Helium detection tool and helium detection system
By designing the sealing cover and connecting base structure of the helium testing fixture, and using the pressing end and inclined side guide to achieve sealing, the problems of poor sealing effect and difficult operation in the existing technology are solved, realizing the use of efficient and economical helium testing fixture.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HEFEI WEIRUI TECH CO LTD
- Filing Date
- 2025-05-19
- Publication Date
- 2026-05-08
AI Technical Summary
Existing helium testing fixtures use masking tape and chain screwing locking methods, resulting in poor sealing performance, high cost, short service life, and difficult operation, making it difficult to meet the requirements of high-precision airtightness testing.
Design a helium detection fixture, including a sealing cap, a first connecting base, and a second connecting base. By cooperating with the pressing end and the sealing receiving position, the radial movement of the sealing element is achieved by using the inclined side guide. Combined with negative pressure sealing, the masking tape is eliminated, and the use of metal material improves durability.
It achieves quick and labor-saving sealing connections, reduces costs, extends the service life of tooling, and improves sealing performance and ease of operation.
Smart Images
Figure CN224216243U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of helium leak detection technology, and more specifically, to a helium detection tooling and a helium detection system. Background Technology
[0002] In the semiconductor manufacturing field, the susceptor (substrate) serves as a core component in processes such as chemical vapor deposition (CVD), metal-organic chemical vapor deposition (MOCVD), and epitaxial growth. Its performance directly determines the precision and yield of wafer processing. Especially regarding hermeticity, even the slightest leak can lead to a decrease in the vacuum level of the reaction chamber and uneven distribution of process gases, ultimately affecting device reliability. Therefore, high-precision hermeticity testing of the susceptor has become an indispensable part of semiconductor equipment quality control.
[0003] The currently used helium testing fixture is made of Teflon. When connecting to the Susceptor, to achieve airtightness and ensure a tight seal with the tubing, masking tape is used for sealing, and a chain is used for tightening. However, this method is problematic. The masking tape is expensive, requiring approximately 10 rolls per year, costing around 6000 yuan. The Teflon fixture is prone to damage from repeated tightening during leak testing, rendering the entire system unusable. The chain tightening for leak testing is difficult to disassemble after testing. Furthermore, the sealing effect is poor, resulting in a slow decrease in leak readings and a long testing time. Utility Model Content
[0004] This invention provides a helium detection fixture and a helium detection system, wherein the helium detection fixture can be quickly connected to a susceptor and achieve a sealing effect.
[0005] To achieve the above objectives, the technical solution provided by this utility model is as follows:
[0006] A helium detection fixture includes a sealing cap, a first connecting base, and a second connecting base;
[0007] The sealing cap is located on one side of the first connecting base and is sealed to the first connecting base; the second connecting base is located on the other side of the first connecting base;
[0008] The first connecting base has a pressing end on the side near the second connecting base, and the second connecting base has a sealing receiving position on the side near the first connecting base, in which a second sealing element is installed; the pressing end is engaged with the sealing receiving position and can press the second sealing element, so that the second sealing element can move toward the radial center of the second connecting base.
[0009] As a further improvement, the sealing receiving position is recessed and located on the inner side of the second connecting base.
[0010] As a further improvement, the side of the sealing receiving position away from the pressing end is inclined to form an inclined side, and the inclined sides in opposite directions form an included angle α.
[0011] As a further improvement, the included angle α is: 100°≤α≤120°.
[0012] As a further improvement, a first connection position is provided on the first connection base, and a second connection position corresponding to the first connection position is provided on the second connection base; the first connection position and the second connection position are used to install connectors.
[0013] As a further improvement, the first connection position and the second connection position are arranged in an array around the axial center of the first connection base.
[0014] As a further improvement, the first connection point is located on the outside of the clamping end.
[0015] As a further improvement, a sealing surface is provided at the connection between the first connecting base and the sealing cover, and a first groove is formed on the sealing surface, in which a first sealing element is provided.
[0016] As a further improvement, one end of the sealing cap has an inlet and the other end has a sealing port, which is connected to the sealing surface.
[0017] This utility model also provides a helium detection system, including a helium mass spectrometer leak detector and the helium detection fixture. The helium mass spectrometer leak detector has an interface column. The helium detection fixture is connected to the column. A first connecting base and a second connecting base are sleeved on the column. When the second sealing element moves toward the radial center of the second connecting base, it squeezes the outer wall of the column.
[0018] Compared with the prior art, the technical solution provided by this utility model has the following advantages:
[0019] (1) The helium detection fixture of this utility model has a clamping end on the first connecting base and a sealing receiving position on the second connecting base, in which a second sealing element is installed. The clamping end engages with the sealing receiving position and can clamp the second sealing element, allowing the second sealing element to move toward the radial center of the second connecting base, thus achieving a sealed connection between the second sealing element and the tubing. The installation and connection process of the fixture is convenient and quick, saving time and effort. Moreover, the use of masking tape is eliminated, saving costs.
[0020] (2) In the helium detection fixture of this utility model, the side of the sealing and receiving position away from the pressing end is inclined to form an inclined side. Under the guidance of the inclined side, the second sealing member moves toward the radial center of the second connecting base, thereby squeezing the outer wall of the tube column to achieve a sealing effect.
