Process circulating water system for single crystal furnace and single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnace process circulating water systems, in particular to a process circulating water system for a single crystal furnace and the single crystal furnace, and the process circulating water system for the single crystal furnace structurally comprises a circulating water pump which is communicated with a single crystal furnace main body through a workshop water return pipeline; the cooling tower is communicated with the single crystal furnace main body through a water return pipeline, and the circulating water pump is communicated with the cooling tower through a water supply pipeline; a communication regulating valve is arranged in the communication pipeline, and the water supply pipeline and the water return pipeline can be communicated through the communication pipeline. The process circulating water system for the single crystal furnace and the single crystal furnace can solve the problem of high energy consumption of the existing process circulating water system for the single crystal furnace.

Description

Technical Field

[0001] This application relates to the technical field of process circulating water systems for single crystal furnaces, and in particular to a process circulating water system for a single crystal furnace and a single crystal furnace. Background Technology

[0002] Currently, the cooling system of the single crystal furnace used in the single crystal Czochralski process is a closed cooling system, which consists of a process circulating water pump, the main cooling system body, pipes, and pipe valves.

[0003] Given the requirements of the single crystal Czochralski process, the circulating cooling water in the single crystal furnace needs to be kept at a constant temperature, constant pressure, and constant flow. As the only power device in the system responsible for regulating constant flow and pressure, the circulating water pump accounts for as much as 83%-87% of the total power consumption of the entire system. In addition, because the existing circulating water system did not fully consider energy-saving factors in the design stage, the energy consumption of the water pump is at a high level during the operation of the system. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a process circulating water system and a single crystal furnace for use in a single crystal furnace, so as to solve the problem of high energy consumption of existing process circulating water systems for single crystal furnaces.

[0005] According to a first aspect of this utility model, a process circulating water system for a single crystal furnace is provided, wherein the process circulating water system for the single crystal furnace includes: a circulating water pump connected to the main body of the single crystal furnace via a workshop return water pipeline; a cooling tower connected to the main body of the single crystal furnace via a return water pipeline, the circulating water pump being connected to the cooling tower via a supply water pipeline; and a connecting pipeline, wherein a connecting regulating valve is provided in the connecting pipeline, and the supply water pipeline and the return water pipeline are connected through the connecting pipeline.

[0006] Preferably, the water supply pipeline includes a main water supply pipeline and a branch water supply pipeline, the branch water supply pipeline being connected to the cooling tower, and the branch water supply pipeline being connected to the circulating water pump through the main water supply pipeline.

[0007] Preferably, the return water pipeline includes a main return water pipeline and a branch return water pipeline, the branch return water pipeline is connected to the cooling tower, and the branch return water pipeline is connected to the main crystal furnace body through the main return water pipeline.

[0008] Preferably, the branch water supply pipeline and the branch water return pipeline are located on the same side of the cooling tower, and the connecting pipeline is located between the branch water supply pipeline and the branch water return pipeline, and the branch water supply pipeline and the branch water return pipeline can be connected through the connecting pipeline.

[0009] Preferably, there are multiple branch water supply pipes and branch return water pipes, with each branch water supply pipe connected to the main water supply pipe and each branch return water pipe connected to the main return water pipe.

[0010] Preferably, multiple branch water supply pipes are respectively arranged on both sides of the cooling tower, and multiple branch return water pipes are respectively arranged on both sides of the cooling tower. Adjacent branch water supply pipes and branch return water pipes can be connected through the connecting pipe.

[0011] Preferably, the connecting pipe is connected to the return water pipe and the supply water pipe via a flange.

[0012] Preferably, the diameter of the connecting pipe is the same as that of the return water pipe and the supply water pipe.

[0013] Preferably, the connecting regulating valve is a manual connecting regulating valve.

[0014] According to a second aspect of the present invention, a single crystal furnace is provided, wherein the single crystal furnace includes a single crystal furnace body and a process circulating water system for the single crystal furnace as described above, the process circulating water system for the single crystal furnace being connected to the single crystal furnace body.

