in the width direction Y of the spray plate 100, the spray holes 21 in the edge zone 121, the transition zone 122 and the center zone 123 gradually become denser. This design can also increase the airflow density in the transition zone 122 and the center zone 123, so that the gaseous precursor and gaseous reactants can be sprayed out more uniformly from the edge zone 121, the transition zone 122 and the center zone 123, further optimizing the uniformity of the coating.

[0055] In some embodiments, along the length direction X of the spray plate 100, the distance between every two adjacent sets of spray hole groups 20 in the edge region 121 is L1, the distance between every two adjacent sets of spray hole groups 20 in the transition region 122 is L2, and the distance between every two adjacent sets of spray hole groups 20 in the center region 123 is L3, where 2mm≤L1≤2.5mm, 1.5mm≤L2≤2mm, and 1mm≤L3≤1.5mm. Within the same spray hole group 20, along the width direction Y of the spray plate 100, the distance between every two adjacent spray holes 21 in the edge region 121 is L4, the distance between every two adjacent spray holes 21 in the transition region 122 is L5, and the distance between every two adjacent spray holes 21 in the center region 123 is L6, where 2mm≤L4≤2.5mm, 1.5mm≤L5≤2mm, and 1mm≤L6≤1.5mm.

[0056] In this design, the spray holes 21 in the edge region 121, transition region 122, and center region 123 gradually become denser in both the length (X) and width (Y) directions of the spray plate 100, resulting in a gradual increase in airflow density from the edge region 121 to the center region 123. Under these conditions, the gaseous precursor and gaseous reactants can be sprayed out more uniformly from the edge region 121, transition region 122, and center region 123, optimizing the uniformity of the coating, improving the coating effect, and reducing the occurrence of turbulent superposition caused by excessively dense airflow in the edge region 121, transition region 122, and center region 123.

[0057] It should be noted that turbulent superposition can easily lead to energy dissipation of gaseous precursors and gaseous reactants, resulting in a decrease in flow velocity.

[0058] In some embodiments, within the same spray hole group 20, the spacing between two adjacent spray holes 21 in the transition zone 122 and the central zone 123 along the width direction Y of the spray plate 100 (specifically as follows) Figure 3 As shown in L7, the distance between two adjacent spray holes 21 in the edge region 121 and the transition region 122 is smaller than that between the two adjacent spray holes 21 in the edge region 121 and the transition region 122 (specifically as shown in L7). Figure 3 (As shown in L8). The above design can further increase the airflow density in the middle zone, so that the gaseous precursor and gaseous reactants can be ejected more uniformly from the edge zone 121, the transition zone 122 and the central zone 123.

[0059] Furthermore, in some embodiments, the spacing between any two adjacent groups of spray holes 20 gradually decreases from the outside to the inside along the length X of the spray plate 100. In this case, the spacing between the two centrally located groups of spray holes 20 along the length X of the spray plate 100 is the smallest. For example, taking fourteen groups of spray holes 20 as an example, the spacing between the seventh and eighth groups of spray holes 20 along the length X of the spray plate 100 is the smallest. Taking fifteen groups of spray holes 20 as an example, the spacing between the seventh and eighth groups of spray holes 20 along the length X of the spray plate 100, as well as the spacing between the eighth and ninth groups of spray holes 20 along the length X of the spray plate 100, are all the smallest. And / or, the spacing between any two adjacent spray holes 21 in the same spray hole group 20 gradually decreases from the outside to the inside along the width direction Y of the spray plate 100. In this case, the spacing between the two spray holes 21 located at the very center of the same spray hole group 20 is the smallest. For example, taking a spray hole group 20 comprising fourteen spray holes 21 as an example, the spacing between the seventh and eighth spray holes 21 arranged along the width direction Y of the spray plate 100 is the smallest. Taking a spray hole group 20 comprising fifteen spray holes 21 as an example, the spacing between the seventh and eighth spray holes 21 arranged along the width direction Y of the spray plate 100, as well as the spacing between the eighth and ninth spray holes 21 arranged along the width direction Y of the spray plate 100, are all the smallest.

[0060] Both of the above designs can increase the density of the spray holes 21 in the central region 123, thereby increasing the airflow density in the central region 123, so that the gas phase precursor and gas phase reactants can be sprayed out more evenly from the edge region 121, the transition region 122 and the central region 123.

[0061] In some embodiments, the aperture of the spray orifice 21 is R, where 1.5mm ≤ R ≤ 3mm. If the aperture of the spray orifice 21 is too small, it can easily lead to excessive pressure drop, causing the vapor precursor to concentrate in the edge region 121 near the first air inlet 30, and the vapor reactants to concentrate in the edge region 121 near the second air inlet 40. Appropriately enlarging the aperture of the spray orifice 21, specifically designing the aperture R of the spray orifice 21 to be in the range of 1.5mm to 3mm, can reduce local resistance and flow rate attenuation. Specifically, it reduces the resistance and flow rate attenuation of the vapor precursor and vapor reactants in the transition region 122 and the central region 123, allowing the vapor precursor and vapor reactants to be uniformly sprayed from the edge region 121, transition region 122, and central region 123, thereby improving the coating effect.

