Silicon carbide single crystal growth vacuum heating furnace with lifting and rotating mechanism

Abstract

The utility model discloses a silicon carbide single crystal growth vacuum heating furnace with a lifting and rotating mechanism, which belongs to the technical field of silicon carbide single crystal growth and comprises a furnace body, an upper flange and the lifting and rotating mechanism, the upper flange is mounted at the top of the furnace body, and the lifting and rotating mechanism is mounted at the top of the upper flange. The lifting and rotating mechanism is mainly composed of a guide column, a moving platform, a transmission screw, a magnetofluid sealing device, a lifting and rotating pipe, a first driving motor and a second driving motor. By optimizing the fixing mode of the heaters, the heaters are stably and uniformly distributed in the furnace body, and uniform heating in the furnace body is ensured. According to the utility model, the structural construction of the upper flange and the lifting and rotating mechanism is innovated, and the upper flange and the lifting and rotating mechanism are designed into an integrated structure, so that the lifting and rotating mechanism is ensured to accurately control the vertical lifting and rotating of the crucible. Due to the innovative design of the vacuum heating furnace, the overall performance and the working efficiency of the vacuum heating furnace are improved.

Description

Technical Field

[0001] This invention belongs to the field of silicon carbide single crystal growth technology, specifically a vacuum heating furnace for silicon carbide single crystal growth with a pulling and rotating mechanism. Background Technology

[0002] In practical applications of vacuum furnaces used for silicon carbide single crystal growth, the coordinated operation of the upper flange and the lifting mechanism is crucial for the silicon carbide single crystal growth process. Traditional vacuum furnaces suffer from problems such as unstable heater and crucible positioning, difficulty in precisely aligning the upper flange and heater, and poor operational flexibility of the lifting mechanism. For example, the relative positional deviation between the upper flange (crucible lifting rod) and the heater affects the uniformity of the thermal field distribution within the crucible; the lack of precise vertical guidance and rotational control in the lifting mechanism makes it difficult to meet the requirements of complex processes in terms of crucible lifting and rotation, thus reducing production efficiency and product quality.

[0003] Therefore, there is an urgent need for a vacuum heating furnace with optimized structural design to solve the above-mentioned technical problems. Summary of the Invention

[0004] The purpose of this invention is to solve the problems existing in the prior art and to provide a vacuum heating furnace for silicon carbide single crystal growth with a lifting and rotating mechanism.

[0005] This utility model is achieved through the following technical solution:

[0006] A vacuum heating furnace for silicon carbide single crystal growth with a lifting and rotating mechanism includes a furnace body, an upper flange and a lifting and rotating mechanism, wherein the upper flange is installed on the top of the furnace body and the lifting and rotating mechanism is installed on the top of the upper flange.

[0007] The furnace body contains a crucible and a heater. The crucible is located in the center, and the heaters are located around the crucible and are evenly distributed. Electrode holes are opened at the bottom of the furnace body, and the electrode rods at the bottom of the heaters are inserted into the electrode holes and extend from the electrode holes to the outside of the furnace body.

[0008] The lifting and rotating mechanism includes a guide column, a moving platform, a transmission screw, a magnetic fluid sealing device, a lifting and rotating tube, a first drive motor, and a second drive motor. The guide column is vertically fixed to the upper flange and evenly distributed around the upper flange. The moving platform is slidably mounted on the guide column. The transmission screw is vertically fixed to the upper flange and passes through the moving platform. The magnetic fluid sealing device is installed at the center of the upper flange. The lifting and rotating tube passes through the upper flange and is slidably connected to it. The bottom end of the lifting and rotating tube is fixedly connected to the crucible, and the top end of the lifting and rotating tube is fixedly connected to the lower half of the rotating shaft of the magnetic fluid sealing device. A rotating driven gear is installed on the upper half of the rotating shaft of the magnetic fluid sealing device. The first drive motor is fixed to the moving platform, and a lifting drive gear is installed at the output end of the first drive motor. The lifting drive gear meshes with the transmission screw. The second drive motor is fixed to the moving platform, and a rotating drive gear is installed at the output end of the second drive motor. The rotating drive gear meshes with the rotating driven gear.

[0009] Furthermore, a bellows is connected between the mobile platform and the upper flange, and the bellows is fitted over the outside of the lifting rotary tube.

[0010] Furthermore, a quartz window is installed at the top of the rotating shaft of the magnetohydrodynamic sealing device, and the line of sight passes through the quartz window, the shaft hole of the magnetohydrodynamic sealing device, and the tube hole of the lifting rotating tube in sequence to the crucible.

[0011] Furthermore, the lifting and rotating tube adopts a tube structure made of graphite material.

[0012] Furthermore, four guide posts are provided, and the four guide posts are fixed at the four corners of the upper flange respectively.

[0013] Furthermore, the top port of the bellows is sealed to the bottom surface of the moving platform, and the bottom port of the bellows is sealed to the top surface of the upper flange.