[0015] This invention relates to a process circulating water system and a single crystal furnace for a single crystal furnace. The circulating water pump is connected to the furnace body via a workshop return water pipeline. A cooling tower is connected to the furnace body via a return water pipeline, and the circulating water pump is connected to the cooling tower via a supply water pipeline. The supply and return water pipelines are connected via a connecting pipeline, which includes a regulating valve. By adjusting the opening of the regulating valve, the flow rate directly between the supply and return water pipelines can be controlled. Since there is a certain head loss between the supply and return water pipelines of the cooling tower, directly connecting them reduces the water velocity, thereby reducing the head loss and lowering the power consumption of the circulating water pump. This effectively solves the problem of high energy consumption in existing process circulating water systems for single crystal furnaces.

[0016] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the process circulating water system for a single crystal furnace according to this utility model.

[0019] Figure 2 This is a schematic diagram of a portion of the process circulating water system for a single crystal furnace according to this utility model.

[0020] Figure 3 This is another schematic diagram of the process circulating water system for a single crystal furnace according to this utility model.

[0021] Attached reference numerals: 1-Circulating water pump; 11-Water pump outlet valve; 12-Water pump inlet valve; 2-Cooling tower; 3-Connecting pipeline; 31-Connecting regulating valve; 4-Main water supply pipeline; 41-Branch water supply pipeline; 5-Main return water pipeline; 51-Branch return water pipeline; 6-Workshop return water pipeline; 7-Single crystal furnace body. Detailed Implementation

[0022] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0023] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0024] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0025] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0026] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0027] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0028] The terminology used herein is for the purpose of describing various examples only and is not intended to limit the examples. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0029] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0030] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0031] like Figures 1 to 3 As shown, according to the first aspect of the present invention, a process circulating water system for a single crystal furnace is provided, the process circulating water system for a single crystal furnace includes a circulating water pump 1, a cooling tower 2 and a connecting pipeline 3.

[0032] In the following description, reference will be made to Figures 1 to 3 The specific structure of the aforementioned components of the process circulating water system used in single crystal furnaces and the connection relationships of these components are described in detail.

[0033] like Figures 1 to 3 As shown, in this embodiment, the circulating water pump 1 and the single crystal furnace body 7 can be connected via the workshop return water pipe 6. The cooling tower 2 can be connected to the single crystal furnace body 7 via the return water pipe. The circulating water pump 1 can be connected to the cooling tower 2 via the supply water pipe. A connecting pipe 3 can be provided between the supply water pipe and the return water pipe, and a connecting regulating valve 31 can be provided in the connecting pipe 3 to connect the supply water pipe and the return water pipe. In this way, by adjusting the opening of the connecting regulating valve 31, the flow rate directly flowing between the supply water pipe and the return water pipe can be controlled. Since there is a certain head loss between the supply water pipe and the return water pipe of the cooling tower 2, by directly connecting the supply water pipe and the return water pipe, the flow velocity of the water in the pipe can be reduced, thereby reducing the head loss of the cooling tower 2, reducing the power of the circulating water pump 1, and ultimately achieving the purpose of energy saving.

[0034] Specifically, in this embodiment, the energy-saving principle is as follows. The friction loss between the supply and return water pipes of cooling tower 2 can be calculated using Darcy's formula, i.e., h f =f×L / d×V 2 / 2g. Where, h f 1 is the friction loss along the pipe (in meters); f is the coefficient of friction, which is related to the material and roughness of the coil and the Reynolds number of the water flow, and can be determined according to the Moody diagram or relevant empirical formulas; L is the length of the coil (in meters); d is the inner diameter of the coil (in meters); v is the water velocity in the pipe (in meters / second), which can be calculated based on the flow rate and the cross-sectional area of ​​the pipe; g is the acceleration due to gravity.

[0035] The formula for calculating local resistance loss is: h j =Σξ×v 2 / 2g. Where, h f Σξ is the friction loss (in meters); Σξ is the local resistance coefficient, and each fitting such as elbows, tees, and valves in the coil has its own corresponding local resistance coefficient; v is the water flow velocity in the pipe (in meters per second), which can be calculated based on the flow rate and the cross-sectional area of ​​the pipe; g is the acceleration due to gravity.

[0036] The total head resistance loss (i.e., the sum of friction loss and local resistance loss) can be expressed as: h = h f+h j .