[0062] Please see Figures 1 to 3 In some embodiments, the spray plate 100 has a first air inlet channel 50, a second air inlet channel 60, a plurality of first transition channels 70, and a plurality of second transition channels 80. The first transition channels 70 correspond one-to-one with the first spray hole group 20a, and the second transition channels 80 correspond one-to-one with the second spray hole group 20b. The first air inlet 30, the first air inlet channel 50, the first transition channel 70, and the spray holes 21 of the first spray hole group 20a corresponding to the first transition channel 70 are sequentially connected; the second air inlet 40, the second air inlet channel 60, the second transition channel 80, and the spray holes 21 of the second spray hole group 20b corresponding to the second transition channel 80 are sequentially connected.

[0063] In actual operation, the gaseous precursor enters the spray plate 100 through each first air inlet 30, then passes through each first transition channel 70 before entering the spray holes 21 of the first spray hole group 20a, which is connected to each first transition channel 70. Finally, it is introduced into the reaction chamber from the spray surface 10 through the spray holes 21 of the first spray hole group 20a. The gaseous reactant enters the spray plate 100 through each second air inlet 40, then passes through each second transition channel 80 before entering the spray holes 21 of the second spray hole group 20b, which is connected to each second transition channel 80. Finally, it is introduced into the reaction chamber from the spray surface 10 through the spray holes 21 of the second spray hole group 20b.

[0064] By designing a first air inlet channel 50, a second air inlet channel 60, multiple first transition channels 70 and multiple second transition channels 80 within the spray plate 100, the gaseous precursor and gaseous reactants can be transferred, allowing the gaseous precursor and gaseous reactants to be smoothly introduced into the reaction chamber from the spray surface 10, ensuring successful coating.

[0065] In some embodiments, the first spray hole group 20a and the second spray hole group 20b are alternately arranged along the length direction X of the spray plate 100, and the first transition channel 70 and the second transition channel 80 are alternately arranged along the length direction X of the spray plate 100. In this way, the gaseous precursor and the gaseous reactant can be uniformly introduced into the reaction chamber, and uniformly mixed on the substrate to undergo a chemical reaction, thereby improving the coating effect.

[0066] This application also provides a coating apparatus, which includes a coating body and a spray plate 100 as described in any of the above embodiments. The coating body has a reaction chamber and an opening communicating with the reaction chamber. The spray plate 100 covers the opening, and the spray surface 10 faces the reaction chamber. Gas-phase precursors and gas-phase reactants are alternately sprayed into the reaction chamber through the spray holes 21 of the spray plate 100, and undergo fully saturated surface chemical reactions on the surface of the battery cell substrate located in the reaction chamber to form a thin film.

[0067] The coating apparatus in this application has the effects of any of the above embodiments, and therefore will not be described in detail here.

[0068] This application also provides a solar cell manufacturing production line, which includes the coating apparatus as described in the above embodiments.

[0069] The solar cell manufacturing production line in this application has the effects of any of the above embodiments, and therefore will not be described in detail here.

[0070] In the aforementioned spray plate 100, coating device, and solar cell manufacturing production line, the spacing between each pair of adjacent spray hole groups 20 in the edge region 121 along the length X of the spray plate 100 is designed to be greater than the spacing between each pair of adjacent spray hole groups 20 in the central region 123. In other words, the spray holes 21 in the central region 123 are more densely packed along the length X of the spray plate 100. This increases the airflow density in the central region 123, allowing the gaseous precursors and gaseous reactants to be sprayed out more evenly from both the edge region 121 and the central region 123. This is beneficial for optimizing the uniformity of the coating and improving the coating effect. Similarly, in the same spray hole group 20, in the width direction Y of the spray plate 100, the distance between each two adjacent spray holes 21 in the edge region 121 is greater than the distance between each two adjacent spray holes 21 in the center region 123. That is, in the width direction Y of the spray plate 100, the spray holes 21 gradually become denser from the edge region 121 to the center region 123. This can also increase the airflow density in the transition region 122 and the center region 123, so that the gas phase precursor and gas phase reactants can be sprayed out more evenly from the edge region 121 and the center region 123, further optimizing the uniformity of the coating and improving the coating effect.