[0021] (3) The helium detection tool of this utility model has a reasonable tilting degree of the inclined side, which on the one hand can better guide the second seal, and on the other hand can prevent the second seal from falling off the sealing and receiving position.
[0022] (4) The helium detection fixture of this utility model achieves a sealed connection between the sealing cover and the first connecting base through negative pressure, which is quick and convenient.
[0023] (5) The helium detection system of this utility model includes the helium detection fixture and has the beneficial effects brought about by the helium detection fixture.
[0024] Other technical problems that the helium detection tooling and helium detection system of this utility model can solve, other technical features contained in the technical solution, and the advantages brought by these technical features will be further explained in detail with reference to the accompanying drawings. Attached Figure Description
[0025] Figure 1 This is a schematic diagram showing the connection status between the helium detection tool and the tubing.
[0026] Figure 2 This is a schematic diagram of the sealing cap structure;
[0027] Figure 3 This is a schematic diagram of the first connecting base structure;
[0028] Figure 4 This is a schematic diagram of the second connecting base structure.
[0029] Label Explanation:
[0030] 1. Sealing cap; 11. Inlet; 12. Sealing port; 2. First connecting base; 21. Pressing end; 22. First groove; 23. First connecting position; 3. Second connecting base; 31. Sealing receiving position; 32. Second connecting position; 4. Tube column; 5. First sealing element; 6. Second sealing element. Detailed Implementation
[0031] To further understand the content of this utility model, a detailed description of this utility model will be provided in conjunction with the accompanying drawings and embodiments.
[0032] The structures, proportions, and sizes illustrated in the accompanying drawings are merely for illustrative purposes and to aid those skilled in the art in understanding and reading the invention. They are not intended to limit the scope of the invention and therefore have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, provided they do not affect the effectiveness or purpose of the invention, should still fall within the scope of the technical content disclosed herein. Furthermore, terms such as "upper," "lower," "left," "right," "inner," "outer," and "middle" used in this specification are merely for clarity and not intended to limit the scope of implementation. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention's implementation.
[0033] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate for the embodiments of this application described herein.
[0034] Combination Figure 1-4 As shown, this embodiment provides a helium detection fixture, including a sealing cap 1, a first connecting base 2, and a second connecting base 3. Specifically, the sealing cap 1 is located on one side of the first connecting base 2 and is sealed to the first connecting base 2; the second connecting base 3 is located on the other side of the first connecting base 2. The sealing cap 1, the first connecting base 2, and the second connecting base 3 are all cylindrical and have interconnected airflow channels inside.
[0035] A clamping end 21 is provided on the side of the first connecting base 2 near the second connecting base 3, and a sealing receiving position 31 is provided on the side of the second connecting base 3 near the first connecting base 2. A second sealing element 6 is installed in the sealing receiving position 31. The clamping end 21 is engaged with the sealing receiving position 31 and can clamp the second sealing element 6, so that the second sealing element 6 can move toward the radial center of the second connecting base 3.
[0036] The helium detection fixture provided in this application is used to connect to the interface column 4 of the helium mass spectrometer leak detector. During connection, the first connecting base 2 and the second connecting base 3 are fitted onto the column 4. When the second sealing element 6 moves toward the radial center of the second connecting base 3, it presses against the outer wall of the column 4, thus achieving a sealed connection between the second sealing element 6 and the column 4. The installation and connection process of the fixture is convenient and quick, saving time and effort. Moreover, the use of masking tape is eliminated, saving costs.
[0037] In some cases, the first connecting base 2 and the second connecting base 3 are made of metal materials such as aluminum, which can be reused and improve the service life of the helium inspection tool.
[0038] Specifically, regarding the second connecting base 3, as follows: Figure 4 As shown. A recessed sealing receiving position 31 is provided on the inner side of the airflow channel of the second connecting base 3 and at one end near the first connecting base 2, and a second sealing member 6 is installed in the sealing receiving position 31. In one specific embodiment, the second sealing member 6 is a rubber sealing ring.
[0039] In a preferred embodiment, the sealing receiving position 31 is inclined on the side away from the pressing end 21, forming an inclined side, and the inclined sides in opposite directions form an included angle α. The sealing receiving position 31 is located on the inner side of the airflow channel of the second connecting base 3, and the airflow channel is cylindrical, thereby forming an included angle α between the inclined sides in opposite directions. For ease of understanding... Figure 1 and Figure 4 The view direction is explained below. The second seal 6 is installed in the sealing receiving position 31. The pressing end 21 is located above the second seal 6. The pressing end 21 presses the second seal 6. Under the guidance of the inclined side, the second seal 6 moves toward the radial center of the second connecting base 3, thereby squeezing the outer wall of the tube column 4 and achieving a sealed connection with the tube column 4.
[0040] Furthermore, the included angle α is 100°≤α≤120°. This allows the inclined side to better guide the second seal 6, while simultaneously preventing the second seal 6 from falling out of the sealing receiving position 31.