[0037] The formula for calculating the power of a water pump is: P = Q × H × ρ × g / 3600 × η. Where P represents the pump power (in kW); Q represents the flow rate (in m³ / s). 3 / h); H represents the head (in meters); ρ represents the density of the conveyed medium (in kg / m³). 3 For example, the density of water is generally taken as 1000 kg / m³. 3 g represents gravitational acceleration; η represents the efficiency of the water pump (a value between 0 and 1).

[0038] From the above formula, we can see that v 2 The larger the value of h, the better. f +h j The larger the value of v2, the greater the required pump power P, and the more electrical energy the pump needs to maintain the flow rate of the single crystal furnace. Reducing v2, or reducing the flow rate, reduces the pump power P, thereby achieving energy saving.

[0039] Preferred, such as Figures 1 to 3 As shown, in this embodiment, the water supply pipeline may include a main water supply pipeline 4 and a branch water supply pipeline 41. The branch water supply pipeline 41 can be connected to the cooling tower 2, and simultaneously, the branch water supply pipeline 41 is connected to the circulating water pump 1 via the main water supply pipeline 4. The branch water supply pipeline 41 can be installed on the side of the cooling tower 2 for easy water supply to the cooling tower 2.

[0040] Preferred, such as Figures 1 to 3 As shown, in this embodiment, the return water pipeline may include a main return water pipeline 5 and a branch return water pipeline 51. The branch return water pipeline 51 may be connected to the cooling tower 2, and simultaneously, the branch return water pipeline 51 is connected to the single crystal furnace body 7 via the main return water pipeline 5. The branch return water pipeline 51 may be installed on the side of the cooling tower 2 for easy return of water from the cooling tower 2.

[0041] Preferably, in one embodiment, the number of branch water supply pipes 41 and branch return water pipes 51 can both be one. In this case, the branch water supply pipe 41 and the branch return water pipe 51 can be located on the same side of the cooling tower 2 to shorten the distance between the branch water supply pipe 41 and the branch return water pipe 51. The connecting pipe 3 can be located between the branch water supply pipe 41 and the branch return water pipe 51, so that the branch water supply pipe 41 and the branch return water pipe 51 can be connected through the connecting pipe 3.

[0042] In addition, preferred, such as Figures 1 to 3As shown, in another embodiment, there can be multiple branch water supply pipes 41 and branch return water pipes 51. Preferably, the number of multiple branch water supply pipes 41 and multiple branch return water pipes 51 can be equal. The multiple branch water supply pipes 41 can be connected to the main water supply pipe 4, and the multiple branch return water pipes 51 can be connected to the main return water pipe 5.

[0043] Furthermore, preferably, such as Figures 1 to 3 As shown, in this embodiment, there can be two branch water supply pipes 41 and two branch return water pipes 51. The two branch water supply pipes 41 can be respectively located on both sides of the cooling tower 2. The two branch return water pipes 51 can also be respectively located on both sides of the cooling tower 2. Adjacent branch water supply pipes 41 and branch return water pipes 51 can be connected by a connecting pipe 3. However, this is not a limitation. In actual production, if a larger number of branch water supply pipes and branch return water pipes are installed, a connecting pipe can be installed between each group of branch water supply pipes and branch return water pipes.

[0044] Preferred, such as Figures 1 to 3 As shown, in this embodiment, the connecting pipe 3 can be connected to the return water pipe and the supply water pipe via a flange. Specifically, the first end of the connecting pipe 3 can be connected to the branch supply water pipe 41 via a flange, so that the branch supply water pipe 41 is connected to the connecting pipe 3. The second end of the connecting pipe 3 can be connected to the branch return water pipe 51 via a flange, so that the branch return water pipe 51 is connected to the connecting pipe 3. When the connecting regulating valve 31 in the connecting pipe 3 is opened, the branch supply water pipe 41 will be directly connected to the branch return water pipe 51. Further, preferably, the diameter of the connecting pipe 3 can be the same as that of the return water pipe and the supply water pipe, that is, the diameters of the connecting pipe 3, the branch return water pipe 51, and the branch supply water pipe 41 are equal.