[0071] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0072] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A spray plate, characterized in that, The spray plate has a spray surface (10), the spray surface (10) has a spray area (12) and an air inlet area (11), the air inlet area (11) is arranged around the spray area (12) circumferentially, the spray area (12) includes multiple sets of spray hole groups (20) spaced apart along the length direction (X) of the spray plate, the spray hole groups (20) include multiple spray holes (21) spaced apart along the width direction (Y) of the spray plate, and the air inlet area (11) has a first air inlet (30) and a second air inlet. (40) The first air inlet (30) and the second air inlet (40) are spaced apart along the width direction (Y) of the spray plate, and the first air inlet (30) and the second air inlet (40) are both located at the two ends of the spray plate that are opposite to each other along its length direction (X). The first air inlet (30) communicates with all the spray holes (21) of a portion of the spray hole group (20), and the second air inlet (40) communicates with all the spray holes (21) of the remaining portion of the spray hole group (20). The spray zone (12) includes an edge zone (121) and a central zone (123), the central zone (123) being located within the area formed by the edge zone (121); in the length direction (X) of the spray plate, the spacing between each pair of adjacent spray hole groups (20) in the edge zone (121) is greater than the spacing between each pair of adjacent spray hole groups (20) in the central zone (123); and / or, in the same spray hole group (20), in the width direction (Y) of the spray plate, the spacing between each pair of adjacent spray holes (21) in the edge zone (121) is greater than the spacing between each pair of adjacent spray holes (21) in the central zone (123).

2. The spray plate according to claim 1, characterized in that, The spray zone (12) further includes a transition zone (122), which is located within the area formed by the edge zone (121) and is disposed on opposite sides of the central zone (123) along the width direction (Y) of the spray plate; in the length direction (X) of the spray plate, the spacing between each two adjacent sets of spray hole groups (20) of the edge zone (121) is greater than the spacing between each two adjacent sets of spray hole groups (20) of the transition zone (122); and / or, in the same set of spray hole groups (20), in the width direction (Y) of the spray plate, the spacing between each two adjacent spray holes (21) of the transition zone (122) is less than the spacing between each two adjacent spray holes (21) of the edge zone (121) and greater than the spacing between each two adjacent spray holes (21) of the central zone (123).

3. The spray plate according to claim 2, characterized in that, Along the length direction (X) of the spray plate, the distance between each pair of adjacent spray hole groups (20) in the edge area (121) is L1, the distance between each pair of adjacent spray hole groups (20) in the transition area (122) is L2, and the distance between each pair of adjacent spray hole groups (20) in the center area (123) is L3, where 2mm≤L1≤2.5mm, 1.5mm≤L2≤2mm, and 1mm≤L3≤1.5mm; In the same spray hole group (20), in the width direction (Y) of the spray plate, the distance between each two adjacent spray holes (21) in the edge area (121) is L4, the distance between each two adjacent spray holes (21) in the transition area (122) is L5, and the distance between each two adjacent spray holes (21) in the center area (123) is L6, 2mm≤L4≤2.5mm, 1.5mm≤L5≤2mm, and 1mm≤L6≤1.5mm.

4. The spray plate according to claim 2, characterized in that, In the same spray hole group (20), in the width direction (Y) of the spray plate, the distance between two spray holes (21) adjacent to the transition area (122) and the center area (123) is smaller than the distance between two spray holes (21) adjacent to the edge area (121) and the transition area (122).

5. The spray plate according to claim 1, characterized in that, The spacing between any two adjacent spray hole groups (20) gradually decreases from the outside to the inside along the length direction (X) of the spray plate; the spacing between any two adjacent spray holes (21) in the same spray hole group (20) gradually decreases from the outside to the inside along the width direction (Y) of the spray plate.

6. The spray plate according to claim 1, characterized in that, The diameter of the spray hole (21) is R, 1.5mm≤R≤3mm.

7. The spray plate according to claim 1, characterized in that, All of the spray hole groups (20) include a plurality of first spray hole groups (20a) and a plurality of second spray hole groups (20b). The spray plate has a first air inlet channel (50), a second air inlet channel (60), a plurality of first transition channels (70) and a plurality of second transition channels (80). The first transition channels (70) correspond one-to-one with the first spray hole groups (20a), and the second transition channels (80) correspond one-to-one with the second spray hole groups (20b). The first air inlet (30), the first air inlet channel (50), the first transition channel (70), and the spray holes (21) of the first spray hole group (20a) corresponding to the first transition channel (70) are connected in sequence; the second air inlet (40), the second air inlet channel (60), the second transition channel (80), and the spray holes (21) of the second spray hole group (20b) corresponding to the second transition channel (80) are connected in sequence.

8. The spray plate according to claim 7, characterized in that, The first spray hole group (20a) and the second spray hole group (20b) are alternately arranged along the length direction (X) of the spray plate, and the first transition channel (70) and the second transition channel (80) are alternately arranged along the length direction (X) of the spray plate.

9. A coating apparatus, characterized in that, The coating apparatus includes: A coating body having a reaction chamber and an opening communicating with the reaction chamber; and The spray plate as described in any one of claims 1 to 8, the spray plate covers the opening, and the spray surface (10) faces the reaction chamber.

10. A solar cell manufacturing production line, characterized in that, The solar cell manufacturing production line includes the coating apparatus as described in claim 9.

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