[0041] See Figure 3 and Figure 4 As shown, a first connecting base 2 is provided with a first connecting position 23, and a second connecting base 3 is provided with a second connecting position 32 corresponding to the first connecting position 23; the first connecting position 23 and the second connecting position 32 are used to install connecting elements. In one specific embodiment, the first connecting position 23 and the second connecting position 32 are through holes, and the connecting element is a bolt. The connecting element passes through the first connecting position 23 and the second connecting position 32. When tightened, the first connecting base 2 and the second connecting base 3 move closer to each other, so that the pressing end 21 presses against the second sealing element 6. When loosened, the helium detection fixture can be easily removed, making the operation very convenient.
[0042] The first connecting position 23 and the second connecting position 32 are arranged in an axial center array around the first connecting base 2, so that when the pressing end 21 presses the second sealing element 6, the different positions are pressed more evenly.
[0043] Combination Figure 1 , Figure 3 and Figure 4 As shown, the first connection position 23 is located outside the clamping end 21.
[0044] See Figure 2In the process, a sealing surface is provided at the connection between the first connecting base 2 and the sealing cover 1. A first groove 22 is formed on the sealing surface, and a first sealing element 5 is placed in the first groove 22. One end of the sealing cover 1 has an inlet 11, and the other end has a sealing port 12, which is connected to the sealing surface. Similarly, the first sealing element 5 is a rubber sealing ring. After the helium detection fixture is connected to the tubing 4, the interior of the helium detection fixture is set to a negative pressure state. The sealing port 12 of the sealing cover 1 is connected to the sealing surface, and the sealing port 12 is pressed against the first sealing element 5, so that the sealing cover 1 and the first connecting base 2 are sealed together.
[0045] In this embodiment, as Figure 3 As shown, the first groove 22 is located outside the first connecting position 23. However, in other cases, the first groove 22 can also be located inside the first connecting position 23. It should be noted that the position of the second connecting position 32 needs to correspond to the first connecting position 23 to facilitate the setting of the connector.
[0046] This application also provides a helium detection system, including a helium mass spectrometer leak detector and the aforementioned helium detection fixture. The helium mass spectrometer leak detector has an interface column 4, and the helium detection fixture is connected to the column 4. A first connecting base 2 and a second connecting base 3 are fitted onto the column 4. When the second sealing element 6 moves toward the radial center of the second connecting base 3, it squeezes the outer wall of the column 4. A bellows can be connected to the inlet 11 for vacuuming and helium gas blowing for helium detection.
[0047] The terms "installation," "setup," "equipped with," and "connection" used herein should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.
[0048] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the figures shown are only one embodiment of the present invention; the actual structure is not limited thereto. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention.
Claims
1. A helium detection fixture, characterized in that: It includes a sealing cap (1), a first connecting base (2), and a second connecting base (3); The sealing cap (1) is located on one side of the first connecting base (2) and is sealed to the first connecting base (2); the second connecting base (3) is located on the other side of the first connecting base (2); The first connecting base (2) is provided with a pressing end (21) on the side near the second connecting base (3), and the second connecting base (3) is provided with a sealing receiving position (31) on the side near the first connecting base (2). A second sealing element (6) is installed in the sealing receiving position (31). The pressing end (21) is connected to the sealing receiving position (31) and can press the second sealing element (6) so that the second sealing element (6) can move toward the radial center of the second connecting base (3).
2. The helium detection fixture according to claim 1, characterized in that: The sealing receiving position (31) is recessed and is located on the inner side of the second connecting base (3).
3. The helium detection fixture according to claim 1 or 2, characterized in that: The sealing receiving position (31) is inclined on the side away from the pressing end (21) to form an inclined side, and the inclined sides in opposite directions form an included angle α.
4. The helium detection fixture according to claim 3, characterized in that: The included angle α is: 100°≤α≤120°.
5. The helium detection fixture according to claim 1, characterized in that: A first connection position (23) is provided on the first connection base (2), and a second connection position (32) corresponding to the first connection position (23) is provided on the second connection base (3); the first connection position (23) and the second connection position (32) are used to set the connector.
6. The helium detection fixture according to claim 5, characterized in that: The first connection position (23) and the second connection position (32) are arranged in an axial center array around the first connection base (2).
7. The helium detection fixture according to claim 5, characterized in that: The first connection position (23) is located outside the clamping end (21).
8. The helium detection fixture according to claim 1, characterized in that: A sealing surface is provided at the connection between the first connecting base (2) and the sealing cover (1), and a first groove (22) is opened on the sealing surface, and a first sealing element (5) is provided in the first groove (22).
9. The helium detection fixture according to claim 8, characterized in that: The sealing cap (1) has an inlet (11) at one end and a sealing port (12) at the other end, and the sealing port (12) is connected to the sealing surface.
10. A helium detection system, characterized in that: The invention includes a helium mass spectrometer leak detector and a helium detection fixture as described in any one of claims 1-9. The helium mass spectrometer leak detector has an interface column (4). The helium detection fixture is connected to the column (4). A first connecting base (2) and a second connecting base (3) are fitted onto the column (4). When the second sealing element (6) moves toward the radial center of the second connecting base (3), it squeezes the outer wall of the column (4).