[0045] In addition, preferred, such as Figures 1 to 3 As shown, in this embodiment, the connecting regulating valve 31 can be a manual connecting regulating valve. The operator can manually adjust the opening of the connecting regulating valve 31 according to actual needs to regulate the water flow rate in the pipeline, thereby reducing the power of the circulating water pump 1 and ultimately achieving energy saving.

[0046] Preferred, such as Figures 1 to 3 As shown in the embodiment, the circulating water pump 1 may also be equipped with a pump outlet valve 11 and a pump inlet valve 12. The pump outlet valve 11 may be located at the end of the main water supply pipeline 4 near the circulating water pump 1. The pump inlet valve 12 may be located at the end of the main return water pipeline 5 near the circulating water pump 1. The pump outlet valve 11 and the pump inlet valve 12 can be used during maintenance of the circulating water pump 1.

[0047] In addition, such as Figures 1 to 3As shown, according to a second aspect of the present invention, a single crystal furnace is provided, the single crystal furnace including a single crystal furnace body 7 and a process circulating water system for the single crystal furnace as described above. The process circulating water system for the single crystal furnace is connected to the single crystal furnace body 7.

[0048] During operation, the main body 7 of the single crystal furnace is connected to the process circulating water system for the single crystal furnace via the main return water pipe 5 and the workshop return water pipe 6. During water circulation, the operator can manually adjust the opening of the connecting regulating valve 31 to control the flow rate directly between the supply and return water pipes. Since there is a certain head loss between the supply and return water pipes of the cooling tower 2, directly connecting them reduces the water velocity in the pipes, thereby reducing the head loss of the cooling tower 2, reducing the power of the circulating water pump 1, and ultimately achieving energy saving. The connecting pipe 3 has a simple structure and is easy to install, ensuring that energy consumption is reduced without incurring excessive production costs.

[0049] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A process circulating water system for a single crystal furnace, connected to the main body of the single crystal furnace, characterized in that, The process circulating water system for the single crystal furnace includes: A circulating water pump is connected to the main body of the single crystal furnace via a workshop return water pipeline; A cooling tower is connected to the main body of the single crystal furnace via a return water pipeline, and a circulating water pump is connected to the cooling tower via a supply water pipeline; and A connecting pipeline is provided, and a connecting regulating valve is installed in the connecting pipeline, so that the water supply pipeline and the water return pipeline can be connected through the connecting pipeline; The water supply pipeline includes a main water supply pipeline and a branch water supply pipeline. The branch water supply pipeline is connected to the cooling tower and is connected to the circulating water pump through the main water supply pipeline. The return water pipeline includes a main return water pipeline and a branch return water pipeline. The branch return water pipeline is connected to the cooling tower, and the branch return water pipeline is connected to the main crystal furnace body through the main return water pipeline. The branch water supply pipeline and the branch water return pipeline are located on the same side of the cooling tower, and the connecting pipeline is located between the branch water supply pipeline and the branch water return pipeline. The branch water supply pipeline and the branch water return pipeline can be connected through the connecting pipeline.

2. The process circulating water system for a single crystal furnace according to claim 1, characterized in that, There are multiple branch water supply pipelines and branch return water pipelines, with each branch water supply pipeline connected to the main water supply pipeline and each branch return water pipeline connected to the main return water pipeline.

3. The process circulating water system for a single crystal furnace according to claim 1, characterized in that, Multiple branch water supply pipes are respectively arranged on both sides of the cooling tower, and multiple branch return water pipes are respectively arranged on both sides of the cooling tower. Adjacent branch water supply pipes and branch return water pipes can be connected through the connecting pipe.

4. The process circulating water system for a single crystal furnace according to claim 1, characterized in that, The connecting pipeline is connected to the return water pipeline and the supply water pipeline via a flange.

5. The process circulating water system for a single crystal furnace according to claim 4, characterized in that, The diameter of the connecting pipe is the same as that of the return water pipe and the supply water pipe.

6. The process circulating water system for a single crystal furnace according to any one of claims 1 to 5, characterized in that, The connecting regulating valve is a manual connecting regulating valve.

7. A single crystal furnace, characterized in that, The single crystal furnace includes a single crystal furnace body and a process circulating water system for the single crystal furnace according to any one of claims 1 to 6, wherein the process circulating water system for the single crystal furnace is connected to the single crystal furnace body.

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