[0014] This invention optimizes the heater fixing method, achieving a stable and evenly distributed heater arrangement within the furnace body, ensuring uniform heating. Furthermore, by innovatively integrating the upper flange and lifting / rotating mechanism into a single structure, this invention ensures precise control of the crucible's vertical lifting and rotation. In summary, the innovative design of this vacuum heating furnace improves its overall performance and operating efficiency.

[0015] Compared with the prior art, the beneficial effects of this utility model include:

[0016] 1) Precise heater positioning: The heaters are evenly fixed in the furnace body through electrode holes, which effectively avoids the problem of heater displacement during operation, ensures the stability and uniformity of the heating area in the furnace body, and improves the heating quality of materials.

[0017] 2) Precise alignment between the upper flange and the crucible: The crucible is centered relative to the upper flange, ensuring a precise relative position between the crucible and the heater. This provides a stable and efficient heating environment for the material and reduces heating problems caused by positional deviations.

[0018] 3) Vertical guidance and stability: The guide column fixes the lifting and rotating mechanism vertically, which greatly improves the stability and accuracy of the movement of the lifting and rotating mechanism, ensuring that the crucible will not shake or deviate during the lifting and lowering process, thus improving the safety and reliability of the equipment operation.

[0019] 4) Flexible and efficient operation: The first drive motor controls the lifting height of the lifting and rotating tube, realizing precise adjustment of the crucible's lifting and lowering position; the second drive motor, in conjunction with the magnetic fluid sealing device, drives the lifting and rotating tube to rotate, which can flexibly control the crucible's rotation, meet diverse process requirements, and improve production efficiency and product quality. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model.

[0021] In the figure: 1-furnace body, 2-upper flange, 3-crucible, 4-heater, 5-electrode rod, 6-guide column, 7-moving platform, 8-transmission screw, 9-magnetic fluid sealing device, 10-lifting rotating tube, 11-first drive motor, 12-second drive motor, 13-rotating driven gear, 14-lifting active gear, 15-rotating active gear, 16-bellows, 17-quartz window. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] In the description of this utility model, it should be noted that the terms "upper", "lower", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] like Figure 1As shown, this embodiment provides a vacuum heating furnace for silicon carbide single crystal growth with a lifting and rotating mechanism, including a furnace body 1, an upper flange 2 and a lifting and rotating mechanism; the upper flange 2 is installed on the top of the furnace body 1, and the lifting and rotating mechanism is installed on the top of the upper flange 2.

[0025] The furnace body 1 is equipped with a crucible 3 and a heater 4. The crucible 3 is located in the center, and the heater 4 is located around the crucible 3 and is evenly distributed. The bottom of the furnace body 1 has an electrode hole. The electrode rod 5 at the bottom of the heater 4 is inserted into the electrode hole and extends from the electrode hole to the outside of the furnace body 1. The setting of the electrode hole ensures that the heater 4 is stably and evenly distributed in the furnace body 1.

[0026] The lifting and rotating mechanism includes guide columns 6, a moving platform 7, a transmission screw 8, a magnetic fluid sealing device 9, a lifting and rotating tube 10, a first drive motor 11, and a second drive motor 12. The guide columns 6 are vertically fixed to the upper flange 2 and evenly distributed around its perimeter. Specifically, four guide columns 6 are provided, each fixed at one of the four corners of the upper flange 2. The moving platform 7 is slidably mounted on the four guide columns 6, and the moving platform 7 is slidably connected to the four guide columns 6. The transmission screw 8 is vertically fixed to the upper flange 2 and passes through the moving platform 7, and the transmission screw 8 is slidably connected to the moving platform 7. The magnetic fluid sealing device 9 is installed at the center of the upper flange 2 and includes a rotating shaft with through-holes running vertically through it. The lifting and rotating tube 10 is made of graphite material. The structure consists of a hollow tube body. The lifting and rotating tube 10 passes through the upper flange 2 and is slidably connected to it. The bottom end of the lifting and rotating tube 10 is located inside the furnace body 1 and is fixedly connected to the crucible 3, thereby ensuring the precise relative position of the crucible 3 and the heater 4 and improving heating uniformity. The top end of the lifting and rotating tube 10 is fixedly connected to the lower half of the rotating shaft of the magnetic fluid sealing device 9. The upper half of the rotating shaft of the magnetic fluid sealing device 9 is equipped with a rotating driven gear 13. The first drive motor 11 is fixed on the moving platform 7. The output end of the first drive motor 11 is equipped with a lifting drive gear 14, which meshes with the transmission screw 8. The second drive motor 12 is fixed on the moving platform 7. The output end of the second drive motor 12 is equipped with a rotating drive gear 15, which meshes with the rotating driven gear 13.

[0027] A bellows 16 is connected between the mobile platform 7 and the upper flange 2, and the bellows 16 is fitted outside the lifting and rotating tube 10. The top opening of the bellows 16 is sealed to the bottom surface of the mobile platform 7, and the bottom opening of the bellows 16 is sealed to the top surface of the upper flange 2. The bellows 16 can seal the sliding connection between the lifting and rotating tube 10 and the upper flange 2, thereby ensuring the vacuum sealing state inside the furnace body 1.

[0028] A quartz window 17 is installed at the top of the rotating shaft of the magnetic fluid sealing device 9. The line of sight passes through the quartz window 17, the shaft hole of the magnetic fluid sealing device 9, and the tube hole of the lifting rotating tube 10 in sequence to the crucible 3.

[0029] The method of using the vacuum heating furnace for silicon carbide single crystal growth with a pulling and rotating mechanism described in this embodiment includes:

[0030] 1) Open the upper flange 2, place the material into the crucible 3, and then seal and fix the upper flange 2 to the furnace body 1.

[0031] 2) Connect the electrode rod 5 on the heater 4 to the external power source and start the heater 4 to heat the furnace body 1 evenly.

[0032] 3) Start the first drive motor 11. The first drive motor 11 drives the lifting drive gear 14 to rotate. Since the lifting drive gear 14 is meshed with the transmission screw 8, when the lifting drive gear 14 rotates forward or backward, it can drive the moving platform 7 to move up or down relative to the transmission screw 8, thereby realizing the upward or downward movement of the crucible 3 in the furnace body 1.

[0033] 4) Start the second drive motor 12. The second drive motor 12 drives the rotating active gear 15 to rotate. The rotating active gear 15 drives the rotating passive gear 13 to rotate. The rotating passive gear 13 drives the magnetic fluid sealing device 9 to rotate. The magnetic fluid sealing device 9 drives the lifting rotating tube 10 to rotate. The lifting rotating tube 10 drives the crucible 3 to rotate, thereby realizing the forward or reverse rotation of the crucible 3. That is, through the special transmission characteristics of the magnetic fluid sealing device 9, the rotation action of the lifting rotating tube 10 is realized, thereby driving the crucible 3 to rotate.

[0034] 5) The operator can observe the reaction of the material in the crucible 3 by passing through the quartz window 17, the shaft hole of the magnetohydrodynamic sealing device 9, and the tube hole of the lifting rotating tube 10 in sequence.

[0035] As can be seen from the above, the silicon carbide single crystal growth vacuum heating furnace with a lifting and rotating mechanism described in this embodiment achieves at least two functions: lifting and rotating the crucible 3, thereby meeting the requirements of different processes for lifting and / or rotating the crucible 3.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum heating furnace for silicon carbide single crystal growth with a lifting and rotating mechanism, comprising a furnace body, an upper flange, and a lifting and rotating mechanism, characterized in that: The upper flange is installed on the top of the furnace body, and the lifting and rotating mechanism is installed on the top of the upper flange; The furnace body contains a crucible and a heater. The crucible is located in the center, and the heaters are located around the crucible and are evenly distributed. Electrode holes are opened at the bottom of the furnace body, and the electrode rods at the bottom of the heaters are inserted into the electrode holes and extend from the electrode holes to the outside of the furnace body. The lifting and rotating mechanism includes a guide column, a moving platform, a transmission screw, a magnetic fluid sealing device, a lifting and rotating tube, a first drive motor, and a second drive motor. The guide column is vertically fixed to the upper flange and evenly distributed around the upper flange. The moving platform is slidably mounted on the guide column. The transmission screw is vertically fixed to the upper flange and passes through the moving platform. The magnetic fluid sealing device is installed at the center of the upper flange. The lifting and rotating tube passes through the upper flange and is slidably connected to it. The bottom end of the lifting and rotating tube is fixedly connected to the crucible, and the top end of the lifting and rotating tube is fixedly connected to the lower half of the rotating shaft of the magnetic fluid sealing device. A rotating driven gear is installed on the upper half of the rotating shaft of the magnetic fluid sealing device. The first drive motor is fixed to the moving platform, and a lifting drive gear is installed at the output end of the first drive motor. The lifting drive gear meshes with the transmission screw. The second drive motor is fixed to the moving platform, and a rotating drive gear is installed at the output end of the second drive motor. The rotating drive gear meshes with the rotating driven gear.

2. The vacuum heating furnace for silicon carbide single crystal growth with a pulling and rotating mechanism according to claim 1, characterized in that: A bellows is connected between the mobile platform and the upper flange, and the bellows is fitted over the outside of the lifting and rotating tube.

3. The vacuum heating furnace for silicon carbide single crystal growth with a pulling and rotating mechanism according to claim 1, characterized in that: A quartz window is installed at the top of the rotating shaft of the magnetohydrodynamic sealing device. The line of sight passes through the quartz window, the shaft hole of the magnetohydrodynamic sealing device, and the tube hole of the lifting rotating tube in sequence to the crucible.

4. The vacuum heating furnace for silicon carbide single crystal growth with a pulling and rotating mechanism according to claim 1, characterized in that: The lifting and rotating tube uses a tube structure made of graphite.

5. The vacuum heating furnace for silicon carbide single crystal growth with a pulling and rotating mechanism according to claim 1, characterized in that: There are four guide posts, which are fixed at the four corners of the upper flange.

6. The vacuum heating furnace for silicon carbide single crystal growth with a pulling and rotating mechanism according to claim 2, characterized in that: The top opening of the bellows is sealed to the bottom surface of the moving platform, and the bottom opening of the bellows is sealed to the top surface of the upper flange.

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